Sand blasting device for tantalum target material

Abstract

The utility model relates to the technical field of sputtering target material production equipment, in particular to a sand blasting device for a tantalum target material. According to the technical scheme, a machine body is erected on a base, a sand blasting module and a spray gun are installed in the machine body, a draught fan is installed on the base, one end of the draught fan is connected with the top end of the machine body through an air guide pipe, the end, away from the air guide pipe, of the draught fan is connected with an air inlet, and a first filter is connected between the draught fan and the air inlet; a second filter is connected between the draught fan and the air guide pipe, a net frame is arranged at the bottom end of the machine body, a fixing module is placed on the net frame and located on one side of the sand blasting module, and a rotating base is erected on the side, located on the sand blasting module, in the machine body. Sand grains are effectively prevented from permeating into a gap between the target material and the fixing frame from the side face through the rubber sleeve, the sand grains are prevented from being accumulated on the side face of the target material through the spiral scraping plate, and therefore the risk that the sand grains are sputtered to the target material from the side face is further reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to sputtering target material production equipment technical field, concretely relates to a sand blasting device for tantalum target material. BACKGROUND

[0002] Tantalum target material is a typical metal target material, and is widely used in PVD based on the corrosion resistance and electromagnetic shielding performance of tantalum target material. For example, tantalum can be used on the surface of other metals as a decorative and protective coating, which can be produced by vacuum sputtering of tantalum target material. In the prior art, when the circular tantalum target material is subjected to sand blasting treatment, the sputtering area in the middle of the circular tantalum target material needs to be protected by using adhesive tape first to prevent the target material from being scrapped during the sand blasting process. This method requires manual application of adhesive tape larger than the sputtering area on the target material first, and then the excess part is trimmed by using a cutter head to determine the sand blasting range. The adhesive tape protection method is too cumbersome, the amount used is large, and it is a disposable item with high cost. In addition, the adhesive tape will be subjected to severe impact during the sand blasting process, and when it is removed later, it will leave adhesive marks on the surface of the target material, which are difficult to remove. Moreover, when the cutter is used for trimming, it is easy to leave scratches.

[0003] After searching, patent publication No. CN202222125359.4 discloses a tantalum target material sand blasting device. Although the device can support the target material to be sand blasted by using the lower baffle and protect the sputtering area by using the upper baffle, the upper and lower baffles can be easily removed, and when different sizes of target materials are replaced, the corresponding models of the upper and lower baffles can be replaced. The upper and lower baffles of the utility model can be reused, the cost is greatly reduced, and when operating, only the locking block needs to be rotated to conveniently take out and replace the target material, which is simple and convenient to operate. However, the device can only block the upper and lower end faces of the target material, and cannot block the side face of the target material. During the sand blasting process, if the sand particles are splashed onto the target material from the side face, the surface of the target material may be subjected to uneven sand blasting treatment, affecting the quality and uniformity of the target material. UTILITY MODEL CONTENTS

[0004] In view of the deficiencies of the prior art, the utility model provides a sand blasting device for tantalum target material, which solves the problems raised in the background art.

[0005] The solution of the utility model to the above technical problem is as follows:

[0006] The sand blasting device for tantalum target material comprises a base, a machine body is arranged on the base, a sand blasting module and a sand blasting gun are installed in the machine body;

[0007] The base is provided with a fan, one end of the fan is connected with the top end of the machine body through a wind guide pipe, the end of the fan away from the wind guide pipe is connected with an air inlet, a first filter is connected between the fan and the air inlet, a second filter is connected between the fan and the wind guide pipe, the bottom end of the machine body is provided with a net rack, the net rack is placed with a fixed module, the fixed module is located on one side of the sand blasting module, a rotating seat is arranged on one side of the sand blasting module in the machine body.

[0008] Based on the above technical scheme, the utility model further can make improvement as follows.

[0009] Further, the machine body is provided with a transparent window, the machine body is provided with an operation port below the transparent window, and a control console is arranged at the connection between the base and the machine body.

[0010] The beneficial effects of the above further scheme are:

[0011] The design of the transparent window enables the operator to clearly observe the working conditions inside the machine body, including the flow state of the sand blasting module, the nozzle, the target material and the sand. This helps the operator to monitor the sand blasting process in real time and ensure smooth operation. The operation port is located below the transparent window, which facilitates the operator to reach into the machine body for operation, such as replacing the target material, adjusting the angle of the nozzle or cleaning the sand inside the machine body.

