Anti-degumming membrane assembly

Abstract

The utility model discloses an anti-degumming membrane assembly, and belongs to the technical field of wafer polishing. The anti-degumming membrane assembly comprises a supporting ring, a membrane material is arranged at the bottom of the supporting ring, an inner membrane connected with the inner surface of the supporting ring is arranged on the upper surface of the membrane material, an outer membrane connected with the outer surface of the supporting ring is arranged on the upper surface of the membrane material, and a sensor for detecting the inner surface of the membrane material is arranged in the supporting ring. A flat angle is arranged on the outer surface of the top of the supporting ring, and the top of the outer diaphragm wraps the outer portion of the flat angle. Round corners are arranged between the surface, close to the supporting ring, of the inner membrane and the membrane material and between the surface, close to the supporting ring, of the outer membrane and the membrane material. And the sensor performs 360-degree detection on the membrane module. By adopting the anti-degumming membrane assembly, the problem that the service life of the membrane assembly and the wafer processing efficiency are influenced due to the fact that the existing membrane assembly is easy to degumming can be solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer polishing technical field especially relates to a kind of anti-release film subassembly. BACKGROUND

[0002] In the field of wafer polishing, film subassembly is one of the many components of polishing head, through the polishing head component connection gas to control film subassembly adsorption and unloading to wafer, so that wafer is rubbed on polishing pad, plays the purpose of polishing, film subassembly plays the vital role.

[0003] The existing film subassembly is bonded by steel ring and fluorine rubber film using special glue under the pressure casting effect of vulcanizing machine. The existing film subassembly often has the problem of easy release, there are two reasons, first, because high-pressure control film subassembly repeatedly adsorbs and unloads to wafer, working environment is in high-pressure state for a long time, makes the adhesion of fluorine rubber film and steel ring under repeated shrinkage and expansion, easy to release phenomenon. Second, film subassembly is soaked in polishing liquid for a long time, polishing liquid is mixed by many chemical agents, has certain corrosion and dissolution effect to glue layer. The above two situations greatly improve the release risk of film subassembly glue layer, thereby shorten its service life, affect wafer processing efficiency and quality. SUMMARY

[0004] The utility model aims at providing a kind of anti-release film subassembly, solve the problem that the existing film subassembly is easy to release, affect film subassembly service life and wafer processing efficiency.

[0005] To achieve the above object, the utility model provides a kind of anti-release film subassembly, including support ring, the bottom of support ring is provided with film material, the upper surface of film material is provided with the inner membrane piece connected with the inner surface of support ring, the upper surface of film material is provided with the outer membrane piece connected with the outer surface of support ring, the inside of support ring is provided with the sensor for detecting the inner surface of film material.

[0006] Preferably, the inner membrane piece, the outer membrane piece and the film material are of an integral structure.

[0007] Preferably, the thickness of the inner membrane piece is equal to the thickness of the film material.

[0008] Preferably, the thickness of the outer membrane piece is equal to the thickness of the film material, and the top of the outer membrane piece is flush with the top of the support ring.

[0009] Preferably, a flat angle is arranged on the top outer surface of the support ring, and the top of the outer membrane piece is wrapped outside the flat angle.

[0010] Preferably, the width of the flat angle is not less than 0.5 mm, and the angle of the flat angle is 30°-60°.

[0011] Preferably, the inner membrane piece is provided with a fillet between the surface close to the support ring and the membrane material, and the outer membrane piece is provided with a fillet between the surface close to the support ring and the membrane material.

[0012] Preferably, the radius of the fillet is not less than 0.5 mm.

[0013] Preferably, the sensor is a visual sensor, and the sensor is connected to the grinding head and detects the membrane assembly in 360 degrees.

[0014] The anti-peeling membrane assembly has the advantages and positive effects that:

[0015] 1. The inner membrane piece and the outer membrane piece are arranged on the membrane material, the contact area between the membrane material and the support ring is increased, the connection strength is improved, and the connection between the membrane material and the support ring is away from the polishing liquid, so that the peeling risk is reduced.

[0016] 2. The support ring is provided with a flat corner on the top outer surface, and the top of the outer membrane piece is wrapped outside the flat corner, so that the gluing area between the outer membrane piece and the support ring is increased, the connection strength between the outer membrane piece and the support ring is improved, and the peeling risk is reduced.

