Coaxial adjusting device and semiconductor process equipment

Abstract

The utility model provides a coaxial adjusting device and semiconductor process equipment, the coaxial adjusting device comprises a mounting seat, a fixed seat, a first adjusting plate, a second adjusting plate, a first guide rail and a second guide rail, the fixed seat is provided with a fixed matching surface, and the first adjusting plate and the second adjusting plate are stacked above the fixed matching surface; the first guide rail fixes the first adjusting plate in the first horizontal direction and moves relative to the fixed matching face. The second guide rail is fixed in the second horizontal direction. The second adjusting plate can move along the second guide rail relative to the first adjusting plate. The mounting base is fixedly connected with the second adjusting plate, and the first horizontal direction intersects with the second horizontal direction. According to the scheme, the accuracy of the position of the air outlet disc can be ensured, and the maintenance efficiency of semiconductor process equipment is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of semiconductor process equipment, specifically, a coaxial adjusting device and a semiconductor process equipment. BACKGROUND

[0002] In the manufacturing process of integrated circuits (IC), with the continuous improvement of process, edge etching machine has become one of the indispensable etching equipment. Edge etching removes unstable film accumulation at the edge of wafer by plasma, reduces the influence of wafer edge deposition on subsequent process, and improves process yield.

[0003] The core of edge etching is to control the concentricity of the upper electrode gas outlet disc and the wafer. The uniformity of edge etching is maintained by concentricity. Since edge etching has very high requirements for concentricity, if the concentricity of the upper electrode gas outlet disc and the wafer deviates by 100 μm, the uniformity of the front surface etching will decrease by about 10.7%, and the uniformity of the back surface etching will decrease by about 12.9%. This will seriously affect the uniformity of edge etching, which requires high accuracy of the upper electrode coaxial adjustment, which needs to be accurate to microns. At the same time, the concentric position of the wafer and the gas outlet disc is different for wafers of different thickness and film layers, which requires the upper electrode to realize the coaxial adjustment function of different concentric positions. In summary, for edge etching, the key point of the design is to realize the accurate and adjustable coaxial adjustment structure, which determines the uniformity of etching.

[0004] However, the existing semiconductor process equipment often cannot guarantee the concentricity of the upper electrode gas outlet disc and the bearing disc. UTILITY MODEL CONTENTS

[0005] The utility model aims at providing a coaxial adjusting device and a semiconductor process equipment, which can guarantee the concentricity of the upper electrode gas outlet disc and the bearing disc.

[0006] To achieve the above-mentioned purpose, as one aspect of the utility model, a coaxial adjusting device is provided for semiconductor process equipment, which comprises a mounting seat, a fixed seat, a first adjusting plate, a second adjusting plate, a first guide rail and a second guide rail, wherein,

[0007] The fixed seat has a fixed fitting surface, and the first adjusting plate and the second adjusting plate are stacked above the fixed fitting surface;

[0008] The first guide rail fixes the first adjusting plate in the first horizontal direction and moves relative to the fixed fitting surface;

[0009] The second guide rail is fixed along a second horizontal direction, and the second adjusting plate is capable of moving relative to the first adjusting plate along the second guide rail;

[0010] The mounting seat is fixedly connected with the second adjusting plate, and the first horizontal direction intersects with the second horizontal direction.

[0011] As an optional embodiment of the utility model, the coaxial adjusting device further comprises at least one first fixing structure and at least one second fixing structure, the first fixing structure is arranged on the fixed matching surface and can selectively lock the relative position between the first adjusting plate and the fixed matching surface, and a plurality of second fixing structures are arranged on the first adjusting plate and can selectively lock the relative position between the second adjusting plate and the first adjusting plate.

[0012] As an optional embodiment of the utility model, the first fixing structure comprises a first set screw, at least one first threaded hole is formed on the fixed matching surface, at least one first through hole is formed on the first adjusting plate, the minimum diameter of the first through hole is smaller than the head diameter of the first set screw and larger than the rod diameter of the first set screw, and the first set screw sequentially passes through the first through hole and the first threaded hole one by one in one-to-one correspondence, so as to lock the relative position between the first adjusting plate and the fixed matching surface.

