Spray source device and passivation layer forming equipment
By designing multiple connectors and insertion holes in the spray source device, combined with elastic components and abutment components, the problem of inconvenient disassembly of the steam guide component is solved, enabling rapid disassembly of the steam guide component and uniform steam diffusion, thereby improving the quality of the passivation layer and the performance of the solar cell.
Patent Information
- Application Number
- CN202520003903.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-02
- Publication Date
- 2025-12-16
- Estimated Expiration
- 2035-01-02
AI Technical Summary
Traditionally, the steam guide component is installed on the wall of the passivation chamber using screws, which causes alumina vapor to seep into the threaded hole, making it inconvenient to disassemble the steam guide component.
The design incorporates multiple connectors and sockets, with the connectors inserted and withdrawn from the sockets in a straight line. Combined with the design of elastic and abutment components, this enables the quick and convenient installation and disassembly of the steam guide.
This enables rapid and convenient installation and disassembly of the steam guide components, improves the reliability of the injection source device and the stability of steam flow, and enhances the uniformity of the passivation layer and the yield of solar cells.
Smart Images
Figure CN223674742U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of solar cells, in particular to a spray source device and a passivation layer forming equipment. BACKGROUND
[0002] In the process of solar cell manufacturing, a dense passivation layer needs to be covered on the cell piece of the solar cell by using a spray source device. In the specific process of forming the passivation layer, aluminum oxide vapor enters the passivation cavity of the spray source device from the spray source port of the spray source device, and is deposited on the cell piece located in the passivation cavity to form a passivation layer.
[0003] In order to facilitate the uniform diffusion of aluminum oxide vapor in the passivation cavity, a steam guide is usually arranged in the passivation cavity. The traditional steam guide is installed with the cavity wall of the passivation cavity by screws. With long time use, aluminum oxide vapor is easy to penetrate into the threaded hole of the steam guide and the cavity wall of the passivation cavity and deposit, resulting in the inconvenience of subsequent disassembly of the steam guide. CONTENT OF THE UTILITY MODEL
[0004] Therefore, it is necessary to provide a spray source device and a passivation layer forming equipment which can be easily disassembled in view of the above problems.
[0005] A spray source device, comprising:
[0006] a main body having a passivation cavity therein and a spray source port being arranged thereon, the spray source port being used for spraying vapor for passivation of a solar cell;
[0007] a steam guide being arranged in the passivation cavity, and the steam guide having a steam guide cavity, a steam inlet and a steam outlet, the spray source port, the steam inlet, the steam guide cavity, the steam outlet and the passivation cavity being sequentially communicated; and
[0008] a plurality of plug-in members being distributed on the periphery of the spray source port and the steam inlet, and all the plug-in members being arranged on one of the main body and the steam guide, a plurality of plug-in holes being arranged on the other of the main body and the steam guide, the plug-in members and the plug-in holes being one-to-one corresponding and being detachably plugged in.
[0009] In some embodiments, each of the plug-in members is protruded from the surface of the steam guide where the steam inlet is arranged, and the wall surface of the main body where the spray source port is arranged is provided with a plurality of plug-in holes;
[0010] The main body is provided with mounting holes, and each of the insertion holes is surrounded by a plurality of the mounting holes, and each of the insertion holes is in communication with each of the mounting holes arranged around it; the spray source device further comprises a plurality of elastic members and a plurality of abutting members, any two of the elastic members, the abutting members and the mounting holes correspond to each other, the elastic members are installed in the corresponding mounting holes and connected with the corresponding abutting members, the insertion member is inserted into the corresponding insertion hole, and the abutting member is abutted with the insertion member under the action of the corresponding elastic member.
[0011] In some embodiments, the insertion member comprises a first sub-portion, a second sub-portion and a third sub-portion, the first sub-portion is protruded on the steam guide member, and the second sub-portion is connected between the first sub-portion and the third sub-portion; the side peripheral surface of the second sub-portion is recessed relative to the first sub-portion and the third sub-portion to form a groove extending along the peripheral direction of the insertion member, and the abutting member is clamped in the groove.
