Multi-blade type wafer push broach

Abstract

The utility model discloses a multi-blade type wafer push broach, which relates to the technical field of parts of push-pull force test equipment and comprises a mounting base, a multi-blade type push broach switching component is fixedly mounted at one end of the mounting base, and a magnetic push component is fixedly mounted at the other end of the mounting base. The multi-cutter type push broach switching assembly comprises a first mounting frame, a rotating shaft, a rotating gear, a driving gear, a driving assembly and a plurality of push broach bodies, one end of the rotating shaft is rotationally connected to one end of the first mounting frame, the other end of the rotating shaft is fixedly connected to the center of the rotating gear, and the rotating gear is meshed with the driving gear. According to the multi-blade type wafer push-type broach, the driving assembly and the rotating gear in the magnetic attraction pushing assembly are matched with each other to complete the switching operation of the push-type broach main body, so that detection equipment provided with the multi-blade type wafer push-type broach can test wafers with different sizes and material hardness by replacing the push-type broach, and the cost of test equipment of test manufacturers is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to push -and -pull test equipment spare part technical field especially, relates to a multi -knife type wafer push -knife. BACKGROUND

[0002] Wafer push -knife is a kind of special tool used in the semiconductor wafer push -and -pull test process, it is a small, precision cutter device, usually made of high-quality hard alloy or other wear-resistant materials, the cutting edge portion is finely ground and handled to ensure that it has suitable shape, similar to small cutter from appearance, but with high precision requirements, size is generally smaller, can be adapted to the operating environment of wafer.

[0003] Such as China patent publication No. CN210052716U discloses a chip push -and -pull test instrument, including the mobile knife seat with the bottom surface as horizontal plane, mobile knife seat below is provided with fixed platform, mobile knife seat lower section inside is provided with fixed cavity, fixed cavity is provided with the driving block that can move horizontally, fixed cavity bottom center is provided with the push -knife groove that is connected with the bottom surface outside of mobile knife seat vertically, push -knife groove is provided with push -knife, push -knife top and driving block side are all inclined surface and mutually cooperate, the inclined surface of driving block is provided with dovetail groove, the inclined surface of push -knife is provided with the dovetail-shaped block that is matched with dovetail groove.

[0004] When carrying out push -and -pull test work to different sizes and different materials wafer, need to select the test equipment equipped with the push -knife that is adapted according to the specific size specification and material hardness characteristics of wafer to execute test procedure, however this situation causes test factory to have to order multiple types of test equipment according to the diversification model of push -knife, in turn causes the significant increase of test equipment purchase cost, to some extent, the economic burden and resource investment pressure of enterprise are increased, it is not conducive to the optimization and control of enterprise cost benefit. UTILITY MODEL CONTENTS

[0005] The utility model aims at solving the problems, such as test factory having to order multiple types of test equipment according to the diversification model of push -knife in prior art, in turn causes the significant increase of test equipment purchase cost, and proposes a multi -knife type wafer push -knife.

[0006] In order to achieve the above object, the utility model discloses the following technical scheme: a multi-tool type wafer push knife, including the mounting base, one end fixed mounting of mounting base has multi-tool type push knife switching assembly, the other end fixed mounting of mounting base has magnetic push assembly, multi-tool type push knife switching assembly includes no.

[0007] Preferably, the driving assembly includes a driving motor and a speed changer, the output end of the driving motor is in transmission connection with the input end of the speed changer, and the output end of the speed changer is in transmission connection with the center of the driving gear.

[0008] Preferably, the push knife body includes a tool bit and a push rod, one end of the push rod is fixedly connected to one end of the tool bit.

[0009] Preferably, the outer sides of the two ends of the push rod are fixedly connected with stop rings respectively.

[0010] Preferably, the magnetic push assembly includes an electromagnetic adsorber, a sliding table, a driving plate and a driving cylinder, the piston rod of the driving cylinder is fixedly connected to one end of the driving plate, the other end of the driving plate is fixedly connected to one side of the sliding table, and the electromagnetic adsorber is fixedly installed above the sliding table.

[0011] Preferably, the electromagnetic adsorber includes an adsorption ring and an electromagnet, and the electromagnet is fixedly installed in the adsorption ring.

[0012] Preferably, the lower end of the adsorption ring is fixedly connected with a connecting base, and the connecting base is fixedly installed above the sliding table through bolts.

