Paddle adjusting device and transportation equipment

Abstract

The utility model provides a paddle adjusting device and transportation equipment, relates to the field of semiconductor or photovoltaic material processing, and solves the technical problem that a rectangular supporting rod is difficult to adjust the posture of a paddle structure. The paddle adjusting device comprises a supporting assembly and a paddle adjusting assembly, wherein the supporting assembly is provided with a first arc-shaped surface and a first plane; the fixing assembly is connected with the paddle structure, the fixing assembly is provided with a first through hole, the first through hole is provided with a first arc-shaped inner wall, the supporting assembly penetrates through the first through hole and the first arc-shaped surface to make contact with the first arc-shaped inner wall so that the fixing assembly can rotate relative to the supporting assembly, and the paddle structure extends in the first direction; the first locking assembly is connected with the fixing assembly, abuts against the at least one first plane and is configured to lock the fixing assembly and the supporting assembly. By means of the structure, the fixing assembly can rotate relative to the supporting assembly, so that the paddle structure borne by the fixing assembly is driven to rotate, the posture of the paddle structure is adjusted, and the paddle structure can be accurately adjusted to be in the horizontal state.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor or photovoltaic material processing, in particular to a paddle adjusting device and a conveying device. BACKGROUND

[0002] The paddle structure is a bearing tool in the production process equipment of solar cell pieces, which is mainly used to send the boat (such as a quartz boat or a graphite boat) loaded with silicon pieces into the furnace tube (such as a quartz tube) of the process equipment for reaction, and then take out the boat after the reaction is completed. Among them, the photovoltaic silicon carbide paddle has important application in the photovoltaic industry, and has the advantages of stable performance, strong bearing capacity, resistance to rapid cooling and heating, etc. Moreover, the service life of the photovoltaic silicon carbide paddle is long, which can greatly prolong the equipment maintenance and cleaning period, and greatly reduce the pollutants and production cost. These advantages make the photovoltaic silicon carbide paddle become a key component of the photovoltaic cell piece loading system. At the same time, with the continuous development of the solar industry and the expansion of the photovoltaic market, the market demand for photovoltaic silicon carbide paddles will also continue to grow. In the future, with the acceleration of domestic substitution process and the continuous progress of technology, the application prospect of photovoltaic silicon carbide paddle in the photovoltaic industry will be more broad.

[0003] In the traditional plasma enhanced chemical vapor deposition (PECVD) equipment, the silicon carbide paddle with a circular cross-sectional shape is mostly used to bear the graphite boat, and the paddle structure bearing the boat usually adopts a cantilevered manner, specifically, a fixed block is supported by a support rod, and then one end of the paddle structure is supported and fixed by the fixed block. After the boat is placed on the paddle structure, the paddle structure and the support rod will be deformed under the action of load and gravity. The heavier the boat is, the longer the paddle structure is, and the greater the deformation degree of the paddle structure and the support rod is, and the more space is needed for the boat pushing device (usually including a driving assembly, a paddle structure, a support rod and a fixed block) to send the boat into the reaction cavity in the furnace tube. With the continuous improvement of production capacity and process, the size of the cell pieces (such as silicon pieces) to be produced is continuously increasing, and the size of the boat is also increasing. Moreover, with the continuous improvement of production capacity, the paddle structure changes from bearing a single boat to bearing double boats, the length of the boat is continuously increasing, and the size of the boat blade is also continuously increasing, that is, the weight of the load borne by the paddle structure is getting larger and larger, so that the deformation of the paddle structure and the support rod is also increasing. CONTENT OF THE UTILITY MODEL

[0004] In order to solve the above technical problems, the present application is proposed. The paddle adjusting device and the conveying device are provided in the embodiments of the present application.

[0005] In a first aspect, an embodiment of the present application provides a paddle adjusting device configured to adjust a posture of a paddle structure, the paddle adjusting device comprising: a support assembly having at least one first arc-shaped surface extending along a first direction and at least one first flat surface extending along the first direction; a fixing assembly connected with the paddle structure, the fixing assembly having a first through hole extending along the first direction, the first through hole having a first arc-shaped inner wall extending along the first direction, wherein the support assembly passes through the first through hole, the first arc-shaped surface is in contact with the first arc-shaped inner wall to enable the fixing assembly to rotate relative to the support assembly, and the paddle structure extends along the first direction; and a first locking assembly connected with the fixing assembly and abutting against the at least one first flat surface, the first locking assembly being configured to lock the fixing assembly and the support assembly.

