Gas phase coating furnace

Abstract

The utility model provides a gas phase cladding furnace, which relates to the technical field of gas phase deposition furnaces and comprises a furnace shell and a furnace tube, a heating component is arranged in the furnace shell, an air inlet and an air outlet are arranged on the furnace shell, the air inlet is used for connecting air inlet equipment, and a blocking mechanism capable of being opened and closed is arranged at the air outlet. The furnace tube is rotationally arranged in the furnace shell, and the heating assembly is distributed on the outer side of the furnace tube; according to the utility model, the air inlet and the air outlet are arranged on the furnace shell, so that the heated furnace tube can be cooled by air, the tube cooling time is shortened, and the production efficiency is improved; the blocking mechanism can control opening and closing of the exhaust outlet, heat is prevented from being dissipated from the exhaust outlet in the process of heating the furnace tube, and the heating efficiency of the furnace tube is guaranteed.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of vapor deposition furnace, especially relates to a vapor deposition furnace. BACKGROUND

[0002] With the rapid development of electric vehicles, energy storage power stations and portable electronic devices, high specific energy lithium ion batteries are attracting more and more attention. However, the graphite negative electrode still occupies a dominant position, and its theoretical specific capacity of 372 mAh / g cannot meet the requirements of high specific energy battery negative electrode materials, seriously restricting the improvement of lithium battery energy density.

[0003] Silicon or silicon-oxygen negative electrode material is the only new high-capacity negative electrode material that has been commercially applied.

[0004] At present, the mainstream commercial silicon monoxide composite negative electrode material is generally carbon-coated by a vertical vapor deposition furnace to improve the cycle performance of the material. According to the inventors' knowledge, the vapor deposition furnace needs to be heated during the coating operation, and the material needs to be discharged after the vapor deposition furnace cools down. The natural cooling time of the vapor deposition furnace is relatively long, which seriously affects the production efficiency. UTILITARY MODEL

[0005] The utility model aims at providing a vapor deposition furnace to solve the problems in the prior art, which can cool the heated furnace tube by air cooling through the air inlet and air outlet on the furnace shell, shorten the cooling time of the tube, and improve the production efficiency. Moreover, the sealing mechanism in the utility model can control the opening and closing of the air outlet, avoid heat emission from the air outlet during the heating of the furnace tube, and ensure the heating efficiency of the furnace tube.

[0006] To achieve the above-mentioned purpose, the utility model provides the following scheme:

[0007] A vapor deposition furnace includes a furnace shell and a furnace tube. The furnace shell is provided with a heating assembly. The furnace shell is provided with an air inlet and an air outlet. The air inlet is connected to an air inlet device. The air outlet is provided with a sealing mechanism that can be opened and closed. The furnace tube is rotatably arranged in the furnace shell. The heating assembly is distributed outside the furnace tube.

[0008] As an embodiment, the sealing mechanism includes a hinge seat, a telescopic pull rod and a heat preservation cover. The hinge seat is fixed on the furnace shell. The fixed end of the telescopic pull rod is hinged to the hinge seat, and the telescopic end is hinged to the heat preservation cover. The heat preservation cover is buckled at the air outlet. One end of the heat preservation cover near the hinge seat is hinged to the furnace shell.

[0009] As an embodiment, the heating assembly is arranged in multiple groups in the axial direction, and each group of the heating assembly further comprises multiple heating units arranged in the circumferential direction, and the heating units are mounted on the inner wall of the furnace shell.

[0010] As an embodiment, in the axial direction, one end of the furnace pipe is provided with an air inlet, and the other end is provided with a material inlet; an air inlet pipe is fixed at the air inlet, and the air inlet pipe is in transmission connection with the rotary driving device; one end of the air inlet pipe is inserted into the air inlet, and the other end of the air inlet pipe is exposed to the furnace pipe and connected with a first rotary joint, and the first rotary joint is connected with a gas source.

[0011] As an embodiment, the feeding mechanism further comprises a movable feeding support, and the feeding support is fixed with a feeding bin, a feeding motor and a feeding channel; the feeding bin is located above the feeding channel, the bottom of the feeding bin is in communication with the feeding channel, and the end of the feeding channel is used to extend into the furnace pipe from the material inlet; the output end of the feeding motor is fixed with an auger, and the auger is located in the feeding channel.

