Reaction furnace and coating equipment
By adjusting the heating and power components with insulated connections in the coating equipment, the problem that heating and ionization cannot be carried out simultaneously during the coating process was solved, thereby improving heating efficiency and stability.
Patent Information
- Application Number
- CN202520174044.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-24
- Publication Date
- 2025-12-19
- Estimated Expiration
- 2035-01-24
AI Technical Summary
During the coating process, the ionization of the reactive gas around the sheet in the furnace cavity and the heating of the heating components cannot be carried out simultaneously, causing the heating components to trip frequently and affecting the continuity of the coating process.
Multiple heating components are insulated from the carrier and connected to it. A second power supply component provides DC power or AC power converted by a transformer. Alternatively, an insulating layer is covered on the outer surface of the heating components to prevent plasma from interfering with the heating circuit and to ensure that heating and ionization occur simultaneously.
This technology enables simultaneous heating and ionization during the coating process, improving heating efficiency and coating stability while reducing the failure rate of heating components.
Smart Images
Figure CN223688451U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present disclosure relates to the field of semiconductor and photovoltaic technology, and particularly relates to a reaction furnace and a coating equipment. BACKGROUND
[0002] In the processing of semiconductor or photovoltaic materials, a processing equipment is usually used to coat a thin film of silicon-containing material on the surface of a wafer. Common processing equipment includes a plasma enhanced chemical vapor deposition (PECVD) equipment, a low pressure chemical vapor deposition (LPCVD) equipment, an atmospheric pressure chemical vapor deposition (APCVD) equipment, etc. A wafer carrying mechanism is used as a carrier of the wafer, and enters a reaction furnace of the processing equipment together with the wafer. The wafer in the reaction furnace reacts under certain temperature and pressure conditions to achieve the coating of the wafer surface. In order to improve the heating efficiency and uniformity of the wafer in the reaction furnace, a heating component is usually arranged in the furnace cavity of the reaction furnace, close to the wafer carrying mechanism. However, it is found in use that when the coating work of ionizing the reaction gas around the wafer in the furnace cavity to generate plasma and the heating work of the heating component on the wafer are simultaneously performed, the power supply connected to the heating component is prone to frequent tripping as the power increases, which causes the coating work to be unable to proceed smoothly. SUMMARY
[0003] Therefore, the present disclosure provides a reaction furnace and a coating equipment to solve the problem that the work of ionizing the gas around the wafer in the furnace cavity and the work of heating the wafer cannot be simultaneously performed in the related art.
[0004] In a first aspect, an embodiment of the present disclosure provides a reaction furnace configured to coat a sheet, the sheet being carried by a sheet carrying mechanism, the sheet carrying mechanism comprising a plurality of carriers arranged along a first direction, each carrier being configured to carry at least one sheet, the reaction furnace comprising: a furnace body having a furnace cavity, the sheet carrying mechanism being capable of being placed in the furnace cavity; a radio frequency assembly electrically connected to the plurality of carriers respectively; a heating assembly insulatedly connected to the carriers, the heating assembly being configured to heat the sheet carried by the carriers; a first power supply assembly electrically connected to the radio frequency assembly, the first power supply assembly being configured to provide a radio frequency power to the radio frequency assembly, the radio frequency assembly conducting the radio frequency power provided by the first power supply assembly to the plurality of carriers, so that each two adjacent carriers have opposite polarities; a second power supply assembly electrically connected to the heating assembly, the second power supply assembly being configured to provide a heating power to the heating assembly, the heating power comprising a direct current power, or the heating power comprising an alternating current power converted by a transformer; or at least an outer surface of the heating assembly is covered with an insulating layer that insulates plasma.
[0005] In some embodiments, the carrier is provided with at least one hollow region, each hollow region being configured to carry a sheet, a carrying portion being arranged on a peripheral side of the hollow region, the carrying portion being configured to carry the sheet, so that the carrying portions of the plurality of carriers arranged along the first direction carry a plurality of sheets as a sheet group, the heating assembly comprises: at least one first heating assembly insulatedly connected to the carrier, each first heating assembly being arranged on one side of at least one sheet group in a vertical direction; at least one second heating assembly insulatedly connected to the carrier, each second heating assembly being arranged on the other side of at least one sheet group in the vertical direction; and at least one third heating assembly insulatedly connected to the carrier, the third heating assembly being arranged on at least one side of each sheet group in a second direction, the second direction intersecting the first direction and intersecting the vertical direction, the first heating assembly, the second heating assembly and the third heating assembly being electrically connected to the second power supply assembly.
[0006] In some embodiments, each carrier comprises a plurality of hollow regions arranged along a second direction, so that the plurality of carriers carry a plurality of sheet groups arranged along the second direction, the heating assembly further comprises: a first electrode assembly arranged on the sheet carrying mechanism, the first electrode assembly being insulated from the carriers, the first electrode assembly connecting the corresponding first heating assembly, the second heating assembly and the third heating assembly of each sheet group, and the first electrode assembly being electrically connected to the second power supply assembly; or a plurality of second electrode assemblies arranged on the sheet carrying mechanism, each second electrode assembly being insulated from the carriers, each second electrode assembly connecting the corresponding first heating assembly, the second heating assembly and the third heating assembly of a sheet group, and the plurality of second electrode assemblies being electrically connected to the second power supply assembly respectively.
[0007] In some embodiments, the first heating assembly is located above the carrier in the vertical direction, and a first gap is formed between the first heating assembly and the carrier, the first gap being greater than or equal to 2 mm; and / or, the second heating assembly is located below the carrier in the vertical direction, and a second gap is formed between the second heating assembly and the carrier, the second gap being greater than or equal to 2 mm; and / or, the carrier is provided with a relief hole penetrating in the first direction on each side of each hollowed region in the second direction, the relief hole is located on the side of the carrier away from the hollowed region in the first direction, and in the case that the sheet is carried by the carrier through the carrier, the orthographic projection of the sheet on the carrier in the first direction does not overlap with the relief hole, each third heating assembly extends in the first direction and passes through a plurality of relief holes located on the same side of the hollowed region and arranged in sequence in the first direction, and the third heating assembly has a third gap to the edge of the relief hole, the third gap being greater than or equal to 2 mm.