[0013] The second fixing structure comprises a second set screw, at least one second threaded hole is formed on the top surface of the first adjusting plate, at least one second through hole is formed on the second adjusting plate, the minimum diameter of the second through hole is smaller than the head diameter of the second set screw and larger than the rod diameter of the second set screw, and the second set screw sequentially passes through the second through hole and the second threaded hole one by one in one-to-one correspondence, so as to lock the relative position between the second adjusting plate and the first adjusting plate.

[0014] As an optional embodiment of the utility model, a plurality of first avoiding holes penetrating through the second adjusting plate along the thickness direction are formed on the second adjusting plate, and the positions of the plurality of first avoiding holes correspond to the positions of the plurality of first through holes one by one.

[0015] As an optional embodiment of the utility model, the fixing seat comprises a fixing piece and first and second mounting seats arranged on the side surface of the fixing seat, and the top surface of the fixing piece is formed as the fixed matching surface.

[0016] As an optional implementation form of the utility model, the mounting seat comprises a mounting piece and a mounting cylinder, the mounting piece is fixedly connected with the second adjusting plate, and the bottom end of the mounting piece passes through the second adjusting plate, the first adjusting plate and the fixing piece and is fixedly connected with the top end of the mounting cylinder, and the bottom end of the mounting cylinder is used for being fixedly connected with the air outlet disc in the cavity.

[0017] As an optional implementation form of the utility model, a plurality of first fixing structures are distributed circumferentially around the mounting piece, a plurality of second fixing structures are distributed circumferentially around the mounting piece, and the plurality of first fixing structures and the plurality of second fixing structures are radially staggered.

[0018] As an optional implementation form of the utility model, the coaxial adjusting device comprises a pair of first guide rails and a pair of second guide rails, two first guide rails are arranged on the two sides of the mounting piece along the second horizontal direction, and two second guide rails are arranged on the two sides of the mounting piece along the first horizontal direction.

[0019] As an optional implementation form of the utility model, the second mounting seat is provided with a first distance measuring sensor and a second distance measuring sensor, the top of the mounting piece is provided with a first detection piece and a second detection piece, the first distance measuring sensor is used for detecting the position of the first detection piece along the first horizontal direction, and the second distance measuring sensor is used for detecting the position of the second detection piece along the second horizontal direction.

[0020] The first distance measuring sensor is fixedly connected with the second mounting seat through a first heat insulation block, and the second distance measuring sensor is fixedly connected with the second mounting seat through a second heat insulation block.

[0021] As an optional implementation form of the utility model, the material of the first heat insulation block and the second heat insulation block is resin.

[0022] As an optional implementation form of the utility model, the bottom of the first mounting seat is fixedly provided with a third heat insulation block, and the bottom of the second mounting seat is fixedly provided with a fourth heat insulation block.

[0023] As an optional implementation form of the utility model, the material of the third heat insulation block and the fourth heat insulation block is resin.

[0024] As an optional implementation form of the utility model, the coaxial adjusting device further comprises a bellows, the bellows is sleeved on the mounting cylinder, the top end of the bellows is sealingly connected with the mounting piece, and the bottom end of the bellows is used for being sealingly connected with the opening at the top of the cavity of the semiconductor process equipment.

[0025] As an optional implementation form of the utility model, the coaxial adjusting device further comprises a first adjusting assembly and a second adjusting assembly, the first adjusting assembly is fixedly arranged on the fixed matching surface, and is used for adjusting the first adjusting plate along the first horizontal direction; the second adjusting assembly is fixedly arranged on the first adjusting plate, and is used for adjusting the position of the second adjusting plate along the second horizontal direction.

[0026] As an optional implementation form of the utility model, the first adjusting assembly comprises a first adjusting seat and a first adjusting screw, the first adjusting plate is formed with a first adjusting threaded hole extending along the first horizontal direction, the first adjusting seat is fixedly arranged on the fixed matching surface, the first adjusting screw is movably arranged in the first adjusting seat and is screwed into the first adjusting threaded hole at an end portion, and the first adjusting seat is used for limiting the position of the first adjusting screw along the first horizontal direction.