[0012] In some embodiments, the abutting member is a spherical structure and has a spherical convex surface, the longitudinal section of the groove is a circular arc, and the spherical convex surface is matched with the groove in a concave-convex manner.
[0013] In some embodiments, the groove wall connected with the third sub-portion is recessed in a partial area arranged along the peripheral direction of the insertion member to form a guide surface extending to the third sub-portion and guiding the abutting member to exit the groove.
[0014] In some embodiments, the spray source device further comprises a diffusion plate, the diffusion plate is installed on the steam guide member and covers the steam inlet, and the diffusion plate is provided with diffusion holes arranged in a matrix.
[0015] In some embodiments, the steam inlet is arranged on an end surface of the steam guide member arranged along the thickness direction of the steam guide member, and extends to the opposite two end surfaces of the steam guide member along the length direction of the steam guide member, and the steam outlet is arranged on at least one end surface of the steam guide member arranged along the length direction of the steam guide member.
[0016] The two cavity walls of the passivation cavity arranged opposite along the width direction of the steam guide member are respectively provided with sliding grooves, the sliding grooves extend to an end surface of the steam guide member along the length direction of the steam guide member, and the two opposite ends of the diffusion plate are respectively slidably installed in the sliding grooves of the two cavity walls of the passivation cavity.
[0017] And / or, the diffusion plate is a plurality of and arranged in a stack along the thickness direction of the steam guide member, and in the direction in which the steam inlet points to the steam guide cavity, the number of the diffusion plates gradually increases.
[0018] In some embodiments, the steam outlet is disposed on both ends of the steam guide member along its length direction, and the steam inlet is disposed on one end of the steam guide member along its thickness direction, and extends along the length direction of the steam guide member to the opposite ends of the steam guide member.
[0019] In some embodiments, the cavity wall of the steam guide chamber is configured with a pattern that guides the steam flow to the steam outlet;
[0020] And / or, the steam guide component includes a plurality of plates arranged sequentially and connected along its circumference, all of the plates surrounding the steam guide cavity, the steam inlet and the steam outlet, the end face of each plate surrounding the steam outlet is an arc-shaped convex surface, and the distance between the arc-shaped convex surface and the central axis of the steam guide component gradually increases in the direction from the steam guide cavity to the steam outlet.
[0021] A passivation layer forming apparatus, comprising a spray source device as described in any of the above embodiments.
[0022] Compared with the prior art, this application has the following beneficial effects:
[0023] The aforementioned spray source device and passivation layer forming equipment are designed with multiple connectors and multiple insertion holes. The direction of insertion and withdrawal of the connectors from the insertion holes is a straight line. Even if steam is deposited in the insertion holes, it is relatively simple to insert and withdraw the connectors from the insertion holes. This design enables the steam guide components to be installed and disassembled quickly and conveniently. Attached Figure Description
[0024] Figure 1 This is a schematic diagram of the main body in one embodiment of this application;
[0025] Figure 2 for Figure 1 The diagram shows a cross-sectional view along the PP direction of the side wall of the main body, which has a nozzle and a connector hole.
[0026] Figure 3 for Figure 1 The left view of the side wall of the main body shown, which has a nozzle and a connector hole;
[0027] Figure 4 This is a schematic diagram of the structure of the steam guide, diffuser plate and abutment member after they are assembled in some embodiments of this application;
[0028] Figure 5 for Figure 4 An enlarged schematic diagram of the partial structure A after the steam guide, diffuser plate and abutment are assembled;
[0029] Figure 6 for Figure 4 Left view of the steam guide, diffuser, and abutment components after assembly;
[0030] Figure 7 for Figure 6 An enlarged schematic diagram of the partial structure B after the steam guide, diffuser plate and abutment are assembled;
[0031] Figure 8 for Figure 4 The diagram shows the structure of the steam guide, diffuser, and abutment after they are assembled and rotated at a certain angle.
[0032] Figure 9 for Figure 8 An enlarged schematic diagram of the partial structure C after the steam guide, diffuser plate and abutment are assembled;
[0033] Figure 10 for Figure 4 The diagram shows the structure of the steam guide, diffuser, and abutment components after they are assembled and inverted.