[0012] Further, the sand blasting module is provided with a bracket, the bracket is rotatably provided with an upper fixed shaft and a lower fixed shaft, the upper fixed shaft and the lower fixed shaft are provided with nozzles, one end of the upper fixed shaft and the lower fixed shaft is connected through a first connecting rod, and the upper fixed shaft is connected with an eccentric turntable through a second connecting rod, and the eccentric turntable is located at the output end of a third motor.

[0013] The beneficial effects of the above further scheme are:

[0014] The third motor drives the eccentric turntable to rotate, and then drives the upper fixed shaft to deflect through the second connecting rod. When the upper fixed shaft deflects, the lower fixed shaft is driven to deflect synchronously through the first connecting rod. This design allows the nozzle to make accurate angle adjustment according to the specific shape of the target material and the sand blasting requirements, ensuring the consistency and uniformity of the sand blasting effect. Flexible adjustment of the angle of the nozzle can optimize the sand blasting path, reduce waste and repetitive labor in the sand blasting process. This helps to improve the efficiency of sand blasting and shorten the operation time.

[0015] Further, the eccentric turntable rotates to pull the upper fixed shaft to deflect through the second connecting rod, and the upper fixed shaft pulls the lower fixed shaft to deflect through the first connecting rod at the same time.

[0016] The beneficial effects of the above further scheme are:

[0017] The eccentric turntable, the second connecting rod, the upper fixed shaft, the first connecting rod, and the lower fixed shaft form a precise transmission system. When the eccentric turntable rotates, the upper fixed shaft is directly pulled to deflect by the second connecting rod, and the upper fixed shaft in turn drives the lower fixed shaft to deflect synchronously by the first connecting rod. This linkage ensures that the adjustment of the nozzle angle can be accurately and synchronously performed. Due to the design of the eccentric turntable, the deflection angles of the upper fixed shaft and the lower fixed shaft can be adjusted within a larger range. This helps to adapt to different shapes and sizes of target materials, ensuring that the sandblasting operation can fully cover the surface of the target material.

[0018] Further, the rotating seat is provided with a rotating disc, the fixed shaft is rotatably installed on the rotating disc, the fixed shaft is arranged in an annular array on the rotating disc, the bottom end of the fixed shaft is provided with a driven wheel, the driven wheel is in transmission connection with the first motor through a belt, and the rotating disc is located at the output end of the second motor.

[0019] The beneficial effects of the above further scheme are:

[0020] The driven wheel is in transmission connection with the first motor through a belt, so that stable transmission of power is realized. The belt transmission has the advantages of simple structure, low manufacturing cost, convenient installation and maintenance, etc., and can also moderate the impact and reduce the vibration, so that the transmission is more stable. The fixed shaft is arranged in an annular array on the rotating disc, and this design enables the nozzle (assuming it is installed on the fixed shaft) to perform sandblasting treatment on the target material from multiple angles. By adjusting the position or angle of the rotating disc, the direction and range of sandblasting can be easily changed. The second motor drives the rotating disc to rotate, realizing rotation; at the same time, the first motor drives the driven wheel and the fixed shaft to rotate through belt transmission. This combination of rotation and revolution enables the target material to be subjected to more uniform and comprehensive sandblasting treatment.

[0021] Further, the first motor and the second motor are located at the top end of the machine body, the second motor drives the rotating disc to rotate, and the first motor drives the driven wheel to rotate through a belt, thereby driving the fixed shaft to rotate.

[0022] The beneficial effects of the above further scheme are:

[0023] The second motor directly drives the rotating disc to rotate, the transmission path is simple and clear, and the energy loss and fault points of the intermediate links are reduced. The first motor drives the driven wheel and the fixed shaft to rotate through a belt, realizing long-distance transmission of power and angle adjustment, and increasing the flexibility of the equipment. Through the rotation of the rotating disc and the rotation of the fixed shaft, multi-angle and multi-direction sandblasting treatment can be realized. This design is suitable for target materials of different shapes and sizes, improving the adaptability and flexibility of the equipment.

[0024] Further, the fixed mold group is provided with a fixing frame, the inside of the fixing frame is provided with a rubber sleeve, the target material is inserted into the fixing frame through the rubber sleeve, one end of the fixing frame is provided with a spiral scraper, and the bottom end of the fixing frame is provided with a clamping block.

