Photoresist coating device

Abstract

The utility model discloses a photoresist coating device which comprises a support frame, a conveying mechanism for pushing coating materials to move is fixedly mounted at the top of the support frame, and a positioning mechanism for positioning materials with different sizes is fixedly mounted on the support frame. A coating mechanism for coating photoresist on the surface of a conveyed material is arranged on the conveying mechanism, and a uniform scraping mechanism for uniformly scraping the photoresist on the surface of the material is arranged on one side of the coating mechanism. According to the utility model, the conveying mechanism can drive the glass substrate needing to be coated with photoresist to move towards the lower part of the coating mechanism, and then the arranged coating mechanism moves along the upper part of the glass substrate, so that the photoresist coating step of the glass substrate can be completed; and when the coating mechanism moves, the uniform scraping mechanism can be in contact with the surface of the glass substrate, so that the photoresist can be uniformly coated on the glass substrate, and the arranged positioning mechanism can be used for positioning the glass substrates with different sizes, so that the photoresist coating accuracy is ensured.

Description

TECHNICAL FIELD

[0001] The utility model relates to coating device technical field, concretely is a photoresist coating device. BACKGROUND

[0002] Photoresist is a kind of chemical substance sensitive to specific wavelength of light, is widely used in semiconductor manufacturing, microelectromechanical system (MEMS), nanotechnology and other fields.

[0003] In the field of semiconductor manufacturing, microelectromechanical system (MEMS), nanotechnology and some advanced display technology (such as LCD, OLED panel manufacturing) etc., photoresist is often used on various substrates, including silicon wafer and glass substrate, and if glass substrate appears deviation when coating, the photoresist of glass substrate surface is not completely coated or is not uniform, for this purpose, we provide a photoresist coating device. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a photoresist coating device to solve the problems in the background art.

[0005] To achieve the above object, the utility model provides the following technical scheme: a photoresist coating device, including support frame, the bottom of support frame is fixedly installed with two groups of pedestal, the top of support frame is fixedly installed with the conveying mechanism of pushing coating material movement, the positioning mechanism of the positioning of different size material is fixedly installed on support frame, the coating mechanism of the surface photoresist coating of conveying material is provided on conveying mechanism, the scraping mechanism of the surface photoresist scraping of material is provided on one side of coating mechanism.

[0006] Further, the conveying mechanism includes mounting plate, pivot, conveying roller, conveying belt and drive motor, the top of support frame is fixedly installed with two groups of mounting plates, a plurality of pivots are rotatably installed between two groups of mounting plates, the conveying roller is fixedly installed on the outside of pivot, the conveying belt is provided on the outside of conveying roller, the drive motor is fixedly installed on one side of mounting plate, and the output end of drive motor is fixedly connected with pivot.

[0007] Further, the coating mechanism includes electric sliding rail, electric sliding block, gantry, connecting column and spraying box, the electric sliding rail is fixedly installed on one side of mounting plate, the gantry is slidably connected with electric sliding block on electric sliding rail, and the spraying box is fixedly connected with the bottom of gantry through multiple connecting columns.

[0008] Further, the scraping mechanism comprises a connecting plate, slide rods, a limiting plate, a scraper and a spring, one side of the spraying box is fixedly provided with the connecting plate, a plurality of groups of slide rods are slidably connected to the connecting plate, the bottom of each slide rod is fixedly connected with the scraper, the top of each slide rod is fixedly connected with the limiting plate, the top of the connecting plate and outside the slide rods is fixedly connected with the spring, and the top of the spring is fixedly connected with the limiting plate.

[0009] Further, the positioning mechanism comprises an avoiding groove, a moving plate, a driving cylinder, an adjusting groove, a threaded rod, a locking nut and a suction disc, the avoiding groove is arranged on the supporting frame, the driving cylinder is fixedly arranged on the moving plate, the output end of the driving cylinder is fixedly connected with the supporting frame, the adjusting groove is arranged on the moving plate and corresponds to the avoiding groove, the threaded rod is inserted into the adjusting groove, the suction disc is arranged on the top of the threaded rod, the blocking piece is arranged on the top of the moving plate and covers the threaded rod, and the locking nut is threadedly connected to the threaded rod and is attached to the bottom of the moving plate.

[0010] Further, the top of the suction disc is fixedly provided with a sealing ring made of rubber material.