[0013] Preferably, the lower end of the sliding table is slidably connected with a sliding rail.

[0014] Preferably, the lower end of the driving cylinder is fixedly installed with a no.

[0015] Preferably, the sliding rail is fixedly installed above the no.

[0016] Compared with the prior art, the utility model has the advantages and positive effects that:

[0017] 1. The utility model discloses a drive assembly and the mutual cooperation of rotation gear in magnetic attraction push component, complete the switching operation of push sword main part, make the detection equipment of equipping with the multi -knife type wafer push sword can test the wafer of different size and material hardness through replacing push sword, thereby reduce the test equipment cost of test factory.

[0018] 2. The utility model discloses the electromagnetic adsorption to push sword main part, push sword main part can always keep in the fixed position inside the through -hole, will not appear a bit displacement or shake, this high stability not only ensured the position accuracy and force consistency when push sword and wafer contact every time, make the wafer in the test process bears the push -pull force of accurate conformity preset parameter, thereby greatly improved the accuracy and reliability of test data. ACCURACY AND RELIABILITY OF TEST DATA

[0019] Figure 1 A three-dimensional structure schematic diagram of the multi-knife type wafer push sword is provided for the utility model;

[0020] Figure 2 A three-dimensional structure schematic diagram of the multi-knife type push sword switching assembly in the multi-knife type wafer push sword is provided for the utility model;

[0021] Figure 3 A connection relationship schematic diagram between the rotation gear and the push sword main body in the multi-knife type wafer push sword is provided for the utility model;

[0022] Figure 4 A three-dimensional structure schematic diagram of the magnetic attraction push assembly in the multi-knife type wafer push sword is provided for the utility model;

[0023] Figure 5 A connection relationship schematic diagram between the electromagnetic adsorber and the sliding table in the multi-knife type wafer push sword is provided for the utility model.

[0024] Legend: 1, installation base; 2, multi-knife type push sword switching assembly; 21, no. 1 mounting bracket; 22, rotation shaft; 23, rotation gear; 231, through -hole; 24, drive gear; 25, drive assembly; 251, drive motor; 252, speed changer; 26, push sword main part; 261, tool bit; 262, push rod; 263, baffle ring; 3, magnetic attraction push assembly; 31, electromagnetic adsorber; 311, adsorption ring; 312, electromagnet; 313, connecting base; 32, sliding table; 33, drive plate; 34, drive cylinder; 35, slide rail; 36, no. 2 mounting bracket. DETAILED DESCRIPTION

[0025] To better understand the above-mentioned objectives, features, and advantages of this utility model, the present utility model will be further described below with reference to the accompanying drawings and embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0026] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the present invention is not limited to the specific embodiments disclosed in the following specification.

[0027] Example 1: As Figure 1 - Figure 4 As shown, this utility model provides a multi-blade wafer pusher, including a mounting base 1. A multi-blade pusher switching assembly 2 is fixedly mounted on one end of the mounting base 1, and a magnetic pusher assembly 3 is fixedly mounted on the other end of the mounting base 1. The multi-blade pusher switching assembly 2 includes a first mounting bracket 21, a rotating shaft 22, a rotating gear 23, a drive gear 24, a drive assembly 25, and several pusher bodies 26. One end of the rotating shaft 22 is rotatably connected to one end of the first mounting bracket 21, and the other end of the rotating shaft 22 is fixedly connected to the rotating gear 23. At the center, the rotating gear 23 meshes with the drive gear 24. The center of the drive gear 24 is connected to the drive assembly 25. Several through holes 231 are arranged in a ring on one side of the rotating gear 23. Several pusher bodies 26 are movably inserted through the interior of the several through holes 231. The drive assembly 25 includes a drive motor 251 and a speed changer 252. The output end of the drive motor 251 is connected to the input end of the speed changer 252. The output end of the speed changer 252 is connected to the center of the drive gear 24.