[0034] Figure 11 for Figure 10 An enlarged schematic diagram of the partial structure D after the steam guide, diffuser plate and abutment are assembled;
[0035] Figure 12 for Figure 4 The diagram shows the structure after the steam guide, diffuser, and abutment are assembled and rotated 180°.
[0036] Figure 13 for Figure 12 An enlarged schematic diagram of the partial structure F after the steam guide, diffuser plate and abutment are assembled;
[0037] Figure 14 for Figure 4 The top view of the steam guide, diffuser plate and abutment parts after assembly.
[0038] Icon labels:
[0039] 100. Spray source device;
[0040] 10. Main body; 20. Steam guide component; 30. Insertion component; 40. Elastic component; 50. Abutment component; 60. Diffuser plate;
[0041] 11. Passivation chamber; 12. Spray source port; 13. Insertion hole; 14. Mounting hole;
[0042] 21. Steam guide cavity; 22. Steam inlet; 23. Steam outlet; 24. Slide groove; 25. Plate; 251. Arc-shaped convex surface;
[0043] 31. First sub-part; 32. Second sub-part; 321. Groove; 33. Third sub-part; 34. Guide surface;
[0044] 61. diffusion hole
[0045] X, length direction; Y, width direction; Z, thickness direction. DETAILED DESCRIPTION
[0046] In order to make the above objectives, features and advantages of the present application more clear and easily understood, the specific embodiments of the present application will be described in detail below with the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. However, the present application can be practiced in a number of different ways from those described herein without departing from the scope of the present application, and it is understood that similar improvements can be made by those skilled in the art without departing from the spirit of the present application, and therefore the present application is not limited to the specific embodiments disclosed below.
[0047] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.
[0048] In addition, the terms "first", "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise specifically limited.
[0049] In the present application, unless otherwise specifically defined and limited, the terms "mounting", "connecting", "connecting", "fixing" and the like should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise specifically defined. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.
[0050] In the present application, unless specifically defined and limited otherwise, a first feature "on" or "under" a second feature can be directly in contact with the second feature, or indirectly in contact with the second feature through an intermediate medium. Moreover, the first feature "over", "above" and "on top of" the second feature can be directly above or obliquely above the second feature, or simply indicate that the first feature is higher in horizontal height than the second feature. The first feature "under", "below" and "underneath" the second feature can be directly below or obliquely below the second feature, or simply indicate that the first feature is lower in horizontal height than the second feature.
[0051] It should be noted that when an element is referred to as being "fixed to" or "set to" another element, it can be directly on the other element or there can be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there can be an intermediate element. The terms "vertical", "horizontal", "up", "down", "left", "right" and similar expressions used herein are for illustrative purposes only and are not the only implementation.
[0052] In the process of manufacturing solar cells, it is necessary to use a spray source device to cover a dense passivation layer on the cell piece of the solar cell. In the specific process of forming the passivation layer, aluminum oxide vapor enters the passivation cavity of the spray source device from the spray source port of the spray source device, and is deposited on the cell piece located in the passivation cavity to form a passivation layer.
[0053] In order to facilitate the uniform diffusion of aluminum oxide vapor in the passivation cavity, a steam guide is usually provided in the passivation cavity. The conventional steam guide is installed with the cavity wall of the passivation cavity by screws. With long-term use, aluminum oxide vapor is easy to penetrate into the threaded hole of the steam guide and the cavity wall of the passivation cavity and deposit, resulting in subsequent inconvenience of disassembling the steam guide.
[0054] Please refer to Figures 1 to 4 , in order to alleviate the above problems, the present application provides a spray source device 100, which comprises a main body 10, a steam guide 20 and a plurality of plug-in parts 30, the main body 10 has a passivation cavity 11 therein, the main body 10 is provided with a spray source port 12, the spray source port 12 is used for spraying steam for passivation of solar cells, the steam guide 20 is arranged in the passivation cavity 11, and the steam guide 20 has a steam guide cavity 21, a steam inlet 22 and a steam outlet 23, the spray source port 12, the steam inlet 22, the steam guide cavity 21, the steam outlet 23 and the passivation cavity 11 are sequentially communicated, all the plug-in parts 30 are distributed on the circumferential side of the spray source port 12 and the steam inlet 22, and all the plug-in parts 30 are arranged on one of the main body 10 and the steam guide 20, a plurality of plug-in holes 13 are provided on the other one of the main body 10 and the steam guide 20, the plug-in parts 30 and the plug-in holes 13 correspond one by one and are detachably plugged.