[0017] 3. The inner membrane piece is provided with a fillet between the surface close to the support ring and the membrane material, and the outer membrane piece is provided with a fillet between the surface close to the support ring and the membrane material. The impact of the steel ring on the fluorine rubber film can be relieved, and the risk of pressure injury and rupture of the fluorine rubber film by the steel ring is reduced.

[0018] 4. The support ring is provided with a sensor for detecting the inner surface of the membrane material, the sensor forms 360-degree omnidirectional detection on the peeling area of the connection between the membrane material and the inner membrane piece, so that the peeling problem can be found in time, and the wafer polishing quality is ensured.

[0019] The technical scheme of the utility model will be further described in detail below with reference to the drawings and embodiments. DRAWINGS

[0020] Figure 1 It is a structure schematic view of the anti-peeling membrane assembly embodiment of the utility model;

[0021] Figure 2 It is a sectional three-dimensional structure schematic view of the anti-peeling membrane assembly embodiment of the utility model;

[0022] Figure 3 It is a sectional structure schematic view of the anti-peeling membrane assembly embodiment of the utility model;

[0023] Figure 4 It is Figure 3 It is an enlarged view of A;

[0024] Figure 5 It is Figure 4 It is an enlarged view of B;

[0025] Figure 6 For Figure 4 The enlarged view of the middle C;

[0026] Figure 7 The film material structure schematic diagram of the anti-peeling film assembly embodiment of the present application is shown in the figure;

[0027] Figure 8 The application state schematic diagram of the anti-peeling film assembly embodiment of the present application is shown in the figure;

[0028] Figure 9 The internal easy-peeling area of the existing film assembly is shown in the figure;

[0029] Figure 10 The internal easy-peeling area of the existing film assembly is shown in the figure.

[0030] Reference signs

[0031] 1, support ring; 2, film material; 3, sensor; 4, inner film piece; 5, outer film piece; 6, flat corner; 7, round corner; 8, polishing pad; 9, polishing liquid. DETAILED DESCRIPTION

[0032] In the description of the present application, it should be explained that the terms "upper", "lower", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, or the orientation or positional relationship commonly used when the product of the present application is used, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present application. In the description of the present application, it should be explained that, unless otherwise explicitly specified and limited, the terms "provided", "mounted", "connected" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be connected inside two elements. For ordinary skilled persons in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0033] In the present application, unless otherwise defined, all technical and scientific terms used herein have the same meaning as understood by those skilled in the art to which the present application belongs. If there is any inconsistency, the meaning explained in the specification or the meaning derived from the content described in the specification shall prevail. In addition, the terms used herein are only for the purpose of describing the embodiments of the present application, and are not intended to limit the present application. In order to accurately describe the technical content in the present application, and in order to accurately understand the present application, before the specific embodiments are described, the following explanations or definitions of the terms used in the specification are given:

[0034] The embodiments of the present application will be described in detail below with reference to the drawings.

[0035] As Figure 1 , Figure 2 , Figure 3 , Figure 7 shown. A kind of anti adhesive film assembly, including support ring 1, support ring 1 is steel ring, support ring 1 is fixed and supported to film material 2. The bottom of support ring 1 is provided with film material 2, and film material 2 is fluorine adhesive film. The upper surface of film material 2 is provided with inner membrane piece 4 connected with the inner surface of support ring 1, and the upper surface of film material 2 is provided with outer membrane piece 5 connected with the outer surface of support ring 1, and inner membrane piece 4, outer membrane piece 5 are integrated structure with film material 2. Film material 2, inner membrane piece 4 and outer membrane piece 5 are fixedly connected with support ring 1 by existing special glue vulcanization.

[0036] The thickness of inner membrane piece 4 is equal to the thickness of film material 2. The height of inner membrane piece 4 is determined by the structural size of the grinding head. The thickness of outer membrane piece 5 is equal to the thickness of film material 2, and the top of outer membrane piece 5 is flush with the top of support ring 1.

[0037] As Figure 9 shown. The film assembly is vibrated due to inflation and deflation in work, so that the pulling force is generated to the easy adhesive area of the connection between film material 2 and support ring 1, causing the adhesive of the film assembly. By increasing inner membrane piece 4 and outer membrane piece 5, the direction of pulling force is changed from the original direct action point to 90° vertical pulling point. Film material 2 is fixed with support ring 1 through inner membrane piece 4 and outer membrane piece 5, and the action force of pulling is changed from a line position to a surface, which improves the connection strength of film material 2 and support ring 1, and greatly relieves the risk of adhesive.