[0006] In some embodiments, the fixing assembly has at least two first threaded portions extending along a second direction intersecting the first direction; the first locking assembly comprises: at least two first screw members, each first screw member being screwed with one first threaded portion; the support assembly has a first side and a second side oppositely arranged in the second direction, and the support assembly has the first flat surface on the first side and the second side respectively, in a case where all the first screw members are arranged on the first side and the second side of the support assembly respectively, the first screw members are configured to abut against the first flat surface on the first side and the first flat surface on the second side respectively from the first side and the second side respectively, and at least one first screw member on the first side and at least one first screw member on the second side are arranged on the same side of the rotation center of the fixing assembly in a third direction intersecting the first direction and the second direction; or, in a case where all the first screw members abut against the same first flat surface, all the first screw members are arranged on both sides of the rotation center of the fixing assembly in the third direction respectively.

[0007] In some embodiments, the fixing assembly further has at least one first waist-shaped hole extending along the second direction and / or the third direction, and the support assembly further has at least one second threaded portion; the paddle adjusting device further comprises: at least one second screw member, each second screw member passing through one first waist-shaped hole and being screwed with the second threaded portion.

[0008] In some embodiments, the paddle adjusting device further comprises: at least one first nut arranged on a side of the fixing assembly away from the support assembly, each first nut being screwed with one first screw member; and / or at least one second nut arranged on the side of the fixing assembly away from the support assembly, each second nut being screwed with one second screw member.

[0009] In some embodiments, the paddle structure has at least two second planes, the fixing assembly further has at least one second through hole extending in the first direction, each second through hole has at least one second arc-shaped inner wall, and each second through hole is capable of allowing one paddle structure to pass through; wherein the paddle adjusting device further comprises: at least one rotating block, each rotating block has at least one second arc-shaped surface and at least one third plane, at least one rotating block is arranged in each second through hole, the second arc-shaped surface of each rotating block is in contact with one second arc-shaped inner wall of one second through hole, and the third plane of each rotating block is in contact with the second plane of the paddle structure, so that the rotating block is capable of rotating relative to the fixing assembly and driving the paddle structure to rotate; and a second locking assembly connected with the fixing assembly and abutting against the at least one second plane of the paddle structure, configured to fix the posture of the paddle structure.

[0010] In some embodiments, the number of rotating blocks is at least two, two oppositely arranged rotating blocks are contained in each second through hole, a containing space is formed between the two rotating blocks, the paddle structure passes through the containing space, and the two second planes of the paddle structure are respectively in contact with one third plane of the two rotating blocks.

[0011] In some embodiments, the fixing assembly has at least two third threaded parts extending in a second direction, and the second direction has an included angle with the first direction; wherein the second locking assembly comprises: at least two third screwing pieces, each third screwing piece is screwed with one third threaded part; wherein the paddle structure has oppositely arranged third and fourth sides in the second direction, the paddle structure has second planes on the third and fourth sides respectively, in the case that all third screwing pieces are arranged on the third and fourth sides of the paddle structure respectively, the third screwing pieces are configured to abut against the second planes on the third and fourth sides respectively, and at least one third screwing piece located on the third side and at least one third screwing piece located on the fourth side are arranged on the same side of the rotation center of the paddle structure in a third direction, and the third direction intersects with the first and second directions; or, in the case that all third screwing pieces abut against the same second plane, all third screwing pieces are arranged on both sides of the rotation center of the paddle structure in the third direction respectively.

[0012] In some embodiments, the fixing assembly further has at least one second waist-shaped hole extending in the second direction, the second direction intersects with the first direction, and the rotating block further has at least one fourth threaded part; wherein the paddle adjusting device further comprises: at least one fourth screwing piece, each fourth screwing piece passes through one second waist-shaped hole and is screwed with one fourth threaded part.

