Dedusting equipment for auxiliary chamber of single crystal furnace

Abstract

The utility model belongs to the technical field of photovoltaic and semiconductor crystal pulling dust removal, in particular to dust removal equipment for an auxiliary chamber of a single crystal furnace, which is characterized in that the top of a tank cylinder is hermetically connected with an upper cover plate, the bottom of the tank cylinder is fixedly connected with a seal head, the bottommost part of the seal head is provided with an ash discharge port, and the outer side surface of the tank cylinder is connected with a plurality of support legs along the circumferential direction; the inner filter element is located in the tank cylinder, the inner space of the tank cylinder below the inner filter element is a dust collection cavity, and the dust collection cavity is located above the end socket; an air inlet pipe and an air outlet pipe are respectively mounted on the cylinder of the tank body, one end of the air inlet pipe is communicated with an exhaust port of an auxiliary chamber of the single crystal furnace, and the other end of the air inlet pipe is communicated with a filter cartridge below the supporting and fixing plate. The device is used for cleaning dust and impurities in the auxiliary chamber of the single crystal furnace in the production process of monocrystalline silicon, is important equipment for removing dust in the auxiliary chamber of the single crystal furnace, and has the characteristics of better and efficient dust removal effect, high filtering precision, small equipment size, good overall stability, long maintenance period, high comprehensive cost performance and the like.

Description

TECHNICAL FIELD

[0001] The utility model belongs to photovoltaic and semiconductor crystal pulling dust removal technical field, concretely is a kind of for single crystal furnace auxiliary chamber dust removal equipment, it can be used to filter the dust impurity of single crystal furnace auxiliary chamber in the single crystal silicon production process. BACKGROUND

[0002] The quality requirement of single crystal silicon of photovoltaic industry increases year by year, and some dust and impurity particles are generated in single crystal furnace auxiliary chamber in the single crystal silicon production process, these particles will seriously affect the performance and quality of single crystal silicon if not removed in time, therefore, in order to improve the competitiveness of product, constantly pursue higher production technology and quality standard, it needs more targeted dust removal equipment to ensure the production quality of single crystal silicon, to promote the continuous upgrading of single crystal silicon dust removal equipment technology and the development of market.

[0003] Single crystal furnace auxiliary chamber dust removal equipment can effectively intercept tiny particles, ensure that production environment is relatively clean, improve the quality of single crystal silicon, therefore, it is necessary to improve product quality, filter the dust impurity of single crystal furnace auxiliary chamber, and design dust removal equipment specially for single crystal furnace auxiliary chamber. CONTENT OF UTILITY MODEL

[0004] In order to meet the requirement of single crystal silicon dust removal, the utility model provides a kind of for single crystal furnace auxiliary chamber dust removal equipment.

[0005] The utility model aims to realize by the following technical scheme:

[0006] The utility model includes upper cover plate, jar body, internal filter core and support leg, wherein jar body includes jar body cylinder and head, the top of jar body cylinder is sealedly connected with upper cover plate, the bottom of jar body cylinder is fixedly connected with head, the bottom of head is equipped with dust discharging port, the outer side of jar body cylinder is connected with a plurality of support legs in the circumferential direction;The internal filter core is located in jar body cylinder, the internal space of jar body cylinder below internal filter core is dust collecting cavity, dust collecting cavity is located above head, internal filter core includes filter cartridge type filter core, support fixed plate and filter cartridge, filter cartridge is fixed in jar body cylinder, support fixed plate is equipped in filter cartridge, a plurality of filter core fixed plates are connected between support fixed plate and filter cartridge top, filter cartridge type filter core is installed on each filter core fixed plate, the position corresponding to each filter cartridge type filter core on filter cartridge top and support fixed plate is opened hole, each filter cartridge type filter core and the corresponding opening hole between filter cartridge top and support fixed plate are sealed by sealing ring;Air inlet pipe and air outlet pipe are respectively installed on jar body cylinder, one end of air inlet pipe is communicated with single crystal furnace auxiliary chamber exhaust port, the other end of air inlet pipe is communicated with filter cartridge below support fixed plate.

[0007] The upper end of the supporting leg is fixed to the outer side surface of the cylinder, and the lower end of the supporting leg is connected with an adjustable footing.

