Solution spin-coating device

Abstract

The utility model relates to the field of spin-coating devices, in particular to a solution spin-coating device which comprises a rotating assembly and a supporting assembly, the rotating assembly comprises a supporting table, a glass slide carrying table placed in the center of the supporting table and a covering part covering the periphery of the supporting table, and the glass slide carrying table is used for carrying a glass slide; the supporting assembly comprises at least one main supporting plate and at least one supporting piece, the supporting piece is arranged on the inner side of the main supporting plate, the main supporting plate is arranged below the supporting table, the supporting piece is used for connecting and fixing the main supporting plate, and the slide carrying table is driven by a motor to rotate so as to throw away the redundant solution. The paint spraying device has the advantages that the occupied area can be effectively reduced, and paint is not scattered.

Description

TECHNICAL FIELD

[0001] The utility model relates to a spin coating device field especially relates to a solution spin coating device.

BACKGROUND

[0002] Spin coating is a kind of coating method that liquid functional material with certain viscosity is uniformly coated on solid surface through centrifugal force, and the required uniformity and consistency of coating are realized by adjusting the centrifugal rotation speed and reaction time.

[0003] But in the prior art, the spin coating device mainly relies on vacuum adsorption to fix the glass slide, so it needs external vacuum pump, and the cost is higher and the area occupied is larger.

[0004] Therefore, the present application provides a solution spin coating device, which can effectively reduce the floor area and realize the coating without spilling.

UTILITY MODEL CONTENTS

[0005] The utility model provides a solution spin coating device, which can effectively reduce the floor area and realize the coating without spilling.

[0006] To solve the above technical problems, the utility model adopts the following technical scheme:

[0007] A solution spin coating device includes a rotating assembly and a support assembly, the rotating assembly includes a support table, a glass slide stage placed in the center of the support table and a cover piece covering the periphery of the support table, the glass slide stage is used to carry the glass slide, the support assembly includes at least one main support plate and at least one support piece, the support piece is arranged on the inner side of the main support plate, the main support plate is arranged below the support table, the support piece is used to connect and fix the main support plate, and the glass slide stage is driven to rotate by a motor to shake off the excess solution.

[0008] Preferably, the glass slide stage is arrayed with a clamping piece on the side, the clamping piece is trapezoidal, and the clamping piece is used to clamp and fix the glass slide.

[0009] Preferably, the support table and the cover piece are circular, and the cover piece is fixedly connected with the support table.

[0010] Preferably, the main support plate is square.

[0011] Preferably, the support piece is "mouth" shaped, and the support piece is provided with a notch.

[0012] Preferably, the main support plate is four.

[0013] Preferably, the support piece is four.

[0014] Preferably, the clamping piece is four.

[0015] As a preference, the motor is a servo motor.

[0016] As a preference, the servo motor is connected and fixed with the slide carrier through the support table.

[0017] The beneficial effects of the utility model are as follows:

[0018] 1. The rotating assembly comprises a support table, a slide carrier placed in the center of the support table, and a cover placed around the support table, the slide carrier is used for carrying a slide, the support assembly comprises at least one main support plate and at least one support piece, the support piece is arranged on the inner side of the main support plate, the main support plate is arranged below the support table, the support piece is used for connecting and fixing the main support plate, the slide carrier is driven to rotate by a motor to shake off the excess solution, the motor is a servo motor, the motor rotates at a fixed speed and drives the slide on the slide carrier to rotate uniformly, so that the purpose of spin coating is achieved. The slide is fixed by four protruding buckle pieces on the slide carrier, so as to avoid sliding of the slide during spin coating, realize fixation of the slide, and improve the stability of the slide.

[0019] 2. The slide carrier is provided with buckle pieces around the side, the buckle pieces are trapezoidal, and the buckle pieces are used for clamping and fixing the slide, in the embodiment, the buckle pieces are four. When the slide is placed on the slide carrier, the buckle pieces around the side fix the slide, and the slide carrier is driven to rotate by the motor, so that spin coating is completed. The excess solution is blocked by the support table, so as to avoid splashing to other places. When spin coating is completed, the motor stops working, and the slide can be taken out at this time.

[0020] 3. The support piece is in the shape of a mouth, and the support piece is provided with a notch, the notch can effectively slow down the shaking caused by rotation and reduce mechanical damage caused by shaking to the device.

[0021] These features and advantages of the utility model will be disclosed in detail in the following specific embodiments and drawings.

DRAWINGS

[0022] The utility model will be further described in combination with the drawings as follows:

[0023] Fig. 1 It is whole schematic view of spin coating device of the utility model;

[0024] Fig. 2 It is motor schematic view;

[0025] Fig. 3 It is buckle piece schematic view.