[0008] In some embodiments, the heating assembly comprises at least one conductive connecting piece, the conductive connecting piece electrically connecting the first heating assembly and the third heating assembly corresponding to each sheet group, and / or the conductive connecting piece electrically connecting the second heating assembly and the third heating assembly corresponding to each sheet group; in the case that the conductive connecting piece electrically connects the first heating assembly, the second heating assembly and the third heating assembly corresponding to each sheet group, the heating assembly further comprises at least one first insulating piece connecting the first heating assembly to the carrier, so that the first heating assembly is located above the carrier; at least one second insulating piece connecting the second heating assembly to the carrier, so that the second heating assembly is located below the carrier, and the two ends of the third heating assembly passing through the relief hole in the first direction are connected to the corresponding first heating assembly and second heating assembly through the conductive connecting piece.
[0009] In some embodiments, a support is further included and is arranged in the furnace cavity, and the sheet carrying mechanism can be placed on the support; in the case that the heating assembly comprises the first electrode assembly, the reaction furnace further comprises a first conductive block which is insulatively connected to the support, and in the case that the sheet carrying mechanism is placed on the support, the first electrode assembly is in contact with the first conductive block; a first lead wire which electrically connects the first conductive block and the second power supply assembly; in the case that the heating assembly comprises the second electrode assembly, the reaction furnace further comprises a plurality of second conductive blocks which are insulatively connected to the support, the plurality of second conductive blocks are arranged at intervals in the second direction, and in the case that the sheet carrying mechanism is placed on the support, the plurality of second electrode assemblies are respectively in contact with the plurality of second conductive blocks; and a plurality of second lead wires, each second lead wire electrically connecting a second conductive block and the second power supply assembly.
[0010] In some embodiments, in the case that the first conducting wire electrically connects the first conducting block and the first power supply component and the outer surface of the heating component is covered with an insulating layer that insulates plasma, other surfaces of the first conducting block and the surface of the first conducting wire are covered with the insulating layer except the surface of the first conducting block that is in contact with the first electrode component; in the case that the second conducting wire electrically connects the second conducting block and the second power supply component and the outer surface of the heating component is covered with an insulating layer that insulates plasma, other surfaces of the second conducting block and the surface of the second conducting wire are covered with the insulating layer except the surface of each second conducting block that is in contact with the second electrode component.
[0011] In some embodiments, in the case that at least the outer surface of the heating component is covered with an insulating layer that insulates plasma, the heating power supply comprises an alternating current power supply converted by a transformer, or the heating power supply comprises a direct current power supply.
[0012] In some embodiments, the radio frequency power supplied by the first power supply component to the radio frequency component has a first radio frequency power, and the first radio frequency power is greater than or equal to 500 W.
[0013] In a second aspect, the embodiments of the present disclosure further provide a coating equipment, comprising: a sheet carrying mechanism comprising a plurality of carrying members arranged at intervals along a first direction, each carrying member being configured to carry at least one sheet; and the reaction furnace described above, the sheet carrying mechanism being capable of being placed in the furnace cavity of the reaction furnace, and the reaction furnace being configured to coat the sheet carried by the carrying member placed in the furnace cavity of the reaction furnace.
[0014] The reaction furnace and the coating equipment provided by the embodiments of the present disclosure can heat the sheet in the sheet carrying mechanism by the second power supply component and the heating component, and adjust the heating power supplied by the second power supply component to the heating component, so that the heating power is a direct current power supply, or the heating power is an alternating current power supply converted by a transformer, or at least the outer surface of the heating component is covered with an insulating layer that insulates plasma, so as to avoid the plasma generated by the glow discharge from interfering with the heating circuit enclosed by the heating component and the second power supply component, and ensure that the heating and the ionization of the reaction gas of the sheet in the reaction furnace can be performed simultaneously.
[0015] In addition, the heating power supplied by the second power supply component to the heating component is adjusted, so that the heating power is a direct current power supply, or the heating power is an alternating current power supply converted by a transformer, or at least the outer surface of the heating component is covered with an insulating layer that insulates plasma, so that the heating component can be closer to the carrying member of the sheet carrying mechanism, and when the heating component is installed in the sheet carrying mechanism, the overall volume can be reduced, and the occupied space of the sheet carrying mechanism with the heating component installed in the furnace cavity is reduced. BRIEF DESCRIPTION OF DRAWINGS
[0016] The above and other objects, features and advantages of the present disclosure will become more apparent from the following detailed description when taken in conjunction with the accompanying drawings in which:
[0017] Figure 1 Fig. 1 shows a simple schematic diagram of a coating equipment provided by an embodiment of the present disclosure.
[0018] Figure 2 Fig. 2 shows a schematic diagram of a sheet carrying mechanism provided by an embodiment of the present disclosure placed in a furnace cavity of a reaction furnace.
[0019] Figure 3 Fig. 3 shows a front view of a sheet carrying mechanism provided by an embodiment of the present disclosure.
[0020] Figure 4 Fig. 4 shows a schematic diagram of a heating assembly electrically connected to a second power supply assembly provided by an embodiment of the present disclosure.
[0021] Figure 5 Fig. 5 shows a schematic diagram of a heating assembly electrically connected to a second power supply assembly provided by another embodiment of the present disclosure.
[0022] Figure 6 Fig. 6 shows a front view of a heating assembly provided by an embodiment of the present disclosure.
[0023] Figure 7 Fig. 7 shows a front view of a heating assembly provided by another embodiment of the present disclosure.