[0025] The beneficial effects of the further scheme are:

[0026] The rubber sleeve is arranged in the fixing frame to provide a tight insertion space for the target material, so that the stability and anti-falling of the target material in the fixing frame are ensured. The rubber sleeve has elasticity and plasticity, and can adapt to target materials of different shapes and sizes. The rubber material has good elasticity and friction, which can further increase the fastening force between the target material and the fixing frame, and prevent the target material from moving or shaking during processing. The spiral scraper is ingeniously arranged at one end of the fixing frame, and the spiral scraper is also made of rubber material. The principle is to continuously push and scrape the material (such as the residues on the surface of the target material) through rotation. This design helps to clean the impurities and residues on the surface of the target material in time during processing, ensuring the stability and consistency of the processing quality.

[0027] The utility model provides a sand blasting device for tantalum target material. Has the following beneficial effects:

[0028] Through the transmission mechanism of the eccentric turntable, the first connecting rod and the second connecting rod, the angle of the spray head on the upper fixed shaft and the lower fixed shaft can be flexibly adjusted. This design ensures that the sand blasting operation can be accurately adjusted according to the specific shape of the target material and the sand blasting requirements, thereby improving the sand blasting efficiency and effect.

[0029] The fan, the first filter and the second filter connected thereto in the device effectively ensure the airflow circulation and cleaning inside the machine body. The fan blows air downward from the top of the machine body, driving the sand to fall to the bottom end of the machine body, reducing the residue and accumulation of sand inside the machine body. At the same time, the filter can block the sand and dust from entering the fan, prolonging the service life of the equipment.

[0030] The fixed mold group inserts the target material through the rubber sleeve, and is provided with a spiral scraper to scrape the sand adhered to the target material. This design not only stably fixes the target material, but also ensures the cleanliness of the target material surface after sand blasting. In addition, the fixed mold group is clamped on the net frame through the clamping block and the clamping groove, which is convenient for disassembly and replacement. BRIEF DESCRIPTION OF DRAWINGS

[0031] The drawings described herein are used to provide further understanding of the utility model and constitute a part of the present application. The schematic embodiments of the utility model and their descriptions are used to explain the utility model, and do not constitute an improper limitation on the utility model.

[0032] In the drawings:

[0033] Figure 1 It is a front view appearance schematic view of the utility model;

[0034] Figure 2 It is a rear view appearance schematic view of the utility model;

[0035] Figure 3 It is a machine body internal structure schematic view of the utility model;

[0036] Figure 4 It is a fixed module appearance schematic view of the utility model;

[0037] Figure 5 It is a sand blasting module appearance schematic view of the utility model;

[0038] Figure 6 It is a rotating seat appearance schematic view of the utility model.

[0039] In the drawings, the component list represented by each sign is as follows:

[0040] 1, fan;10, base;11, cloth gas box;12, control valve group;13, second filter;14, spray gun;15, net rack;16, fixed module;1601, clamping block;1602, clamping groove;1603, target material;1604, rubber sleeve;1605, spiral scraper;1606, fixing frame;2, air duct;3, machine body;301, operation port;302, window;4, sand blasting module;401, lower fixed shaft;402, first connecting rod;403, spray head;404, upper fixed shaft;405, support;406, second connecting rod;407, eccentric turntable;408, third motor;5, door plate;6, rotating seat;601, first motor;602, second motor;603, fixed shaft;604, rotating disc;605, driven wheel;606, belt;7, air inlet;8, first filter;9, control console. DETAILED DESCRIPTION

[0041] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0042] Please refer to Figures 1 to 6 The embodiments provided by the utility model:

