Source measurement device and test equipment of integrated circuit

Abstract

The utility model discloses a source measuring device and test equipment of an integrated circuit. The source measuring device comprises a control module, a test chip, a power amplification module and a power supply module, the power supply module is connected with the control module, the test chip and the power amplification module and is used for supplying power to the control module, the test chip and the power amplification module; the test chip is connected between the control module and the power amplification module, and the power amplification module is connected with an integrated circuit to be tested; the test chip is used for outputting a first electric signal to the power amplification module according to a driving signal sent by the control module; and the power amplification module is used for performing power amplification on the first electric signal and then outputting a total power amplification signal to a power supply end of the integrated circuit to be tested. According to the utility model, a test scheme of an integrated circuit with a large current demand is satisfied.

Description

TECHNICAL FIELD

[0001] The utility model relates to integrated circuit test technical field especially relates to a source measuring device and test equipment of integrated circuit. BACKGROUND

[0002] In recent years, with the rapid development of domestic semiconductor technology, the source measuring device as the core component of semiconductor device test equipment has been pursued by more and more enterprises.

[0003] At present, the current range of the source measuring device output is low, which cannot meet the test scheme of integrated circuit with large current demand. UTILITY MODEL CONTENTS

[0004] The utility model provides a source measuring device and test equipment of integrated circuit to solve the problem of low current range of the existing source measuring device output.

[0005] Firstly, the utility model provides a source measuring device of integrated circuit, and the source measuring device comprises a control module, a test chip, a power amplification module and a power module;

[0006] The power module is connected with the control module, the test chip and the power amplification module, and is used for power supply for the control module, the test chip and the power amplification module;

[0007] The test chip is connected between the control module and the power amplification module, and the power amplification module is connected with the integrated circuit to be measured;The test chip is used for outputting the first electric signal to the power amplification module according to the drive signal sent by the control module, and the power amplification module is used for outputting the total power amplification signal to the power supply end of the integrated circuit to be measured after power amplification to the first electric signal.

[0008] Optionally, the power amplification module comprises a plurality of current amplification units;

[0009] The plurality of current amplification units are connected in parallel between the test chip and the integrated circuit to be measured, and the plurality of current amplification units are also connected with the control module;The control module is used for controlling the conduction or turn-off of the current amplification unit;The current amplification unit is used for outputting the sub-power amplification signal after power amplification to the first electric signal output by the test chip when conducting;The sub-power amplification signal output by the plurality of parallelly connected current amplification units is outputted as the total power amplification signal to the power supply end of the integrated circuit to be measured.

[0010] Optionally, the power amplification module comprises four current amplification units;

[0011] The four current amplification units are connected in parallel between the test chip and the integrated circuit to be tested, and the four current amplification units are also connected with the control module; the control module is used for controlling the current amplification units to be turned on or turned off; the current amplification unit is used for outputting a sub-power amplification signal after power amplifying the first electric signal output by the test chip when turned on; the sub-power amplification signals output by the four parallelly connected current amplification units are combined to output a total power amplification signal to the power supply end of the integrated circuit to be tested.

[0012] Optionally, the current amplification unit comprises a switch component and a current feedback amplifier.

[0013] The first end of the switch component is connected with the test chip, the second end of the switch component is connected with the first end of the current feedback amplifier, and the control end of the switch component is connected with the control module; the second end of the current feedback amplifier is connected with the integrated circuit to be tested; the control module is used for controlling the switch component to be turned on or turned off, and the current feedback amplifier is used for receiving the first electric signal output by the test chip when the corresponding switch component is turned on, and outputting a sub-power amplification signal after power amplifying the first electric signal.

[0014] Optionally, the source measurement device further comprises a feedback checking module.