[0024] Reference signs:
[0025] 100, coating equipment; 101, reaction furnace; 10, sheet carrying mechanism; 1, carrying member; 11, hollowed region; 111, carrying part; 12, avoiding hole; 13, pin electrode hole; 20, furnace body, 201, furnace cavity; 202, furnace mouth; 30, heating assembly; 3a, heating unit; 31, first heating assembly; 311, first heating strip; 32, second heating assembly; 321, second heating strip; 33, third heating assembly; 331, third heating strip; 34, second electrode assembly; 35, first electrode assembly; 36, conductive connecting member; 40, sheet; 40a, sheet group; 50, radio frequency assembly; 60, first power supply assembly; 70, second power supply assembly; 701, direct current power supply; 702, alternating current power supply converted through transformer; 80, supporting member; 801, second conductive block; 802, second conductive wire; 102, power supply equipment; X, first direction; Y, second direction; Z, vertical direction. DETAILED DESCRIPTION
[0026] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments of this disclosure, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this disclosure.
[0027] Figure 1 The diagram shown is a simplified schematic of a coating apparatus provided in an embodiment of this disclosure. Figure 2 The diagram shown is a schematic of a sheet support mechanism provided in an embodiment of the present disclosure placed inside the furnace cavity of a reactor. Figure 3 The image shown is a front view of a sheet support mechanism provided in an embodiment of this disclosure. Figure 4 The diagram shown is a schematic diagram of the electrical connection between a heating component and a second power supply component according to an embodiment of this disclosure. Figure 5 The diagram shown is a schematic representation of the electrical connection between a heating assembly and a second power supply assembly according to another embodiment of this disclosure. Arrow X points to a first direction, arrow Y points to a second direction, and arrow Z points to a vertical direction. The first direction X, the second direction Y, and the vertical direction Z intersect each other. In this embodiment, the first direction X, the second direction Y, and the vertical direction Z are perpendicular to each other. The second direction Y is the length direction of the sheet support mechanism 10 and also the extension direction of the reactor 101, and will not be emphasized separately thereafter.
[0028] This disclosure provides a reactor, such as... Figures 1 to 5 The coating equipment 100 is configured to coat a sheet 40, which is supported by a sheet support mechanism 10. The sheet support mechanism 10 includes a plurality of support members 1 spaced apart along a first direction X, each support member 1 being configured to carry at least one sheet 40. The reactor 101 includes a furnace body 20 having a furnace cavity 201, and the sheet support mechanism 10 carrying the unprocessed sheet can be placed within the furnace cavity 201 to coat the surface of the sheet 40.
[0029] Optionally, the sheet 40 can be a solar cell, which needs to be processed through different processes to finally become a usable solar cell product. The shape of the solar cell can be, for example, rectangular, square, circular, etc., without specific limitation. Among the multiple sheets 40 supported by the sheet support mechanism 10, multiple sheets 40 arranged at intervals along the first direction X are considered as a sheet group 40a. The sheet support mechanism 10 can support only one sheet group 40a, or it can support multiple sheets group 40a arranged at intervals along the second direction Y. The spacing between two adjacent sheets 40 in each sheet group 40a can be adaptively adjusted according to actual needs, without specific limitation.
[0030] It can be understood that the coating equipment 100 can be a PECVD device, an LPCVD device, an APCVD device, etc. In the present embodiment, the coating equipment 100 is set as a PECVD device, which can include a power supply device 102 and a reaction furnace 101. The power supply device 102 is configured to supply power to the reaction furnace 101, and no detailed description is given.
[0031] The reaction furnace 101 further includes a radio frequency assembly 50 and a first power supply assembly 60. The radio frequency assembly 50 is electrically connected to the plurality of carriers 1, respectively, and the radio frequency assembly 50 is electrically connected to the first power supply assembly 60. The first power supply assembly 60 is configured to provide radio frequency power to the radio frequency assembly 50. The radio frequency assembly 50 conducts the radio frequency power provided by the first power supply assembly 60 to the plurality of carriers 1, so that each adjacent two carriers 1 have opposite polarities. After the sheet carrier mechanism 10 carrying the unprocessed sheet is placed in the furnace cavity 201, the reaction gas is filled into the furnace cavity 201 of the reaction furnace 101, and after the sheet 40 reaches the set pressure and temperature, the reaction gas between the two carriers 1 with opposite polarities is ionized to generate plasma, and the plasma is attached to the surface of the sheet 40 to achieve coating.
[0032] Optionally, the furnace body 20 of the reaction furnace 101 extends along the second direction Y and is provided with a furnace opening 202 at one end of the second direction Y, which is in communication with the furnace cavity 201. The furnace opening 202 is provided with a furnace door that can be opened and closed, and the sheet carrier mechanism 10 can enter and exit the furnace cavity 201 from the furnace opening 202. The radio frequency assembly 50 for electrically connecting the carriers 1 on the sheet carrier mechanism 10 can be arranged on the furnace door.
[0033] Furthermore, the radio frequency assembly 50 can include a pin electrode that is electrically connected to a radio frequency power supply. Each carrier 1 can be provided with a pin electrode hole 13 that cooperates with the pin electrode. After the furnace door is closed, the pin electrode is inserted into the pin electrode hole 13, the carrier 1 is electrified, and the adjacent carriers 1 are one positive and the other negative.
[0034] It can be understood that the radio frequency power provided by the first power supply assembly 60 to the radio frequency assembly 50 has a first radio frequency power. The first radio frequency power of the radio frequency power affects the degree of plasma ionization between the carriers 1, and the first radio frequency power can be adaptively adjusted according to actual needs, which is not specifically limited. In the present embodiment, the first radio frequency power can be set to be greater than or equal to 500 W.
[0035] Optionally, the plurality of carriers 1 in the sheet carrier mechanism 10 can be graphite sheets arranged at intervals along the first direction X.
