Positioning disc mechanism and die bonding equipment

Abstract

The utility model is applicable to the technical field of semiconductor equipment, and provides a positioning disc mechanism and die bonding equipment, and the positioning disc mechanism comprises a positioning disc group, a sliding block and a driving unit. The die bonding equipment comprises any one of the positioning disc mechanisms. The multiple swing arm mechanisms are slidably connected to the first mounting face of the positioning disc set through the sliding blocks, so that the multiple swing arm assemblies can rotate around the first axis along with the positioning disc set, and meanwhile the corresponding sliding blocks can be driven by the multiple driving units to move in the direction of the first axis. Installation of the multiple swing arm mechanisms can be achieved through the positioning disc set, so that the connecting structure between the multiple swing arm mechanisms and the driving end of the rotary driving mechanism is simpler, and the integration degree is higher. Meanwhile, installation errors caused by the fact that the multiple swing arm assemblies are installed on different parts can be avoided, the relative positions of the multiple swing arm mechanisms are more accurate, and therefore the die bonding precision and efficiency are improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of semiconductor equipment especially relates to a positioning disc mechanism and die bonding equipment. BACKGROUND

[0002] Die bonder is one of the equipment for semiconductor device manufacturing, which connects semiconductor wafer and other components together. In the die bonder work, the crystal ring is usually supported by the crystal supply platform, then the chip on the crystal ring is separated from the blue film through the needle device, finally the nozzle structure is driven to move and suck the chip on the crystal ring through the swing arm structure, then the chip is transported and firmly connected with the welding point of the packaging substrate to realize die bonding. In order to improve the work efficiency of die bonding, the existing die bonder mostly adopts the mode that multiple swing arm structures are driven to move simultaneously through the rotary drive mechanism. Since multiple swing arm structures need to be connected with the driving end of the rotary drive mechanism, the connection structure between the swing arm structure and the rotary drive mechanism is complex, which seriously affects the precision and efficiency of die bonding. SUMMARY

[0003] The utility model discloses a positioning disc mechanism and die bonding equipment, which aims at solving the technical problem of complex connection structure between the swing arm structure and the rotary drive mechanism of the die bonder in the prior art.

[0004] The utility model discloses a positioning disc mechanism and die bonding equipment, which aims at solving the technical problem of complex connection structure between the swing arm structure and the rotary drive mechanism of the die bonder in the prior art.

[0005] The positioning disc group is connected with the driving end of the rotary drive mechanism, and has the freedom of rotating around the first axis, which is the axis of the positioning disc group. The positioning disc group has a plurality of first mounting surfaces, and the first mounting surfaces are uniformly distributed around the first axis.

[0006] The sliding blocks are used for installing the swing arm mechanism, and are one-to-one corresponding to the first mounting surfaces. The sliding blocks are respectively and slidably arranged on the first mounting surfaces.

[0007] The driving units are one-to-one corresponding to the sliding blocks, and are uniformly arranged on the positioning disc group around the first axis. The driving units are used for driving the sliding blocks to move along the first axis.

[0008] In an optional embodiment, the interior of the positioning disc group is a hollow structure, and the driving units are located in the interior of the positioning disc group. At least part of the sliding blocks extends into the interior of the positioning disc group and is connected with the driving end of the driving units.

[0009] In an alternative embodiment, the positioning disc set is further provided with a mounting opening at the side away from the driving end of the rotary driving mechanism, the mounting opening is used to communicate the inner space of the positioning disc set with the outside, and a sealing base is further detachably arranged at the mounting opening.

[0010] In an alternative embodiment, a sliding rail unit is arranged between the sliding block and the first mounting surface, and a plurality of oil groove structures are arranged on the sealing base towards the side of the positioning disc set, the oil groove structures are used to accommodate foreign matters falling from the sliding rail unit, and the plurality of oil groove structures are respectively located below the sliding rail unit along the first axis direction.

[0011] In an alternative embodiment, the positioning disc mechanism further comprises a controller, the controller is used to control the working state of the electrical element on the positioning disc set, the controller is fixedly arranged inside the positioning disc set, and the center of gravity of the controller is located on the first axis.

[0012] In an alternative embodiment, the positioning disc set has a second mounting surface on the outer periphery, the second mounting surface is located between two first mounting surfaces, and the number of the second mounting surfaces is multiple, and the plurality of second mounting surfaces are uniformly distributed around the first axis.

