Deposition furnace for manufacturing synthetic quartz glass with high optical uniformity

Abstract

The utility model discloses a deposition furnace for manufacturing synthetic quartz glass with high optical uniformity, and relates to the technical field of deposition furnaces. The device comprises a deposition furnace, a bottom supporting mechanism is fixedly mounted at the bottom of the deposition furnace, and a driving device is arranged on the inner wall of the bottom supporting mechanism. The driving device is arranged on the bottom supporting mechanism, and after vaporized silicon dioxide gas enters the deposition furnace, the driving device drives the operation device to operate to provide operation driving force for the bayonet socket, so that the bayonet socket can drive the deposition tank at the top to operate; gas is guided and homogenized in cooperation with a flow guide assembly rotating along with the bottom, so that the gas uniformly flows around the deposition tank and makes contact with the outer side of the combustion cell; and in cooperation with the exhaust assembly, the molten redundant gas is adsorbed, so that the remaining particles are blocked on the inner wall of the exhaust assembly, and defects caused by the fact that more small particles are accumulated together to form large particles falling on quartz glass are prevented.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of deposition furnace, specifically, and particularly relates to a deposition furnace for manufacturing high-optical-uniformity synthetic quartz glass. BACKGROUND

[0002] Synthetic quartz glass is a kind of artificial material, which is made of high-purity silicon dioxide powder by high-temperature melting. Its chemical composition is the same as that of natural quartz glass, but it has a more uniform and purer structure. The chemical vapor deposition method CVD method is one of the main processes for preparing synthetic quartz glass, and its principle is to make the SiCl4 gas after heating vaporization enter the hydrogen-oxygen flame driven by oxygen, and after a series of high-temperature hydrolysis reactions, produce amorphous silica microparticles, which are deposited on the high-temperature target surface to form fused quartz glass, and the viscosity gradually increases until solidification as the temperature decreases.

[0003] In the prior art, through retrieval, Chinese patent No. CN201610019706.1 discloses a deposition furnace for melting quartz glass, the outer wall of the deposition furnace is made of heat preservation material, the inner wall is made of refractory material, and the middle layer is an electric heating device or a circulating water cooling device; The deposition furnace is a sectional heat preservation type deposition furnace, which is divided into four parts from top to bottom: the top section of the furnace body is an arc-shaped top cover part, and the middle layer is an electric heating device; The middle section is divided into 2-5 heat preservation sections, and an electric heating device is used for auxiliary heating.

[0004] During the deposition process of quartz glass, the airflow in the furnace continuously flows, causing the SiO2 particles that have not been deposited on the target surface to float upward in the furnace along with the airflow. As the reaction time prolongs, more tiny particles accumulate together to form large particles, and even accumulate into sheet-shaped accumulated materials. Once they fall into the fused quartz glass body, defects will be formed on the surface or inside of the glass body.

[0005] In view of the problems in the related art, no effective solution has been proposed so far. UTILITY MODEL CONTENT

[0006] In view of the problems in the related art, the utility model proposes a deposition furnace for manufacturing high-optical-uniformity synthetic quartz glass to overcome the above technical problems existing in the prior art.

[0007] To solve the above technical problems, the utility model is realized by the following technical solutions:

[0008] The utility model discloses a kind of deposition furnaces for manufacturing high optical uniformity synthetic quartz glass, including deposition furnace, the bottom fixed mounting of deposition furnace has bottom support mechanism, the inner wall of bottom support mechanism is provided with driving device, the side of driving device is engaged with running device, the inside of running device is inserted with plug-in seat, the top fixed mounting of plug-in seat has deposition tank, the bottom fixed connection of deposition tank has flow guide component, the top of deposition furnace is provided with exhaust component, the both sides of deposition furnace are fixedly installed with gas inlet, the inside of deposition furnace is provided with combustion pool.

[0009] Further, the deposition furnace includes a deposition furnace body, an inner portion of the deposition furnace body is provided with a hearth, both side surfaces of the deposition furnace body are fixedly connected with an extended furnace body, and the combustion pool is located inside the extended furnace body.