[0015] The feedback checking module is connected with the test chip and the control module, and the test chip is further connected with the output end of the integrated circuit to be tested; the test chip is used for detecting the voltage value of the output end of the integrated circuit to be tested and transmitting the voltage value to the feedback checking module, the feedback checking module is used for converting the voltage value of the output end of the integrated circuit to digital and feeding back to the control module, and the control module is used for detecting whether the integrated circuit to be tested works normally.

[0016] Optionally, the test chip comprises a first output end and a second output end; the first output end is connected with the power amplification module, and the first output end outputs a first electric signal to the power amplification module; the power amplification module is used for outputting a total power amplification signal to the power supply end of the integrated circuit to be tested after power amplifying the first electric signal; the second output end is connected with the integrated circuit to be tested, and is used for outputting a second electric signal to the power supply end of the integrated circuit to be tested.

[0017] Optionally, the source measurement device further comprises an external sampling resistor.

[0018] The external sampling resistor is connected between the power amplification module and the integrated circuit to be tested, and two ends of the external sampling resistor are further connected to the test chip.

[0019] The test chip is used for detecting the voltage value of the external sampling resistor and outputting the voltage value to the feedback checking module, and the feedback checking module is used for obtaining the current value flowing through the external sampling resistor according to the voltage value of the external sampling resistor and feeding back the current value to the control module after analog-to-digital conversion.

[0020] The feedback verification module is also used to obtain the current value output from the second output terminal of the test chip to the integrated circuit under test and feed it back to the control module after analog-to-digital conversion.

[0021] Optionally, the source measurement device may also include a relay module;

[0022] The relay module is connected between the power amplifier module and the integrated circuit under test. The relay module is also connected to the control module. The control module is used to control the relay module to turn on or off. When the relay module is on, it is used to transmit the total power amplification signal to the integrated circuit under test.

[0023] Optionally, the test chip includes the AD5522 chip; the control module includes an FPGA chip.

[0024] Secondly, this utility model provides a test device for integrated circuits, wherein the test device includes the source measurement device for integrated circuits provided in the first aspect above.

[0025] The technical solution of this embodiment of the invention includes a power amplification module to amplify the current signal output by the test chip, or to amplify the current generated by the voltage signal output by the test chip. A control module can control the amplification degree of both the current signal and the voltage signal, thereby increasing the current range output from the source measurement device to the integrated circuit under test. This technical solution of the invention satisfies the testing requirements of integrated circuits with high current demands, i.e., it meets the testing needs of high-power integrated circuits.

[0026] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of this utility model, nor is it intended to limit the scope of this utility model. Other features of this utility model will become readily apparent from the following description. Attached Figure Description

[0027] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0028] Figure 1 This is a schematic diagram of the structure of a source measurement device for an integrated circuit provided in an embodiment of the present invention;

[0029] Figure 2 This is a schematic diagram of the structure of another integrated circuit source measurement device provided in an embodiment of this utility model;

[0030] Figure 3 is a structural schematic view of another source measurement device of an integrated circuit provided by an embodiment of the present application;

[0031] Figure 4 is a structural schematic view of another source measurement device of an integrated circuit provided by an embodiment of the present application;

[0032] Figure 5 is a structural schematic view of another source measurement device of an integrated circuit provided by an embodiment of the present application. DETAILED DESCRIPTION

[0033] In order to make the person skilled in the art better understand the present application scheme, the technical scheme in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by the person skilled in the art without creative labor should belong to the scope of protection of the present application.

[0034] It should be noted that the terms "first", "second" and the like in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and do not necessarily have to be used to describe a specific order or sequence. It should be understood that the data thus used can be interchanged under appropriate circumstances, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusion, for example, a process, method, system, product or device including a series of steps or units does not have to be limited to those steps or units clearly listed, but can include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0035] Figure 1 is a structural schematic view of a source measurement device of an integrated circuit provided by an embodiment of the present application, as Figure 1 shown, the source measurement device comprises: a control module 1, a test chip 2, a power amplification module 3 and a power module 4. The power module 4 is connected with the control module 1, the test chip 2 and the power amplification module 3, and is used to power the control module 1, the test chip 2 and the power amplification module 3. The test chip 2 is connected between the control module 1 and the power amplification module 3, and the power amplification module 3 is connected with the integrated circuit 10 to be measured. The test chip 2 is used to output a first electric signal to the power amplification module 3 according to the driving signal sent by the control module 1, and the power amplification module 3 is used to output a total power amplification signal to the power supply end of the integrated circuit 10 to be measured after power amplification of the first electric signal.