[0027] The second adjusting assembly comprises a second adjusting seat and a second adjusting screw, the second adjusting plate is formed with a second adjusting threaded hole extending along the second horizontal direction, the second adjusting seat is fixedly arranged on the first adjusting plate, the second adjusting screw is movably arranged in the second adjusting seat and is screwed into the second adjusting threaded hole at an end portion, and the second adjusting seat is used for limiting the position of the second adjusting screw along the second horizontal direction.

[0028] As a second aspect of the utility model, a semiconductor process equipment is provided, comprising a cavity, a bearing disc, an air outlet disc and the coaxial adjusting device described above, the bearing disc and the air outlet disc are arranged in the cavity, the coaxial adjusting device is fixedly arranged on the cavity, and the air outlet disc is fixedly connected with the mounting seat of the coaxial adjusting device.

[0029] In the coaxial adjusting device and the semiconductor process equipment provided by the utility model, the mounting seat is connected with the fixed matching surface of the fixed seat through the first adjusting plate and the second adjusting plate, the first adjusting plate is movably arranged on the fixing member through the first guide rail, so that when the position of the mounting seat (and the air outlet disc (upper electrode) connected below) along the first horizontal direction is adjusted, the first adjusting plate can drive the second adjusting plate and the mounting seat (and the air outlet disc) to move only along the first horizontal direction, and rotation does not occur; similarly, the second adjusting plate is arranged on the first adjusting plate through the second guide rail, so that when the position of the mounting seat along the second horizontal direction is adjusted, the second adjusting plate can drive the mounting seat to move only along the second horizontal direction, and rotation does not occur, thereby ensuring the accuracy of the position of the air outlet disc.

[0030] And, the first adjusting plate can only move along the first horizontal direction under the guidance of the first guide rail, and cannot affect the feeding amount of the second adjusting plate along the second horizontal direction, and the second adjusting plate can only move along the second horizontal direction under the guidance of the second guide rail, and cannot affect the feeding amount of the first adjusting plate along the first horizontal direction, so that it is not necessary to restore the deviation of the mounting base along one horizontal direction after adjusting the position of the mounting base along the other horizontal direction, personnel maintenance time is saved, maintenance difficulty is reduced, and maintenance efficiency of the semiconductor process equipment is improved. BRIEF DESCRIPTION OF DRAWINGS

[0031] The accompanying drawings are included to provide a further understanding of the present application, and are incorporated in and constitute a part of this specification, illustrate embodiments of the present application and serve to explain the present application and, together with the description, do not limit the present application. In the drawings:

[0032] Figure 1 is a structure schematic view of the coaxial adjusting device provided by the embodiment of the present application;

[0033] Figure 2 is Figure 1 is an A-A cross-sectional schematic view of the coaxial adjusting device in the embodiment;

[0034] Figure 3 is Figure 1 is a B-B cross-sectional schematic view of the coaxial adjusting device in the embodiment;

[0035] Figure 4 is a structure schematic view of the first fixing structure and the second fixing structure in the coaxial adjusting device provided by the embodiment of the present application;

[0036] Figure 5 is a structure schematic view of the first adjusting assembly in the coaxial adjusting device provided by the embodiment of the present application.

[0037] Explanation of reference signs:

[0038] mounting base 100

[0039] mounting member 110

[0040] mounting cylinder 120

[0041] fixed base 200

[0042] fixed member 210

[0043] first mounting base 220

[0044] second mounting base 230

[0045] first adjusting plate 300

[0046] first guide rail 310

[0047] First fixing structure 320

[0048] First set screw 321

[0049] First through hole 330

[0050] Second adjusting plate 400

[0051] Second guide rail 410

[0052] Second fixing structure 420

[0053] Second set screw 421

[0054] Second through hole 430

[0055] First avoiding hole 440

[0056] First distance measuring sensor 511

[0057] First detection piece 512

[0058] Second distance measuring sensor 521

[0059] Second detection piece 522

[0060] First heat insulation block 610

[0061] Second heat insulation block 620

[0062] Third heat insulation block 630

[0063] Fourth heat insulation block 640

[0064] Bellow 700

[0065] First adjusting assembly 810

[0066] First adjusting seat 811

[0067] First adjusting screw 812

[0068] Second adjusting assembly 820

[0069] Cavity 10

[0070] Bearing disc 20

[0071] Air outlet disc 30 DETAILED DESCRIPTION

[0072] The specific embodiments of the present application will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are merely intended to illustrate and explain the present application, and are not intended to limit the present application.