[0055] Specifically, in the present application, the steam is aluminum oxide steam. The externally formed steam enters through the spray source port 12, and then diffuses into the passivation cavity 11 through the steam inlet port 22, the steam guide cavity 21 and the steam outlet port 23 in turn. The solar cell wafer is located in the passivation cavity 11, and the steam diffuses in the passivation cavity 11 and deposits on the solar cell wafer to form a passivation layer of the solar cell.
[0056] The steam guide 20 is used to guide the steam to diffuse uniformly in the passivation cavity 11 to improve the passivation effect. Generally, the cross-sectional area of the spray source port 12 is small, and the steam entering from the spray source port 12 into the steam inlet port 22 is a relatively concentrated steam beam. The steam guide cavity 21 has a large volume, and the steam diffuses in the process of flowing through the steam guide cavity 21 and forms a relatively dispersed steam beam. When the steam beam is input into the passivation cavity 11 through the steam outlet port 23, it is more evenly distributed in the passivation cavity 11.
[0057] As an example, all the insertion pieces 30 are arranged on the steam guide 20, and all the insertion holes 13 are arranged on the cavity wall of the passivation cavity 11. Of course, the arrangement of the insertion pieces 30 and the insertion holes 13 is not limited to the above, and all the insertion pieces 30 can be arranged on the cavity wall of the passivation cavity 11, and all the insertion holes 13 can be arranged on the steam guide 20. For the convenience of description, the following embodiments are described by taking all the insertion pieces 30 arranged on the steam guide 20 and all the insertion holes 13 arranged on the cavity wall of the passivation cavity 11 as an example.
[0058] Each insertion piece 30 is detachably inserted into the corresponding insertion hole 13 to achieve detachable connection of the steam guide 20 and the main body 10. After connection, all the insertion pieces 30 and all the insertion holes 13 are distributed on the periphery of the spray source port 12 and the steam inlet port 22, which not only improves the stability and reliability of the connection between the steam guide 20 and the main body 10, but also does not affect the flow of the steam.
[0059] In the prior art, the steam guide 20 and the cavity wall of the main body 10 are installed by screws. After working for a period of time, the steam deposits in the threaded holes of the cavity wall of the steam guide 20 and the main body 10, causing the screws to be unable to be rotated and detached, thereby causing the steam guide 20 and the main body 10 to be inconvenient to detach. In the present application, a plurality of insertion pieces 30 and a plurality of insertion holes 13 are designed, and the direction of insertion and withdrawal of the insertion pieces 30 into and out of the insertion holes 13 is a straight line. Even if the steam deposits in the insertion holes 13, the insertion and withdrawal of the insertion pieces 30 into and out of the insertion holes 13 is relatively simple. This design can achieve quick and convenient installation and detachment of the steam guide 20.
[0060] In some embodiments, each of the inserting pieces 30 is protruded from the surface of the steam guide 20 where the steam inlet 22 is formed, and the wall of the main body 10 where the spray source opening 12 is formed is provided with a plurality of inserting holes 13. The main body 10 is provided with a plurality of mounting holes 14, each of the inserting holes 13 is surrounded by a plurality of the mounting holes 14, and each of the inserting holes 13 is in communication with each of the mounting holes 14 surrounding it; the spray source device 100 further comprises a plurality of elastic pieces 40 and a plurality of abutting pieces 50, any two of the elastic pieces 40, the abutting pieces 50 and the mounting holes 14 are one-to-one corresponding, the elastic pieces 40 are mounted in the corresponding mounting holes 14 and connected with the corresponding abutting pieces 50, the inserting pieces 30 are inserted into the corresponding inserting holes 13, and the abutting pieces 50 abut against the inserting pieces 30 under the action of the corresponding elastic pieces 40.