[0028] The specific settings and effects of the embodiment are described as follows. When the pusher body 26 needs to be switched, the test equipment drives the multi-blade wafer pusher to move to the blade changing area. The driving motor 251 in the driving assembly 25 drives the gear box 252 to work. The gear box 252 drives the driving gear 24 to rotate. Since the driving gear 24 and the rotating gear 23 are in meshing engagement, the rotating gear 23 starts to rotate under the driving of the driving gear 24, driving the pusher body 26 needed for testing to rotate to one side of the detection table. At the same time, the pusher body 26 is aligned with the middle part of the wafer on the side above the detection table. Then the magnetic attraction and pushing assembly 3 attracts and positions the other end of the pusher body 26, completing the positioning operation of the pusher body 26. The test equipment drives the multi-blade wafer pusher that has completed the blade changing operation to move towards the detection table. The pusher body 26 tests the wafer in terms of push-pull force. Through the mutual cooperation of the driving assembly 25 in the magnetic attraction and pushing assembly 3 and the rotating gear 23, the switching operation of the pusher body 26 is completed. The detection equipment equipped with the multi-blade wafer pusher can test wafers of different sizes and material hardness by replacing the pusher, thereby reducing the cost of the test equipment of the test factory.

[0029] Embodiment two: as Figure 1 - Figure 5As shown, a multi-knife type wafer pushing knife includes a mounting base 1, one end of the mounting base 1 is fixedly installed with a multi-knife type pushing knife switching assembly 2, the other end of the mounting base 1 is fixedly installed with a magnetic attraction pushing assembly 3, the multi-knife type pushing knife switching assembly 2 includes a No. 1 mounting frame 21, a rotating shaft 22, a rotating gear 23, a driving gear 24, a driving assembly 25 and a plurality of pushing knife bodies 26, one end of the rotating shaft 22 is rotatably connected to one end of the No. 1 mounting frame 21, the other end of the rotating shaft 22 is fixedly connected at the center of the rotating gear 23, the rotating gear 23 is engaged with the driving gear 24, the center of the driving gear 24 is drivingly connected with the driving assembly 25, a plurality of through holes 231 are formed in the rotating gear 23 in a ring arrangement, the plurality of pushing knife bodies 26 are movably penetrated into the plurality of through holes 231 respectively, the pushing knife body 26 includes a knife head 261 and a pushing rod 262, one end of the pushing rod 262 is fixedly connected to one end of the knife head 261, the outer sides of both ends of the pushing rod 262 are fixedly connected with stop rings 263 respectively, the magnetic attraction pushing assembly 3 includes an electromagnetic attractor 31, a sliding table 32, a driving plate 33 and a driving cylinder 34, the piston rod of the driving cylinder 34 is fixedly connected to one end of the driving plate 33, the other end of the driving plate 33 is fixedly connected with one side of the sliding table 32, the electromagnetic attractor 31 is fixedly installed above the sliding table 32, the electromagnetic attractor 31 includes an attractor ring 311 and an electromagnet 312, the electromagnet 312 is fixedly installed inside the attractor ring 311, a connecting base 313 is fixedly connected below the attractor ring 311, the connecting base 313 is fixedly installed above the sliding table 32 through bolts, the connecting base 313 is fixedly connected below the attractor ring 311, the connecting base 313 is fixedly installed above the sliding table 32 through bolts, a sliding rail 35 is fixedly installed above a No. 2 mounting frame 36.

[0030] The effect achieved by the whole embodiment is that when the magnetic attraction and pushing assembly 3 performs the attraction and positioning operation on the pusher body 26, the driving cylinder 34 starts to work, the electromagnetic attractor 31 is pushed to move steadily towards one end of the pushing rod 262, with the advancement of the process, one end of the pushing rod 262 is accurately and smoothly inserted into the inner space of the electromagnetic attractor 31, at this moment, the electric current is supplied to the electromagnet 312, the electromagnet 312 generates strong and stable magnetic force to attract and fix one end of the pushing rod 262 in the specific position in the inner space, in this way, when the test equipment starts to drive the multi-blade wafer pusher to perform the pushing operation on the wafer, the pusher body 26 can always keep in the fixed position in the through hole 231 and will not displace or shake, the high stability not only ensures the consistency of the position accuracy and force when the pusher contacts the wafer each time, so that the pushing and pulling force of the wafer in the test process can accurately meet the preset parameters, thereby greatly improving the accuracy and reliability of the test data, but also the stable pusher state can effectively reduce the accidental scratches, collisions and other damages to the wafer caused by the pusher activity, reduces the wafer scrap rate, improves the production efficiency and product quality.