[0073] In the existing semiconductor process equipment, the position of the upper electrode gas outlet disc is usually adjusted by using laminated plate-shaped members. Specifically, the top structure of the upper electrode gas outlet disc is supported by two laminated plate-shaped members, and the two plate-shaped members are driven to slide in different horizontal directions by two adjusting screws respectively, so as to adjust the horizontal position of the upper electrode gas outlet disc.

[0074] However, in the existing scheme, the plate-shaped member is only pushed by a single adjusting screw, and the movement direction of the plate-shaped member is extremely easy to deviate, and even rotates seriously, which affects the accuracy of the position of the upper electrode gas outlet disc. Moreover, when the two adjusting screws adjust the corresponding plate-shaped members to move in the corresponding direction, the gap between the screw transmission structures will inevitably affect the feeding amount of the other adjusting direction, so that the other adjusting screw also needs to be adjusted again to restore the position, which increases unnecessary repeated actions, prolongs the maintenance time of personnel, and increases the difficulty of personnel maintenance.

[0075] To solve the above technical problems, as one aspect of the present application, a coaxial adjusting device is provided for semiconductor process equipment, such as Figures 1 to 3 As shown in the figure, the coaxial adjusting device comprises a mounting seat 100, a fixed seat 200, a first adjusting plate 300, a second adjusting plate 400, a first guide rail 310 and a second guide rail 410, wherein,

[0076] The fixed seat 200 has a fixed fitting surface, and the first adjusting plate 300 and the second adjusting plate 400 are laminated above the fixed fitting surface;

[0077] The first guide rail 310 fixes the first adjusting plate 300 along the first horizontal direction and can move relative to the fixed fitting surface;

[0078] The second guide rail 410 is fixed along the second horizontal direction, and the second adjusting plate 400 can move relative to the first adjusting plate 300 along the second guide rail 410;

[0079] The mounting seat 100 is fixedly connected with the second adjusting plate 400, and the first horizontal direction intersects with the second horizontal direction.

[0080] In the coaxial adjusting device, the mounting seat 100 is connected with the fixed surface of the fixed seat 200 through the first adjusting plate 300 and the second adjusting plate 400, the first adjusting plate 300 is movably arranged on the fixed part 210 through the first guide rail 310, so that when the position of the mounting seat 100 (and the upper electrode connected below the air outlet disc 30) is adjusted along the first horizontal direction, the first adjusting plate 300 can drive the second adjusting plate 400 and the mounting seat 100 (and the air outlet disc 30) to move only along the first horizontal direction, and rotation does not occur; similarly, the second adjusting plate 400 is movably arranged on the first adjusting plate 300 through the second guide rail 410, so that when the position of the mounting seat 100 is adjusted along the second horizontal direction, the second adjusting plate 400 can drive the mounting seat 100 to move only along the second horizontal direction, and rotation does not occur, thereby ensuring the accuracy of the position of the air outlet disc 30.

[0081] In addition, the first adjusting plate 300 can only move along the first horizontal direction under the guidance of the first guide rail 310, and will not affect the feeding amount of the second adjusting plate 400 along the second horizontal direction, and the second adjusting plate 400 can only move along the second horizontal direction under the guidance of the second guide rail 410, and will not affect the feeding amount of the first adjusting plate 300 along the first horizontal direction, so that it is not necessary to restore the deviation of the mounting seat 100 along the other horizontal direction after adjusting the position of the mounting seat 100 along one horizontal direction each time, personnel maintenance time is saved, maintenance difficulty is reduced, and maintenance efficiency of the semiconductor process equipment is improved.

[0082] As an optional embodiment of the utility model, the first horizontal direction is perpendicular to the second horizontal direction.