[0012] As an embodiment, the furnace plug is used for detachable connection at the material inlet, one end of the furnace plug is provided with a plugging plate used for plugging the material inlet, and a filter rod used for filtering the material in the furnace pipe is fixed on the plugging plate; the other end of the furnace plug is connected with the tail gas treatment mechanism through a second rotary joint, and the exhaust end of the filter rod is in communication with the tail gas treatment mechanism.

[0013] As an embodiment, the back flushing mechanism further comprises a high-pressure gas source and a flushing pipe, the flushing pipe penetrates through the rotary joint in the axial direction, and the end of the flushing pipe extends into the inside of the filter rod from the exhaust end of the filter rod; the flushing pipe is provided with a first valve; a second valve is arranged on the pipeline between the first rotary joint and the tail gas treatment mechanism.

[0014] As an embodiment, the machine frame and the telescopic ejector rod are further provided, the fixed end of the telescopic ejector rod is hinged with the machine frame, the telescopic end is hinged with the position close to the air inlet on the furnace shell, and the position close to the material inlet on the furnace shell is hinged with the machine frame.

[0015] As an embodiment, the discharging mechanism further comprises a movable discharging support, and the discharging support is provided with a discharging bin, and the top of the discharging bin is in communication with the tail gas treatment mechanism through a pipeline.

[0016] As an embodiment, the tail gas treatment mechanism comprises a movable tail gas treatment support, a liquid seal tank, a cyclone condensing pipe and a dust removal tank are sequentially connected on the tail gas treatment support, the liquid seal tank is provided with a tail gas inlet, and the dust removal tank is provided with an exhaust port.

[0017] The utility model discloses have the following technical effects relative to the prior art:

[0018] The utility model discloses can carry out air cooling to the heating furnace pipe through setting the air inlet and the air outlet on the furnace shell, shorten the cooling time of the cooling pipe, improve production efficiency, and the plugging mechanism in the utility model discloses can control the opening and closing of the air outlet, plugging mechanism is plugged to the air outlet in the process of heating furnace pipe, can avoid the heat from the air outlet, guarantees the heating efficiency of furnace pipe.

[0019] The utility model discloses have the following technical effects relative to the prior art:

[0020] The utility model discloses set up the filter stick to filter material through setting the filter stick at the material port, and allow gas to discharge, avoid material from being carried out furnace pipe by gas, guarantee the material quality accuracy in furnace pipe, and the backblowing mechanism that sets up can backblow to the filter stick, guarantee its filtering effect. BRIEF DESCRIPTION OF DRAWINGS

[0021] In order to more clearly illustrate the technical scheme in the embodiment of the utility model or prior art, the following will briefly introduce the drawing needed to be used in the embodiment, and obviously, the drawing in the following description is only some embodiments of the utility model, and for those skilled in the art, other drawings can also be obtained according to these drawings without paying the creativity of labor.

[0022] Figure 1 It is the structure schematic drawing of furnace pipe and feeding mechanism connection in an embodiment of the utility model;

[0023] Figure 2 It is the structure schematic drawing of furnace pipe and furnace plug, tail gas treatment mechanism connection in an embodiment of the utility model;

[0024] Figure 3 It is Figure 2 The top view;

[0025] Figure 4 It is the structure schematic drawing of furnace pipe and discharge structure connection in an embodiment of the utility model;

[0026] Figure 5 It is Figure 4 The left view;

[0027] Figure 6 It is the structure schematic drawing of gas control module in an embodiment of the utility model;

[0028] Figure 7 It is a structure schematic view of the furnace plug in an embodiment of the utility model;

[0029] Figure 8 It is Figure 7 The left view of

[0030] Figure 9 It is a structure schematic view of the vibrating mechanism in an embodiment of the utility model.