[0036] Specifically, the power module 4 provides the required power input for the control module 1, the test chip 2 and the power amplification module 3, so that the control module 1, the test chip 2 and the power amplification module 3 can work normally. The control module 1 can include a Field Programmable Gate Array (FPGA) chip, which has the advantages of high speed, high efficiency and strong compatibility, and has very broad application prospects in the integrated circuit test field. The test chip 2 can include an AD5522 chip, and the test chip 2 can be switched between four-quadrant power supply modes under the control of the control module 1 to output constant currents or voltages of different gears. The control module 1 in combination with the test chip 2 can provide precise programmable multi-gear constant voltage or constant current four-quadrant power supply.

[0037] The control module 1 drives the test chip 2 to output a first electrical signal, which can be a current signal or a voltage signal. The power amplification module 3 receives the first electrical signal and can amplify the current signal or the current generated by the voltage signal, thereby realizing power amplification of the first electrical signal and outputting a total power amplification signal to the power supply end of the integrated circuit 10 under test, and realizing the test of the integrated circuit 10. The power amplification module 3 can also be connected to the control module 1, which can control the amplification degree of the current signal and the current generated by the voltage signal by the power amplification module 3, i.e. control the power amplification degree of the first electrical signal by the power amplification module 3.

[0038] The technical scheme of the utility model embodiment sets the power amplification module to amplify the current signal output by the test chip or the current generated by the voltage signal output by the test chip, and the control module can control the amplification degree of the current signal and the amplification degree of the current generated by the voltage signal by the power amplification module, so that the current range output by the source measurement device to the integrated circuit under test is larger. The technical scheme of the utility model embodiment meets the test scheme of integrated circuits with large current demand, i.e. meets the test demand of high-power integrated circuits.

[0039] Optionally, on the basis of each of the above embodiments, Figure 2 is another structure schematic view of the source measurement device of the integrated circuit provided by the utility model embodiment, like Figure 2As shown, the power amplification module 3 comprises a plurality of current amplification units 31. The plurality of current amplification units 31 are connected in parallel between the test chip 2 and the integrated circuit 10 to be tested, and are also connected with the control module 1. The control module 1 is used to control the current amplification units 31 to be turned on or turned off, and the current amplification units 31 are used to output a sub-power amplification signal after power amplifying the first electric signal output by the test chip 2 when turned on. The sub-power amplification signals output by the plurality of parallelly connected current amplification units 31 are combined to output a total power amplification signal to the power supply end of the integrated circuit 10 to be tested.

[0040] Specifically, the power amplification module 3 can comprise a plurality of parallelly connected current amplification units 31, Figure 2 Exemplarily, it is shown that the power amplification module 3 comprises four parallelly connected current amplification units 31. In some embodiments of the present application, the number of parallelly connected current amplification units 31 in the power amplification module 3 can be greater than four or less than four. The current amplification units 31 can amplify the current signal output by the test chip 2 or the current generated by the voltage signal output by the test chip 2, and finally output a sub-power amplification signal. The control module 1 can control any one of the current amplification units 31 to be turned on or turned off. When the control module 1 controls one of the current amplification units 31 to be turned off, the branch in which the current amplification unit 31 is located is in an open circuit state and does not participate in amplifying the current signal output by the test chip 2 or the current generated by the voltage signal output by the test chip 2, and the branch in which the current amplification unit 31 is located has no output.