[0083] In order to further ensure the accuracy of the position of the air outlet disc 30, as a preferred embodiment of the utility model, as shown in Figure 1 The coaxial adjusting device further comprises at least one first fixing structure 320 and at least one second fixing structure 420, the first fixing structure 320 is arranged on the fixed surface and can selectively lock the relative position between the first adjusting plate 300 and the fixed surface, and a plurality of second fixing structures 420 are arranged on the first adjusting plate 300 and can selectively lock the relative position between the second adjusting plate 400 and the first adjusting plate 300.

[0084] In the embodiment of the utility model, coaxial adjusting device still first fixed structure 320 and second fixed structure 420, first fixed structure 320 can selectively lock the position of first adjusting plate 300, multiple second fixed structure 420 can selectively lock the position of second adjusting plate 400, so that when adjusting one adjusting plate, another adjusting plate can be locked, avoid another adjusting plate in current adjustment process and be influenced by vibration and produce displacement, further guarantee the accuracy of the position of air outlet disc 30.

[0085] As an optional implementation of the utility model, as shown in Figure 4 The first fixed structure 320 includes a first set screw 321, and at least one first threaded hole is formed on the fixed fitting surface. At least one first through hole 330 is formed on the first adjusting plate 300. The minimum diameter of the first through hole 330 is smaller than the head diameter of the first set screw 321 and larger than the rod diameter of the first set screw 321. The first set screw 321 passes through the first through hole 330 and the first threaded hole one by one in correspondence, so as to lock the relative position between the first adjusting plate 300 and the fixed fitting surface;

[0086] The second fixed structure 420 includes a second set screw 421. At least one second threaded hole is formed on the top surface of the first adjusting plate 300. At least one second through hole 430 is formed on the second adjusting plate 400. The minimum diameter of the second through hole 430 is smaller than the head diameter of the second set screw 421 and larger than the rod diameter of the second set screw 421. The second set screw 421 passes through the second through hole 430 and the second threaded hole one by one in correspondence, so as to lock the relative position between the second adjusting plate 400 and the first adjusting plate 300.

[0087] As an optional implementation of the utility model, as shown in Figure 4 The first through hole 330 and the second through hole 430 are both countersunk holes, and the first set screw 321 and the second set screw 421 are countersunk screws.

[0088] In order to facilitate the adjustment of the first set screw 321 located below the second adjusting plate 400 by using a screwdriver or other tools, as an optional implementation of the utility model, as shown in Figure 4 A plurality of first avoiding holes 440 are formed on the second adjusting plate 400 and penetrate the second adjusting plate 400 in the thickness direction. The positions of the plurality of first avoiding holes 440 correspond to the positions of the plurality of first through holes 330 one by one.

[0089] As an optional implementation of the utility model, as shown in Figure 2 , Figure 3As shown, the fixing base 200 includes a fixing member 210 and a first mounting base 220 and a second mounting base 230 disposed on the side of the fixing base 200. The top surface of the fixing member 210 is formed as a fixing mating surface.

[0090] As an optional embodiment of this utility model, such as Figure 2 , Figure 3 As shown, the first mounting base 220 and the second mounting base 230 are both fixedly connected to the fastener 210, and the bottom of the first mounting base 220 and the second mounting base 230 are used to be fixedly connected to the cavity 10 of the semiconductor process equipment.

[0091] The mounting base 100 includes a mounting member 110 and a mounting cylinder 120. The mounting member 110 is fixedly connected to the second adjusting plate 400, and the bottom end of the mounting member 110 passes through the second adjusting plate 400, the first adjusting plate 300 and the fixing member 210 and is fixedly connected to the top end of the mounting cylinder 120. The bottom end of the mounting cylinder 120 is used to be fixedly connected to the air outlet plate 30 in the cavity 10.

[0092] Optionally, such as Figure 2 As shown, the mounting part 110 is engaged in the through hole of the second adjusting plate 400, and the top of the mounting part 110 has a positioning boss protruding in all directions. The positioning boss is stacked on top of the second adjusting plate 400, thereby achieving a fixed connection with the second adjusting plate 400.

