Pressure tank glue spraying system based on electronic meter interlocking

Abstract

The utility model relates to a pressure tank glue spraying system based on electronic meter interlocking. The pressure tank glue spraying system comprises a pressure tank and a photoresist bottle, the pressure tank is provided with a gas pipe which is connected with a nitrogen switching valve; an electronic pressure gauge is arranged in the pressure tank; the photoresist bottle is communicated with a photoresist tube, the photoresist tube is provided with a glue empty alarm sensor and an on-off resorption valve, and the outlet end of the photoresist tube is provided with a photoresist nozzle. The device has the advantages that the electronic pressure gauge monitors the air pressure in the tank in real time, and the glue empty alarm sensor monitors the flowing condition of photoresist in the photoresist tube in real time, so that the monitoring capability of a glue spraying system is improved, and the problems that a machine table does not spray glue and a wafer does not finish the glue uniformizing action due to the fact that abnormal phenomena are not handled in time are avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor packaging, especially a pressure tank glue spraying system based on electronic watch interlocking. BACKGROUND

[0002] With the progress of packaging technology, the glue spraying technology is also constantly optimized. For example, in order to improve the density and performance of packaging, the glue spraying technology may need to achieve more fine glue control to meet the requirements of high-density pins and small spacing. The prior art is to place a photoresist bottle in a gas tank and continuously input nitrogen gas in the gas tank, so that the photoresist is sprayed out from the pipeline under a certain pressure, thereby achieving the purpose of spraying glue on the wafer.

[0003] During the glue spraying process, due to various factors, the gas pressure in the gas tank may be insufficient, leading to abnormal spraying. The conventional monitoring method is to set a glue empty alarm sensor in the pipeline, which will issue an alarm when there is no fluid flowing in the pipeline. However, when the gas pressure in the gas tank is insufficient to push the photoresist glue to flow, a portion of the photoresist glue may still remain in the pipeline. At this time, the glue empty alarm sensor senses the remaining photoresist glue in the pipeline and does not report abnormal information. However, in fact, due to the abnormal pressure supply of the gas tank, the photoresist glue cannot be sprayed out, leading to the problem that the abnormal phenomenon cannot be handled in time and no glue spraying action is performed in actual operation, causing the wafer to not complete the glue uniformization operation.

[0004] Therefore, in order to strengthen the monitoring capability of the glue spraying operation, the pressure tank glue spraying system needs to be further improved. UTILITY MODEL CONTENTS

[0005] The utility model aims to provide a pressure tank glue spraying system based on electronic watch interlocking, which can improve the response capability to the interruption abnormal phenomenon in glue spraying and the monitoring capability of the glue spraying system.

[0006] To achieve the above utility model purposes, the utility model provides a pressure tank glue spraying system based on electronic watch interlocking, which comprises a pressure tank and a photoresist bottle.

[0007] The pressure tank is provided with an air pipe, and the air pipe is connected with a nitrogen gas on-off valve.

[0008] An electronic pressure gauge is arranged in the pressure tank.

[0009] The photoresist bottle is located in the pressure tank, and the photoresist bottle is connected with a photoresist pipe, which is provided with a glue empty alarm sensor and an on-off back suction valve. An outlet end of the photoresist pipe is provided with a photoresist spraying head.

[0010] Preferably, the photoresist spraying head is a horn-shaped spraying head.

[0011] As a further improvement of the utility model, the connecting part of the light blocking bottle and the light blocking pipe, and the connecting part of the pressure tank and the light blocking pipe are provided with air leakage prevention joints.

[0012] The utility model discloses a pressure tank glue spraying system based on electronic gauge interlocking, nitrogen is inputted from the gas pipe into the pressure tank, and the nitrogen switch valve can adjust the nitrogen amount of the pressure tank, so as to change the pressure level in the tank; the light blocking bottle in the tank is extruded by external air pressure, and the light blocking glue in the bottle is sprayed from the light blocking spray head after passing through the glue empty alarm sensor and the on-off back suction valve respectively. The electronic pressure gauge is used for monitoring the air pressure in the pressure tank in real time, the glue empty alarm sensor is used for monitoring the light blocking glue flow condition in the light blocking pipe in real time, when the light blocking glue in the pipe is monitored to be missing, immediately signal transmission is given to the terminal, and the terminal will continuously monitor the parameter change trend according to the information reported by the electronic pressure gauge and the glue empty alarm sensor, so as to facilitate the operator to analyze the fault reason, facilitate overhauling, guarantee the stable operation of the glue spraying system, and avoid the phenomenon of missing spraying.