[0036] Specifically, the reaction furnace 101 further comprises a heating assembly 30 and a second power supply assembly 70, the heating assembly 30 is insulatedly connected with the carrier 1 respectively, and the heating assembly 30 is configured to heat the sheet 40 carried on the carrier 1; the second power supply assembly 70 is electrically connected with the heating assembly 30, and the second power supply assembly 70 is configured to provide a heating power for the heating assembly 30, the heating power comprises a direct current power supply 701, or the heating power comprises an alternating current power supply 702 converted through a transformer, or the heating power comprises an alternating current power supply, and at least an outer surface of the heating assembly 30 is covered with an insulating layer for isolating plasma.
[0037] The reaction furnace provided by the embodiment of the present disclosure is used for heating the sheet 40 in the sheet carrying mechanism 10 through the second power supply assembly 70 and the heating assembly 30, and the heating power provided by the second power supply assembly 70 for the heating assembly 30 is adjusted, so that the heating power is the direct current power supply 701, or the heating power is the alternating current power supply 702 converted through the transformer, or at least the outer surface of the heating assembly 30 is covered with the insulating layer for isolating plasma, so as to avoid the interference of the plasma generated by the glow discharge on the heating circuit enclosed by the electrical connection between the heating assembly 30 and the second power supply assembly 70, and ensure that the heating and the ionization of the reaction gas of the sheet 40 in the reaction furnace 101 can be simultaneously performed.
[0038] In addition, the heating power provided by the second power supply assembly 70 for the heating assembly 30 is adjusted, so that the heating power is the direct current power supply 701, or the heating power is the alternating current power supply converted through the transformer, or at least the outer surface of the heating assembly 30 is covered with the insulating layer for isolating plasma, so that the heating assembly 30 can be closer to the carrier 1 of the sheet carrying mechanism 10, and when the heating assembly 30 is installed on the sheet carrying mechanism 10, the overall volume can be reduced, and the occupied space of the sheet carrying mechanism 10 with the heating assembly 30 installed in the furnace cavity 201 is reduced.
[0039] It can be understood that the heating power of the heating power supply can be adaptively adjusted according to actual needs, and in the embodiment of the present disclosure, the heating power is set to be greater than or equal to 200W.
[0040] Optionally, when at least the surface of the heating assembly 30 is provided with the insulating layer, the insulating layer can be formed as a coating on the surface in a film plating manner, and the material of the coating can be silicon nitride or other oxidation-resistant coating, which is not limited in particular.
[0041] Optionally, as Figure 4 When the heating power supply adopts the direct current power supply 701 to supply power to the heating assembly 30, the size and direction of the direct current are constant, and when the radio frequency power is greater than 25KW and the heating power is greater than 50KW, the heating power supply and the radio frequency power supply can be simultaneously connected without mutual interference.
[0042] Optionally, as Figure 5 In the case of using the AC power supply converted by the transformer to supply power to the heating assembly 30, for example, the 380V AC power supply provided by the power supply device 102 is converted into 220V AC power supply by the transformer when transmitted to the heating power supply, and the original 380V AC power supply directly supplies power to the RF power supply, so that the heating power supply and the RF power supply are in different circuit systems, and the RF power can be greater than 25KW, and the heating power can be greater than 50KW, and the two can be connected at the same time without interfering with each other.
[0043] It should be emphasized that in the case of at least covering the outer surface of the heating assembly 30 with an insulating layer that insulates the plasma, the AC power supply of the heating power supply can also be set as an AC power supply converted by a transformer, or the heating power supply can be set as a DC power supply, without specific limitation.
[0044] Optionally, the heating assembly 30 can be pre-installed and fixed on the sheet material carrying mechanism 10. The heating assembly 30 can be set as an integrated structure with the sheet material carrying mechanism 10, or can be set as a combined structure of detachable connection with the sheet material carrying mechanism 10, and can be adaptively adjusted according to actual needs. In the embodiment of the present disclosure, the heating assembly 30 can be pre-installed and fixed on the sheet material carrying mechanism 10 to improve the efficiency of loading and unloading the sheet material 40, and to keep the relative position between the heating assembly 30 and the carrier 1 fixed, so that the heating assembly 30 can ensure the uniformity and stability of heating the sheet material 40 when heating the sheet material 40 of different batches of the sheet material carrying mechanism 10.
[0045] In an optional embodiment, as Figure 3The carrier 1 in the sheet carrier mechanism 10 is provided with at least one hollow area 11, each hollow area 11 is configured to carry a sheet 40, and the periphery of the hollow area 11 is provided with a carrier portion 111 configured to carry the sheet 40, so that the carrier portions 111 of a plurality of carriers 1 arranged in sequence along the first direction X carry a plurality of sheets 40 as a sheet group 40a. The heating assembly 30 includes at least one first heating assembly 31, at least one second heating assembly 32, and at least one third heating assembly 33. Each first heating assembly 31 is arranged on one side of at least one sheet group 40a in the vertical direction Z; each second heating assembly 32 is arranged on the other side of at least one sheet group 40a in the vertical direction Z, and the first heating assembly 31 and the second heating assembly 32 correspond to each other in the vertical direction Z; and the third heating assembly 33 is arranged on at least one side of each sheet group 40a in the second direction Y. The first heating assembly 31, the second heating assembly 32, and the third heating assembly 33 are electrically connected to the second power supply assembly 70 for heating the sheets 40 in the corresponding sheet group 40a. By arranging the first heating assembly 31, the second heating assembly 32, and the third heating assembly 33 around each sheet group 40a in the sheet carrier mechanism 10, the heat generated by the heating assembly 30 can be quickly transferred to the sheets 40 at different positions in the sheet carrier mechanism 10, so that the sheets 40 can be quickly heated to the required reaction temperature in a short time, thereby improving the heating efficiency of the sheets 40 in the reaction furnace 101.