[0043] Embodiment one

[0044] The sand blasting device for tantalum target material includes a base 10, a machine body 3 is arranged on the base 10, a transparent window 302 is arranged on the machine body 3, an operation port 301 is arranged below the transparent window 302, a control console 9 is installed at the connection between the base 10 and the machine body 3, and the design of the transparent window 302 enables the operator to clearly observe the working conditions inside the machine body 3, including the flow state of the sand blasting module 4, the spray head 403, the target material 1603 and the sand. This helps the operator to monitor the sand blasting process in real time and ensure the smooth operation. The operation port 301 is located below the transparent window 302, which is convenient for the operator to put his hand into the machine body 3 to operate, such as replacing the target material 1603, adjusting the angle of the spray head 403 or cleaning the sand inside the machine body 3, etc. The machine body 3 is installed with a sand blasting module 4 and a spray gun 14, the sand blasting module 4 is provided with a bracket 405, the upper fixed shaft 404 and the lower fixed shaft 401 are rotatably installed on the bracket 405, the spray head 403 is installed on the upper fixed shaft 404 and the lower fixed shaft 401, one end of the upper fixed shaft 404 and the lower fixed shaft 401 is drivingly connected through a first connecting rod 402, the upper fixed shaft 404 is drivingly connected with an eccentric turntable 407 through a second connecting rod 406, the eccentric turntable 407 is located at the output end of a third motor 408, the eccentric turntable 407 is driven to rotate by the third motor 408, and then the upper fixed shaft 404 is driven to deflect by the second connecting rod 406. When the upper fixed shaft 404 deflects, the lower fixed shaft 401 is synchronously deflected by the driving connection through the first connecting rod 402. This design allows the spray head 403 to make accurate angle adjustment according to the specific shape of the target material 1603 and the sand blasting requirements, ensuring the consistency and uniformity of the sand blasting effect. Flexible adjustment of the angle of the spray head 403 can optimize the sand blasting path, reduce waste and repetitive labor during the sand blasting process. This helps to improve the sand blasting efficiency and shorten the operation time. When the eccentric turntable 407 rotates, the upper fixed shaft 404 is pulled to deflect by the second connecting rod 406, and at the same time, the upper fixed shaft 404 pulls the lower fixed shaft 401 to deflect by the first connecting rod 402, thereby achieving the effect of adjusting the angle of the spray head 403 on the upper fixed shaft 404 and the lower fixed shaft 401. A precise transmission system is formed between the eccentric turntable 407, the second connecting rod 406, the upper fixed shaft 404, the first connecting rod 402 and the lower fixed shaft 401. When the eccentric turntable 407 rotates, the upper fixed shaft 404 is directly pulled to deflect by the second connecting rod 406, and at the same time, the upper fixed shaft 404 drives the lower fixed shaft 401 to synchronously deflect by the first connecting rod 402. This linkage ensures that the adjustment of the angle of the spray head 403 can be accurately and synchronously performed. Due to the design of the eccentric turntable 407, the deflection angle of the upper fixed shaft 404 and the lower fixed shaft 401 can be adjusted within a larger range.This helps to adapt to targets 1603 of different shapes and sizes, ensuring that the sandblasting operation can fully cover the surface of the target 1603. A blower 1 is installed on the base 10. One end of the blower 1 is connected to the top of the machine body 3 through the air guide pipe 2. The end of the blower 1 away from the air guide pipe 2 is connected to the air inlet 7. A first filter 8 is connected between the blower 1 and the air inlet 7. A second filter 13 is connected between the blower 1 and the air guide pipe 2. The blower 1 blows air downward from the top of the machine body 3, thereby ensuring that the sand and gravel inside the machine body 3 are driven by the airflow to fall to the bottom of the machine body 3.

