Automatic plate loading device for plasma cleaning machine carrier

Abstract

The utility model discloses an automatic plate loading device for a plasma cleaning machine. Belongs to the technical field of plate carriers. According to the technical scheme, the plate loading device comprises a carrier plate frame and a plate loading rack, a plurality of receding holes are formed in the carrier plate frame in the circumferential direction, elastic assemblies are arranged on the receding holes, pressing rods matched with the edge of a plate are arranged on the elastic assemblies, and the pressing rods are matched to clamp the plate; a mounting panel is arranged on the plate mounting rack, a positioning notch matched with the carrier plate frame is formed in the mounting panel, and a plurality of pressing plate assemblies are arranged on the mounting panel around the positioning notch; a first lifting platform is arranged on the plate loading rack below the positioning notch, an ejector pin assembly is arranged on the first lifting platform, and a second lifting platform used for placing plates is arranged on the first lifting platform; the utility model aims to provide the automatic plate loading device for the plasma cleaning machine carrier, which is simple in structure and convenient to clamp; the plate loading device is used for loading plates on a carrier before the plasma cleaning machine is used.

Description

TECHNICAL FIELD

[0001] The utility model relates to a plate loading device, more specifically, especially relates to a plasma cleaning machine carrier automatic plate loading device. BACKGROUND

[0002] The plasma cleaning machine is a kind of brand-new high-tech technology, utilizes plasma to reach the effect that conventional cleaning method cannot reach.Plasma is a state of matter, also called the fourth state of matter, and does not belong to the three states of solid, liquid and gas.Commonly, enough energy is applied to gas to ionize it into plasma state.The "active" components of plasma include: ions, electrons, atoms, active groups, excited-state nuclides (metastable state), photons, etc.The plasma cleaning machine is to process sample surface by utilizing the properties of these active components, so as to realize cleaning, coating and other purposes.

[0003] When the plasma cleaning machine processes soft plate or ultra-thin plate, due to the strong suction of the equipment during vacuumizing, the plate cannot be straightened or displaced in the cavity, and when the plate is displaced, it contacts the electrode of the equipment, which can cause large-area burning or burning of the product when the radio frequency power output is outputted.In order to solve the above problems, a carrier is usually provided to fix the plate, and the existing carrier is usually manually fixed when clamping the plate, which is low in efficiency and large in workload. UTILITY MODEL CONTENT

[0004] The utility model aims at the deficiencies of the prior art, and provides a plasma cleaning machine carrier automatic plate loading device which is simple in structure and convenient to clamp.

[0005] The technical scheme of the utility model is implemented as follows: a plasma cleaning machine carrier automatic plate loading device, comprising a carrier plate frame and a plate loading rack, the carrier plate frame is provided with a plurality of displacement holes in the circumferential direction, and an elastic component is arranged on each displacement hole, a pressing rod matched with the edge of the plate is arranged on the elastic component, and each pressing rod clamps the plate.

[0006] A mounting panel is arranged on the plate loading rack, a positioning notch matched with the carrier plate frame is arranged on the mounting panel, a plurality of pressing plate assemblies for pressing the carrier plate frame are arranged on the mounting panel around the positioning notch, a first lifting platform is arranged below the positioning notch on the plate loading rack, a top pin assembly corresponding to each elastic component is arranged on the first lifting platform, and a second lifting platform for placing the plate is arranged on the first lifting platform.

[0007] In the above-mentioned plasma cleaning machine carrier automatic plate loading device, the carrier plate frame comprises a C-shaped frame, an adjusting frame plate is detachably arranged on the open end of the C-shaped frame, mounting holes are arranged at both ends of the adjusting frame plate, and adjusting holes matched with the mounting holes are arranged on both free ends of the open side of the C-shaped frame.

[0008] The elastic assembly includes a hinged seat arranged on the side of the positioning hole away from the inner hole of the carrier plate frame, and a clamping plate hinged to the hinged seat and used for connecting the pressing rod.