[0093] As an optional embodiment of this utility model, such as Figure 1 As shown, multiple first fixing structures 320 are circumferentially distributed around the mounting member 110, and multiple second fixing structures 420 are circumferentially distributed around the mounting member 110, with the multiple first fixing structures 320 and the multiple second fixing structures 420 being radially offset.

[0094] As an optional embodiment of this utility model, such as Figure 2 , Figure 3 As shown, the coaxial adjustment device includes a pair of first guide rails 310 and a pair of second guide rails 410. The two first guide rails 310 are arranged on both sides of the mounting member 110 along the second horizontal direction, and the two second guide rails 410 are arranged on both sides of the mounting member 110 along the first horizontal direction.

[0095] To further ensure the accuracy of the position of the air outlet plate 30, as a preferred embodiment of this utility model, such as Figure 1 As shown, in a preferred embodiment of this utility model, as Figures 1 to 3As shown, the second mounting seat 230 is provided with a first distance measuring sensor 511 and a second distance measuring sensor 521, and the top of the mounting piece 110 is provided with a first detection piece 512 and a second detection piece 522, the first distance measuring sensor 511 is used for detecting the position of the first detection piece 512 along the first horizontal direction, and the second distance measuring sensor 521 is used for detecting the position of the second detection piece 522 along the second horizontal direction.

[0096] The embodiment of the utility model through the displacement of the mounting seat 100 along the first horizontal direction and the second horizontal direction is detected respectively by the distance measuring sensor and the detection piece arranged in pairs, thereby can accurate construction horizontal coordinate system determines the mounting seat 100 position coordinate, guarantee the accuracy of the horizontal position of mounting seat 100, further guarantee the accuracy of the position of the gas outlet disc 30.

[0097] As an optional embodiment of the utility model, the first distance measuring sensor 511 and the second distance measuring sensor 521 are both laser distance measuring sensors.

[0098] As a preferred embodiment of the utility model, Figures 2 to 3 As shown, the first distance measuring sensor 511 is fixedly connected with the second mounting seat 230 through the first heat insulation block 610, and the second distance measuring sensor 521 is fixedly connected with the second mounting seat 230 through the second heat insulation block 620.

[0099] In the related art, the laser distance measuring sensor directly contacts with the mounting plate, so that the temperature of the laser sensor is easily affected by the process chamber, and can reach about 50 DEG C in the process, while the normal working temperature range of the laser sensor is 0-50 DEG C, and the temperature rise will cause the reading of the laser sensor to change, thereby causing the coaxial adjustment displacement to be inaccurate, the coaxial adjustment to be not in place, and the personnel maintenance time to be increased.

[0100] And in the embodiment of the utility model, the first distance measuring sensor 511 is fixedly connected with the second mounting seat 230 through the first heat insulation block 610, and the second distance measuring sensor 521 is fixedly connected with the second mounting seat 230 through the second heat insulation block 620, so that the heat transferred from the process chamber to the distance measuring sensor through the mounting plate can be effectively reduced, thereby ensuring the accuracy of detecting the position of the upper electrode, further ensuring the accuracy of the position of the gas outlet disc 30, and improving the adjustment efficiency of the position of the upper electrode.

[0101] As an optional embodiment of the utility model, the material of the first heat insulation block 610 and the second heat insulation block 620 is resin.

[0102] In order to further reduce the heat transferred from the process chamber to the distance measuring sensor through the mounting plate, and further ensure the accuracy of detecting the position of the upper electrode, as a preferred embodiment of the utility model, Figures 2 to 3As shown, the bottom of the first mounting seat 220 is fixedly provided with a third heat insulation block 630, and the bottom of the second mounting seat 230 is fixedly provided with a fourth heat insulation block 640.

[0103] As an optional embodiment of the utility model, the material of the third heat insulation block 630 and the fourth heat insulation block 640 is resin.

[0104] As an optional embodiment of the utility model, as shown in the figure, Figure 1 As shown, the coaxial adjusting device further comprises a bellows 700, the bellows 700 is sleeved on the mounting cylinder 120, and the top end of the bellows 700 is sealingly connected with the mounting piece 110, and the bottom end of the bellows 700 is used for sealingly connecting with the opening at the top of the cavity 10 of the semiconductor process equipment.