[0046] It can be understood that the specific positions and arrangement forms of the first heating assembly 31, the second heating assembly 32, and the third heating assembly 33 on the sheet carrier mechanism 10 can be adaptively adjusted according to actual needs, and are not specifically limited.
[0047] Figure 6 The front view of the heating assembly provided by an embodiment of the present disclosure is shown. Figure 7 The front view of the heating assembly provided by another embodiment of the present disclosure is shown.
[0048] In some embodiments, when the plurality of carriers 1 of the sheet carrying mechanism 10 is configured to carry a group of sheet sets 40a (not shown in the figure), the number of third heating assemblies 33 includes two, the number of first heating assemblies 31 and second heating assemblies 32 is one respectively, two third heating assemblies 33 are respectively arranged on both sides of the sheet set 40a in the second direction Y, and the two third heating assemblies 33, the first heating assembly 31 and the second heating assembly 32 form a frame structure with a containing space in the middle, at least the sheet 40 in the sheet set 40a is located in the containing space, and the sheet set 40a has a gap between the first heating assembly 31, the second heating assembly 32 and the third heating assembly 33 respectively. When the plurality of carriers 1 of the sheet carrying mechanism 10 is configured to carry two or more groups of sheet sets 40a, the number of third heating assemblies 33 includes two and more, each third heating assembly 33 is arranged on one side of each sheet set 40a in the second direction Y, the number of first heating assemblies 31 and the number of second heating assemblies 32 respectively include two and more, and the plurality of first heating assemblies 31 are connected or disconnected with each other in sequence, the plurality of second heating assemblies 32 are connected or disconnected with each other in sequence, and each sheet set 40a is correspondingly provided with a first heating assembly 31 and a second heating assembly 32 on both sides in the vertical direction Z, and the sheet set 40a has a gap between the first heating assembly 31, the second heating assembly 32 and the third heating assembly 33 respectively.
[0049] As Figure 6 When the plurality of first heating assemblies 31 are arranged to be connected with each other in sequence, and the plurality of second heating assemblies 32 are arranged to be connected with each other in sequence, the heating assembly 30 further includes a first electrode assembly 35, the first electrode assembly 35 is arranged on the sheet carrying mechanism 10, the first electrode assembly 35 is insulated from the carrier 1, the first electrode assembly 35 is connected with the corresponding first heating assembly 31, second heating assembly 32 and third heating assembly 33 of each sheet set 40a, and the first electrode assembly 35 is electrically connected with the second power supply assembly 70. All the first heating assemblies 31, second heating assemblies 32 and third heating assemblies 33 around and inside the sheet carrying mechanism 10 are electrically connected by the first electrode assembly 35, so that each heating assembly 30 can heat at the same time after the second power supply assembly 70 is turned on, and the temperature rise of the sheet 40 located at different positions of the sheet carrying mechanism 10 is consistent, so that each part of the sheet carrying mechanism 10 in the second direction Y forms a constant temperature zone with consistent temperature.
[0050] As Figure 7In the case that the plurality of first heating assemblies 31 are arranged to be disconnected from each other in sequence, and the plurality of second heating assemblies 32 are arranged to be disconnected from each other in sequence, the heating assembly 30 further comprises a plurality of second electrode assemblies 34 arranged on the sheet material carrying mechanism 10, the second electrode assemblies 34 are insulated from the carrier 1, each second electrode assembly 34 is connected to the corresponding first heating assembly 31, second heating assembly 32 and third heating assembly 33 of a sheet material group 40a, and the plurality of second electrode assemblies 34 are respectively electrically connected to the second power supply assembly 70. By using the plurality of second electrode assemblies 34 to respectively electrically connect the three heating assemblies (i.e. the first heating assembly 31, the second heating assembly 32 and the third heating assembly 33, and as a heating unit 3a) around each sheet material group 40a, the heating units 3a can be individually controlled whether to heat and the temperature of heating after the second power supply assembly 70 is turned on, so that the heating temperature of each heating unit 3a can be adjusted according to the actual situation, for example, the heating units 3a on the sheet material carrying mechanism 10 closer to the two ends of the furnace cavity 201 in the second direction Y can set the heating temperature higher, and the heating temperature of the heating units 3a located in the middle position of the sheet material carrying mechanism 10 can be set lower, so that in the actual processing process, the heating assembly 30 forms a constant temperature zone around the sheet material carrying mechanism 10 in the furnace cavity 201.
[0051] Optionally, the first heating assembly 31, the second heating assembly 32 and the third heating assembly 33 can be arranged as heating wires or heating rods that can be used to heat the sheet material 40, and can be adaptively adjusted according to actual needs. In the embodiment of the present disclosure, the materials of the first heating assembly 31, the second heating assembly 32 and the third heating assembly 33 are arranged as graphite, i.e. the first heating strip 311, the second heating strip 321 and the third heating strip 331 can be arranged as graphite sheets.
[0052] In some optional embodiments, the heating assembly 30 further comprises at least one conductive connecting piece 36, which electrically connects the first heating assembly 31 and the third heating assembly 33 corresponding to each sheet material group 40a, and / or the conductive connecting piece 36 electrically connects the second heating assembly 32 and the third heating assembly 33 corresponding to each sheet material group 40a. In other examples, the first heating assembly 31, the second heating assembly 32 and the third heating assembly 33 can be not connected to each other, and are not specifically limited.
[0053] Optionally, the conductive connecting piece 36 can be, for example, a metal sheet, a graphite sheet, etc., and is not specifically limited.
[0054] In some optional embodiments, when the conductive connecting piece 36 electrically connects the corresponding first heating assembly 31, second heating assembly 32 and third heating assembly 33 of each sheet group 40a, the reaction furnace 101 further comprises at least one first insulating piece and at least one second insulating piece, the first insulating piece connects the first heating assembly 31 to the carrier 1 so that the first heating assembly 31 is located above the carrier 1; the second insulating piece connects the second heating assembly 32 to the carrier 1 so that the second heating assembly 32 is located below the carrier 1.