[0013] In an alternative embodiment, the second mounting surface is provided with an air path control group, the air path control group is used to control the communication and disconnection of the air path at the suction nozzle structure.

[0014] In an alternative embodiment, the positioning disc set comprises a main disc body and a main cylinder part, the main disc body is arranged at the end of the main cylinder part, the first mounting surface is located on the outer periphery of the main cylinder part and is uniformly distributed around the axis of the main cylinder part.

[0015] In an alternative embodiment, the cross section of the main cylinder part is a regular polygon, and the shape of the main disc body matches the cross section shape of the main cylinder part.

[0016] In a second aspect, a fixed crystal device is provided, comprising the positioning disc mechanism of any one of the above.

[0017] The technical effect of the first aspect of the utility model is: through setting the positioning disc group between the driving end of the rotary driving mechanism and the swing arm mechanism, the positioning disc group can rotate around the first axis under the action of the rotary driving mechanism. Meanwhile, the positioning disc group has a plurality of first mounting surfaces which are uniformly distributed around the first axis, a plurality of sliding blocks can be set in one-to-one correspondence with the first mounting surfaces, the sliding blocks are slidably arranged on the first mounting surfaces, and the swing arm mechanism is connected to the sliding blocks. In addition, a plurality of driving units which are uniformly arranged around the first axis are arranged on the positioning disc group, and the driving units are arranged in one-to-one correspondence with the sliding blocks. By slidingly connecting the plurality of swing arm mechanisms to the first mounting surfaces on the positioning disc group through the sliding blocks, the plurality of swing arm assemblies can rotate around the first axis together with the positioning disc group, and the swing arm mechanism can also slide along the first axis by driving the corresponding sliding blocks to move along the first axis direction through the plurality of driving units. Compared with the prior art, the plurality of swing arm mechanisms can be installed through the positioning disc group, the connection structure between the plurality of swing arm mechanisms and the driving end of the rotary driving mechanism is simpler and has higher integration. At the same time, the plurality of swing arm mechanisms are installed on the same component positioning disc group, which can avoid the installation error caused by installing the plurality of swing arm assemblies on different components, so that the relative positions between the plurality of swing arm mechanisms are more accurate, thereby improving the precision of die bonding.

[0018] It can be understood that the beneficial effects of the second aspect described above can be referred to the related description in the first aspect described above, which will not be repeated here. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to more clearly illustrate the technical scheme of the embodiments of the utility model, the following will briefly introduce the drawings needed to be used in the embodiments of the utility model or the prior art description. Obviously, the drawings described below are only some embodiments of the utility model, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.

[0020] Figure 1 It is the structural schematic diagram of the positioning disc mechanism provided by the embodiments of the utility model.

[0021] Figure 2 It is the exploded structural schematic diagram of the positioning disc mechanism provided by the embodiments of the utility model.

[0022] Figure 3 It is the schematic diagram of the positioning disc mechanism after removing the sealing bottom disc provided by the embodiments of the utility model.

[0023] Figure 4 It is the structural schematic diagram of the positioning disc group used by the embodiments of the utility model.

[0024] Reference numerals:

[0025] 1. positioning disc set; 11. main disc body; 12. main cylinder body; 13. mounting opening; 14. first mounting surface; 15. second mounting surface; 16. mounting groove; 17. heat dissipation hole; 2. sliding block; 21. body part; 22. connecting part; 3. driving unit; 4. controller; 5. air path control group; 6. connecting handle part; 7. sealing base disc; 71. oil groove structure; 8. sliding rail unit; 9. first axis. DETAILED DESCRIPTION

[0026] The embodiments of the present application are described in detail below, examples of which are shown in the drawings, wherein the same or similar notations represent the same or similar elements having the same or similar functions throughout. The embodiments described below by reference to the drawings are exemplary, and are intended to explain the present application, and cannot be understood as a limitation of the present application.

[0027] In the description of the present application, it is to be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0028] In addition, the terms "first", "second" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "multiple" is two or more, unless otherwise specifically limited.

[0029] In the present application, unless otherwise specifically defined and limited, the terms "mounting", "connection", "connection", "fixing" and the like should be broadly understood, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements. For ordinary skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0030] In order to make the purpose, technical scheme and advantages of the present application more clear and explicit, the present application will be further described in detail below with reference to the drawings and examples.