[0061] Specifically, the elastic piece 40 can be a spring, a compressed spring piece or other elastic structure. The abutting piece 50 is partially located in the corresponding mounting hole 14 and partially located in the corresponding inserting hole 13. When the inserting piece 30 is not inserted into the inserting hole 13, the elastic piece 40 can be in a natural state or a compressed state. During the process of inserting the inserting piece 30 into the inserting hole 13, the inserting piece 30 extrudes the abutting piece 50 and pushes the part of the abutting piece 50 extending into the mounting hole 14 to increase, and the elastic piece 40 is compressed. At the same time, the inserting piece 30 is inserted into the space surrounded by the abutting pieces 50, and the abutting pieces 50 abut against the inserting piece 30 under the action of the corresponding elastic pieces 40, so as to avoid the inserting piece 30 from being pulled out, improve the reliability of the inserting piece 30, and also facilitate the disassembly of the inserting piece 30.
[0062] Please refer to Figure 2 and Figure 3 , and refer to Figure 4 , Figures 6 to 13 , further, in some embodiments, the inserting piece 30 comprises a first sub-piece 31, a second sub-piece 32 and a third sub-piece 33, the first sub-piece 31 is protruded from the steam guide 20, and the second sub-piece 32 is connected between the first sub-piece 31 and the third sub-piece 33; the side peripheral surface of the second sub-piece 32 is recessed relative to the first sub-piece 31 and the third sub-piece 33, forming a groove 321 extending along the peripheral direction of the inserting piece 30, the abutting piece 50 is clamped in the groove 321 and abuts against the groove wall of the groove 321, so as to improve the stability and reliability of the inserting piece 30.
[0063] In some embodiments, the abutting piece 50 is a spherical structure and has a spherical convex surface, the longitudinal section of the groove 321 is a circular arc, and the spherical convex surface is matched with the groove 321. In this embodiment, the abutting piece 50 can be more smoothly and smoothly inserted into or out of the groove 321, and the inserting piece 30 is convenient and labor-saving to disassemble.
[0064] In some embodiments, the groove wall connecting the third sub-portion 33 with the groove 321 is recessed in a partial region along the circumference of the plug-in piece 30, forming a guide surface 34 extending to the third sub-portion 33 and guiding the abutting piece 50 to exit the groove 321.
[0065] Specifically, the groove wall connecting the third sub-portion 33 with the groove 321 is a closed structure continuously extending along the circumference of the plug-in piece 30, wherein a portion of the groove wall along the circumference of the plug-in piece 30 is recessed to form the guide surface 34 for guiding the abutting piece 50 to move out of the groove 321 during the process of the plug-in piece 30 exiting the plug-in hole 13, and the remaining portion of the groove wall along the circumference of the plug-in piece 30 cooperates with the groove wall connecting the first sub-portion 31 for limiting the abutting piece 50 in the groove 321. Of course, the remaining portion of the groove wall connecting the third sub-portion 33 with the groove 321 along the circumference of the plug-in piece 30 (as indicated by arrow E in the middle) can also guide the abutting piece 50 to move out of the groove 321 during the process of the plug-in piece 30 exiting the plug-in hole 13. It is worth mentioning that the abutting piece 50 guided to move out of the groove 321 by the remaining portion of the groove wall connecting the third sub-portion 33 with the groove 321 along the circumference of the plug-in piece 30 is different from the abutting piece 50 guided to exit by the guide surface 34. Figure 11
[0066] By designing the guide surface 34, the guide surface 34 can guide part of the abutting piece 50 to exit the groove 321, which reduces the resistance during the process of the plug-in piece 30 exiting the plug-in hole 13, facilitating the disassembly of the plug-in piece 30.
[0067] Please refer to Figures 1 to 4 In some embodiments, the spray source device 100 further comprises a diffusion plate 60 mounted on the steam guide 20 and covering the steam inlet 22, and the diffusion plate 60 is provided with diffusion holes 61 arranged in a matrix. Specifically, the diffusion holes 61 arranged in a matrix are uniformly distributed on the diffusion plate 60. During the process of steam passing through the diffusion plate 60, the steam is scattered by the diffusion holes 61 on the diffusion plate 60, forming relatively dispersed steam, and then the steam is further diffused in the steam guide cavity 21, and finally input into the passivation cavity 11 through the steam outlet 23 and can be uniformly distributed in the passivation cavity 11, thereby facilitating the improvement of the quality of the formed passivation layer and the improvement of the qualified rate of the solar cell.