[0031] Mark explanation:

[0032] 10, furnace shell; 11, furnace tube; 12, heating assembly; 13, stirring blade; 14, plugging mechanism; 15, air blower; 16, hinged seat; 17, telescopic pull rod; 18, heat preservation cover; 19, air inlet pipe; 110, first rotary joint; 111, gear; 112, driving motor; 113, vibrating mechanism; 114, metal ball;

[0033] 20, first manual valve; 21, pressure gauge; 22, check valve; 23, flowmeter; 24, second manual valve; 25, third manual valve; 26, air inlet flange; 27, fourth manual valve; 28, micro-pressure transmitter;

[0034] 30, feeding support; 31, feeding bin; 32, feeding motor; 33, feeding channel; 34, auger;

[0035] 40, furnace plug; 41, plugging plate; 42, filter stick; 43, second rotary joint; 44, high-pressure gas source; 45, purging pipe; 46, first valve; 47, second valve;

[0036] 50, rack; 51, telescopic ejector rod; 52, support frame;

[0037] 60, discharging support; 61, discharging bin;

[0038] 70, tail gas treatment support; 71, liquid seal tank; 72, cyclone condensing tank; 73, dust removal tank; 74, exhaust port; 75, rotary motor. DETAILED DESCRIPTION

[0039] The technical scheme in the embodiments of the utility model will be described clearly and completely below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0040] The utility model discloses a gas phase cladding furnace to solve the prior art problems, the air inlet and the air outlet can be set up on the furnace shell, and the heated furnace tube can be air-cooled, the cooling time of the furnace tube is shortened, and the production efficiency is improved.

[0041] In order to make the above-mentioned purpose, features and advantages of the utility model more obvious and easy to understand, the utility model will be further explained in detail in combination with the drawings and specific embodiments.

[0042] As Figures 1-9 The utility model discloses a gas phase cladding furnace, including furnace shell 10 and furnace tube 11, be provided with heating assembly 12 in furnace shell 10, furnace tube 11 is usually metal material, be provided with stirring vane 13 on the inner wall of furnace tube 11, specifically, the middle part of furnace tube 11 is horizontal stirring vane, and both sides are inclined stirring vane, and the inclination angle is 15 ° ~ 45 °, and both sides are distributed to each other, and the height of stirring vane 13 is 5mm ~ 40mm, can make material can be fully turned up and down, and material and process gas are contacted fully. The air inlet and the air outlet are arranged on the furnace shell 10, the air inlet is used for connecting the air inlet equipment, and the air outlet is provided with the sealing mechanism 14 that can open and close. Usually, the air inlet is arranged at the bottom of the furnace shell, and the air outlet is arranged at the top of the furnace shell. The furnace tube 11 is rotatably arranged in the furnace shell 10, and the heating assembly 12 is distributed on the outside of the furnace tube 11. When using, the air inlet is connected with the air inlet equipment, for example, the air blower 15, the sealing mechanism 14 seals the air outlet, the heating assembly 12 heats the furnace tube 11, to reach the temperature required in the material cladding process. After the cladding process is completed, the sealing mechanism 14 opens the air outlet, the air blower 15 is started, and the external air enters the furnace shell 10 under the action of the air blower 15, and the furnace tube 11 is air-cooled and cooled, and then discharged from the air outlet. When the furnace tube 11 is lowered to the set temperature, the material is discharged.

[0043] Therefore, the air inlet and the air outlet can be set up on the furnace shell 10, and the heated furnace tube 11 can be air-cooled, the cooling time of the furnace tube is shortened, and the production efficiency is improved. Moreover, the sealing mechanism 14 in the utility model can control the opening and closing of the air outlet, and in the process of heating the furnace tube 11, the sealing mechanism 14 seals the air outlet to avoid heat emission from the air outlet, and ensures the heating efficiency of the furnace tube 11.

[0044] The blocking mechanism 14 in the embodiment includes a hinged seat 16, an extension rod 17 and a heat preservation cover 18. The hinged seat 16 is fixed on the furnace shell 10. The fixed end of the extension rod 17 is hinged with the hinged seat 16, and the extension end is hinged with the heat preservation cover 18. The heat preservation cover 18 is buckled at the air outlet. The end of the heat preservation cover 18 close to the hinged seat 16 is hinged with the furnace shell 10. The extension rod 17 can be extended to ensure that the heat preservation cover 18 is buckled at the air outlet, and the extension rod 17 can be shortened to open the heat preservation cover 18. The extension rod 17 can be a hydraulic rod, a pneumatic rod or an electric push rod.