[0031] Referring to Figures 1 to 4 In the embodiment of the utility model, the first aspect provides a positioning disc mechanism, the positioning disc mechanism comprises a positioning disc group 1, a sliding block 2 and a driving unit 3. The positioning disc group 1 is connected with the driving end of the rotary driving mechanism, the positioning disc group 1 has the freedom of rotating around the first axis, the first axis is the axis of the positioning disc group 1, the outer periphery of the positioning disc group 1 is provided with a plurality of first mounting surfaces 14, and the plurality of first mounting surfaces 14 are uniformly distributed around the first axis. The number of the sliding block 2 is multiple, the sliding block 2 is arranged in one-to-one correspondence with the first mounting surface 14, and the sliding block 2 is slidably arranged on the first mounting surface 14, and the sliding block 2 is used for installing the swing arm mechanism. The number of the driving unit 3 is multiple, the driving unit 3 is arranged in one-to-one correspondence with the sliding block 2, the plurality of driving units 3 are uniformly arranged on the positioning disc group 1 around the first axis, and the driving unit 3 is used for driving different sliding blocks 2 to move along the first axis direction.

[0032] Specifically, the positioning disc group 1 refers to a component or assembly with a certain volume, and the positioning disc group 1 can be block-shaped, columnar or combined in multiple shapes. The first mounting surface 14 refers to a surface structure arranged on the outer periphery of the positioning disc group 1, and the first mounting surface 14 can be a flat surface structure or a curved surface structure. The sliding block 2 refers to a component with a certain volume, and the sliding block 2 can be block-shaped, plate-shaped or combined in multiple shapes, and the sliding block 2 can be connected with the first mounting surface 14 through a sliding rail sliding structure, a sliding rail roller structure or a sliding rail sliding block structure. The swing arm mechanism can be connected with the side of the sliding block 2 away from the positioning disc group 1 through clamping, fastener connection or plug-in connection. The driving unit 3 refers to a component or assembly that can drive a body to move along a straight line, and the driving unit 3 can be a pneumatic cylinder, a hydraulic cylinder or a voice coil motor. The rotary driving mechanism refers to a component that can output torque and drive a body or assembly to rotate, and the rotary driving mechanism can be a motor or a hydraulic motor, and a heat dissipation part can be further arranged outside the rotary driving mechanism.

[0033] The positioning disc mechanism provided by the embodiment of the utility model, through setting the positioning disc group 1 between the driving end of the rotary driving mechanism and the swing arm mechanism, the positioning disc group 1 can rotate around the first axis under the action of the rotary driving mechanism. Meanwhile, the positioning disc group 1 is provided with a plurality of first mounting surfaces 14, the plurality of first mounting surfaces 14 are uniformly distributed around the first axis, the plurality of sliding blocks 2 and the first mounting surfaces 14 can be set one by one in correspondence, the sliding block 2 can be slidably arranged on the first mounting surface 14, and the swing arm mechanism is installed and connected to the sliding block 2. The plurality of swing arm mechanisms are slidably connected to the first mounting surfaces 14 on the positioning disc group 1 through the sliding blocks 2, so that the plurality of swing arm assemblies can rotate around the first axis together with the positioning disc group 1. Meanwhile, the positioning disc group 1 is also provided with a plurality of driving units 3 which are uniformly arranged around the first axis, and the driving units 3 are set in correspondence with the sliding blocks 2. At this time, the plurality of driving units 3 can also drive the corresponding sliding blocks 2 to move along the first axis direction respectively, so as to realize that the swing arm mechanism can rotate around the first axis and also can slide along the first axis. Compared with the prior art, the plurality of swing arm mechanisms can be installed through the positioning disc group 1, the connection structure between the plurality of swing arm mechanisms and the driving end of the rotary driving mechanism is simpler, and the integration of the positioning disc mechanism is higher. Meanwhile, the plurality of swing arm mechanisms are installed on the same component positioning disc group 1, the installation error caused by installing the plurality of swing arm assemblies on different components can be avoided, the relative positions between the plurality of swing arm mechanisms are more accurate, and therefore the precision of die bonding is improved.