CONCRETE EMBODIMENT

[0026] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0027] The concepts involved in this application will first be explained with reference to the accompanying drawings. It should be noted that the following explanation of each concept is only to make the content of this application easier to understand and does not imply any limitation on the scope of protection of this application.

[0028] Example 1:

[0029] A solution spin coating apparatus, such as Figs. 1 to 3 As shown, the system includes a rotating assembly 1 and a supporting assembly 2. The rotating assembly 1 includes a support platform 102, a slide stage 101 placed at the center of the support platform 102, and a covering 103 covering the periphery of the support platform 102. The slide stage 101 is used to support the slides. The supporting assembly 2 includes at least one main support plate 104 and at least one support member 105. The support member 105 is located inside the main support plate 104, which is located below the support platform 102. The support member 105 is used to connect and fix the main support plate 104. The slide stage 101 is driven to rotate by a motor 106 to remove excess solution. The motor 106 is a servo motor. The motor 106 rotates at a fixed rate, causing the slides on the slide stage 101 to rotate uniformly, thereby achieving the purpose of spin coating. The slides are fixed by four protruding fasteners 107 on the slide stage 101 to prevent the slides from sliding during spin coating, thus fixing the slides and improving their placement stability.

[0030] The support platform 102 is connected to the support member 105, and the output shaft of the motor 106 is connected and fixed to the glass slide stage 101 through the support platform 102.

[0031] The slide stage 101 has four trapezoidal locking members 107 arranged around its periphery. These members grip and secure the slide. In this embodiment, four locking members 107 are used. When the slide is placed on the slide stage 101, the locking members 107 secure it, and the motor 106 rotates the slide stage 101 to complete the spin coating. Excess solution is blocked by the support stage 102 to prevent splashing. When the spin coating is complete, the motor 106 stops, and the slide can be removed.

[0032] Both the support platform 102 and the cover 103 are circular, which will not cause cutting damage to the operator and improve the safety of use. The cover 103 is fixedly connected to the support platform 102.

[0033] The main support plate 104 is square.

[0034] The support 105 is in the shape of a "mouth", and the support 105 is provided with a notch 108, which can effectively slow down the shaking caused by rotation and reduce the mechanical damage caused by the shaking to the device.

[0035] The main support plate 104 is four, and the support 105 is four. The main support plate 104 and the support 105 form a fixed frame of the motor 106, the motor 106 is fixed on the support 105, the output shaft of the motor 106 is connected and fixed with the slide glass stage 101, and the placing stability of the motor 106 is improved.

[0036] The above is only a specific embodiment of the present application, but the protection scope of the present application is not limited to this. Those skilled in the art should understand that the present application includes but is not limited to the contents described in the drawings and the above specific embodiment. Any modification that does not deviate from the function and structural principle of the present application will be included in the scope of the claims.

Claims

1. A solution spin coating apparatus characterized by comprising: The application relates to a rotating and supporting device, which comprises a rotating component and a supporting component, the rotating component comprises a supporting table, a slide table placed in the center of the supporting table and used for carrying slides, and a cover placed on the periphery of the supporting table, and the supporting component comprises at least one main supporting plate, at least one supporting piece arranged on the inner side of the main supporting plate, and the main supporting plate is arranged below the supporting table, the supporting piece is used for connecting and fixing the main supporting plate, the slide table is driven to rotate by a motor to shake off excess solution, and the slide table is provided with a plurality of buckle pieces arranged in an array on the periphery of the slide table, the buckle pieces are trapezoidal, and the buckle pieces are used for clamping and fixing the slides.

2. A solution spin coating apparatus as claimed in claim 1, wherein The supporting table and the cover are circular, and the cover is fixedly connected with the supporting table.

3. The solution spin coating apparatus of claim 1, wherein The main supporting plate is square.

4. The spin coater of claim 1, wherein The supporting piece is "mouth-shaped", and the supporting piece is provided with a notch.

5. A spin coater as claimed in claim 3, wherein the means for rotating the substrate comprises a motor and a chuck. The main supporting plate is four.

6. A spin coater as claimed in claim 4, wherein the means for rotating the substrate comprises a motor and a chuck. The supporting piece is four.

7. The spin-on solution coating apparatus of claim 1, wherein The buckle piece is four.

8. The spin-on solution coating apparatus of claim 1, wherein, The motor is a servo motor.

9. A spin coater apparatus as claimed in claim 8, wherein the spin coater apparatus is configured to spin the substrate at a speed of 1000 rpm or more. The servo motor is connected with and fixed to the slide table through the supporting table.

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