[0010] Further, the bottom support mechanism includes a bottom support table, the inner wall of the bottom support table is fixedly connected with a horizontal table, the top of the horizontal table is provided with an isolation plate, and the driving device is fixedly connected to the bottom of the horizontal table.

[0011] Further, the driving device includes a fixed plate, the bottom of the fixed plate is provided with a driving motor, and the output end of the driving motor is provided with a driving gear.

[0012] Further, the running device includes a running seat, the bottom of the running seat is fixedly installed with a running shaft, the bottom of the running shaft is fixedly installed with a running gear, the running seat is located inside the hearth, and the plug-in seat is inserted into the inside of the running seat.

[0013] Further, the flow guide component includes a flow guide plate, the inner wall of the flow guide plate is provided with a flow-through groove, and the flow guide plate is symmetrically arranged at the bottom of the deposition tank.

[0014] Further, the inner wall of the combustion pool is fixedly installed with a partition frame, and the inner wall of the partition frame is provided with an inner through hole.

[0015] Further, the exhaust component includes an exhaust top cover, the top of the exhaust top cover is provided with an exhaust pipe, and the bottom of the exhaust top cover is fixedly connected with a filter plate.

[0016] The utility model has the following beneficial effects:

[0017] 1. The utility model discloses a drive device is placed on the bottom support mechanism, when the silica gas after vaporization enters the inside of the deposition furnace, drives the running device to run through the drive device and provides the running driving force for the plug-in seat, so that the plug-in seat can drive the top deposition groove to run, and the gas is guided and homogenized through the flow guide assembly that bottom follows rotation, makes it even flow around the deposition groove and the outside of the combustion pool contact, and cooperation exhaust assembly adsorbs the excess gas after melting so that the remaining particles are blocked in the inner wall of exhaust assembly to prevent more small particles from accumulating together to form large particles and fall on the quartz glass to cause defects.

[0018] 2. The utility model discloses drive motor and drive gear are placed in the outside of the deposition furnace body, so that in the process of making quartz glass, the running driving force is provided for the plug-in seat through drive gear and running gear and other components outside, and then cooperate indirectly and drive the top deposition groove to run, so that the quartz glass after melting can be evenly distributed in the inner wall of the deposition groove, and the flow can be differentiated after driving the flow guide assembly to run, so that it evenly rises and improves the melting rate, the filter plate is arranged below the exhaust top cover, when the small particles contained in the excess gas continue to rise, the small particles are blocked on the filter plate, and the remaining gas continues to rise and is discharged from the inside of the exhaust pipe, so that the excess particles are prevented from gathering into large particles and falling on the inner wall of the deposition groove to cause adverse effects on the quartz glass.

[0019] Of course, it is not necessary for any product implementing the utility model to achieve all the advantages mentioned above at the same time. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the technical scheme of the embodiments of the utility model, the following will briefly introduce the drawings needed to be used in the embodiment description, obviously, the drawings in the following description are only some embodiments of the utility model, and for those skilled in the art, other drawings can also be obtained according to these drawings without creating labor.

[0021] Figure 1 It is the three-dimensional structure schematic diagram of the utility model;

[0022] Figure 2 It is the bottom support table structure schematic diagram of the utility model;

[0023] Figure 3 It is the exhaust top cover structure schematic diagram of the utility model;

[0024] Figure 4 It is the inside structure schematic diagram of the deposition furnace body of the utility model;

[0025] Figure 5 It is the combustion pool structure schematic diagram of the utility model;

[0026] Figure 6 The utility model discloses a flow guide plate structure schematic view;

[0027] In the drawing, the component list that each sign represents is as follows:

[0028] 1, deposit stove;2, bottom support mechanism;3, drive arrangement;4, running device;5, plug-in seat;6, deposit groove;7, flow guide component;8, exhaust component;9, air inlet;10, combustion pool;101, deposit stove body;102, hearth;103, extension stove body;201, bottom support table;202, cross table;203, isolation board;301, fixed plate;302, drive motor;303, drive gear;401, running seat;402, running shaft;403, running gear;701, flow guide plate;702, flow-through groove;11, partition frame;12, inner through hole;801, exhaust top cap;802, exhaust pipe;803, filter plate. DETAILED DESCRIPTION

[0029] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the scope of protection of the utility model.