[0013] In some embodiments, the paddle adjusting device further comprises: at least one clamping piece, each clamping piece is arranged between the second locking assembly and the second plane, and is configured to protect the paddle structure.

[0014] In a second aspect, an embodiment of the present application provides a transportation device, comprising: a paddle structure configured to carry products; and the paddle adjusting device of any one of the first aspect, connected with the paddle structure and configured to adjust the posture of the paddle structure.

[0015] The paddle adjusting device and the transportation device provided by the embodiments of the present application can rotate the fixing assembly relative to the supporting assembly, thereby driving the paddle structure carried by the fixing assembly to rotate, so as to adjust the posture of the paddle structure, and the paddle structure can be accurately adjusted to a horizontal state. In addition, the supporting assembly with the first arc surface and the first plane has a more stable structure and a smaller deformation amount compared with the supporting rod with a circular cross-sectional shape, thereby improving the stability of the transportation device and the yield. BRIEF DESCRIPTION OF DRAWINGS

[0016] The above and other objects, features and advantages of the present application will become more apparent from the following detailed description of embodiments of the present application, when taken in conjunction with the accompanying drawings. The drawings provided in the specification and the embodiments of the present application will form a part of the specification and are implemented to explain, interpret and illustrate the application and will not be taken as limiting the present application. In the drawings, the same reference numerals and signs are generally used to designate the same or similar components or steps.

[0017] Figure 1 Fig. 1 shows a side view of a transportation device provided by an exemplary embodiment of the present application.

[0018] Figure 2 Fig. 2 shows a perspective view of the transportation device provided by the exemplary embodiment of the present application. Figure 1 Fig. 3 shows a cross-sectional view of the transportation device along AA direction.

[0019] Figure 3 Fig. 4 shows a top view of the transportation device provided by the exemplary embodiment of the present application.

[0020] Figure 4 Fig. 5 shows a perspective view of the transportation device provided by the exemplary embodiment of the present application. Figure 3 Fig. 6 shows a cross-sectional view of the transportation device along BB direction.

[0021] Figure 5 Fig. 7 shows a front view of the transportation device provided by the exemplary embodiment of the present application.

[0022] LIST OF REFERENCE NUMERALS

[0023] 100, paddle adjusting device; 101, support assembly; 1011, first side; 1012, second side; 1013, first arc surface; 1014, first plane; 1015, second threaded hole; 102, fixing assembly; 1021, first through hole; 1022, first fixing block; 1023, second fixing block; 1024, first waist-shaped hole; 1025, third threaded hole; 1026, second waist-shaped hole; 1027, second through hole; 103, first locking assembly; 1031, first screwing piece; 104, second screwing piece; 105, first nut; 106, second nut; 107, rotating block; 1071, second arc surface; 1072, third plane; 1073, fourth threaded hole; 108, second locking assembly; 1081, third screwing piece; 109, fourth screwing piece; 110, clamping piece; 111, third nut; 112, fourth nut; 200, paddle structure; 201, third side; 202, fourth side; 300, transportation device. DETAILED DESCRIPTION

[0024] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work belong to the scope of protection of the present application.

[0025] Figure 1 Fig. 1 shows a side view of a transportation device provided by an exemplary embodiment of the present application, Figure 2 Fig. 2 shows a front view of a transportation device provided by an exemplary embodiment of the present application, Figure 1 Fig. 3 shows a cross-sectional view of a transportation device along AA direction, Figure 3 Fig. 4 shows a top view of a transportation device provided by an exemplary embodiment of the present application, Figure 4 Fig. 5 shows a perspective view of a transportation device provided by an exemplary embodiment of the present application, Figure 3 Fig. 6 shows a cross-sectional view of a transportation device along BB direction, Figure 5 Fig. 7 shows a front view of a transportation device provided by an exemplary embodiment of the present application.