[0013] Compared with the prior art, the utility model discloses a pressure tank glue spraying system based on electronic gauge interlocking has the advantages of

[0014] The electronic pressure gauge monitors the air pressure in the tank in real time, and the glue empty alarm sensor monitors the light blocking glue flow condition in the light blocking pipe in real time, so as to improve the monitoring capacity of the glue spraying system, avoid the problem that the machine table is not sprayed with glue due to not timely handling abnormal phenomenon, and cause the wafer to not complete the uniform glue operation. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is a structure schematic view of the utility model discloses a pressure tank glue spraying system based on electronic gauge interlocking. CONCRETE EMBODIMENT

[0016] The specific embodiment of the utility model is further explained in detail in combination with the drawings.

[0017] As Figure 1 The utility model discloses a pressure tank glue spraying system based on electronic gauge interlocking, including pressure tank 1 and light blocking bottle 3;

[0018] Pressure tank 1 is equipped with gas pipe 2, and gas pipe 2 is connected with nitrogen switch valve 21;

[0019] Pressure tank 1 is equipped with electronic pressure gauge 4;

[0020] The electronic pressure gauge 4 is used for measuring the actual pressure value in the pressure tank 1, compared with a conventional mechanical pressure gauge, the electronic pressure gauge 4 has faster response speed, realizes real-time monitoring of the gas pressure in the tank, and timely records and transmits data to the computer terminal. If the value of the electronic pressure gauge 4 read by the terminal is less than the preset value, the machine will send an alarm feedback and stop working, so that the operator can handle it in time, and the problem that the photoresist glue is retained in the photoresist pipe 6 and cannot be sprayed due to insufficient pressure in the tank is avoided.

[0021] The photoresist bottle 3 is located in the pressure tank 1, the photoresist bottle 3 is communicated with the photoresist pipe 6, the photoresist pipe 6 is provided with a glue empty alarm sensor 7 and an on-off back suction valve 8, and the outlet end of the photoresist pipe 6 is provided with a photoresist spraying head 9.

[0022] The on-off back suction valve 8 can be opened or closed as needed to control the flow direction of the photoresist glue, and when the pressure in the pressure tank 1 is insufficient or the pressure supply is interrupted, the photoresist glue is prevented from flowing back.

[0023] The photoresist spraying head 9 is a horn-shaped spraying head, which facilitates more uniform spraying of the photoresist glue.

[0024] The connection between the photoresist bottle 3 and the photoresist pipe 6, and the connection between the pressure tank 1 and the photoresist pipe 6 are all provided with an air leakage prevention joint 5, so as to prevent nitrogen gas from leaking out of the connection, causing insufficient pressure in the pressure tank 1, and affecting the transmission of the photoresist glue in the photoresist bottle 3.

[0025] The photoresist bottle 3 is located in the pressure tank 1, the photoresist bottle 3 is communicated with the photoresist pipe 6, the photoresist pipe 6 is provided with a glue empty alarm sensor 7 and an on-off back suction valve 8, and the outlet end of the photoresist pipe 6 is provided with a photoresist spraying head 9. The electronic pressure gauge 4 is used for real-time monitoring of the gas pressure in the pressure tank 1, the glue empty alarm sensor 7 is used for real-time monitoring of the photoresist glue flow condition in the photoresist pipe 6, when the condition of lack of photoresist glue in the pipe is monitored, the signal is immediately transmitted to the terminal, the terminal will continuously monitor the change trend of each parameter according to the information reported by the electronic pressure gauge 4 and the glue empty alarm sensor 7, which is convenient for the operator to analyze the fault reason, facilitates maintenance, ensures stable operation of the photoresist spraying system, and avoids the phenomenon of incomplete spraying.

[0026] The preferred embodiments of the utility model have been specifically described above, but the utility model is not limited to the described embodiments, and those skilled in the art can make various equivalent modifications or replacements without departing from the spirit of the utility model, and these equivalent modifications or replacements are all included in the range defined by the claims of the present application.

Claims

1. An electronic table interlock based pressure pot glue spraying system, characterized in that, The pressure tank and the photoresist bottle are included; The pressure tank is provided with an air pipe, and a nitrogen switch valve is connected to the air pipe; An electronic pressure gauge is arranged in the pressure tank; The photoresist bottle is located in the pressure tank, and a photoresist pipe is communicated with the photoresist bottle, the photoresist pipe is provided with a glue empty alarm sensor and an on-off back suction valve, and a photoresist nozzle is arranged at an outlet end of the photoresist pipe.

2. A pressure pot glue spraying system based on electronic table interlocking as claimed in claim 1, wherein, The photoresist nozzle is a horn-shaped nozzle.

3. An electronic spreadsheet interlocked pressure pot glue application system as claimed in claim 1, wherein, Air leakage prevention joints are arranged at the connection between the photoresist bottle and the photoresist pipe and the connection between the pressure tank and the photoresist pipe.

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