[0008] The edge of the upper cover plate is provided with a plurality of grooves in the circumferential direction, and the outer side surface of the top of the cylinder is fixed with a plurality of U-shaped welds corresponding to the grooves in the circumferential direction.

[0009] The outer side surface of the cylinder is provided with a plurality of forklift plates in the circumferential direction.

[0010] The gas outlet pipe is respectively provided with a pressure gauge for observing the internal pressure of the cylinder and a manual pressure relief valve for pressure relief before maintenance.

[0011] The upper end of the supporting leg is fixed to the outer side surface of the cylinder, and the lower end of the supporting leg is connected with an adjustable footing.

[0012] The adjustable footing has universal casters.

[0013] The supporting leg is a telescopic rod.

[0014] The advantages and positive effects of the utility model are as follows:

[0015] The utility model is used for cleaning dust and impurities in a single crystal furnace auxiliary chamber in a single crystal silicon production process, is important equipment for dust removal of the single crystal furnace auxiliary chamber, has better high -efficient dust removal effect, high filtration precision, small equipment volume, good overall stability, long maintenance period, and high comprehensive performance ratio and the like. BRIEF DESCRIPTION OF DRAWINGS

[0016] In order to more clearly illustrate the technical scheme in the embodiment or prior art of the present application, the following will briefly introduce the drawings needed to be used in the embodiment or prior art description, and obviously, the drawings in the following description are only some embodiments of the present application, and those skilled in the art can obtain other drawings according to these drawings without creating creative labor.

[0017] Fig. 1 It is a structure top view of the utility model;

[0018] Fig. 2 It is a structure front view of the utility model;

[0019] Fig. 3 It is an internal structure sectional view of the utility model;

[0020] 1 is a dust removal device, 201 is an upper cover plate, 202 is a lifting ring nut, 203 is a tank cylinder, 204 is a live flange, 205 is an air inlet pipe, 206 is a head, 207 is a support leg, 208 is an adjustable foot, 209 is a dust outlet, 210 is a forklift plate, 211 is an air outlet pipe, 212 is a pressure gauge, 213 is a U-shaped welding part, 214 is a hinge, 215 is a handle, 216 is a tank flange, 301 is a filter core fixing plate, 302 is a filter cartridge type filter core, 303 is a sealing ring, 304 is a support fixing plate, and 305 is a dust collecting cavity. DETAILED DESCRIPTION

[0021] In order to make the purpose, technical scheme and advantages of the utility model more clearly, the following will be further described in detail in combination with the drawings and examples. It should be understood that the specific examples described herein are only used to explain the utility model, and are not used to limit the utility model.

[0022] The utility model will be further described in combination with the drawings.

[0023] As Figs. 1-3 shown, the utility model includes upper cover plate 201, tank, internal filter core and support leg 207, wherein the tank includes tank cylinder 203 and head 206, the top of tank cylinder 203 is sealedly connected with upper cover plate 201, the bottom of tank cylinder 203 is fixedly connected with head 206, the bottommost place of head 206 is equipped with dust outlet 209, the outer side of tank cylinder 203 is connected with multiple support legs 207 in the circumference direction;The internal filter core is located in tank cylinder 203, the internal space of tank cylinder 203 below the internal filter core is dust collecting cavity 305, dust collecting cavity 305 is located above head 206, the internal filter core includes filter cartridge type filter core 302, support fixing plate 304 and filter cartridge 306, filter cartridge 306 is fixed in the inside of tank cylinder 203, support fixing plate 304 is equipped with in filter cartridge 306, multiple filter core fixing plates 301 are connected between support fixing plate 304 and the top of filter cartridge 306, each filter core fixing plate 301 is installed with filter cartridge type filter core 302, the top of filter cartridge 306 and support fixing plate 304 are opened in the position corresponding to each filter cartridge type filter core 302, each filter cartridge type filter core 302 and the opening corresponding to the top of filter cartridge 306 and support fixing plate 304 are sealed by sealing ring 303;Tank cylinder 203 is installed with air inlet pipe 205 and air outlet pipe 211 respectively, one end of air inlet pipe 205 is communicated with single crystal furnace auxiliary chamber exhaust port, the other end of air inlet pipe 205 is communicated with filter cartridge 306 below support fixing plate 304.