[0009] The automatic plate loading device of the plasma cleaning machine carrier comprises a plurality of limiting convex rods arranged on the edge of the carrier plate frame.

[0010] The automatic plate loading device of the plasma cleaning machine carrier comprises a plurality of lifting rods arranged around the positioning notch, and a pressing block arranged on the upper end of each lifting rod.

[0011] The automatic plate loading device of the plasma cleaning machine carrier comprises a plurality of lifting rods arranged around the positioning notch, and a pressing block arranged on the upper end of each lifting rod.

[0012] The second lifting platform comprises a second lifting cylinder arranged on the main platform, and a main placement table connected to the piston rod of the second lifting cylinder.

[0013] After the carrier plate frame is placed in the positioning notch and pressed by the pressing plate assembly, the first lifting platform is raised to lift the elastic assembly, the plate is placed on the second lifting platform, and the plate is automatically clamped and loaded. BRIEF DESCRIPTION OF DRAWINGS

[0014] The utility model makes further detailed description in combination with the embodiment in the drawings, but does not constitute any limit to the utility model.

[0015] Figure 1 It is the structure schematic diagram of the carrier used in the utility model;

[0016] Figure 2 It is the local structure schematic diagram of A of the utility model;

[0017] Figure 3 It is the structure schematic diagram of the utility model;

[0018] Figure 4 It is the section structure schematic diagram of the utility model.

[0019] Fig. 1, carrier plate frame; 1a, C-shaped frame; 1b, adjusting frame plate; 1c, mounting hole; 1d, adjusting hole; 2, let go of the hole; 3, elastic assembly; 3a, hinged seat; 3b, opening and closing plate; 3c, torsional spring; 4, pressure rod; 5, limit convex rod; 6, plate mounting rack; 7, mounting panel; 8, positioning notch; 9, pressing plate assembly; 9a, lifting rod; 9b, pressing block; 9c, rotary down pressure cylinder; 10, first lifting platform; 10a, first lifting cylinder; 10b, main platform; 10c, guide rail; 10d, adjusting platform; 11, top pin assembly; 12, second lifting platform; 12a, second lifting cylinder; 12b, main placement table; 12c, third lifting cylinder; 12d, auxiliary placement table. DETAILED DESCRIPTION

[0020] Reference Figures 1-4 As shown in the utility model discloses a kind of automatic plate mounting device of plasma cleaning machine carrier, including carrier plate frame 1 and plate mounting rack 6, it is characterized in that, the carrier plate frame 1 is provided with several let go of the hole 2 along circumference, elastic assembly 3 is provided on each let go of the hole 2, the elastic assembly 3 is provided with the pressure rod 4 matched with the edge of plate, each pressure rod 4 cooperates clamping plate.The let go of the hole on carrier plate frame is placed in external tooling top elastic assembly, after plate is placed in carrier plate frame, lifting carrier plate frame or making external tooling drop, it can make pressure rod clamping plate to complete clamping, plate is supported by carrier plate frame, it can guarantee that plate is kept straight and is not prone to displacement in cavity, it can effectively avoid that plate contacts equipment electrode and causes burn or burnout, and whole clamping process is quick and convenient, and clamping efficiency is high.

[0021] The plate mounting rack 6 is provided with a mounting panel 7, and the mounting panel 7 is provided with a positioning notch 8 matched with the carrier plate frame 1. A plurality of pressing plate assemblies 9 for pressing the carrier plate frame 1 are arranged on the mounting panel 7 around the positioning notch 8. A first lifting platform 10 is arranged below the positioning notch 8 on the plate mounting rack 6. A top pin assembly 11 corresponding to each elastic assembly 3 is arranged on the first lifting platform 10. A second lifting platform 12 for placing the plate is arranged on the first lifting platform 10. When the first lifting platform is raised to lift the elastic assembly with the top pin assembly, the second lifting platform is raised to above the hole in the carrier plate frame. After the plate is placed on the second lifting platform, the second lifting platform and the first lifting platform are lowered in turn to place the plate on the carrier plate frame and press the plate with the pressure rod. The whole process of clamping the plate is fully automatic, which can effectively improve the plate mounting efficiency and reduce labor costs.