[0030] In the description of the utility model, it is understood that the terms "opening", "upper", "lower", "top", "middle", "inner" and the like indicate the orientation or positional relationship, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the indicated components or elements must have a specific orientation, be constructed and operated in a specific orientation, therefore, it cannot be understood as a limitation of the utility model.

[0031] Please refer to Figures 1-6 The utility model discloses a kind of deposit stoves for manufacturing high optical uniformity synthetic quartz glass, including deposit stove 1, the bottom of the deposit stove 1 is fixedly installed with bottom support mechanism 2, the inner wall of the bottom support mechanism 2 is provided with drive arrangement 3, one side of the drive arrangement 3 is engaged with running device 4, the inside of the running device 4 is plugged with plug-in seat 5, the top of the plug-in seat 5 is fixedly installed with deposit groove 6, the bottom of the deposit groove 6 is fixedly connected with flow guide component 7, the top of the deposit stove 1 is provided with exhaust component 8, the two side surfaces of the deposit stove 1 are all fixedly installed with air inlet 9, the inside of the deposit stove 1 is provided with combustion pool 10.

[0032] The driving device 3 is fixed on the bottom support mechanism 2 in use, when the gas after being heated and vaporized enters the inside of the deposition furnace 1 through the gas inlet 9, the driving device 3 is started to drive the running device 4 to run, so that the plug-in seat 5 runs in the inside of the deposition furnace 1, the deposition groove 6 is driven to run in the inside of the deposition furnace 1, the airflow is driven to flow upwards at the bottom of the flow guide assembly 7, and the high-temperature molten quartz falls in the inside of the deposition groove 6 through the combustion pool 10, and the excess gas is discharged by the exhaust assembly 8.

[0033] The driving device 3 is fixed on the bottom support mechanism 2 in use, when the gas after being heated and vaporized enters the inside of the deposition furnace 1 through the gas inlet 9, the driving device 3 is started to drive the running device 4 to run, so that the plug-in seat 5 runs in the inside of the deposition furnace 1, the deposition groove 6 is driven to run in the inside of the deposition furnace 1, the airflow is driven to flow upwards at the bottom of the flow guide assembly 7, and the high-temperature molten quartz falls in the inside of the deposition groove 6 through the combustion pool 10, and the excess gas is discharged by the exhaust assembly 8.

[0034] In an embodiment, for the deposition furnace 1, the deposition furnace 1 comprises a deposition furnace body 101, a hearth 102 is arranged in the inside of the deposition furnace body 101, and extension furnace bodies 103 are fixedly connected to the two side surfaces of the deposition furnace body 101; and the combustion pool 10 is located in the inside of the extension furnace body 103.

[0035] The deposition groove 6 is located in the inside of the hearth 102, the extension furnace bodies 103 are arranged on the two sides of the deposition furnace body 101, so that the hearth 102 has symmetrical combustion pools 10 on the inner wall, the gas can be in contact with the combustion flame in a large range when entering the inside of the hearth 102, and can quickly present a molten state.

[0036] In an embodiment, for the bottom support mechanism 2, the bottom support mechanism 2 comprises a bottom support table 201, a horizontal table 202 is fixedly connected to the inner wall of the bottom support table 201, an isolation plate 203 is arranged at the top of the horizontal table 202, and the driving device 3 is fixedly connected to the bottom of the horizontal table 202.

[0037] The bottom support table 201 increases the bottom isolation height at the bottom of the deposition furnace body 101, the horizontal table 202 provides installation space for the driving device 3, and the isolation plate 203 above provides a blocking temperature effect for the driving device 3.

[0038] In one embodiment, for the above-mentioned driving device 3, the driving device 3 comprises a fixed plate 301, the bottom of the fixed plate 301 is provided with a driving motor 302, and the output end of the driving motor 302 is provided with a driving gear 303.

[0039] By fixing the fixed plate 301 on the horizontal table 202, when the driving motor 302 is started, it makes the driving gear 303 rotate, which drives the running device 4 on one side to run, and then the part extending into the furnace 102 drives the plug-in seat 5 and the top deposition groove 6 to run together to provide running driving force for the deposition groove 6.