[0045] In the embodiment, the heating assembly 12 is arranged in the axial direction. Each group of the heating assembly 12 further includes a plurality of heating units arranged in the circumferential direction. The heating units are installed on the inner wall of the furnace shell 10. Specifically, the heating unit includes a heat preservation block embedded in the furnace shell 10 and a heating resistance wire. The heat preservation block is composed of an aluminum silicate fiber vacuum casting module. A lightweight aluminum silicate fiber blanket is laid outside as a heat preservation layer. The heat preservation block has a gap with the furnace tube 11. The heating resistance wire is spirally wound by iron-chromium-aluminum heating wire and is pre-embedded in the heat preservation block mold during casting. In the embodiment, the inside of the furnace shell 10 is divided into three regions A, B and C in the axial direction. Each region is divided into an upper half region and a lower half region. The heating units are arranged in each half region. Thus, the inside of the furnace shell 10 in the embodiment is divided into six heating zones, which can realize temperature gradient control and control of different temperature zones. In the embodiment, the heat preservation block is provided with a ventilation channel opposite the air outlet on the furnace shell 10.

[0046] In the axial direction, one end of the furnace tube 11 is provided with an air inlet, and the other end is provided with a material inlet. An air inlet pipe 19 is fixed at the air inlet. The air inlet pipe 19 is used for transmission connection with the rotary driving device. Specifically, the air inlet pipe 19 is provided with a gear 111. The rotary driving device can include a driving motor 112 and a speed reducer. The output shaft of the speed reducer is provided with a driving gear 111 engaged with the gear 111. One end of the air inlet pipe 19 is inserted into the air inlet. The other end of the air inlet pipe 19 is exposed to the furnace tube 11 and connected with a first rotary joint 110. The first rotary joint 110 is connected with a gas source, which can ensure that the gas supply process is not affected by the rotation of the air inlet pipe 19. The position of the air inlet on the furnace tube 11 is also welded with a vibrating mechanism 113. The vibrating mechanism 113 is symmetrically welded with two groups. During the rotation of the furnace tube 11, the metal balls 114 in the vibrating mechanism 113 will fall due to gravity and intermittently knock the furnace tube 11 to prevent the material on the wall of the furnace tube 11 from sticking.

[0047] During the whole coating process, which usually includes feeding, air exhausting, coating and discharging, the air exhausting process usually uses inert gas or nitrogen to exhaust the air in the furnace tube 11, and the coating process needs to use process gas. Therefore, during the whole coating process, different gases need to be introduced through the gas inlet pipe 19 according to different stages. The embodiment also includes a gas control module, which contains three gas control paths. Each gas control path includes a first manual valve 20, a pressure gauge 21, a one-way valve 22, a flow meter 23 and a second manual valve 24 connected in sequence. The first manual valve 20 in each gas control path can be connected to different gas sources, and the second manual valve 24 in the three gas control paths is connected to a four-way joint. One of the remaining ports in the four-way joint is connected to the gas inlet flange 26 through the third manual valve 25, and the gas inlet flange 26 is in communication with the gas inlet pipe 19. Specifically, the third manual valve 25 and the gas inlet flange 26 are respectively connected to two ends of a three-way joint, and the other end of the three-way joint is connected to the micro-pressure transmitter 28 through the fourth manual valve 27. In use, different process gases can be introduced into the furnace tube 11 through different gas control paths, and the flow meter 23 can adjust the flow of different gases to ensure process stability. The micro-pressure transmitter 28 can monitor the pressure change in the furnace tube 11 during work.

[0048] Since the material port needs to be fed and discharged in the embodiment, the equipment connected to the material port is actually switched according to different stages. Therefore, the embodiment also includes a feeding mechanism, which includes a movable feeding support 30. Specifically, the bottom of the feeding support 30 is provided with walking wheels with locking function. The feeding support 30 is fixed with a feeding bin 31, a feeding motor 32 and a feeding channel 33; the feeding bin 31 is located above the feeding channel 33, the bottom of the feeding bin 31 is in communication with the feeding channel 33, and the end of the feeding channel 33 is used to extend into the furnace tube 11 from the material port; the output end of the feeding motor 32 is fixed with an auger 34, and the auger 34 is located in the feeding channel 33.