[0041] For example, the current signal output by the test chip 2 can be ±80 mA, or the current generated by the voltage signal output by the test chip 2 can be ±80 mA, the control module 1 controls the three current amplification units 31 to be turned on, and the remaining current amplification units 31 are turned off. One current amplification unit 31 can amplify the ±80 mA current to ±1 A, and the three current amplification units 31 output ±1 A current, which can output ±3 A current to the power supply end of the integrated circuit 10 to be tested. The control module 1 can control different numbers of current amplification units to be turned on according to the needs of the integrated circuit 10 to be tested, so as to change the current range of the source measurement device output to the integrated circuit 10 to be tested. The technical scheme of the embodiment of the present application adopts a power supply cascade mode, that is, a mode of parallel connection of multiple current amplification units 31. When the control module 1 controls n current amplification units 31 to be turned on, the source measurement device can output a current n times the output current of one current amplification unit 31 to the integrated circuit 10 to be tested. The source measurement device provided by the embodiment of the present application is a source measurement unit based on an integrated operational amplifier, and a complementary output stage power amplification circuit is designed, which can be effectively applied to the test scheme of the integrated circuit with large current demand, so as to improve the work efficiency and save the code configuration.

[0042] Optionally, on the basis of each of the above embodiments, with reference to Figure 2 The power amplification module 3 includes four current amplification units 31. The four current amplification units 31 are connected in parallel between the test chip 2 and the integrated circuit 10 to be tested, and the four current amplification units 31 are also connected with the control module 1. The control module 1 is used to control the current amplification units 31 to be turned on or turned off. The current amplification unit 31 is used to output a sub-power amplification signal after power amplifying the first electric signal output by the test chip 2 when turned on. The sub-power amplification signals output by the four parallelly connected current amplification units 31 are combined to output a total power amplification signal to the power supply end of the integrated circuit 10 to be tested.

[0043] Specifically, the power amplification module 3 can include four current amplification units 31 connected in parallel, and the current signal output by the test chip 2 can be ±80mA, or the current generated by the voltage signal output by the test chip 2 can be ±80mA, and the control module 1 controls the four current amplification units 31 to be all turned on. One current amplification unit 31 can amplify the ±80mA current to ±1A, and the ±1A currents output by the four current amplification units 31 can be combined to output a ±4A current to the power supply end of the integrated circuit 10 to be tested. The control module 1 can control different numbers of current amplification units to be turned on according to the requirements of the integrated circuit 10 to be tested, so as to change the current range output by the source measurement device to the integrated circuit 10 to be tested. The technical scheme of the embodiment of the utility model can improve the current output range of the source measurement device to ±4A, and can be effectively applied to the test scheme of the integrated circuit with large current demand.

[0044] Optionally, on the basis of each of the above embodiments, Figure 3 is another structure diagram of a source measurement device for integrated circuits provided by the embodiment of the utility model, as Figure 3 shown, the current amplification unit 31 includes: a switching component 311 and a current feedback amplifier 312. The first end of the switching component 311 is connected with the test chip 2, the second end of the switching component 311 is connected with the first end of the current feedback amplifier 312, and the control end of the switching component 311 is connected with the control module 1. The second end of the current feedback amplifier 312 is connected with the integrated circuit 10 to be tested. The control module 1 is used for controlling the switching component 311 to be turned on or turned off, and the current feedback amplifier 312 is used for receiving the first electric signal output by the test chip 2 when the corresponding switching component 311 is turned on, and outputting a sub-power amplification signal after power amplifying the first electric signal.

[0045] Specifically, the current amplification unit 31 can include a switching component 311 and a current feedback amplifier 312, the switching component 311 can be connected with the power supply module 4, and the power supply module 4 can provide power supply for the switching component. The current feedback amplifier 312 can adopt an LT1210IR#PBF chip, and the LT1210IR#PBF chip is a current feedback amplifier with high output current and large signal performance.