[0040] In one embodiment, for the above-mentioned running device 4, the running device 4 comprises a running seat 401, the bottom of the running seat 401 is fixedly installed with a running shaft 402, the bottom of the running shaft 402 is fixedly installed with a running gear 403, the running seat 401 is located inside the furnace 102, and the plug-in seat 5 is plugged into the inside of the running seat 401.

[0041] When the driving motor 302 is started, the driving gear 303 at the output end drives the running gear 403 to run, so that the running shaft 402 drives the top running seat 401 to rotate, and the inside plug-in seat 5 is driven to rotate by the running seat 401 and drives the top deposition groove 6 to rotate.

[0042] By placing the driving motor 302 and the driving gear 303 outside the deposition furnace body 101, during the production of quartz glass, the driving gear 303 and the running gear 403 and other components provide running driving force for the plug-in seat 5 outside, and then indirectly drive the top deposition groove 6 to run, so that the molten quartz glass can be uniformly distributed on the inner wall of the deposition groove 6, and the running of the flow guide assembly 7 can differentiate the airflow to make it rise uniformly to improve the melting rate.

[0043] In one embodiment, for the above-mentioned flow guide assembly 7, the flow guide assembly 7 comprises a flow guide plate 701, the inner wall of the flow guide plate 701 is provided with a flow-through groove 702, and the flow guide plate 701 is symmetrically arranged at the bottom of the deposition groove 6.

[0044] When the plug-in seat 5 rotates, it drives the flow guide plate 701 to rotate together so that the airflow enters from the bottom, is driven by the flow guide plate 701 cooperating with the flow-through groove 702 to run uniformly, and makes the airflow uniformly contact with the flame outside the combustion pool 10.

[0045] In one embodiment, for the above-mentioned combustion pool 10, the inner wall of the combustion pool 10 is fixedly installed with a partition frame 11, and the inner wall of the partition frame 11 is provided with an inner through hole 12.

[0046] The plurality of inner through holes 12 arranged uniformly on the partition frame 11 help to split the flame into a plurality of flames, which extend along the inner through holes 12 to the inside of the hearth 102 and fully contact the continuously rising air flow.

[0047] In one embodiment, for the above-mentioned exhaust assembly 8, the exhaust assembly 8 comprises an exhaust top cover 801, the top of the exhaust top cover 801 is provided with an exhaust pipe 802, and the bottom of the exhaust top cover 801 is fixedly connected with a filter plate 803.

[0048] By arranging the filter plate 803 below the exhaust top cover 801, when the small particles contained in the continuously rising excess gas are blocked on the filter plate 803, the remaining gas continues to rise and is discharged from the inside of the exhaust pipe 802, so as to prevent the excess particles from gathering into large particles and falling onto the inner wall of the deposition tank 6 to cause adverse effects on the quartz glass.

[0049] Through the above technical solution, 1. By arranging the driving device 3 on the bottom support mechanism 2, when the vaporized silicon dioxide gas enters the inside of the deposition furnace 1, the driving device 3 drives the running device 4 to provide running driving force for the plug-in seat 5, so that the plug-in seat 5 can drive the deposition tank 6 at the top to run, cooperate with the rotation of the bottom guide assembly 7 to guide and homogenize the gas, so that it uniformly flows around the deposition tank 6 and contacts the outside of the combustion pool 10, and cooperate with the exhaust assembly 8 to adsorb the excess gas after melting to prevent more small particles from gathering together to form large particles and falling on the quartz glass to cause defects; 2. By arranging the driving motor 302 and the driving gear 303 outside the deposition furnace body 101, so that during the production of the quartz glass, the driving gear 303 and the running gear 403 and other components provide running driving force for the plug-in seat 5 outside, and then cooperate with the top deposition tank 6 to run indirectly, so that the melted quartz glass can be uniformly distributed on the inner wall of the deposition tank 6, and the running of the guide assembly 7 can differentiate the air flow to make it rise uniformly to improve the melting rate; By arranging the filter plate 803 below the exhaust top cover 801, when the small particles contained in the continuously rising excess gas are blocked on the filter plate 803, the remaining gas continues to rise and is discharged from the inside of the exhaust pipe 802, so as to prevent the excess particles from gathering into large particles and falling onto the inner wall of the deposition tank 6 to cause adverse effects on the quartz glass.