[0049] After the feeding is completed, the air in the furnace tube 11 needs to be exhausted, and then the process gas is introduced to coat the material. However, the particle size of the material is very small, and the material will be raised during the exhaust process and the coating process. Especially during the coating process, the furnace tube 11 is rotating, and the material will be raised sharply under the action of the stirring blade 13. During the exhaust process and the coating process, the replacement gas or the process gas used in the coating process is in a state of continuous introduction and continuous exhaust, which causes the exhaust gas to carry away part of the material, thereby causing the material in the furnace tube 11 to continuously decrease. In order to avoid this problem, the embodiment further includes a furnace plug 40 for detachable connection at the material port, one end of the furnace plug 40 is provided with a plugging plate 41 for plugging the material port, and a filter rod 42 for filtering the material in the furnace tube 11 is fixed on the plugging plate 41; the other end of the furnace plug 40 is connected with the tail gas treatment mechanism through a second rotary joint 43, and the exhaust end of the filter rod 42 is communicated with the tail gas treatment mechanism. Thus, the embodiment filters the material by arranging the filter rod 42 at the material port, allowing the gas to be exhausted, avoiding the material being carried out of the furnace tube 11 by the gas, and ensuring the accuracy of the material quality in the furnace tube 11.

[0050] The filter rod 42 may be blocked after a long time of use, affecting the gas exhaust. In order to prolong the service life of the filter rod 42 and ensure the normal exhaust process, the embodiment further includes a back flushing mechanism, the back flushing mechanism includes a high-pressure gas source 44 and a purge pipe 45, the high-pressure gas source 44 can be a gas storage tank storing inert gas or nitrogen, the purge pipe 45 penetrates the rotary joint in the axial direction, and the end of the purge pipe 45 extends into the inside of the filter rod 42 from the exhaust end of the filter rod 42; the purge pipe 45 is provided with a first valve 46; a second valve 47 is arranged on the pipeline between the first rotary joint 110 and the tail gas treatment mechanism. During the exhaust process of the furnace tube 11, the first valve 46 is closed, the second valve 47 is opened, and the air in the furnace tube 11 is replaced by the replacement gas (usually nitrogen or inert gas). During the material coating process, the second valve 47 is opened, the first valve 46 is closed, and the process gas can be exhausted; after a certain period of time, the first valve 46 is opened, the second valve 47 is closed, and the gas in the high-pressure gas source 44 acts on the inside of the filter rod 42 from the purge pipe 45 to back flush the filter rod 42, and blow out the material in the filter hole of the filter rod 42. The blowing action can last for 1s~2s. After the blowing action is completed, the first valve 46 is closed, the second valve 47 is opened, and the furnace tube 11 can be exhausted. The staff can set the interval length of the blowing action according to the actual situation.

[0051] The embodiment further comprises a rack 50 and a telescopic top rod 51, the bottom of the rack 50 is provided with a height-adjustable support frame 52, the fixed end of the telescopic top rod 51 is hinged to the rack 50, the telescopic end is hinged to a position on the furnace shell 10 close to the air inlet, and the position on the furnace shell 10 close to the material inlet is hinged to the rack 50, the telescopic top rod 51 can be extended to lift one end of the air inlet in the furnace tube 11 on the furnace shell 10, so that the furnace tube 11 is inclined to unload, and the inclination angle is generally about 14°. The telescopic top rod 51 can be a hydraulic rod or an electric push rod.

[0052] The embodiment further comprises a discharging mechanism, the discharging mechanism comprises a movable discharging support 60, the bottom of the discharging support 60 is provided with a walking wheel with a locking function, and the discharging support 60 is provided with a discharging bin 61, and the top of the discharging bin 61 is communicated with the tail gas treatment mechanism through a pipeline.

[0053] As an embodiment, the tail gas treatment mechanism comprises a movable tail gas treatment support 70, the tail gas treatment support 70 is provided with a liquid seal tank 71, a cyclone condensing pipe and a dust removal tank 73 which are sequentially communicated, the liquid seal tank 71 is provided with a tail gas inlet, and the dust removal tank 73 is provided with an exhaust port 74. After the tail gas is discharged, the tail gas enters the liquid seal tank 71 first, since the pipe opening of the tail gas inlet pipe 19 of the liquid seal tank 71 is located below the liquid level, the tail air can be prevented from entering the furnace tube 11. The tail gas is cooled after passing through the liquid seal tank 71, and part of the dust in the tail gas is adsorbed by the liquid, and the furnace pressure can be adjusted by increasing the liquid level in the liquid seal tank 71. The top of the cyclone condensing tank 72 is provided with a rotating motor 75, the cyclone condensing tank 72 can condense tar in the tail gas, and the tar can be collected through the tar discharge port below. The dust removal tank 73 removes the dust to make the tail gas meet the reasonable emission requirements.