[0105] As an optional embodiment of the utility model, as shown in the figure, Figures 1 to 3 As shown, the coaxial adjusting device further comprises a first adjusting assembly 810 and a second adjusting assembly 820, the first adjusting assembly 810 is fixedly arranged on the fixed matching surface and is used for adjusting the first adjusting plate 300 along the first horizontal direction, and the second adjusting assembly 820 is fixedly arranged on the first adjusting plate 300 and is used for adjusting the position of the second adjusting plate 400 along the second horizontal direction.

[0106] As an optional embodiment of the utility model, as shown in the figure, Figure 5 As shown, the first adjusting assembly 810 comprises a first adjusting seat 811 and a first adjusting screw 812, the first adjusting plate 300 is formed with a first adjusting threaded hole extending along the first horizontal direction, the first adjusting seat 811 is fixedly arranged on the fixed matching surface, the first adjusting screw 812 is movably arranged in the first adjusting seat 811 and the end portion is screwed into the first adjusting threaded hole, and the first adjusting seat 811 is used for limiting the position of the first adjusting screw 812 along the first horizontal direction.

[0107] Similarly, the second adjusting assembly 820 comprises a second adjusting seat and a second adjusting screw, the second adjusting plate 400 is formed with a second adjusting threaded hole extending along the second horizontal direction, the second adjusting seat is fixedly arranged on the first adjusting plate 300, the second adjusting screw is movably arranged in the second adjusting seat and the end portion is screwed into the second adjusting threaded hole, and the second adjusting seat is used for limiting the position of the second adjusting screw along the second horizontal direction.

[0108] As a second aspect of the utility model, a semiconductor process equipment is provided, as shown in the figure, Figures 1 to 3 As shown, the semiconductor process equipment comprises a cavity 10, a bearing disc 20, an exhaust disc 30 (upper electrode) and the coaxial adjusting device in front, the bearing disc 20 and the exhaust disc 30 are arranged in the cavity 10, the coaxial adjusting device is fixedly arranged on the cavity 10, and the exhaust disc 30 is fixedly connected with the mounting seat 100 of the coaxial adjusting device.

[0109] In the semiconductor process equipment, the mounting seat 100 of the coaxial adjusting device is connected with the fixed surface of the fixing seat 200 through the first adjusting plate 300 and the second adjusting plate 400, the first adjusting plate 300 is movably arranged on the fixing part 210 through the first guide rail 310, so that when the position of the mounting seat 100 and the gas outlet disc 30 connected below the mounting seat 100 along the first horizontal direction is adjusted, the first adjusting plate 300 can drive the second adjusting plate 400 and the mounting seat 100 (and the gas outlet disc 30) to move along the first horizontal direction only, and rotation does not occur; similarly, the second adjusting plate 400 is arranged on the first adjusting plate 300 through the second guide rail 410, so that when the position of the mounting seat 100 along the second horizontal direction is adjusted, the second adjusting plate 400 can drive the mounting seat 100 to move along the second horizontal direction only, and rotation does not occur, thereby ensuring the accuracy of the position of the gas outlet disc 30.

[0110] In addition, the first adjusting plate 300 can only move along the first horizontal direction under the guidance of the first guide rail 310, and will not affect the feeding amount of the second adjusting plate 400 along the second horizontal direction, and the second adjusting plate 400 can only move along the second horizontal direction under the guidance of the second guide rail 410, and will not affect the feeding amount of the first adjusting plate 300 along the first horizontal direction, so that it is not necessary to restore the deviation of the mounting seat 100 along the other horizontal direction after adjusting the position of the mounting seat 100 along one horizontal direction each time, personnel maintenance time is saved, maintenance difficulty is reduced, and maintenance efficiency of the semiconductor process equipment is improved.

[0111] It can be understood that the above embodiments are only exemplary embodiments adopted for illustrating the principles of the utility model, and the utility model is not limited thereto. For ordinary skilled persons in the art, various modifications and improvements can be made without departing from the spirit and essence of the utility model, and these modifications and improvements are also regarded as the protection scope of the utility model.