[0026] As shown in Fig. 1, Figures 1 to 5 An embodiment of the present application provides a paddle adjusting device 100 configured to adjust the posture of a paddle structure 200, the paddle adjusting device 100 comprising a support assembly 101, a fixing assembly 102 and a first locking assembly 103. The support assembly 101 has a first side 1011 and a second side 1012, and the first side 1011 and the second side 1012 are opposite to each other. Figure 1 and Figure 3The paddle structure 200 has at least one first arcuate surface 1013 extending in the X direction and at least one first plane 1014 extending in the first direction. A fixing assembly 102 is connected to the paddle structure 200 and has a first through hole 1021 extending in the first direction. The first through hole 1021 has a first arcuate inner wall extending in the first direction, through which a support assembly 101 passes. The first arcuate surface 1013 contacts the first arcuate inner wall to allow the fixing assembly 102 to rotate relative to the support assembly 101, wherein the paddle structure 200 extends in the first direction. A first locking assembly 103 is connected to the fixing assembly 102 and abuts against at least one first plane 1014, configured to lock the fixing assembly 102 and the support assembly 101.

[0027] For example, such as Figure 2 , Figure 4 and Figure 5 As shown, the support assembly 101 includes a support rod. The upper and lower ends of the support rod have first arcuate surfaces 1013, and the left and right ends of the support rod have first flat surfaces 1014. The upper and lower inner walls of the first through hole 1021 are first arcuate inner walls. Thus, the first arcuate surface 1013 at the upper end of the support rod can rotate relative to the upper inner wall of the first through hole 1021, and the first arcuate surface 1013 at the lower end of the support rod can rotate relative to the lower inner wall of the first through hole 1021.

[0028] For example, the support assembly 101 includes a support rod with a first arcuate surface 1013 at its lower end, and a first flat surface 1014 at its upper, left, and right ends. The lower inner wall of the first through hole 1021 is a first arcuate inner wall. In this way, the first arcuate surface 1013 at the lower end of the support rod can rotate relative to the lower inner wall of the first through hole 1021.

[0029] For example, the support component 101 can be obtained by welding an arc-shaped structure onto a cuboid structure, so that the support component 101 can have the structural stability of a support rod with a rectangular cross-sectional shape, while also allowing the fixing component 102 to rotate around the support component 101.

[0030] For example, such as Figure 5 As shown, the fixing component 102 includes a first fixing block 1022 and a second fixing block 1023. The first fixing block 1022 and the second fixing block 1023 are connected by screws or bolts. The first fixing block 1022 is located above the second fixing block 1023. The first fixing block 1022 has a first through hole 1021.

[0031] For example, the first locking assembly 103 includes screws and / or bolts.

[0032] For example, the fixing component 102 is connected to the two paddle structures 200.

[0033] In the related art, because the structural stability of the rectangular cross-section silicon carbide paddle is better than that of the circular cross-section silicon carbide paddle, and the structural stability of the rectangular cross-section support rod is better than that of the circular cross-section support rod, in order to reduce the deformation amount of the paddle structure and the support rod, some manufacturers use the rectangular cross-section silicon carbide paddle and the rectangular cross-section support rod. However, compared with the circular cross-section support rod, it is difficult for the fixed block to rotate relative to the rectangular cross-section support rod, and therefore, if the rectangular cross-section support rod is used, it is difficult to adjust the attitude of the paddle structure (such as adjusting the paddle structure to a horizontal state).

[0034] In the embodiments of the present application, because the support assembly 101 has the first arc-shaped surface 1013, the first through hole 1021 has the first arc-shaped inner wall, and the first arc-shaped surface 1013 is in contact with the first arc-shaped inner wall, the fixed assembly 102 can rotate relative to the support assembly 101, thereby driving the paddle structure 200 carried by the fixed assembly 102 to rotate, so as to adjust the attitude of the paddle structure 200, and the paddle structure 200 can be accurately adjusted to a horizontal state. For example, the upper surface of the paddle structure 200 is a second plane, the upper surface of the paddle structure 200 is parallel to the horizontal plane, and it can be considered that the paddle structure 200 is in a horizontal state. For example, the lower surface of the paddle structure 200 is a second plane, the lower surface of the paddle structure 200 is parallel to the horizontal plane, and it can be considered that the paddle structure 200 is in a horizontal state. By arranging the first locking assembly 103, the attitude of the fixed assembly 102 can be fixed. In addition, compared with the circular cross-section support rod, the support assembly 101 having the first arc-shaped surface 1013 and the first plane 1014 has a more stable structure and a smaller deformation amount.