[0046] The control module 1 can control the switch component 311 to be turned on or turned off according to the test parameter requirement of the integrated circuit 10 to be tested, when the control module 1 controls the switch component 311 to be turned off, the switch component 311 and the branch where the corresponding current feedback amplifier 312 is arranged are in a disconnected state, and the switch component 311 and the branch where the corresponding current feedback amplifier 312 is arranged have no output. When the control module 1 controls the switch component 311 to be turned on, the corresponding current feedback amplifier 312 amplifies the current signal output by the test chip 2 or amplifies the current generated by the voltage signal output by the test chip 2, so as to output a sub-power amplification signal. The existing source measurement device is constructed by using a plurality of operational amplifier integrated circuits, and a large amount of hardware resources are consumed, and the integration degree is low. The source measurement device provided in the embodiment of the utility model selects an LT1210IR#PBF chip as the current feedback amplifier 312, and adopts a current feedback amplifier 312 cascade mode, the output current range is wide and the integration degree is high, and the source measurement device is used in cooperation with the test chip 2, so that the design of the ADC acquisition circuit, the clamping circuit and the comparison circuit can be saved, and the hardware design resources can be significantly reduced.

[0047] Optionally, on the basis of each of the above embodiments, Figure 4 is a structural schematic diagram of another integrated circuit source measurement device provided by the embodiment of the utility model, as Figure 4 indicated, the source measurement device further comprises a feedback verification module 5. The feedback verification module 5 is connected with the test chip 2 and the control module 1, and the test chip 2 is further connected with the output end of the integrated circuit 10 to be tested. The test chip 2 is used for detecting the voltage value of the output end of the integrated circuit 10 to be tested and transmitting the voltage value to the feedback verification module 5, the feedback verification module 5 is used for feeding back the voltage value of the output end of the integrated circuit to the control module 1, and the control module 1 is used for detecting whether the integrated circuit 10 to be tested works normally according to the voltage value of the output end of the integrated circuit 10.

[0048] Specifically, the source measurement device can further comprise the feedback verification module 5, the test chip 2 can switch the four-quadrant power supply mode through the control of the control module 1, output constant currents or voltages of different gears, and the feedback verification module 5 measures the voltage or current excited by the integrated circuit 10 to be tested in the test process, so as to achieve the closed-loop measurement of the integrated circuit 10.

[0049] The source measurement device outputs the total power amplification signal to the power supply end of the integrated circuit 10 to be tested, and the output end of the integrated circuit 10 to be tested outputs a certain voltage value according to the total power amplification signal input from the power supply end. The test chip 2 acquires the voltage value of the output end of the integrated circuit 10 and outputs the voltage value to the feedback verification module 5. The feedback verification module 5 can convert the voltage value into a digital signal and transmit it to the control module 1. The control module 1 detects whether the integrated circuit 10 to be tested can normally work when the power supply end is normally powered according to the digital signal fed back by the feedback verification module 5, so as to judge the good or bad of the integrated circuit 10.

[0050] Optionally, on the basis of each of the above embodiments, with reference to Figure 4 , the test chip 2 includes a first output end A and a second output end B. The first output end A is connected with the power amplification module 3, and the first output end A outputs a first electric signal to the power amplification module 3. The power amplification module 3 is used for performing power amplification on the first electric signal and then outputting a total power amplification signal to the power supply end of the integrated circuit 10 to be tested. The second output end B is connected with the integrated circuit 10 to be tested and is used for outputting a second electric signal to the power supply end of the integrated circuit 10 to be tested.

[0051] Specifically, the test chip 2 can be equipped with four internal gears and one external expandable current gear. Any one of the four internal gears can be connected to the second output end B of the test chip 2, and the external expandable current gear is connected to the first output end A of the test chip 2. The first output end A and the second output end B of the test chip 2 can realize four-quadrant power supply. The test chip 2 is also equipped with a comparison circuit, a clamping circuit and an alarm circuit, etc. The second output end B can output a small current, and the four internal gears output different currents. The control module 1 can control any one of the four internal gears of the test chip 2 to be connected to the second output end B. For example, the four internal gears can realize the output of currents of ±5uA, ±20uA, ±200uA and ±2mA. The external expandable current gear connected to the first output end A can realize large current output. For example, the first output end A can realize the output of a current of ±80mA.