[0055] Optionally, when the first heating assembly 31, the second heating assembly 32 and the third heating assembly 33 are not connected to each other, the heating assembly 30 can further comprise a third insulating piece configured to insulatively connect the third heating assembly 33 to the carrier 1.
[0056] It can be understood that the first insulating piece, the second insulating piece and the third insulating piece can be ceramic with insulating capability.
[0057] It is emphasized that the outer surface of the heating assembly 30 covered with the plasma-isolating insulating layer can specifically refer to that the insulating layer is arranged on the surface of the first heating assembly 31, the surface of the second heating assembly 32, the surface of the third heating assembly 33, the surface of the electrode assembly and the surface of the conductive connecting piece 36, which is not described in detail.
[0058] In some embodiments, each carrier 1 comprises a plurality of hollowed-out areas 11 arranged at intervals along the second direction Y, and the carrier 1 is provided with a plurality of avoiding holes 12 penetrating along the first direction X on both sides of each hollowed-out area 11 along the second direction Y, the avoiding holes 12 are located on the side of the carrier 1 away from the hollowed-out area 11 along the first direction X, and the normal projection of the sheet 40 on the carrier 1 along the first direction X does not overlap with the avoiding holes 12 when the sheet 40 is carried on the carrier 1 by the carrying part 111, each third heating assembly 33 extends along the first direction X and passes through a plurality of avoiding holes 12 arranged in sequence on the same side of the hollowed-out area 11 along the first direction X, and the third heating assembly 33 has a gap to the edge of the avoiding hole 12. By extending the third heating assembly 33 into the interior of the carrier 1, the third heating assembly 33 can heat all the sheets 40 in different sheet groups 40a inside the sheet carrying mechanism 10, further improving the heating efficiency of the heating assembly 30 on the sheets 40 carried by the sheet carrying mechanism 10.
[0059] Optionally, the first heating assembly 31 is located above the carrier 1 in the vertical direction Z, and a first gap is formed between the first heating assembly 31 and the carrier 1, the first gap being greater than or equal to 2 mm; the second heating assembly 32 is located below the carrier 1 in the vertical direction Z, and a second gap is formed between the second heating assembly 32 and the carrier 1, the second gap being greater than or equal to 2 mm; the third heating assembly 33 has a third gap to the edge of the avoiding hole 12, the third gap being greater than or equal to 2 mm. By adjusting the heating power supply or at least providing an insulating layer on the surface of the heating assembly 30, the first gap, the second gap and the third gap can be reduced as much as possible, which is conducive to reducing the occupied space in the furnace cavity 201 while the plasma generated by ionization does not affect the heating of the heating assembly 30.
[0060] Optionally, the first gap, the second gap and the third gap can be the same or different, and can be adaptively adjusted according to actual needs. For example, the first gap, the second gap and the third gap can be the same, and the gap can be set to 2 mm, 3 mm, 5 mm, 8 mm, 10 mm, etc.
[0061] In an optional embodiment, as Figures 5 to 7 The first heating assembly 31 includes a plurality of first heating strips 311 arranged at intervals in the first direction X and connected to each other at the head or disconnected from each other, the plurality of first heating strips 311 are arranged at intervals in the first direction X, and the plurality of first heating strips 311 are aligned with the plurality of carriers 1 in the vertical direction Z; the second heating assembly 32 includes a plurality of second heating strips 321 arranged at intervals in the second direction Y and connected to each other at the head or disconnected from each other; the third heating assembly 33 includes a plurality of third heating strips 331 arranged at intervals in the vertical direction Z and connected to each other at the head or disconnected from each other, the third heating strips 331 connecting the first heating strips 311 and the second heating strips 321 and being electrically connected with the second power supply assembly 70.
[0062] In some embodiments, the reaction furnace 101 further includes a support 80, the support 80 is arranged in the furnace cavity 201, and the sheet carrier mechanism 10 can be placed on the support 80; in the case where the heating assembly 30 includes a first electrode assembly 35 (not shown in the figure), the reaction furnace 101 further includes: a first conductive block, which is insulatedly connected to the support 80, and in the case where the sheet carrier mechanism 10 is placed on the support 80, the first electrode assembly 35 is in contact with the first conductive block; a first lead wire, which is electrically connected to the first conductive block and the second power supply assembly 70. As Figures 3 to 5In the case that the heating assembly 30 comprises the second electrode assembly 34, the reaction furnace 101 further comprises: a plurality of second conductive blocks 801 insulatedly connected to the support 80, the plurality of second conductive blocks 801 are arranged in the second direction Y, and in the case that the sheet material carrying mechanism 10 is placed on the support 80, the plurality of second electrode assemblies 34 are respectively in contact with the plurality of second conductive blocks 801; and a plurality of second conductive wires 802, each second conductive wire 802 electrically connects one second conductive block 801 and the second power supply assembly 70.
[0063] It can be understood that the support 80 can be insulatedly connected with the second conductive blocks 801 through the insulating member, the second conductive blocks 801 correspond to the second electrode assemblies 34 arranged on the sheet material carrying mechanism 10 one by one, in the case that the sheet material carrying mechanism 10 is placed on the support 80, the second electrode assemblies 34 can be in contact with the second conductive blocks 801, and the second electrode assemblies 34 are electrically connected with the second conductive blocks 801, and the second conductive wires 802 are used for electrically connecting the second electrode assemblies 34 and the second power supply assembly 70.
[0064] Optionally, the support 80 can be arranged as at least one support rod in the furnace cavity 201, and the support rod extends in the first direction X.