[0024] The top of the tank cylinder 203 of the embodiment is welded with a tank flange 216, and the upper cover plate 201 is hinged with the tank cylinder 203 through a hinge 214 and sealed between the closed state and the tank flange 216 through a sealing ring. The upper surface of the upper cover plate 201 is provided with a handle 215 for use when opening the upper cover plate 201 during maintenance.

[0025] The edge of the upper cover plate 201 of the embodiment is provided with a plurality of grooves in the circumferential direction, and the outer side of the top of the tank cylinder 203 is fixed with a plurality of U-shaped welds 213 corresponding to the number of grooves in the circumferential direction. Each U-shaped weld 213 is provided with a set of hinge bolts and lifting ring nuts 202 between the corresponding grooves. The upper cover plate 201 is connected with the tank cylinder 203 through each set of hinge bolts and lifting ring nuts 202 in the closed state. The lower end of the hinge bolt is hinged with the U-shaped weld 213, and the upper end of the hinge bolt is embedded in the groove and is in threaded connection with the lifting ring nut 202. The hinge bolt is used in cooperation with the lifting ring nut 202, and when the inside of the tank cylinder 203 is periodically maintained, the hinge bolt plays a role of quick disassembly and quick opening of the upper cover plate 201, which is convenient for production, installation and daily maintenance.

[0026] The outer side of the tank cylinder 203 of the embodiment is provided with a plurality of forklift plates 210 in the circumferential direction, and the forklift plates 210 are located between the gas inlet pipe 205 and the head 206. The head 206 of the embodiment is elliptical and is welded at the bottom of the tank cylinder 203, which is convenient for collecting dust. The lowest point of the head 206 is designed as a dust discharge port 209 for periodic disassembly and removal of dust. The dust is collected in a dust collection cavity 305, and the dust in the tank cylinder 203 can be discharged by disassembling the dust discharge port 209. The structure of the dust discharge port 209 is a prior art, including a dust discharge pipe, a fixed flange, a loose flange, a sealing ring and a blind plate.

[0027] The gas outlet pipe 211 and the gas inlet pipe 205 of the embodiment are symmetrically arranged on the left and right sides of the axial section of the tank cylinder 203. One end of the gas inlet pipe 205 is provided with a loose flange 204, one end of the gas outlet pipe 211 is in communication with the inside of the tank cylinder 203, and the other end of the gas outlet pipe 211 is provided with a fixed flange and a loose flange. The gas outlet pipe 211 is respectively provided with a pressure gauge 212 and a manual pressure relief valve. The pressure gauge 212 is convenient for observing the pressure inside the tank cylinder 203, and the manual pressure relief valve is used for pressure relief before maintenance.

[0028] Four supporting legs 207 are arranged on the circumference of the tank cylinder 203, and the upper end of each supporting leg 207 is fixed to the outer side of the tank cylinder 203 by bolt connection, for supporting the dust removal equipment; the lower end of the supporting leg 207 is provided with an adjustable foot 208, so as to adjust the required height when the dust removal equipment is connected with the on-site pipeline due to the size deviation.

[0029] The end surface of the filter core fixing plate 301 is V-shaped, and the V-shaped filter core fixing plate axially fixes the filter cartridge type filter core 302.

[0030] The working principle of the utility model is that:

[0031] The single crystal furnace auxiliary chamber dust removal equipment 1 is installed near the exhaust port of the single crystal furnace auxiliary chamber, the air inlet pipe 205 is communicated with the exhaust port of the single crystal furnace auxiliary chamber, and the air outlet pipe 211 is connected with the defect air pump, so that the gas with dust generated in the single crystal furnace auxiliary chamber can be extracted in time, so that the gas is filtered and treated by the internal filter core before being discharged from the single crystal furnace system, so as to prevent the dust from spreading to the surrounding environment.

[0032] In the description of the present application, it should be understood that if the terms "upper", "lower", "left", "right" and the like indicate the orientation or positional relationship shown in the drawings, they are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore the terms describing the positional relationship in the drawings are only used for exemplary description, and cannot be understood as a limitation of the present patent, for those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.