[0054] The adaptive changes according to actual requirements are within the protection scope of the utility model.

[0055] The principle and implementation mode of the utility model are described by applying specific examples in the utility model, and the above embodiment is only used for helping to understand the method and core idea of the utility model; meanwhile, according to the idea of the utility model, the specific implementation mode and application range will be changed by the general technical personnel in the field. In conclusion, the content of the specification should not be understood as the limitation of the utility model.

Claims

1. A gas phase cladding furnace characterized by, The utility model provides a kind of rotary furnace, including: Furnace shell, heating assembly is arranged in the furnace shell, air inlet and air outlet are provided on the furnace shell, the air inlet is used to connect air inlet equipment, the air outlet is provided with the closure mechanism that can be opened and closed; And furnace tube, the furnace tube is rotationally arranged in the furnace shell, and the heating assembly is distributed outside the furnace tube; The closure mechanism includes hinged seat, telescopic pull rod and heat preservation cover, the hinged seat is fixed on the furnace shell, the fixed end of telescopic pull rod is hinged with the hinged seat, and the telescopic end is hinged with the heat preservation cover, the heat preservation cover is buckled at the air outlet, and the end of the heat preservation cover close to the hinged seat is hinged with the furnace shell.

2. The gas-phase coating furnace according to claim 1, characterized in that The heating assembly is provided with multiple groups in axial direction, and each group of the heating assembly further includes a plurality of heating units arranged in circumferential direction, and the heating units are mounted on the inner wall of the furnace shell.

3. The gas-phase coating furnace according to claim 1, characterized in that In axial direction, one end of the furnace tube is provided with air inlet, and the other end is provided with material port;Air inlet pipe is fixed at the air inlet, and the air inlet pipe is used to be drivingly connected with rotary driving equipment;One end of the air inlet pipe is inserted into the air inlet, and the other end of the air inlet pipe is exposed to the furnace tube and connected with first rotary joint, and the first rotary joint is connected with gas source.

4. The gas-phase coating furnace according to claim 3, characterized in that Further including feeding mechanism, the feeding mechanism includes movable feeding support, feeding bin, feeding motor and feeding channel are fixed on the feeding support;The feeding bin is located above the feeding channel, the bottom of the feeding bin is communicated with the feeding channel, and the end of the feeding channel is used to extend into the furnace tube from the material port;The output end of the feeding motor is fixed with auger, and the auger is located in the feeding channel.

5. The gas-phase coating furnace according to claim 3, characterized in that Further including furnace plug for detachably connected at the material port, one end of the furnace plug is provided with blocking plate for blocking the material port, and filter stick for filtering material in the furnace tube is fixed on the blocking plate;The other end of the furnace plug is connected with tail gas treatment mechanism through second rotary joint, and the exhaust end of the filter stick is communicated with the tail gas treatment mechanism.

6. The gas-phase coating furnace according to claim 5, characterized in that Further including backflushing mechanism, the backflushing mechanism includes high-pressure gas source and purge pipe, the purge pipe penetrates the rotary joint in axial direction, and the end of the purge pipe extends into the filter stick from the exhaust end of the filter stick;First valve is arranged on the purge pipe;Second valve is arranged on the pipeline between the first rotary joint and the tail gas treatment mechanism.

7. The gas-phase coating furnace according to claim 3, characterized in that Further including rack and telescopic ejector rod, the fixed end of the telescopic ejector rod is hinged with the rack, the telescopic end is hinged with the position close to the air inlet on the furnace shell, and the position close to the material port on the furnace shell is hinged with the rack.

8. The gas-phase coating furnace according to claim 7, characterized in that Further including discharging mechanism, the discharging mechanism includes movable discharging support, and discharging bin is arranged on the discharging support, and the top of the discharging bin is communicated with tail gas treatment mechanism through pipeline.

9. A gas phase coating furnace according to claim 5 or 8, characterized in that The tail gas treatment mechanism includes movable tail gas treatment support, and liquid seal tank, cyclone condenser pipe and dust removal tank are sequentially communicated on the tail gas treatment support, tail gas inlet is arranged on the liquid seal tank, and exhaust port is arranged on the dust removal tank.

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