[0038] As Figure 8 , Figure 10 shown. There are a large number of grinding liquid 9 outside the steel ring, and when the film assembly drives the wafer to polish on the grinding pad 8, the polishing liquid on the grinding pad 8 has the effect of corrosion and dissolution on the adhesive layer. In the rotary polishing of the film assembly, the adhesive layer is further exacerbated by the friction and fluid resistance of the grinding liquid 9. By increasing outer membrane piece 5 on film material 2, the height of outer membrane piece 5 is flush with the top of support ring 1, and the connection between outer membrane piece 5 and support ring 1 is not directly contacted with grinding liquid 9, which reduces the risk of adhesive.

[0039] As Figure 4 , Figure 5 , Figure 6The top outer surface of the support ring 1 is provided with a flat angle 6, the width of the flat angle 6 is not less than 0.5mm, and the angle of the flat angle 6 is 30°-60°. The top of the outer film piece 5 is wrapped outside the flat angle 6, which increases the gluing area between the outer film piece 5 and the support ring 1, improves the connection strength between the outer film piece 5 and the support ring 1, and slows down the risk of delamination.

[0040] The surface of the inner film piece 4 close to the support ring 1 and the surface of the outer film piece 5 close to the support ring 1 are both provided with a round angle 7 between the film material 2. The radius of the round angle 7 is not less than 0.5mm. The connection between the inner film piece 4, the outer film piece 5 and the film material 2 is designed as a round angle 7, which can relieve the impact of the steel ring on the fluorine rubber film, and reduce the risk of pressure injury and rupture of the fluorine rubber film.

[0041] The inside of the support ring 1 is provided with a sensor 3 for detecting the inner surface of the film material 2. The sensor 3 is a visual sensor 3, and the sensor 3 is connected with a controller or an external display by using existing technology. The sensor 3 is connected with the grinding head, and the sensor 3 remains fixed, and with the rotation polishing operation of the film assembly itself, the sensor 3 forms 360° omnidirectional detection on the delamination area of the connection between the film material 2 and the inner film piece 4, so as to find the delamination problem in time and ensure the wafer polishing quality.

[0042] After a period of practical application, the improved film assembly greatly reduces the risk of film delamination, prolongs the service life of the film assembly, reduces the replacement frequency of the film assembly, reduces the material cost, and improves the wafer polishing efficiency and polishing quality.

[0043] Therefore, the anti-delamination film assembly can solve the problem of easy delamination of the existing film assembly, which affects the service life of the film assembly and the wafer processing efficiency.

[0044] Finally, it should be pointed out that: the above examples are only used to illustrate the technical scheme of the utility model and not to limit it, although the utility model has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical scheme of the utility model can still be modified or replaced, and these modifications or replacements cannot make the modified technical scheme deviate from the spirit and scope of the utility model technical scheme.

Claims

1. An anti-detachment film assembly, characterized in that: It includes a support ring, a membrane material at the bottom of the support ring, an inner membrane sheet on the upper surface of the membrane material that is connected to the inner surface of the support ring, an outer membrane sheet on the upper surface of the membrane material that is connected to the outer surface of the support ring, and a sensor for detecting the inner surface of the membrane material inside the support ring.

2. The anti-detachment film assembly according to claim 1, characterized in that: The inner diaphragm, outer diaphragm, and membrane material are an integral structure.

3. The anti-detachment film assembly according to claim 1, characterized in that: The thickness of the inner diaphragm is equal to the thickness of the membrane material.

4. The anti-detachment film assembly according to claim 1, characterized in that: The thickness of the outer diaphragm is equal to the thickness of the membrane material, and the top of the outer diaphragm is flush with the top of the support ring.

5. The anti-detachment film assembly according to claim 1, characterized in that: The top outer surface of the support ring is provided with a flat corner, and the top of the outer diaphragm is wrapped around the outside of the flat corner.

6. The anti-detachment film assembly according to claim 5, characterized in that: The width of the flat angle is not less than 0.5mm, and the angle of the flat angle is 30°-60°.

7. The anti-detachment film assembly according to claim 1, characterized in that: The inner diaphragm near the support ring and the membrane material are both provided with rounded corners, as are the outer diaphragm near the support ring and the membrane material.

8. The anti-detachment film assembly according to claim 7, characterized in that: The radius of the fillet is not less than 0.5 mm.

9. The anti-detachment film assembly according to claim 1, characterized in that: The sensor is a vision sensor, which is connected to the grinding head and performs 360° detection on the membrane module.

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