[0052] The second output end B of the test chip 2 can be directly connected to the integrated circuit 10 to be tested, and the first output end A is connected to the power amplification module 3. The power amplification module 3 is used to improve the output current range and uses the single-channel configuration of the test chip 2 in a cascade mode to drive multiple current amplifiers, thereby further improving the output current range. The control module 1 selects the internal gear or the external expandable current gear of the test chip 2 according to the test parameters and threshold values to be executed by the integrated circuit 10 to be tested, so as to realize the output of the first electric signal by the first output end A of the test chip 2 or the output of the second electric signal by the second output end B of the test chip 2.

[0053] Optionally, based on the above embodiments, Figure 5 This is a schematic diagram of the structure of another source measurement device for an integrated circuit provided in an embodiment of this utility model, as shown below. Figure 5 As shown, the source measurement device also includes an external sampling resistor R1. The external sampling resistor R1 is connected between the power amplifier module 3 and the integrated circuit 10 under test, and its two ends are also connected to the test chip 2. The test chip 2 is used to detect the voltage value of the external sampling resistor R1 and output it to the feedback verification module 5. The feedback verification module 5 is used to obtain the current value flowing through the external sampling resistor R1 based on its voltage value and feed it back to the control module 1 after analog-to-digital conversion. The feedback verification module 5 is also used to obtain the current value output from the second output terminal B of the test chip 2 to the integrated circuit 10 under test and feed it back to the control module 1 after analog-to-digital conversion.

[0054] Specifically, the control module 1 can select the second output terminal B of the test chip 2 to output a second electrical signal to the integrated circuit under test 10, based on the test parameters and thresholds to be executed by the integrated circuit under test 10. Alternatively, it can select the first output terminal A of the test chip 2 to output a first electrical signal, which is then amplified by the power amplification module 3 and output as a total power amplified signal to the integrated circuit under test 10. When the first output terminal A of the test chip 2 is selected to output a first electrical signal, which is then amplified by the power amplification module 3 and output as a total power amplified signal to the integrated circuit under test 10, the test chip 2 can acquire the voltage value across the external sampling resistor R1 and output it to the feedback verification module 5. The feedback verification module 5 calculates the current value flowing through the external sampling resistor R1 based on the voltage value across the external sampling resistor R1, or the test chip 2 can calculate the current value flowing through the external sampling resistor R1 based on the voltage value across the external sampling resistor R1 and output it to the feedback verification module 5. The current value flowing through the external sampling resistor R1 is the current value input to the integrated circuit 10 under test. The feedback verification module 5 converts this current value into a digital signal and outputs it to the control module 1. The control module 1 determines whether the current value input to the integrated circuit 10 under test meets the requirements.

[0055] When the second output end B of the selected test chip 2 outputs the second electric signal to the integrated circuit 10 to be tested, the test chip 2 can output the voltage value between the internal sampling resistor to the feedback checking module 5, the feedback checking module 5 calculates the current value flowing through the internal sampling resistor according to the voltage value between the internal sampling resistor, or the test chip 2 can calculate the current value flowing through the internal sampling resistor according to the voltage value between the internal sampling resistor and output to the feedback checking module 5. The current value flowing through the internal sampling resistor is the current value output to the integrated circuit 10 to be tested by the second output end B, and the feedback checking module 5 converts the current value into a digital signal and outputs to the control module 1, and the control module 1 judges whether the current value input to the integrated circuit 10 to be tested meets the requirements. The technical scheme of the embodiment of the utility model, by setting the feedback checking module 5, the voltage or current excited by the integrated circuit 10 to be tested in the test process can be measured, so as to judge the integrated circuit 10. The current input to the integrated circuit 10 to be tested can also be measured, realizing the self-checking and overvoltage and overcurrent protection functions of the source measurement device.