[0011] Compared with the prior art, the conveying mechanism provided by the utility model can drive the glass substrate that needs to be coated with photoresist to move below the coating mechanism, and then the coating mechanism arranged subsequently moves above the glass substrate, so that the photoresist coating step of the glass substrate can be completed, and the scraping mechanism can be in contact with the surface of the glass substrate when the coating mechanism moves, so that the photoresist can be uniformly coated on the glass substrate, and the positioning mechanism arranged can position glass substrates of different sizes, and ensure the precision of photoresist coating. BRIEF DESCRIPTION OF DRAWINGS

[0012] Figure 1 It is a first perspective view structural diagram of the utility model;

[0013] Figure 2 It is a second perspective view structural diagram of the utility model;

[0014] Figure 3 It is a third perspective view structural diagram of the utility model.

[0015] In the figure: 1, support frame; 2, base; 3, conveying mechanism; 4, positioning mechanism; 5, coating mechanism; 6, scraping mechanism; 7, mounting plate; 8, rotating shaft; 9, conveying roller; 10, conveying belt; 11, driving motor; 12, electric sliding rail; 13, electric sliding block; 14, gantry; 15, connecting column; 16, spraying box; 17, connecting plate; 18, sliding rod; 19, limiting plate; 20, scraper; 21, spring; 22, avoiding groove; 23, moving plate; 24, driving cylinder; 25, adjusting groove; 26, threaded rod; 27, locking nut; 28, suction cup; 29, blocking piece. DETAILED DESCRIPTION

[0016] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0017] Please refer to Figures 1-3 The present application provides a technical solution: a photoresist coating device, comprising a support frame 1, two groups of bases 2 are fixedly installed at the bottom of the support frame 1, a conveying mechanism 3 for moving the coating material is fixedly installed at the top of the support frame 1, a positioning mechanism 4 for positioning different sizes of materials is fixedly installed on the support frame 1, a coating mechanism 5 for coating photoresist on the surface of the conveyed material is arranged on the conveying mechanism 3, and a scraping mechanism 6 for scraping the photoresist on the surface of the material is arranged on one side of the coating mechanism 5.

[0018] The conveying mechanism 3 can drive the glass substrate that needs to be coated with photoresist to move below the coating mechanism 5, and then the coating mechanism 5 moves above the glass substrate, so that the photoresist coating step of the glass substrate can be completed, and the scraping mechanism 6 can be in contact with the surface of the glass substrate during the movement of the coating mechanism 5, so that the photoresist can be uniformly coated on the glass substrate, and the positioning mechanism 4 can position different sizes of glass substrates to ensure the accuracy of photoresist coating.

[0019] Please refer to Figure 1 and Figure 2The conveying mechanism 3 comprises mounting plates 7, rotating shafts 8, conveying rollers 9, a conveying belt 10 and a driving motor 11, two groups of mounting plates 7 are fixedly installed at the top of the support frame 1, a plurality of groups of rotating shafts 8 are rotatably installed between the two groups of mounting plates 7, the conveying rollers 9 are fixedly installed outside the rotating shafts 8, the conveying belt 10 is arranged outside the conveying rollers 9, the driving motor 11 is fixedly installed on one side of the mounting plate 7, and the output end of the driving motor 11 is fixedly connected with the rotating shaft 8; the conveying rollers 9 connected with the two ends of the conveying belt 10 can drive the conveying belt 10 to move, and the rotating shafts 8 and the conveying rollers 9 arranged at the middle position can position and support the conveyed glass substrate.

[0020] The glass substrate to be conveyed is placed on the conveying belt 10, then the driving motor 11 drives the rotating shafts 8 and the conveying rollers 9 to rotate, then the conveying belt 10 is driven to rotate by the conveying rollers 9, so that the glass substrate on the conveying belt 10 is pushed to move below the coating mechanism 5.

[0021] Please refer to Figure 1 and Figure 2 The coating mechanism 5 comprises an electric sliding rail 12, an electric sliding block 13, a gantry 14, connecting columns 15 and a spraying box 16, the electric sliding rail 12 is fixedly installed on one side of the mounting plate 7, the gantry 14 is slidably connected with the electric sliding block 13 on the electric sliding rail 12, and the spraying box 16 is fixedly connected with the gantry 14 through a plurality of connecting columns 15.