[0065] In an optional embodiment, in the case that the first conductive blocks are electrically connected with the second power supply assembly 70 and the outer surface of the heating assembly 30 is covered with an insulating layer for isolating plasma, the surfaces of the first conductive blocks other than the surface in contact with the first electrode assemblies 35 and the surfaces of the first conductive wires are covered with the insulating layer; and in the case that the second conductive blocks 801 are electrically connected with the second power supply assembly 70 and the outer surface of the heating assembly 30 is covered with an insulating layer for isolating plasma, the surfaces of the second conductive blocks 801 other than the surface in contact with the second electrode assemblies 34 and the surfaces of the second conductive wires 802 are covered with the insulating layer.
[0066] Optionally, the inner wall of the furnace cavity 201 enclosed in the reaction furnace 101 can be provided with heating wires for heating the furnace cavity 201. The sheet material 40 is heated by the heating structure arranged on the sheet material carrying mechanism 10 and the heating wires arranged on the inner wall of the furnace cavity 201, which further improves the heating efficiency of the sheet material 40.
[0067] The embodiments of the present disclosure further provide a coating equipment, such as Figure 1 The coating equipment 100 comprises a reaction furnace 101 and a sheet material carrying mechanism 10, the sheet material carrying mechanism 10 comprises a plurality of carrying members 1 arranged in the first direction X, each carrying member 1 is configured to carry at least one sheet material 40, and the sheet material carrying mechanism 10 can be placed in a furnace cavity 201 of the reaction furnace 101, and the reaction furnace 101 is configured to coat the sheet material 40 carried on the carrying member 1 in the furnace cavity 201.
[0068] Optionally, the coating equipment 100 further comprises a power supply device 102, which is configured to supply power to the first power supply assembly 60 and the second power supply assembly 70 of the reaction furnace 101.
[0069] It can be understood that the specific structure and cooperation relationship of the reaction furnace 101 and the sheet carrying mechanism 10 can refer to the related description of the above embodiments, and will not be described again.
[0070] In the embodiments of the present disclosure, if not specifically limited, the form of connection can be bolt-nut, screw, buckle, magnetic attraction and the like for detachable connection. In some connections, if there is no special requirement for the form of detachable cooperation, it can be connected by welding, bonding and the like for non-detachable connection.
[0071] The above describes the basic principles of the present disclosure in combination with specific embodiments, but it should be pointed out that the advantages, advantages, effects and the like mentioned in the present disclosure are only examples and not limitations, and these advantages, advantages, effects and the like cannot be considered as the must-have of each embodiment of the present disclosure. In addition, the above specific details are only for the purpose of example and for the purpose of understanding, and not for the purpose of limitation, and the above details do not limit the present disclosure to the above specific details.
[0072] The block diagrams of the devices, apparatuses, equipment, systems involved in the present disclosure are only illustrative examples and are not intended to require or imply the connection, arrangement, configuration shown in the block diagram. As those skilled in the art will recognize, these devices, apparatuses, equipment, systems can be connected, arranged, configured in any manner. Words such as "include", "contain", "have" and the like are open-ended words, which mean "including but not limited to", and can be used interchangeably. The words "or" and "and" used herein mean the word "and / or", and can be used interchangeably unless the context clearly indicates otherwise. The word "such as" used herein means the phrase "such as but not limited to", and can be used interchangeably.
[0073] It should also be noted that in the devices, equipment and methods of the present disclosure, each component or each step can be decomposed and / or recombined. These decompositions and / or recombinations should be considered as equivalent solutions of the present disclosure.
[0074] The above description of the disclosed aspects is provided so that any person skilled in the art can make or use the present disclosure. Various modifications to these aspects will be apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of the present disclosure. Therefore, the present disclosure is not intended to be limited to the aspects shown herein, but rather is to be accorded the broadest scope consistent with the principles and novel features disclosed herein.
[0075] The foregoing description has been presented for the purposes of illustration and description. Furthermore, the description is not intended to limit the embodiments of the disclosure to the forms disclosed herein. Although the various example aspects and embodiments have been described herein with regard to particular aspects and embodiments, those skilled in the art will recognize that certain modifications, changes, substitutions, additions and sub-combinations can be made without departing from the spirit of the disclosure.
Claims
1. A reactor furnace characterized by, A coating device configured to coat a plurality of sheets, the sheets being carried by a sheet carrying mechanism, the sheet carrying mechanism comprising a plurality of carriers arranged along a first direction, each carrier being configured to carry at least one of the sheets, the coating device comprising: a furnace body having a furnace cavity, the sheet carrying mechanism being capable of being placed in the furnace cavity; a plurality of radio frequency assemblies respectively in conductive connection with the plurality of carriers; a plurality of heating assemblies respectively in insulating connection with the carriers, the heating assemblies being configured to heat the sheets carried by the carriers; a first power supply assembly in electrical connection with the radio frequency assemblies, the first power supply assembly being configured to provide radio frequency power to the radio frequency assemblies, the radio frequency assemblies being configured to conduct the radio frequency power provided by the first power supply assembly to the plurality of carriers, such that each pair of adjacent carriers has opposite polarity; a second power supply assembly in electrical connection with the heating assemblies, the second power supply assembly being configured to provide heating power to the heating assemblies, the heating power comprising direct current power, or the heating power comprising alternating current power converted by a transformer, or at least an outer surface of the heating assemblies being covered with an insulating layer for isolating plasma.
2. The reactor of claim 1, wherein The carriers are provided with at least one hollow region, each hollow region being configured to carry one of the sheets, a carrying portion being arranged on a periphery of the hollow region, the carrying portion being configured to carry the sheet, such that a plurality of the sheets carried by the carrying portions of a plurality of the carriers arranged along the first direction forms a sheet group, the heating assemblies comprising: at least one first heating assembly in insulating connection with the carriers, each first heating assembly being arranged on one side of at least one of the sheet groups in a vertical direction; at least one second heating assembly in insulating connection with the carriers, each second heating assembly being arranged on another side of at least one of the sheet groups in the vertical direction; at least one third heating assembly in insulating connection with the carriers, the third heating assembly being arranged on at least one side of each of the sheet groups in a second direction, the second direction intersecting the first direction and intersecting the vertical direction, the first heating assembly, the second heating assembly and the third heating assembly being in electrical connection with the second power supply assembly.