[0056] Optionally, on the basis of each of the above embodiments, with reference to Figure 5 , the source measurement device further comprises a relay module 6. The relay module 6 is connected between the power amplification module 3 and the integrated circuit 10 to be tested, and the relay module 6 is further connected with the control module 1. The control module 1 is used for controlling the relay module 6 to be turned on or turned off. The relay module 6 is used for transmitting the total power amplification signal to the integrated circuit 10 to be tested when turned on.

[0057] Specifically, the source measurement device can further set a relay module 6 between the integrated circuit 10 to be tested and the power amplification module 3. The relay module 6 can be connected with the power supply module 4, and the power supply module 4 can provide power supply for the relay module 6. The control module 1 can control the turn-on or turn-off of the relay module 6. The second output end B of the test chip 2 is connected with the relay module 6, and the relay module 6 is further used for transmitting the second electric signal to the integrated circuit 10 to be tested when turned on.

[0058] Optionally, on the basis of each of the above embodiments, with reference to Figure 5 , the test chip 2 comprises an AD5522 chip, and the control module 1 comprises an FPGA chip.

[0059] Specifically, the power module 4 supplies energy to each module, the FPGA chip writes data to each register of the AD5522 chip according to the test parameters and threshold values to be executed by the integrated circuit 10 under test, drives each digital-to-analog conversion module (DAC) in the AD5522 chip to execute output, clamping and comparison functions, selects one of the flow adding / measuring (FIMI), flow adding / measuring (FIMV), voltage adding / measuring (FVMI) and voltage adding / measuring (FVMV) states, selects the internal gear of the AD5522 chip or the external expandable flow gear, configures the corresponding sampling resistor, configures the cascade mode working state, and makes the AD5522 chip start working. The FPGA chip configures the working state of the relay module 6 to realize the output of the power supply signal required by the integrated circuit 10 under test. The FPGA chip communicates with the feedback verification module 5 to obtain the voltage value of the output end of the integrated circuit 10 under test and the external sampling resistor R1 and the internal sampling resistor, and outputs the test item data after being interpreted by the internal program.

[0060] The source measurement device of the integrated circuit 10 provided by the technical scheme of the embodiment of the utility model has a series of advantages such as high integration, strong compatibility, strong operability and high speed and high efficiency, can be used as a direct solution of multi-gear equipment power supply in the test field of the integrated circuit 10, significantly improves the test efficiency of the direct current source integrated circuit, and has certain value for the development of the test industry of the integrated circuit 10 towards integration and high speed.

[0061] The embodiment of the utility model provides a kind of integrated circuit test equipment, wherein, test equipment includes any integrated circuit source measurement device provided by any embodiment of the utility model described above, has the beneficial effects of any integrated circuit source measurement device provided by any embodiment of the utility model described above.

[0062] It should be understood that the various forms of flow shown above can be used to reorder, add or delete steps. For example, the steps described in the utility model can be executed in parallel, sequentially or in different order, as long as the desired results of the technical scheme of the utility model can be achieved, which is not limited herein.

[0063] The above specific embodiments do not constitute a limitation on the scope of protection of the utility model. Those skilled in the art should understand that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modification, equivalent substitution and improvement made within the spirit and principles of the utility model should be included in the scope of protection of the utility model.

Claims

1. A source measurement unit of an integrated circuit, characterized by, The utility model relates to a test device for integrated circuit, which comprises a control module, a test chip, a power amplifier module and a power module. The power module is connected with the control module, the test chip and the power amplifier module, and is used to supply power for the control module, the test chip and the power amplifier module. The test chip is connected between the control module and the power amplifier module, and the power amplifier module is connected with the integrated circuit to be tested. The test chip is used to output a first electric signal to the power amplifier module according to a driving signal sent by the control module.