[0022] In the embodiment, the carrier plate frame 1 comprises a C-shaped frame 1a, and an adjusting frame plate 1b is detachably arranged at the open end of the C-shaped frame 1a; the two ends of the adjusting frame plate 1b are provided with mounting holes 1c, and a plurality of adjusting holes 1d matched with the mounting holes 1c are arranged at the two free ends of the open side of the C-shaped frame 1a. After the structure is adopted, the size of the carrier plate frame can be adjusted by changing the mounting position of the adjusting frame plate, so that the carrier plate frame can clamp a plurality of different sizes of plates.

[0023] In the embodiment, the elastic assembly 3 comprises a hinge seat 3a arranged at the side of the relief hole 2 away from the hole in the carrier plate frame 1, and an opening and closing plate 3b for connecting the pressing rod 4 is hingedly arranged on the hinge seat 3a; a torsion spring 3c is arranged between the hinge seat 3a and the opening and closing plate 3b. The opening and closing plate is turned outward by inserting an external tool into the relief hole to lift the opening and closing plate, so that the plate is conveniently placed on the carrier plate frame below the pressing rod.

[0024] In the embodiment, preferably, a plurality of limiting protruding rods 5 are arranged on the edge of the carrier plate frame 1, and each limiting protruding rod 5 is located in the corresponding limiting hole on the plate when the plate is pressed by the pressing rod 4. By arranging the limiting protruding rods matched with the corresponding limiting holes on the plate, the plate can be positioned, and the stability of clamping can be further improved.

[0025] In the embodiment, the pressing plate assembly 9 comprises a plurality of lifting rods 9a arranged around the positioning notch 8, and a pressing block 9b is arranged at the upper end of each lifting rod 9a; a rotary pressing cylinder 9c matched with each lifting rod 9a is arranged on the plate mounting rack 6. In the initial state, the pressing block is located above the outside of the positioning notch, and when the carrier plate frame is placed at the positioning notch on the mounting panel, the rotary pressing cylinder rotates the front end of the pressing block above the carrier plate frame and moves downward to press the carrier plate frame. The rotary pressing cylinder is a prior art, and its specific structure and connection mode are well known to those skilled in the art, and will not be described here.

[0026] In the embodiment, the first lifting platform 10 comprises a first lifting cylinder 10a arranged on the plate mounting rack, a main platform 10b connected to the piston rod of the first lifting cylinder 10a, a guide rail 10c arranged on one side of the main platform 10b, and an adjusting platform 10d arranged on the guide rail 10c through a sliding block. By arranging the guide rail and the adjusting platform to adjust the size of the first lifting platform, plates of different sizes can be clamped by matching the carrier plate frames of different sizes. Corresponding positioning structures are arranged on the guide rail and the adjusting platform to fix the position of the adjusting platform, which is well known to those skilled in the art, and will not be described here.

[0027] The second lifting platform 12 comprises a second lifting cylinder 12a arranged on the main platform 10b, and a main placing table 12b is connected to a piston rod of the second lifting cylinder 12a; and the adjusting platform 10d is provided with a third lifting cylinder 12c, and an auxiliary placing table 12d matched with the main placing table 12b is arranged on a piston rod of the third lifting cylinder 12c. After the structure is adopted, the second lifting platform adjusts in cooperation with the first lifting platform, and clamps different sizes of the plate in cooperation with different sizes of the carrier plate frame.

[0028] In work, the carrier plate frame is placed at the positioning notch on the mounting panel, the lower pressing cylinder rotates the pressing block front end to above the carrier plate frame and presses the carrier plate frame downward, the first lifting platform is lifted to make the needle assembly insert into the clearance hole to lift the opening and closing plate, the second lifting platform is lifted to above the inner hole of the carrier plate frame, the plate is placed on the second lifting platform, the second lifting platform and the first lifting platform are sequentially lowered to place the plate on the carrier plate frame and make the pressing rod press the plate, after the clamping is completed, the lower pressing cylinder is rotated to lift the pressing block and rotate to the outside, and the assembled carrier plate frame and the plate are taken out.