[0045] Example 2

[0046] To ensure the effectiveness of sandblasting, for example, such as Figures 1 to 6As shown, the application also includes: the bottom end of the body 3 is provided with a net rack 15, the net rack 15 is placed with a fixed module 16, the fixed module 16 is provided with a fixed frame 1606, the inside of the fixed frame 1606 is provided with a rubber sleeve 1604, the fixed frame 1606 is limitedly inserted with a target material 1603 through the rubber sleeve 1604, one end of the fixed frame 1606 is provided with a spiral scraper 1605, when the target material 1603 moves in the fixed frame 1606, the spiral scraper 1605 is used to scrape the sand adhered on the target material 1603, the bottom end of the fixed frame 1606 is provided with a clamping block 1601, the clamping block 1601 is provided with a clamping groove 1602, the fixed frame 1606 is clamped and installed on the net rack 15 through the clamping groove 1602 of the clamping block 1601, the rubber sleeve 1604 is arranged in the fixed frame 1606 to provide a tight insertion space for the target material 1603, so as to ensure the stability and non-falling of the target material 1603 in the fixed frame 1606. The rubber sleeve 1604 has certain elasticity and plasticity, which can adapt to target materials 1603 of different shapes and sizes. The rubber material has good elasticity and friction, which can further increase the fastening force between the target material 1603 and the fixed frame 1606, preventing the target material 1603 from shifting or shaking during processing. The spiral scraper 1605 is ingeniously arranged at one end of the fixed frame 1606, and the spiral scraper 1605 is also made of rubber material. Its principle is to continuously push and remove materials (such as residues on the surface of the target material 1603) through rotation. This design helps to clean the impurities and residues on the surface of the target material 1603 in time during processing, ensuring the stability and consistency of the processing quality. The fixed module 16 is located on one side of the sand blasting module 4, a rotating seat 6 is arranged in the body 3 on one side of the sand blasting module 4, the rotating seat 6 is provided with a rotating disc 604, the rotating disc 604 is rotatably installed with a fixed shaft 603, the fixed shaft 603 is used to fix the target material without covering protection, the fixed shaft 603 is arranged in an annular array on the rotating disc 604, the bottom end of the fixed shaft 603 is provided with a driven wheel 605, the driven wheel 605 is in transmission connection with the first motor 601 through the belt 606, the rotating disc 604 is located at the output end of the second motor 602, the driven wheel 605 is in transmission connection with the first motor 601 through the belt 606, realizing stable transmission of power. The belt 606 transmission has the advantages of simple structure, low manufacturing cost, convenient installation and maintenance, etc., and can also moderate the impact and reduce the vibration, making the transmission more stable. The fixed shaft 603 is arranged in an annular array on the rotating disc 604, which makes the spray head 403 (supposedly installed on the fixed shaft 603) can perform sand blasting treatment on the target material 1603 from multiple angles. By adjusting the position or angle of the rotating disc 604, the direction and range of sand blasting can be easily changed. The second motor 602 drives the rotating disc 604 to rotate, realizing rotation; at the same time, through the belt 606 transmission, the first motor 601 drives the driven wheel 605 and the fixed shaft 603 to rotate.The combination of rotation and revolution allows the target material 1603 to be subjected to more uniform and comprehensive sandblasting. The first motor 601 and the second motor 602 are located at the top of the machine body 3. The second motor 602 drives the rotating disc 604 to rotate. The first motor 601 drives the driven wheel 605 to rotate through the belt 606, and then drives the fixed shaft 603 to rotate, thereby ensuring that the surface of the target material is uniformly processed. The second motor 602 directly drives the rotating disc 604 to rotate, the transmission path is simple and clear, and the energy loss and fault points of the intermediate links are reduced. The first motor 601 drives the driven wheel 605 and the fixed shaft 603 to rotate through the belt 606, realizing long-distance transmission of power and angle adjustment, and increasing the flexibility of the equipment. Through the rotation of the rotating disc 604 and the rotation of the fixed shaft 603, multi-angle and multi-direction sandblasting processing can be realized. This design is suitable for target materials 1603 of different shapes and sizes, improving the adaptability and flexibility of the equipment.

[0047] Working principle:

[0048] The eccentric rotating disc 407 is driven by the first motor 601 to rotate, and pulls the upper fixed shaft 404 to deflect through the second connecting rod 406. At the same time, the upper fixed shaft 404 deflects, pulling the lower fixed shaft 401 to deflect through the first connecting rod 402, thereby adjusting the angle of the spray head 403 on the upper fixed shaft 404 and the lower fixed shaft 401. This design allows the spray head 403 to make precise angle adjustments according to the specific shape of the target material 1603 and the sandblasting requirements.

[0049] When the sandblasting module 4 is started, the spray head 403 sprays abrasive (sand) at high speed to the surface of the target material 1603. The abrasive produces a cutting effect when it impacts the surface of the target material 1603, removing dirt, rust, or performing roughening treatment on the surface of the target material 1603.

[0050] The second motor 602 drives the rotating seat 6 to rotate, causing the target material 1603 on the fixed shaft 603 to revolve. At the same time, the first motor 601 drives the driven wheel 605 and the fixed shaft 603 to rotate through the belt 606. This combination of rotation and revolution ensures that the surface of the target material 1603 can be subjected to more uniform and comprehensive sandblasting.

[0051] When processing target materials 1603 that need to be shielded and protected, the target material 1603 is inserted into the fixed frame 1606 and clamped and fixed by the rubber sleeve 1604 inside the fixed frame 1606. Then, the surface of the target material 1603 between the two fixed frames 1606 is processed by the spray gun 14, and after the sandblasting is completed, the target material 1603 moves in the fixed frame 1606, and the sand adhering to the target material 1603 is removed by the spiral scraper 1605.