2. The integrated-circuit source measurement unit of claim 1, wherein The power amplifier module is used to output a total power amplification signal to a power supply end of the integrated circuit to be tested after power amplification of the first electric signal. The power amplifier module comprises a plurality of current amplification units. The plurality of current amplification units are connected in parallel between the test chip and the integrated circuit to be tested, and are also connected with the control module.

3. The integrated-circuit source measurement unit of claim 2, wherein The control module is used to control the current amplification units to be turned on or turned off. The current amplification unit is used to output a sub-power amplification signal after power amplification of the first electric signal output by the test chip when turned on.

4. The integrated-circuit source measurement set of claim 2 or 3, wherein, The four current amplification units are connected in parallel between the test chip and the integrated circuit to be tested, and are also connected with the control module. The control module is used to control the current amplification units to be turned on or turned off.

5. The integrated-circuit source measurement unit of claim 1, wherein The current amplification unit is used to output a sub-power amplification signal after power amplification of the first electric signal output by the test chip when turned on. The current amplification unit comprises a switching component and a current feedback amplifier. The first end of the switching component is connected with the test chip, the second end of the switching component is connected with the first end of the current feedback amplifier, and the control end of the switching component is connected with the control module. The second end of the current feedback amplifier is connected with the integrated circuit to be tested. The control module is used to control the switching component to be turned on or turned off. The current feedback amplifier is used to receive the first electric signal output by the test chip when the corresponding switching component is turned on, and output the sub-power amplification signal after power amplification of the first electric signal. The utility model further comprises a feedback verification module. The feedback verification module is connected with the test chip and the control module, and the test chip is also connected with an output end of the integrated circuit to be tested. The test chip is used to detect a voltage value of the output end of the integrated circuit to be tested and transmit the voltage value to the feedback verification module. The feedback verification module is used to perform analog-to-digital conversion on the voltage value of the output end of the integrated circuit and feed back the voltage value to the control module. The control module is used to detect whether the integrated circuit to be tested works normally.

6. The integrated-circuit source measurement unit of claim 5, wherein The test chip comprises a first output end and a second output end; the first output end is connected with the power amplification module, and the first output end outputs the first electric signal to the power amplification module; the power amplification module is used for performing power amplification on the first electric signal and then outputs the total power amplification signal to the power supply end of the integrated circuit to be tested; the second output end is connected with the integrated circuit to be tested, and is used for outputting a second electric signal to the power supply end of the integrated circuit to be tested.

7. The integrated-circuit source measurement unit of claim 6, wherein Further comprising: an external sampling resistor; the external sampling resistor is connected between the power amplification module and the integrated circuit to be tested, and two ends of the external sampling resistor are also connected to the test chip; the test chip is used for detecting a voltage value of the external sampling resistor and outputting the voltage value to the feedback verification module; the feedback verification module is used for obtaining a current value flowing through the external sampling resistor according to the voltage value of the external sampling resistor, and then feeding back the current value to the control module after analog-digital conversion; the feedback verification module is also used for obtaining a current value outputted by the second output end of the test chip to the integrated circuit to be tested, and then feeding back the current value to the control module after analog-digital conversion.

8. The integrated-circuit source measurement unit of claim 1, wherein Further comprising a relay module; the relay module is connected between the power amplification module and the integrated circuit to be tested, and the relay module is also connected with the control module; the control module is used for controlling the relay module to be turned on or turned off; the relay module is used for transmitting the total power amplification signal to the integrated circuit to be tested when the relay module is turned on.

9. The integrated-circuit source measurement unit of claim 1, wherein The test chip comprises an AD5522 chip; and the control module comprises an FPGA chip.

10. A test apparatus for an integrated circuit, characterized by A source measurement device comprising the integrated circuit according to any one of claims 1-9.

Images