[0050] In the description of the application, references to "one embodiment", "an example", "certain examples" etc. mean that a particular feature, structure, material or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. The appearances of the phrases "in one embodiment", "an example" or "certain examples" in various places in the specification are not necessarily referring to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics can be combined in any suitable manner in one or more embodiments or examples.

[0051] The preferred embodiments of the application disclosed above are only used to help explain the application. The preferred embodiments do not describe all of the details of the application, nor limit the application to the specific embodiments described. Obviously, many modifications and variations of the application can be made in light of the teachings above. The embodiments are chosen and described in order to best explain the principles of the application and its practical application, thus enabling others skilled in the art to best utilize the application. The application is defined solely by the claims appended hereto and equivalents thereof, regardless and notwithstanding any limitations introduced by the description.

Claims

1. A deposition furnace for manufacturing synthetic quartz glass of high optical homogeneity, comprising a deposition furnace (1), characterized in that: The bottom of the deposition furnace (1) is fixedly provided with a bottom support mechanism (2), the inner wall of the bottom support mechanism (2) is provided with a driving device (3), one side of the driving device (3) is engaged with a running device (4), the inside of the running device (4) is inserted with a plug-in seat (5), the top of the plug-in seat (5) is fixedly provided with a deposition tank (6), the bottom of the deposition tank (6) is fixedly connected with a flow guide assembly (7), the top of the deposition furnace (1) is provided with an exhaust assembly (8), both sides of the deposition furnace (1) are fixedly provided with an air inlet (9), and the inside of the deposition furnace (1) is provided with a combustion pool (10).

2. The deposition furnace for producing synthetic quartz glass having high optical uniformity according to claim 1, wherein The deposition furnace (1) comprises a deposition furnace body (101), the inside of the deposition furnace body (101) is provided with a hearth (102), both sides of the deposition furnace body (101) are fixedly connected with an extended furnace body (103), and the combustion pool (10) is located in the inside of the extended furnace body (103).

3. The deposition furnace for producing synthetic quartz glass having high optical uniformity according to claim 1, wherein The bottom support mechanism (2) comprises a bottom support table (201), the inner wall of the bottom support table (201) is fixedly connected with a cross table (202), the top of the cross table (202) is provided with an isolation plate (203), and the driving device (3) is fixedly connected to the bottom of the cross table (202).

4. The deposition furnace for producing synthetic quartz glass having high optical uniformity according to claim 1, wherein The driving device (3) comprises a fixed plate (301), the bottom of the fixed plate (301) is provided with a driving motor (302), and the output end of the driving motor (302) is provided with a driving gear (303).

5. The deposition furnace for producing synthetic quartz glass having high optical uniformity according to claim 2, wherein The running device (4) comprises a running seat (401), the bottom of the running seat (401) is fixedly provided with a running shaft (402), the bottom of the running shaft (402) is fixedly provided with a running gear (403), the running seat (401) is located in the inside of the hearth (102), and the plug-in seat (5) is inserted into the inside of the running seat (401).

6. The deposition furnace for producing synthetic quartz glass having high optical uniformity according to claim 1, wherein The flow guide assembly (7) comprises a flow guide plate (701), the inner wall of the flow guide plate (701) is provided with a flow-through groove (702), and the flow guide plate (701) is symmetrically arranged at the bottom of the deposition tank (6).

7. The deposition furnace for producing synthetic quartz glass having high optical uniformity according to claim 1, wherein The inner wall of the combustion pool (10) is fixedly provided with a partition frame (11), and the inner wall of the partition frame (11) is provided with an inner through hole (12).

8. The deposition furnace for producing synthetic quartz glass having high optical uniformity according to claim 1, wherein The exhaust assembly (8) comprises an exhaust top cover (801), the top of the exhaust top cover (801) is provided with an exhaust pipe (802), and the bottom of the exhaust top cover (801) is fixedly connected with a filter plate (803).

Images