[0034] In addition, the plurality of first mounting surfaces 14 on the positioning disc group 1 are uniformly distributed around the first axis, and the plurality of sliding blocks 2 are also slidably arranged on the corresponding first mounting surfaces 14 respectively, so that the plurality of sliding blocks 2 are also uniformly distributed around the first axis, and the plurality of swing arm mechanisms are also uniformly distributed around the first axis, and the plurality of driving units 3 are also uniformly arranged on the positioning disc group 1 around the first axis, so that the overall gravity center of the positioning disc mechanism and the swing arm mechanism is located at the first axis, the problem of shaking of the positioning disc group 1 when rotating around the first axis is avoided, and the rotation of the swing arm mechanism is more stable.

[0035] In one embodiment, please refer to Figure 2 and Figure 3The inside of the positioning disc set 1 is a hollow structure, the plurality of driving units 3 are located inside the positioning disc set 1, and at least part of the sliding block 2 extends into the inside of the positioning disc set 1 and is connected with the driving end of the driving unit 3. Specifically, the inside of the positioning disc set 1 is a hollow structure, which means that a containing space is further arranged in the inside of the positioning disc set 1, so that the inside of the positioning disc set 1 can contain objects. The driving unit 3 can be connected to the inner wall of the positioning disc set 1 by clamping or fastener connection and the like. In this embodiment, by arranging the inside of the positioning disc set 1 as a hollow structure, locating the plurality of driving units 3 inside the positioning disc set 1, and extending at least part of the sliding block 2 into the inside of the positioning disc set 1 and connecting it with the driving end of the driving unit 3, the driving unit 3 can be as close as possible to the first axis during installation, so that the overall weight of the positioning disc set 1 and the driving unit 3 can be concentrated in the direction close to the first axis, the rotational inertia of the positioning disc set 1 is reduced, and the stop position of the swing arm mechanism is more accurate, thereby improving the precision of the die bonding equipment during die bonding.

[0036] In an optional embodiment, referring to Figure 3 The sliding block 2 includes a body part 21 and a connecting part 22, the body part 21 is slidingly connected at the first mounting surface 14, and the connecting part 22 is connected between the body part 21 and the driving end of the driving unit 3. Specifically, the body part 21 and the connecting part 22 both refer to components with a certain volume, and the body part 21 and the connecting part 22 can be block-shaped, plate-shaped or a combination of various shapes, and the body part 21 and the connecting part 22 can be an integral structure, for example, made by machining or casting, or the body part 21 and the connecting part 22 can be a split structure, for example, the body part 21 and the connecting part 22 can be connected by insertion, welding or fastener connection. In this embodiment, the positioning disc set 1 can be provided with a relief opening for avoiding the connecting part 22, and when the body part 21 needs to be connected with the driving end of the driving unit 3, the connecting part 22 can pass through the relief opening and be connected with the driving structure.

[0037] In an embodiment, referring to Figure 2 and Figure 3The positioning disc group 1 is further provided with a mounting opening 13 at the side away from the driving end of the rotary driving mechanism, the mounting opening 13 is used for connecting the internal space of the positioning disc group 1 with the outside, and the mounting opening 13 is further detachably provided with a sealing bottom disc 7. Specifically, the mounting opening 13 refers to an opening structure with a certain area, and the shape of the opening structure can be circular, regular polygonal or other shapes. The sealing bottom disc 7 refers to a plate-shaped member with a certain area, and the shape of the sealing bottom disc 7 can be matched with the shape of the mounting opening 13. The sealing bottom disc 7 can be detachably connected with the positioning disc group 1 by clamping, inserting or fastener connection and the like. In the embodiment, by providing the mounting opening 13 on the positioning disc group 1, the driving unit 3 can be more conveniently mounted to the inside of the positioning disc group 1, and the sealing bottom disc 7 is further detachably provided at the mounting opening 13, so that after the components inside the positioning disc group 1 are mounted, the mounting opening 13 can be sealed by the sealing bottom disc 7, avoiding other components from entering the inside of the positioning disc group 1 through the mounting opening 13, so that the use of the positioning disc group 1 is safer.