[0029] The above-mentioned embodiments are the preferred embodiments of the present application, which are only used to facilitate the description of the present application and do not limit the present application in any form. Any person with ordinary knowledge in the art can make equivalent embodiments by making partial changes or modifications within the range of the technical features of the present application without departing from the technical features of the present application, and the equivalent embodiments still belong to the range of the technical features of the present application.

Claims

1. A plasma cleaning machine carrier automatic plate loading device, comprising a carrier plate frame (1) and a plate loading frame (6), characterized in that, The carrier plate frame (1) is provided with a plurality of positioning holes (2) in the circumferential direction, and an elastic assembly (3) is arranged on each positioning hole (2), and a pressing rod (4) matched with the edge of the plate is arranged on the elastic assembly (3), and each pressing rod (4) is matched with the clamping plate; The plate mounting frame (6) is provided with a mounting panel (7), and a positioning notch (8) matched with the carrier plate frame (1) is arranged on the mounting panel (7), and a plurality of pressing plate assemblies (9) for pressing the carrier plate frame (1) are arranged on the mounting panel (7) around the positioning notch (8); a first lifting platform (10) is arranged below the positioning notch (8) of the plate mounting frame (6), a plurality of ejector pin assemblies (11) corresponding to the elastic assemblies (3) are arranged on the first lifting platform (10), and a second lifting platform (12) for placing the plate is arranged on the first lifting platform (10).

2. An apparatus for automatically loading a substrate into a plasma cleaner according to claim 1, wherein The carrier plate frame (1) comprises a C-shaped frame (1a), and an adjusting frame plate (1b) is detachably arranged at the open end of the C-shaped frame (1a); the two ends of the adjusting frame plate (1b) are provided with mounting holes (1c), and a plurality of adjusting holes (1d) matched with the mounting holes (1c) are arranged on the two free ends of the C-shaped frame (1a).

3. An apparatus for automatically loading a substrate into a plasma cleaner according to claim 1, wherein The elastic assembly (3) comprises a hinge seat (3a) arranged on the side of the positioning hole (2) away from the inner hole of the carrier plate frame (1), and a hinged opening and closing plate (3b) for connecting the pressing rod (4) is arranged on the hinge seat (3a); a torsional spring (3c) is arranged between the hinge seat (3a) and the opening and closing plate (3b).

4. The apparatus of claim 1, wherein the apparatus is a plasma cleaner. A plurality of limiting protruding rods (5) are arranged on the edge of the carrier plate frame (1), and when the pressing rod (4) presses the plate, each limiting protruding rod (5) is located in the corresponding limiting hole on the plate.

5. An apparatus for automatically loading a substrate into a plasma cleaner according to claim 1, wherein The pressing plate assembly (9) comprises a plurality of lifting rods (9a) arranged around the positioning notch (8), and a pressing block (9b) is arranged on the upper end of each lifting rod (9a); a rotary downward pressing air cylinder (9c) matched with each lifting rod (9a) is arranged on the plate mounting frame (6).

6. An apparatus for automatically loading a substrate into a plasma cleaner according to claim 1, wherein The first lifting platform (10) comprises a first lifting air cylinder (10a) arranged on the plate mounting frame, a main platform (10b) connected to the piston rod of the first lifting air cylinder (10a), a guide rail (10c) arranged on one side of the main platform (10b), and an adjusting platform (10d) arranged on the guide rail (10c) through a sliding block; The second lifting platform (12) comprises a second lifting air cylinder (12a) arranged on the main platform (10b), and a main placing table (12b) connected to the piston rod of the second lifting air cylinder (12a); a third lifting air cylinder (12c) is arranged on the adjusting platform (10d), and an auxiliary placing table (12d) matched with the main placing table (12b) is arranged on the piston rod of the third lifting air cylinder (12c).

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