3. The reactor of claim 2, wherein Each of the carriers comprises a plurality of hollow regions arranged along the second direction, such that a plurality of the carriers carry a plurality of sheet groups arranged along the second direction, the heating assemblies further comprising: a first electrode assembly arranged on the sheet carrying mechanism, the first electrode assembly being in insulating connection with the carriers, the first electrode assembly being connected with the first heating assembly, the second heating assembly and the third heating assembly corresponding to each of the sheet groups, and the first electrode assembly being in electrical connection with the second power supply assembly; or a second electrode assembly arranged on the sheet carrying mechanism, the second electrode assembly being in insulating connection with the carriers, the second electrode assembly being connected with the first heating assembly, the second heating assembly and the third heating assembly corresponding to each of the sheet groups, and the second electrode assembly being in electrical connection with the second power supply assembly. A plurality of second electrode assemblies are arranged on the sheet material carrying mechanism, the second electrode assemblies are insulated from the carrier, each of the second electrode assemblies is connected to the first heating assembly, the second heating assembly and the third heating assembly corresponding to the sheet material group, and the plurality of second electrode assemblies are respectively electrically connected to the second power supply assembly.
4. The reaction furnace according to claim 3, wherein the first heating assembly is located above the carrier in the vertical direction, and a first gap is formed between the first heating assembly and the carrier, the first gap being greater than or equal to 2 mm; and / or the second heating assembly is located below the carrier in the vertical direction, and a second gap is formed between the second heating assembly and the carrier, the second gap being greater than or equal to 2 mm; and / or the carrier is provided with a plurality of avoiding holes penetrating through in the first direction on both sides of each of the hollowed-out regions in the second direction, the avoiding holes are located on the side of the carrier away from the hollowed-out regions in the first direction, and the projection of the sheet material on the carrier in the first direction does not overlap with the avoiding holes when the sheet material is carried by the carrier, each of the third heating assemblies extends in the first direction and passes through a plurality of the avoiding holes arranged in the first direction on the same side of the hollowed-out region, and the third heating assembly has a third gap to the edge of the avoiding hole, the third gap being greater than or equal to 2 mm.
5. The reactor of claim 4, wherein The heating assembly comprises: at least one conductive connecting piece electrically connecting the first heating assembly and the third heating assembly corresponding to each of the sheet material groups, and / or the conductive connecting piece electrically connecting the second heating assembly and the third heating assembly corresponding to each of the sheet material groups; when the conductive connecting piece electrically connects the first heating assembly, the second heating assembly and the third heating assembly corresponding to each of the sheet material groups, the heating assembly further comprises: at least one first insulating piece connecting the first heating assembly to the carrier so that the first heating assembly is located above the carrier; at least one second insulating piece connecting the second heating assembly to the carrier so that the second heating assembly is located below the carrier, and both ends of the third heating assembly passing through the avoiding hole in the first direction are connected to the corresponding first heating assembly and second heating assembly through the conductive connecting piece.
6. The reactor of claim 3, wherein Further comprising a support arranged in the furnace cavity, and the sheet material carrying mechanism can be placed on the support; when the heating assembly comprises the first electrode assembly, the reaction furnace further comprises: a first conductive block insulatedly connected to the support, the first electrode assembly is in contact with the first conductive block when the sheet material carrying mechanism is placed on the support; a first conductive wire electrically connecting the first conductive block and the second power supply assembly; when the heating assembly comprises the second electrode assembly, the reaction furnace further comprises: a second conductive block insulatedly connected to the support, the second electrode assembly is in contact with the second conductive block when the sheet material carrying mechanism is placed on the support; and a second conductive wire electrically connecting the second conductive block and the second power supply assembly. a plurality of second conductive blocks, insulatedly connected to the support, the plurality of second conductive blocks being arranged in the second direction, and each of the plurality of second conductive blocks being in contact with one of the plurality of second electrode assemblies when the sheet carrier is placed on the support; a plurality of second conductive lines, each of the plurality of second conductive lines electrically connecting one of the plurality of second conductive blocks and the second power supply assembly.
7. The reactor of claim 6, wherein when the first conductive lines electrically connect the first conductive blocks and the second power supply assembly and the outer surface of the heating assembly is covered with the insulating layer that insulates plasma, except for the surface of the first conductive blocks that is in contact with the first electrode assemblies, other surfaces of the first conductive blocks and surfaces of the first conductive lines are covered with the insulating layer; when the second conductive lines electrically connect the second conductive blocks and the second power supply assembly and the outer surface of the heating assembly is covered with the insulating layer that insulates plasma, except for the surface of each of the second conductive blocks that is in contact with the second electrode assemblies, other surfaces of the second conductive blocks and surfaces of the second conductive lines are covered with the insulating layer.
8. The reactor of claim 1, wherein when at least the outer surface of the heating assembly is covered with the insulating layer that insulates plasma, the heating power supply includes the AC power supply that is converted by the transformer, or the heating power supply includes the DC power supply.
9. The reactor of claim 1, wherein the RF power supplied by the first power supply assembly to the RF assembly has a first RF power, and the first RF power is greater than or equal to 500 W.
10. A coating apparatus, characterized by, comprising: a sheet carrier mechanism including a plurality of carriers arranged in a first direction, each of the carriers being configured to carry at least one sheet ； The reactor of any one of claims 1-9, the sheet carrier mechanism being capable of being placed in a furnace cavity of the reactor, and the reactor being configured to coat the sheet placed on the carriers in the furnace cavity.