[0038] In an optional embodiment, referring to Figure 2 A support connecting block is arranged between the sealing bottom disc 7 and the positioning disc group 1. Specifically, the support connecting block refers to a component with a certain volume, which can be block-shaped, columnar or plate-shaped structure. By arranging the support connecting block between the sealing bottom disc 7 and the positioning disc group 1, the sealing bottom disc 7 can form a clearance after being mounted, so that at least part of the sliding block 2 can extend into the positioning disc group 1 through the clearance and be connected with the driving end of the driving unit 3, thereby avoiding the damage to the strength of the positioning disc group 1 caused by the arrangement of the avoiding structure on the positioning disc group 1. On the premise of ensuring the connection between the sliding block 2 and the driving unit 3 to be more convenient, the strength of the positioning disc group 1 is ensured, and the installation of the swing arm structure is more stable and reliable.

[0039] In an embodiment, referring to Figure 1 and Figure 2, the sliding block 2 and the first mounting surface 14 are provided with sliding rail units 8, and the side of the sealing base plate 7 facing the positioning disc set 1 is provided with a plurality of oil groove structures 71 for accommodating foreign matter falling from the sliding rail units 8, and the plurality of oil groove structures 71 are respectively located in the lower region of the sliding rail units 8 along the first axis direction. Specifically, the sliding rail unit 8 refers to a component or assembly for connecting two components and allowing the two components to slide relative to each other, for example, the sliding rail unit 8 can adopt a cross rail, which is a high-precision linear motion guide device composed of two guide rails with V-shaped rails, roller retainer, cylindrical rollers, etc. The oil groove structure 71 refers to a certain space accommodating structure, wherein the oil groove structure 71 can be a groove structure, a flow guide groove, etc. In the embodiment, by arranging the cross rail between the sliding block 2 and the first mounting surface 14, the sliding of the sliding block 2 is more convenient, and the sliding of the sliding block 2 is more stable and accurate. At the same time, a plurality of oil groove structures 71 for accommodating foreign matter falling from the sliding rail units 8, such as lubricating oil, are arranged on the side of the sealing base plate 7 facing the positioning disc set 1, and the plurality of oil groove structures 71 are located in the lower region of the sliding rail units 8 along the first axis direction, i.e. directly below the sliding rail units 8. During operation, oil stains or foreign matter can be prevented from falling onto the chip, making the die bonding of the die bonder more secure and reliable.

[0040] In an optional embodiment, referring to Figure 4 A plurality of mounting grooves 16 are arranged on the outer periphery of the positioning disc set 1, the plurality of mounting grooves 16 are uniformly distributed around the first axis, and the depth direction of the plurality of mounting grooves 16 is arranged in a direction perpendicular to the first axis, and the first mounting surface 14 is located on the bottom surface of the mounting groove 16. Specifically, the mounting groove 16 refers to a groove structure with a certain depth. By arranging a plurality of mounting grooves 16 on the outer periphery of the positioning disc set 1, the first mounting surface 14 is located on the bottom surface of the mounting groove 16, so that the installation position of the sliding block 2 and the sliding rail unit 8 after installation can be as close to the first axis as possible, so that the overall weight of the entire positioning disc mechanism can be concentrated in the direction close to the first axis, thereby reducing the inertia of the positioning disc set 1 during rotation, and further making the stop position of the swing arm mechanism after movement more accurate, thereby improving the accuracy of die bonding.

[0041] In an embodiment, referring to Figure 3The positioning disc mechanism further comprises a controller 4 for controlling the working state of the electrical components on the positioning disc set 1, the controller 4 is fixed to the inner wall of the positioning disc set 1, and the center of gravity of the controller 4 is located on the first axis. Specifically, the controller 4 refers to a device for controlling the operation of other equipment or electrical components, and in this embodiment, it refers to a controller 4 in a physical sense, which has a certain volume and weight. The controller 4 can be a PLC (Programmable Logic Controller), an MCU (Micro-Controller Unit) or a DCS (Distributed Control System). The controller 4 can be fixed inside the positioning disc set 1 by clamping, bonding or fastening. By locating the center of gravity of the controller 4 on the first axis, the overall center of gravity of the positioning disc set 1 and the controller 4 can be close to the first axis after the controller 4 is installed, which can make the rotation of the positioning disc set 1 more stable, and also reduce the moment of inertia of the positioning disc set 1 and improve the accuracy of die bonding.