[0022] When it is necessary to coat photoresist on the surface of the glass substrate, the electric sliding block 13 moves along the electric sliding rail 12, then the photoresist is coated on the surface of the glass substrate by the spraying box 16.

[0023] Please refer to Figure 1 , Figure 2 and Figure 3 The scraping mechanism 6 comprises connecting plates 17, slide rods 18, limiting plates 19, scraping plates 20 and springs 21, the connecting plates 17 are fixedly installed on one side of the spraying box 16, a plurality of groups of slide rods 18 are slidably connected with the connecting plates 17, the scraping plates 20 are fixedly connected with the bottom of the slide rods 18, the limiting plates 19 are fixedly connected with the top of the slide rods 18, the springs 21 are fixedly connected with the top of the connecting plates 17 and outside the slide rods 18, and the top of the springs 21 is fixedly connected with the limiting plates 19.

[0024] When the positioning mechanism 4 drives the glass substrate to be positioned and lifted, when the coating mechanism 5 moves along the glass substrate, the scraping plates 20 are always in contact with the surface of the glass substrate due to the elastic force of the springs 21, then the scraping plates 20 continuously move along the glass substrate as the coating mechanism 5 continuously moves, so that the photoresist on the glass substrate is scraped and leveled.

[0025] Please refer to Figure 1 , Figure 2 and Figure 3 , the positioning mechanism 4 comprises an avoidance slot 22, a moving plate 23, a drive cylinder 24, an adjusting slot 25, a threaded rod 26, a locking nut 27 and a suction cup 28, the support frame 1 is provided with an avoidance slot 22, the moving plate 23 is fixedly provided with a drive cylinder 24, the output end of the drive cylinder 24 is fixedly connected with the support frame 1, the moving plate 23 is provided with an adjusting slot 25 at the position corresponding to the avoidance slot 22, the adjusting slot 25 is inserted with a threaded rod 26, the top of the threaded rod 26 is provided with a suction cup 28, one end of the suction cup 28 is communicated with the vacuumizing equipment outside, the outside of the threaded rod 26 is provided with a blocking piece 29 overlapped on the top of the moving plate 23, the outside of the threaded rod 26 is threadedly connected with a locking nut 27 abutting with the bottom of the moving plate 23.

[0026] Wherein, the position of the suction cup 28 is adjusted according to the size of the glass substrate to be positioned and adsorbed, when the position of the suction cup 28 is adjusted, the locking nut 27 is unscrewed, the threaded rod 26 and the suction cup 28 are moved along the adjusting slot 25 and the avoidance slot 22, then the position adjustment of the suction cup 28 can be completed, when the adjustment is completed, the position of the threaded rod 26 and the suction cup 28 is fixed again by the locking nut 27, then the drive cylinder 24 operates, the drive cylinder 24 can drive the threaded rod 26 and the suction cup 28 to move upwards, the glass substrate can be adsorbed and lifted, and the positioning and fixing of the glass substrate are completed.

[0027] Please refer to Figure 1 , the top of the suction cup 28 is fixedly provided with a sealing ring made of rubber material, the rubber sealing ring provided on the top of the suction cup 28 can be in full contact with the glass substrate, and the adsorption and positioning of the glass substrate are more stable.

[0028] In use, firstly, the conveying mechanism 3 can drive the glass substrate to be coated with photoresist to move below the coating mechanism 5, and then the coating mechanism 5 moves above the glass substrate, so that the photoresist coating step of the glass substrate can be completed, and the scraping mechanism 6 can be in contact with the surface of the glass substrate during the movement of the coating mechanism 5, so that the photoresist can be uniformly coated on the glass substrate, and the positioning mechanism 4 can position the glass substrate of different sizes to ensure the accuracy of the photoresist coating. The glass substrate to be conveyed is placed on the conveying belt 10, and then the driving motor 11 drives the rotating shaft 8 and the conveying roller 9 to rotate, and then the conveying belt 10 is driven to rotate by the conveying roller 9, so that the glass substrate on the conveying belt 10 can be moved below the coating mechanism 5. When the surface of the glass substrate needs to be coated with photoresist, the electric sliding block 13 moves along the electric sliding rail 12, and then the photoresist can be coated on the surface of the glass substrate by the spraying box 16. When the positioning mechanism 4 drives the glass substrate to be positioned, the scraping plate 20 can be in contact with the surface of the glass substrate at any time due to the elastic force of the spring 21 during the movement of the coating mechanism 5 along the glass substrate. Then, with the continuous movement of the coating mechanism 5, the scraping plate 20 can move along the glass substrate, so that the photoresist on the glass substrate can be scraped and leveled. The position of the suction cup 28 is adjusted according to the size of the glass substrate to be positioned and adsorbed. When the position of the suction cup 28 is adjusted, the locking nut 27 is unscrewed, and the threaded rod 26 and the suction cup 28 move along the adjustment groove 25 and the avoiding groove 22. Then the position adjustment of the suction cup 28 can be completed. When the adjustment is completed, the position of the threaded rod 26 and the suction cup 28 can be fixed again by the locking nut 27. Then the driving cylinder 24 operates, and the driving cylinder 24 can drive the threaded rod 26 and the suction cup 28 to move upwards, so that the glass substrate can be adsorbed and lifted, and the positioning and fixing of the glass substrate can be completed.