[0031] The working principle and use method of the device are as follows: when the pusher body 26 needs to be switched, the test equipment drives the multi-blade wafer pusher to move to the blade changing area, the driving motor 251 in the driving assembly 25 drives the gear box 252 to work, the gear box 252 drives the driving gear 24 to rotate, since the driving gear 24 and the rotating gear 23 are engaged with each other, the rotating gear 23 starts to rotate under the driving of the driving gear 24, drives the pusher body 26 required for the test to rotate to one side of the test table, at the same time, the pusher body 26 is aligned with the middle part of the wafer on the test table, the driving cylinder 34 starts to work, the electromagnetic attractor 31 is pushed to move steadily towards one end of the pushing rod 262, with the advancement of the process, one end of the pushing rod 262 is accurately and smoothly inserted into the inner space of the electromagnetic attractor 31, at this moment, the electric current is supplied to the electromagnet 312, the electromagnet 312 generates strong and stable magnetic force to attract and fix one end of the pushing rod 262 in the specific position in the inner space, the positioning operation on the pusher body 26 is completed, the test equipment drives the multi-blade wafer pusher which has completed the blade changing operation to move towards the test table, the pusher body 26 performs the pushing and pulling force test on the wafer.

[0032] The above is only a preferred embodiment of the present application, and is not intended to limit the present application in other forms, any skilled person in the art can modify or change the above disclosed technical content to equivalent embodiments applied to other fields, but any simple modification, equivalent change and modification made on the basis of the technical essence of the present application to the above embodiments still belongs to the protection scope of the technical scheme of the present application.

Claims

1. A multi-blade wafer pusher comprising a mounting base (1), characterized in that: One end of the mounting base (1) is fixedly installed with a multi-blade type push blade switching assembly (2), the other end of the mounting base (1) is fixedly installed with a magnetic push assembly (3), the multi-blade type push blade switching assembly (2) comprises a No. 1 mounting frame (21), a rotating shaft (22), a rotating gear (23), a driving gear (24), a driving assembly (25) and a plurality of push blade bodies (26), one end of the rotating shaft (22) is rotatably connected to one end of the No. 1 mounting frame (21), the other end of the rotating shaft (22) is fixedly connected to the center of the rotating gear (23), the rotating gear (23) is in mesh with the driving gear (24), the center of the driving gear (24) is drivingly connected with the driving assembly (25), a plurality of through holes (231) are formed in the rotating gear (23) in an annular arrangement, and a plurality of push blade bodies (26) are movably penetrated into the plurality of through holes (231).

2. The multi-tool wafer push broach of claim 1 wherein: The driving assembly (25) comprises a driving motor (251) and a speed changer (252), the output end of the driving motor (251) is drivingly connected with the input end of the speed changer (252), and the output end of the speed changer (252) is drivingly connected with the center of the driving gear (24).

3. The multi-blade wafer pusher of claim 1, wherein: The push blade body (26) comprises a blade head (261) and a push rod (262), one end of the push rod (262) is fixedly connected to one end of the blade head (261).

4. The multi-blade wafer pusher of claim 3, wherein: The outer sides of the two ends of the push rod (262) are fixedly connected with stop rings (263), respectively.

5. The multi-blade wafer pusher of claim 1, wherein: The magnetic push assembly (3) comprises an electromagnetic adsorber (31), a sliding table (32), a driving plate (33) and a driving cylinder (34), the piston rod of the driving cylinder (34) is fixedly connected to one end of the driving plate (33), the other end of the driving plate (33) is fixedly connected with one side of the sliding table (32), and the electromagnetic adsorber (31) is fixedly installed above the sliding table (32).

6. The multi-blade wafer pusher of claim 5, wherein: The electromagnetic adsorber (31) comprises an adsorption ring (311) and an electromagnet (312), and the electromagnet (312) is fixedly installed in the adsorption ring (311).

7. The multi-blade wafer push broach of claim 6, wherein: A connecting base (313) is fixedly connected below the adsorption ring (311), and the connecting base (313) is fixedly installed above the sliding table (32) through bolts.

8. The multi-blade wafer pusher of claim 7, wherein: A sliding rail (35) is slidingly connected below the sliding table (32).

9. The multi-blade wafer pusher of claim 8, wherein: A No. 2 mounting frame (36) is fixedly installed below the driving cylinder (34).

10. The multi-blade wafer pusher of claim 9, wherein: The sliding rail (35) is fixedly installed above the No. 2 mounting frame (36).

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