[0042] In one embodiment, referring to Figure 1 and Figure 4 The outer periphery of the positioning disc set 1 has a second mounting surface 15, the second mounting surface 15 is located between two first mounting surfaces 14, the number of the second mounting surfaces 15 is multiple, and the multiple second mounting surfaces 15 are also uniformly distributed around the first axis. Specifically, the second mounting surface 15 refers to a surface structure with a certain area, which can be a flat surface structure or a curved surface structure. In this embodiment, by providing multiple second mounting surfaces 15 on the outer periphery of the positioning disc set 1, other components such as the air path control set 5 can be installed on the second mounting surfaces 15 while the swing arm mechanism is installed on the first mounting surfaces 14, which can improve the integration of the entire positioning disc mechanism. Moreover, the multiple second mounting surfaces 15 are also uniformly distributed around the first axis, and the second mounting surfaces 15 are located between two first mounting surfaces 14, which are arranged alternately. This can make the components installed on the second mounting surfaces 15 also uniformly distributed around the first axis, thereby improving the stability of the positioning disc set 1 during rotation.

[0043] In an optional embodiment, referring to Figure 4The second mounting surface 15 can also be provided with heat dissipation holes 17 for air flow, and the sealing base 7 is provided with heat dissipation holes 17 for air flow. The heat dissipation holes 17 refer to the through hole structure provided through the object, and the number of heat dissipation holes 17 is usually multiple, and multiple heat dissipation holes 17 are uniformly distributed in the specified area. By providing heat dissipation holes 17 on the second mounting surface 15 and the sealing base 7, the inside of the positioning disc set 1 can exchange air with the outside, avoid overheating of the components installed inside the positioning disc set 1 due to heat accumulation, make the components inside the positioning disc set 1 safer to use, and make the use of the entire positioning disc mechanism safer and more reliable.

[0044] In an embodiment, referring to Figure 1 With Figure 2 , the second mounting surface 15 is provided with an air path control group 5, which is used to control the communication and disconnection of the air path at the suction nozzle structure. Specifically, the air path control group 5 refers to a component or assembly for controlling the communication and disconnection of the air path, which can include components such as solenoid valves. In this embodiment, by arranging the air path control group 5 on the second mounting surface 15, and connecting the control end of the air path control group 5 with the controller 4, the control of the suction nozzle structure on each swing arm mechanism can be more convenient, and the weight distribution of the positioning disc set 1 after installation of the air path control group 5 in the circumferential direction of the first axis is kept balanced, so that the rotation of the positioning disc set 1 is more stable.

[0045] In an embodiment, referring to Figure 4 , the positioning disc set 1 includes a main disc body 11 and a main cylinder body 12, the main disc body 11 is arranged at the end of the main cylinder body, the first mounting surface 14 is located on the outer periphery of the main cylinder body 12 and is uniformly distributed around the axis of the main cylinder body 12. Specifically, the main disc body 11 refers to a plate structure with a certain area, one side of the main disc body 11 is used to connect with the driving end of the rotary driving mechanism, and the other side of the main disc body 11 abuts at one opening of the main cylinder body 12. The main cylinder body 12 refers to a cylindrical component with a certain height, which is formed by surrounding a plate component. The main disc body 11 and the main cylinder body 12 can be integrally formed, for example, they can be made by pressure casting, machining or casting, etc., so that the overall strength of the positioning disc set 1 is better. The main disc body 11 and the main cylinder body 12 can also be a split structure, and they can be connected with each other by welding, fastener connection or clamping, etc., which can reduce the manufacturing cost. In this embodiment, the main disc body 11 is arranged at the end of the main cylinder body to form the positioning disc set 1, and the first mounting surface 14 is located on the outer periphery of the main cylinder body 12 and is uniformly distributed around the axis of the main cylinder body 12, so that the structure of the entire positioning disc set 1 is simpler.

[0046] In an optional embodiment, referring toFigure 1 With Figure 2 The side of the main disc body 11 away from the main cylinder body 12 is further provided with a connecting handle 6. The first end of the connecting handle 6 is used to be connected with the driving end of the rotary driving mechanism, and the second end of the connecting handle 6 is connected to the side of the main disc body 11. The second end of the connecting handle 6 can be connected with the main disc body 11 through clamping, insertion or fasteners and the like. Specifically, the connecting handle 6 refers to a component with a certain length, and the connecting handle 6 can be columnar or blocky and the like. By providing the connecting handle 6 on the side of the main disc body 11 away from the main cylinder body 12, the connection of the positioning disc set 1 with the rotary driving mechanism can be more convenient and firm.