[0029] Although the embodiments of the present application have been shown and described, it should be understood by those skilled in the art that various changes, modifications, substitutions and variations can be made to the embodiments without departing from the principles and spirit of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A photoresist coating device comprising a support frame (1), the bottom of the support frame (1) being fixedly mounted with two groups of pedestals (2), characterized in that: The top of the support frame (1) is fixedly installed with a conveying mechanism (3) for pushing the coating material to move, and the support frame (1) is fixedly installed with a positioning mechanism (4) for positioning materials of different sizes.

2. The photoresist coating apparatus of claim 1, wherein: The conveying mechanism (3) comprises a mounting plate (7), a rotating shaft (8), a conveying roller (9), a conveying belt (10) and a driving motor (11), the top of the support frame (1) is fixedly installed with two groups of mounting plates (7), a plurality of rotating shafts (8) are rotatably installed between the two groups of mounting plates (7), the outer part of the rotating shaft (8) is fixedly installed with a conveying roller (9), the outer part of the conveying roller (9) is provided with a conveying belt (10), one side of the mounting plate (7) is fixedly installed with a driving motor (11), and the output end of the driving motor (11) is fixedly connected with the rotating shaft (8).

3. The photoresist coating apparatus of claim 2, wherein: The coating mechanism (5) comprises an electric sliding rail (12), an electric sliding block (13), a gantry (14), a connecting column (15) and a spraying box (16), one side of the mounting plate (7) is fixedly installed with an electric sliding rail (12), the electric sliding rail (12) is slidably connected with a gantry (14) through an electric sliding block (13), and the bottom of the gantry (14) is fixedly connected with a spraying box (16) through a plurality of connecting columns (15).

4. The photoresist coating apparatus of claim 3, wherein: The scraping mechanism (6) comprises a connecting plate (17), a sliding rod (18), a limiting plate (19), a scraper (20) and a spring (21), one side of the spraying box (16) is fixedly installed with a connecting plate (17), a plurality of sliding rods (18) are slidably connected to the connecting plate (17), the bottom of the sliding rod (18) is fixedly connected with a scraper (20), the top of the sliding rod (18) is fixedly connected with a limiting plate (19), the top of the connecting plate (17) and outside the sliding rod (18) is fixedly connected with a spring (21), and the top of the spring (21) is fixedly connected with the limiting plate (19).

5. The photoresist coating apparatus of claim 4, wherein: The positioning mechanism (4) comprises an avoiding groove (22), a moving plate (23), a driving cylinder (24), an adjusting groove (25), a threaded rod (26), a locking nut (27) and a suction cup (28), the avoiding groove (22) is formed in the support frame (1), the driving cylinder (24) is fixedly installed on the moving plate (23), the output end of the driving cylinder (24) is fixedly connected with the support frame (1), the adjusting groove (25) is formed in the moving plate (23) and corresponds to the position of the avoiding groove (22), the threaded rod (26) is inserted into the adjusting groove (25), the suction cup (28) is arranged at the top of the threaded rod (26), the blocking piece (29) is arranged outside the threaded rod (26) and overlaps the top of the moving plate (23), the locking nut (27) is threadedly connected outside the threaded rod (26) and is attached to the bottom of the moving plate (23).

6. The photoresist coating apparatus of claim 5, wherein: The top of the suction cup (28) is fixedly installed with a sealing ring made of rubber material.

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