Claims

1. A coaxial adjustment device for a semiconductor process apparatus, characterized by, The coaxial adjusting device comprises a mounting seat, a fixing seat, a first adjusting plate, a second adjusting plate, a first guide rail and a second guide rail, wherein, The fixing seat has a fixing matching surface, and the first adjusting plate and the second adjusting plate are stacked above the fixing matching surface; The first guide rail fixes the first adjusting plate in a first horizontal direction and moves relative to the fixing matching surface; The second guide rail is fixed in a second horizontal direction, and the second adjusting plate can move relative to the first adjusting plate along the second guide rail; The mounting seat is fixedly connected with the second adjusting plate, and the first horizontal direction intersects with the second horizontal direction.

2. The coaxial adjustment device of claim 1, wherein, The coaxial adjusting device further comprises at least one first fixing structure and at least one second fixing structure, the first fixing structure is arranged on the fixing matching surface and can selectively lock the relative position between the first adjusting plate and the fixing matching surface, and a plurality of second fixing structures are arranged on the first adjusting plate and can selectively lock the relative position between the second adjusting plate and the first adjusting plate.

3. The coaxial adjustment device of claim 2, wherein, The first fixing structure comprises a first set screw, at least one first threaded hole is formed on the fixing matching surface, at least one first through hole is formed on the first adjusting plate, the minimum diameter of the first through hole is smaller than the head diameter of the first set screw and larger than the rod diameter of the first set screw, and the first set screw passes through the first through hole and the first threaded hole one by one to lock the relative position between the first adjusting plate and the fixing matching surface.

4. The coaxial adjustment device of claim 3, wherein, The fixing seat comprises a fixing piece and first and second mounting seats arranged on the side surface of the fixing seat, and the top surface of the fixing piece is formed as the fixing matching surface.

5. The coaxial adjustment device of claim 4, wherein, The mounting seat comprises a mounting piece and a mounting cylinder, the mounting piece is fixedly connected with the second adjusting plate, the bottom end of the mounting piece passes through the second adjusting plate, the first adjusting plate and the fixing piece and is fixedly connected with the top end of the mounting cylinder, and the bottom end of the mounting cylinder is used for fixedly connecting with an air outlet disc in a cavity.

6. The coaxial adjustment device of claim 5, wherein, The coaxial adjusting device comprises a pair of first guide rails and a pair of second guide rails, two first guide rails are arranged on both sides of the mounting piece in the second horizontal direction, and two second guide rails are arranged on both sides of the mounting piece in the first horizontal direction.

7. The coaxial adjustment device of claim 5, wherein, The second mounting seat is provided with a first distance measuring sensor and a second distance measuring sensor, the top of the mounting piece is provided with a first detection piece and a second detection piece, the first distance measuring sensor is used for detecting the position of the first detection piece in the first horizontal direction, and the second distance measuring sensor is used for detecting the position of the second detection piece in the second horizontal direction. The first distance measuring sensor is fixedly connected with the second mounting seat through a first heat insulation block, and the second distance measuring sensor is fixedly connected with the second mounting seat through a second heat insulation block.

8. The coaxial adjustment device of claim 7, wherein, The bottom of the first mounting seat is fixedly provided with a third heat insulation block, and the bottom of the second mounting seat is fixedly provided with a fourth heat insulation block.

9. The coaxial adjustment device of claim 5, wherein, The coaxial adjusting device further comprises a bellows, the bellows is sleeved on the mounting cylinder, and a top end of the bellows is in sealed connection with the mounting piece, and a bottom end of the bellows is used for being in sealed connection with an opening at the top of the cavity of the semiconductor process equipment.

10. The coaxial adjustment device according to any one of claims 1 to 9, characterized in that The coaxial adjusting device further comprises a first adjusting assembly and a second adjusting assembly, the first adjusting assembly is fixedly arranged on the fixed fitting surface, and is used for adjusting the first adjusting plate in the first horizontal direction; and the second adjusting assembly is fixedly arranged on the first adjusting plate, and is used for adjusting the position of the second adjusting plate in the second horizontal direction.

11. A semiconductor process apparatus characterized by comprising: The coaxial adjusting device is arranged on the cavity, and the gas outlet disc is fixedly connected with the mounting base of the coaxial adjusting device.

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