[0068] In some embodiments, the steam inlet 22 is arranged on one end surface of the steam guide 20 along the thickness direction Z of the steam guide 20 and extends to the opposite two end surfaces of the steam guide 20 along the length direction X of the steam guide 20, and the steam outlet 23 is arranged on at least one end surface of the steam guide 20 along the length direction X of the steam guide 20; the two cavity walls of the passivation cavity 11 arranged opposite along the width direction Y of the steam guide 20 are respectively provided with a sliding groove 24, the sliding groove 24 extends to one end surface of the steam guide 20 along the length direction X of the steam guide 20, and the two opposite ends of the diffusion plate 60 are respectively slidably installed in the sliding grooves 24 of the two cavity walls of the passivation cavity 11. The arrangement of the sliding groove 24 facilitates the installation and removal of the diffusion plate 60, and facilitates disassembly.
[0069] Specifically, the mesh number of the diffusion holes 61 of different types of diffusion plates 60 is different. It can be understood that the mesh number of the diffusion holes 61 refers to the inner diameter of the diffusion holes 61 and the number of the diffusion holes 61 are different. The larger the mesh number of the diffusion holes 61, the smaller the inner diameter of the diffusion holes 61, and the more the number of the holes. The larger the mesh number of the diffusion holes 61, the better the dispersion effect of the steam, the more uniform the diffusion of the steam in the passivation cavity 11, and the higher the qualified rate of the solar cells. By arranging the sliding groove 24, the replacement of different types of diffusion plates 60 can be realized, and the replacement is convenient. Different types of diffusion plates 60 have different uniformity of steam in the passivation cavity 11, so the required type of diffusion plate 60 can be selected according to the needs.
[0070] In some embodiments, the diffusion plate 60 is a plurality of and arranged in a stacked manner along the thickness direction Z of the steam guide 20, and in the direction in which the steam inlet 22 points to the steam guide cavity 21, the mesh number of the diffusion plate 60 gradually increases. The diffusion plate 60 not only has the effect of dispersing steam, but also has the effect of filtering steam, and the larger the mesh number of the diffusion plate 60, the better the filtering effect. The design of multiple diffusion plates 60 in this embodiment can cooperate to sputter and scatter the steam of the spray source port 12, and the uniformity is better, and also has the effect of filtering steam, which is beneficial to improve the quality of the passivation layer formed, and the qualified rate of the solar cells is also improved.
[0071] In some embodiments, the steam outlet 23 is arranged on the two end surfaces of the steam guide 20 along the length direction X of the steam guide 20, and the steam inlet 22 is arranged on one end surface of the steam guide 20 along the thickness direction Z of the steam guide 20 and extends to the opposite two end surfaces of the steam guide 20 along the length direction X of the steam guide 20, and communicates with the steam outlets 23 of the two end surfaces.
[0072] In the prior art, the steam outlet 23 is arranged on one end surface of the steam guide 20 along the length direction X of the steam guide 20, so that the other end of the steam guide 20 along the length direction X forms a closed end. This design causes part of the steam to collect at the closed end of the steam guide 20, which will disturb the diffusion of other steam in the steam guide cavity 21, and deteriorate the uniformity of the steam in the passivation cavity 11.
[0073] In this application, by opening steam outlets 23 on both ends of the steam guide 20 along its length direction X, the steam entering from the steam inlet 22 is discharged from the steam outlets 23 at both ends of the steam guide 20. Therefore, there is no drawback of steam accumulating at the closed end and disturbing the diffusion of other steam, thus optimizing the uniformity of steam diffusion in the passivation cavity 11.
[0074] In some embodiments, the cavity wall of the steam guide chamber 21 is formed with textures to guide steam flow to the steam outlet 23. Taking the steam outlet 23 as an example where the steam guide member 20 is located at both ends along its length direction X, the textures extend along the length direction X of the steam guide member 20 to both ends. The texture design can, on the one hand, quickly guide steam out of the steam guide chamber 21, and on the other hand, the texture can also increase the roughness of the cavity wall of the steam guide chamber 21, thereby increasing the complexity of steam flow during the process of steam contacting and flowing with the texture, and the steam can be further dispersed.