[0047] In one embodiment, referring to Figure 4 The cross section of the main cylinder body 12 is a regular polygon, and the shape of the main disc body 11 matches the cross section shape of the main cylinder body 12. Specifically, the regular polygon can be a hexagon. By making the cross section of the main cylinder body 12 a regular polygon and the shape of the main disc body 11 match the cross section shape of the main cylinder body 12, the first mounting surface 14 and the second mounting surface 15 can be both arranged on the outside of the main cylinder body 12, so that the first mounting surface 14 and the second mounting surface 15 can both be planar structures, thereby making the installation of the swing arm structure or other components more convenient. The cross section of the main cylinder body 12 being a regular polygon also makes the overall strength of the main cylinder body 12 better.

[0048] In a second aspect, a positioning disc mechanism is provided. It can be understood that the beneficial effects of the second aspect can be understood in relation to the first aspect.

[0049] The above is only a preferred embodiment of the present application, and only the technical principle of the present application is specifically described. These descriptions are only for explaining the principle of the present application, and cannot be interpreted as limiting the protection scope of the present application in any way. Based on the above explanation, any modification, equivalent replacement and improvement within the spirit and principles of the present application, and other specific embodiments of the present application that can be conceived by those skilled in the art without creative labor, should be included in the protection scope of the present application.

Claims

1. A positioning disc mechanism, characterized by, The positioning disc set is connected with the driving end of the rotating driving mechanism and has a rotation freedom around a first axis, which is the axis of the positioning disc set. The positioning disc set has a plurality of first mounting surfaces uniformly distributed around the first axis. A plurality of sliding blocks are used to install the swing arm mechanism. The sliding blocks are arranged one-to-one with the first mounting surfaces. The plurality of sliding blocks are respectively arranged on the first mounting surfaces in a sliding manner. A plurality of driving units are arranged one-to-one with the sliding blocks and are uniformly arranged on the positioning disc set around the first axis to drive the sliding blocks to move along the first axis. The interior of the positioning disc set is a hollow structure. The plurality of driving units are located in the interior of the positioning disc set. At least part of the sliding blocks extends into the interior of the positioning disc set and is connected with the driving end of the driving unit. The side of the positioning disc set away from the driving end of the rotating driving mechanism is further provided with a mounting opening for communicating the internal space of the positioning disc set with the outside. A sealing base is arranged at the mounting opening.

2. The index plate mechanism of claim 1, wherein, A sliding rail unit is arranged between the sliding block and the first mounting surface. A plurality of oil groove structures are arranged on the sealing base towards the side of the positioning disc set. The oil groove structures are used to accommodate foreign matters falling from the sliding rail unit. The plurality of oil groove structures are respectively located below the sliding rail unit in the direction along the first axis.

3. The index plate mechanism of claim 2, wherein, The positioning disc mechanism further comprises a controller for controlling the working state of an electrical element on the positioning disc set. The controller is fixedly arranged in the interior of the positioning disc set. The center of gravity of the controller is located on the first axis.

4. The index plate mechanism of claim 3, wherein, The outer periphery of the positioning disc set has a second mounting surface located between two first mounting surfaces. The second mounting surface is a plurality of second mounting surfaces uniformly distributed around the first axis.

5. The index plate mechanism of claim 2 wherein, A gas path control group is arranged on the second mounting surface. The gas path control group is used to control the communication and disconnection of the gas path at the suction nozzle structure.

6. The index plate mechanism of claim 2 wherein, The positioning disc set comprises a main disc body and a main cylinder part. The main disc body covers the end of the main cylinder part. The first mounting surface is located on the outer periphery of the main cylinder part and is uniformly distributed around the axis of the main cylinder part.

7. The index plate mechanism of claim 6, wherein, The cross section of the main cylinder part is a regular polygon. The shape of the main disc body matches the shape of the cross section of the main cylinder part.

8. A positioning disc mechanism as claimed in any one of claims 2 to 7, characterized in that The positioning disc mechanism comprises any one of claims 1 to 9.

9. The index plate mechanism of claim 8, wherein, ​ 10. A die bonding apparatus, characterized in that, ​

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