[0052] The fan 1 is started, and air is blown to the inside of the machine body 3 through the air guide pipe 2. The airflow drives the sand and gravel in the machine body 3 to fall to the bottom end of the machine body 3. The first filter 8 and the second filter 13 are respectively located at the air inlet 7 and the air outlet of the fan 1, and are used for blocking the sand and dust from entering the fan 1, so as to protect the fan 1 from being damaged.

[0053] The basic principle and main features of the present application and the advantages of the present application are shown and described above. For those skilled in the art, it is obvious that the present application is not limited to the details of the above exemplary embodiments, and the present application can be implemented in other specific forms without departing from the spirit or basic characteristics of the present application. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting, and the scope of the present application is defined by the appended claims rather than the above description, and therefore all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present application. Any reference signs in the claims should not be regarded as limiting the claims involved.

[0054] In addition, it should be understood that although the present specification is described in terms of embodiments, not every embodiment contains only one independent technical solution, and the description manner of the specification is only for the sake of clarity, and those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that those skilled in the art can understand.

Claims

1. A sandblasting device for tantalum target material, comprising a base (10), a body (3) mounted on the base (10), and a sandblasting module (4) and a spray gun (14) installed inside the body (3), characterized in that: A fan (1) is installed on the base (10). One end of the fan (1) is connected to the top of the body (3) through the air guide pipe (2). An air inlet (7) is connected to the end of the fan (1) away from the air guide pipe (2). A first filter (8) is connected between the fan (1) and the air inlet (7). A second filter (13) is connected between the fan (1) and the air guide pipe (2). A mesh frame (15) is provided at the bottom of the body (3). A fixed module (16) is placed on the mesh frame (15). The fixed module (16) is located on one side of the sandblasting module (4). A rotating seat (6) is mounted inside the body (3) on one side of the sandblasting module (4).

2. The sandblasting device for tantalum target material according to claim 1, characterized in that: The body (3) is provided with a window (302), and an operation port (301) is provided below the window (302) on the body (3). A control console (9) is installed at the connection between the base (10) and the body (3).

3. The sandblasting apparatus for tantalum target material according to claim 1, characterized in that: The sandblasting module (4) is provided with a bracket (405), on which an upper fixed shaft (404) and a lower fixed shaft (401) are rotatably mounted. A nozzle (403) is mounted on the upper fixed shaft (404) and the lower fixed shaft (401). One end of the upper fixed shaft (404) and the lower fixed shaft (401) is connected by a first connecting rod (402), and the upper fixed shaft (404) is connected by a second connecting rod (406) to an eccentric turntable (407). The eccentric turntable (407) is located at the output end of a third motor (408).

4. The sandblasting apparatus for tantalum target material according to claim 3, characterized in that: When the eccentric turntable (407) rotates, it pulls the upper fixed shaft (404) to deflect via the second connecting rod (406). At the same time as the upper fixed shaft (404) deflects, the upper fixed shaft (404) pulls the lower fixed shaft (401) to deflect via the first connecting rod (402).

5. The sandblasting apparatus for tantalum target material according to claim 1, characterized in that: The rotating base (6) is provided with a rotating disk (604), and a fixed shaft (603) is rotatably mounted on the rotating disk (604). The fixed shafts (603) are arranged in a ring array on the rotating disk (604). A driven wheel (605) is provided at the bottom end of the fixed shaft (603). The driven wheel (605) is connected to the first motor (601) through a belt (606). The rotating disk (604) is located at the output end of the second motor (602).

6. The sandblasting apparatus for tantalum target material according to claim 5, characterized in that: The first motor (601) and the second motor (602) are located at the top of the body (3). The second motor (602) drives the rotating disk (604) to rotate, and the first motor (601) drives the driven wheel (605) to rotate through the belt (606), thereby driving the fixed shaft (603) to rotate.

7. The sandblasting apparatus for tantalum target material according to claim 1, characterized in that: The fixed module (16) is provided with a fixed frame (1606), and a rubber sleeve (1604) is provided inside the fixed frame (1606). A target material (1603) is inserted into the fixed frame (1606) through the rubber sleeve (1604) for limiting. A spiral scraper (1605) is provided at one end of the fixed frame (1606), and a locking block (1601) is provided at the bottom end of the fixed frame (1606). A locking groove (1602) is opened on the locking block (1601).

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