[0033] The above is only the preferred embodiment of the present application, and does not limit the present application, any modification, equivalent replacement and improvement made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A dust removal device for the auxiliary chamber of a single crystal furnace, characterized in that: The dust collector comprises an upper cover plate (201), a tank body, an internal filter element and a supporting leg (207), wherein the tank body comprises a tank body cylinder (203) and a head (206), the top of the tank body cylinder (203) is sealingly connected with the upper cover plate (201), the bottom of the tank body cylinder (203) is fixedly connected with the head (206), the bottom of the head (206) is provided with a dust discharging port (209), and the outer side of the tank body cylinder (203) is circumferentially connected with a plurality of supporting legs (207); the internal filter element is located in the tank body cylinder (203), the internal space of the tank body cylinder (203) below the internal filter element is a dust collecting cavity (305), the dust collecting cavity (305) is located above the head (206), the internal filter element comprises a filter cartridge type filter element (302), a supporting fixed plate (304) and a filter cartridge (306), the filter cartridge (306) is fixed in the tank body cylinder (203), the filter cartridge (306) is provided with the supporting fixed plate (304), a plurality of filter element fixed plates (301) are connected between the supporting fixed plate (304) and the top of the filter cartridge (306), each filter element fixed plate (301) is provided with the filter cartridge type filter element (302), the top of the filter cartridge (306) and the supporting fixed plate (304) are provided with holes corresponding to the filter cartridge type filter elements (302), and each filter cartridge type filter element (302) is sealingly connected with the corresponding holes in the top of the filter cartridge (306) and the supporting fixed plate (304) through a sealing ring (303); the tank body cylinder (203) is provided with an air inlet pipe (205) and an air outlet pipe (211), one end of the air inlet pipe (205) is communicated with a single crystal furnace auxiliary chamber exhaust port, and the other end of the air inlet pipe (205) is communicated with the filter cartridge (306) below the supporting fixed plate (304).

2. The apparatus for dedusting the subchamber of a single crystal furnace according to claim 1, characterized in that: The top of the tank body cylinder (203) is provided with a tank body flange (216), the upper cover plate (201) is hingedly connected with the tank body cylinder (203) through a hinge (214) and sealingly connected between the closed state and the tank body flange (216); the upper surface of the upper cover plate (201) is provided with a handle (215).

3. The apparatus for dedusting the subchamber of a single crystal furnace according to claim 1, characterized in that: The edge of the upper cover plate (201) is circumferentially provided with a plurality of grooves, the top outer side of the tank body cylinder (203) is circumferentially fixedly connected with a plurality of U-shaped welds (213) corresponding to the grooves, each U-shaped weld (213) is provided with a set of knuckle bolts and lifting ring nuts (202) between the corresponding grooves, and the upper cover plate (201) is connected with the tank body cylinder (203) through the sets of knuckle bolts and lifting ring nuts (202) in the closed state; the lower end of the knuckle bolt is hingedly connected with the U-shaped weld (213), the upper end of the knuckle bolt is embedded in the groove, and the upper end of the knuckle bolt is threadedly connected with the lifting ring nut (202).

4. The apparatus for dedusting the subchamber of a single crystal furnace according to claim 1, characterized in that: The outer side of the tank body cylinder (203) is circumferentially provided with a plurality of forklift plates (210).

5. The apparatus for dedusting the subchamber of a single crystal furnace according to claim 1, characterized in that: The air outlet pipe (211) is respectively provided with a pressure gauge (212) for observing the internal pressure of the tank body cylinder (203) and a manual pressure relief valve for pressure relief before maintenance.

6. The apparatus for dedusting the subchamber of a single crystal furnace according to claim 1, characterized in that: The upper end of the leg (207) is fixed to the outer side of the tank cylinder (203), and the lower end of the leg (207) is connected with an adjustable footing (208).

7. The apparatus for dedusting the subchamber of a single crystal furnace according to claim 6, characterized in that: The adjustable footing (208) has universal casters.

8. The apparatus for dedusting the subchamber of a single crystal furnace according to claim 1, characterized in that: The leg (207) is a telescopic rod.

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