[0075] As an example, multiple lines can be formed within the steam guide cavity 21, with all lines surrounding the central axis of the steam guide component 20 (e.g., Figure 4 (As shown by the dashed line L) settings.
[0076] As an example, the texture can be set as a wave pattern, spiral pattern, or other texture extending along the length direction X of the steam guide 20.
[0077] Please see Figure 4 and Figure 14 In some embodiments, the steam guide 20 includes multiple plates 25 arranged sequentially and connected along its circumference. All plates 25 surround a steam guide cavity 21, a steam inlet 22, and a steam outlet 23. The end face of each plate 25 surrounding the steam outlet 23 is an arc-shaped convex surface 251. The arc-shaped convex surface 251 can guide steam flow, and the arc-shaped convex surfaces 251 of different plates 25 guide steam in different directions, which is beneficial for the full diffusion of steam within the passivation cavity 11. Furthermore, in the direction from the steam guide cavity 21 to the steam outlet 23, the arc-shaped convex surface 251 is perpendicular to the central axis of the steam guide 20 (e.g., ...). Figure 4 As the distance between the two sides (as shown by the dashed line L) gradually increases, the cross-sectional area of the steam outlet 23 formed in this way also gradually increases. Therefore, during the process of steam being output from the steam outlet 23, the steam further diffuses and flows into the passivation cavity 11, and can eventually be evenly distributed in the steam cavity to improve the yield of solar cells.
[0078] This application also provides a passivation layer forming apparatus, which includes a steam source device and an injection source device 100 as described in any of the above.
[0079] The steam source device generates the steam forming the passivation layer, and is communicated with the spray source port 12 of the spray source device 100. The steam in the steam source device enters the passivation cavity 11 of the spray source device 100 through the spray source port 12, the steam inlet port 22, the steam guide cavity 21 and the steam outlet port 23 in sequence, and is deposited on the battery piece in the passivation cavity 11 to form the passivation layer.
[0080] The spray source device 100 and the passivation layer forming device can realize quick and convenient installation and dismounting of the steam guide 20 by designing the plurality of plug-in members 30 and the plurality of plug-in holes 13. The insertion and withdrawal of the plug-in members 30 into and out of the plug-in holes 13 are in straight lines, and the insertion and withdrawal of the plug-in members 30 into and out of the plug-in holes 13 are relatively simple even if the steam is deposited in the plug-in holes 13.
[0081] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description simple, all possible combinations of the technical features in the above-mentioned embodiments are not described, however, as long as the combinations of the technical features do not exist contradictory, they should be considered as the scope of the present application.
[0082] The above-mentioned embodiments only express several implementation manners of the present application, and the description is relatively specific and detailed, however, it should not be understood as the limitation of the patent application scope. It should be pointed out that, for the ordinary skilled in the art, several modifications and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the patent protection scope of the present application should be subject to the appended claims.
Claims
1. A spray source device, characterized by, The spray source device comprises: a main body (10) having a passivation cavity (11) therein, and a spray source opening (12) formed on the main body (10) for spraying a vapor for passivating a solar cell; a vapor guide member (20) disposed in the passivation cavity (11) and having a vapor guide cavity (21), a vapor inlet opening (22) and a vapor outlet opening (23), the spray source opening (12), the vapor inlet opening (22), the vapor guide cavity (21), the vapor outlet opening (23) and the passivation cavity (11) being sequentially communicated; and a plurality of plug members (30) distributed around the spray source opening (12) and the vapor inlet opening (22), all of the plug members (30) being disposed on one of the main body (10) and the vapor guide member (20), a plurality of plug holes (13) being formed on the other of the main body (10) and the vapor guide member (20), the plug members (30) and the plug holes (13) being one-to-one corresponding and detachably plugged.
2. The source apparatus according to claim 1, wherein Each of the plug members (30) is protruded from a surface of the vapor guide member (20) on which the vapor inlet opening (22) is formed, and a wall surface of the main body (10) on which the spray source opening (12) is formed is provided with a plurality of the plug holes (13); the main body (10) is provided with a plurality of mounting holes (14) therein, each of the plug holes (13) is surrounded by a plurality of the mounting holes (14), and each of the plug holes (13) is communicated with each of the mounting holes (14) surrounding the plug hole (13); the spray source device further comprises a plurality of elastic members (40) and a plurality of abutting members (50), any two of the elastic members (40), the abutting members (50) and the mounting holes (14) are one-to-one corresponding, the elastic members (40) are mounted in the corresponding mounting holes (14) and connected with the corresponding abutting members (50), the plug members (30) are inserted into the corresponding plug holes (13), and the abutting members (50) are abutted against the plug members (30) under the action of the corresponding elastic members (40).
3. The source apparatus according to claim 2, wherein The plug member (30) comprises a first sub-member (31), a second sub-member (32) and a third sub-member (33), the first sub-member (31) is protruded from the vapor guide member (20), the second sub-member (32) is connected between the first sub-member (31) and the third sub-member (33), a side peripheral surface of the second sub-member (32) is recessed relative to the first sub-member (31) and the third sub-member (33) to form a groove (321) extending along a peripheral direction of the plug member (30), and the abutting member (50) is clamped in the groove (321).
4. The source apparatus according to claim 3, wherein The abutting member (50) is in a spherical structure and has a spherical convex surface, a longitudinal section of the groove (321) is in a circular arc shape, and the spherical convex surface is in a concave-convex cooperation with the groove (321).
5. The source apparatus of claim 4, wherein The groove wall connecting the groove (321) and the third sub-portion (33) is recessed in a partial area arranged along the circumference of the plug (30), forming a guide surface (34) extending to the third sub-portion (33) and guiding the abutting member (50) to exit the groove (321).
6. The source apparatus of claim 1, wherein The spray source device further comprises a diffusion plate (60) mounted on the steam guide member (20) and covering the steam inlet (22), wherein the diffusion plate (60) is provided with diffusion holes (61) arranged in a matrix.
7. The source apparatus of claim 6, wherein The steam outlet (23) is arranged on two end faces of the steam guide member (20) along the length direction (X) of the steam guide member (20), and the steam inlet (22) is arranged on one end face of the steam guide member (20) along the thickness direction (Z) of the steam guide member (20) and extends to the opposite two end faces of the steam guide member (20) along the length direction (X) of the steam guide member (20). The two cavity walls of the passivation cavity (11) arranged opposite along the width direction (Y) of the steam guide member (20) are respectively provided with a sliding groove (24) extending to one end face of the steam guide member (20) along the length direction (X) of the steam guide member (20), and the two ends of the diffusion plate (60) arranged opposite are respectively slidably mounted in the sliding grooves (24) of the two cavity walls of the passivation cavity (11). And / or, the diffusion plate (60) is a plurality of and arranged in layers along the thickness direction (Z) of the steam guide member (20), and in the direction in which the steam inlet (22) points to the steam guide cavity (21), the number of meshes of the diffusion plate (60) gradually increases.
8. The source apparatus of claim 1, wherein The steam outlet (23) is arranged on two end faces of the steam guide member (20) along the length direction (X) of the steam guide member (20), and the steam inlet (22) is arranged on one end face of the steam guide member (20) along the thickness direction (Z) of the steam guide member (20) and extends to the opposite two end faces of the steam guide member (20) along the length direction (X) of the steam guide member (20).
9. The source apparatus of claim 1, wherein The cavity wall of the steam guide cavity (21) is configured to form a pattern guiding the steam flow to the steam outlet (23); And / or, the steam guide member (20) comprises a plurality of plate members (25) arranged in sequence and connected along the circumference thereof, and all the plate members (25) surround to form the steam guide cavity (21), the steam inlet (22) and the steam outlet (23), and the end face of each plate member (25) surrounding to form one end of the steam outlet (23) is an arc convex surface (251), and in the direction in which the steam guide cavity (21) points to the steam outlet (23), the distance between the arc convex surface (251) and the central axis of the steam guide member (20) gradually increases.
10. An apparatus for forming a passivation layer, characterized by comprising: The spray source device comprises the spray source device according to any one of claims 1 to 9.