[0035] In some embodiments, the fixed assembly 102 has a second direction (such as the direction of the arrow A2 in FIG. 2) along which the fixed assembly 102 can rotate relative to the support assembly 101. Figures 2 to 5The first locking assembly 103 includes at least two first threaded parts 1031. Each first threaded part 1031 is screwed with a first threaded part. The support assembly 101 has a first side 1011 and a second side 1012 oppositely arranged in the second direction. The support assembly 101 has a first plane 1014 on the first side 1011 and a first plane 1014 on the second side 1012 respectively. In the case that all the first threaded parts 1031 are arranged on the first side 1011 and the second side 1012 respectively, the first threaded parts 1031 are configured to abut the first plane 1014 on the first side 1011 and the first plane 1014 on the second side 1012 respectively from the first side 1011 and the second side 1012. At least one first threaded part 1031 on the first side 1011 and at least one first threaded part 1031 on the second side 1012 are arranged on the same side of the rotation center of the fixing assembly 102 (i.e. the rotation center of the fixing assembly 102 relative to the support assembly 101) in the third direction (e.g. the Z direction shown in the figure) which is perpendicular to the first direction and the second direction. Figure 1 、 Figure 2 、 Figure 4 and Figure 5 The first locking assembly 103 includes at least two first threaded parts 1031. Each first threaded part 1031 is screwed with a first threaded part. The support assembly 101 has a first side 1011 and a second side 1012 oppositely arranged in the second direction. The support assembly 101 has a first plane 1014 on the first side 1011 and a first plane 1014 on the second side 1012 respectively. In the case that all the first threaded parts 1031 are arranged on the first side 1011 and the second side 1012 respectively, the first threaded parts 1031 are configured to abut the first plane 1014 on the first side 1011 and the first plane 1014 on the second side 1012 respectively from the first side 1011 and the second side 1012. At least one first threaded part 1031 on the first side 1011 and at least one first threaded part 1031 on the second side 1012 are arranged on the same side of the rotation center of the fixing assembly 102 (i.e. the rotation center of the fixing assembly 102 relative to the support assembly 101) in the third direction (e.g. the Z direction shown in the figure) which is perpendicular to the first direction and the second direction.

[0036] Exemplarily, the second direction is a horizontal direction perpendicular to the first direction.

[0037] Exemplarily, the fixing assembly 102 (e.g. the first fixing block 1022) has at least two first threaded holes extending in the second direction, and the first threaded part is a thread in the first threaded hole.

[0038] Exemplarily, the first threaded part 1031 is a screw or a bolt.

[0039] Exemplarily, there are eight first threaded parts 1031, four first threaded parts 1031 are arranged on the first side 1011 (e.g. the left side of the support assembly 101), and four first threaded parts 1031 are arranged on the second side 1012 (e.g. the right side of the support assembly 101). Among them, two first threaded parts 1031 on the first side 1011 and two first threaded parts 1031 on the second side 1012 are arranged on one side (e.g. the upper side) of the rotation center of the fixing assembly 102 in the third direction, and the other two first threaded parts 1031 on the first side 1011 and the other two first threaded parts 1031 on the second side 1012 are arranged on the other side (e.g. the lower side) of the rotation center of the fixing assembly 102 in the third direction.

[0040] Exemplarily, the first screw members 1031 are four, and the four first screw members 1031 are located on the first side 1011 or the second side 1012 (e.g., the left side of the support assembly 101), two first screw members 1031 are arranged on one side (e.g., the upper side) of the rotation center of the fixing assembly 102 in the third direction, and the other two first screw members 1031 are arranged on the other side (e.g., the lower side) of the rotation center of the fixing assembly 102 in the third direction.

[0041] Through this structure, the posture of the fixing assembly 102 can be stably fixed.

[0042] In some embodiments, as shown in Figures 1 to 5 , the fixing assembly 102 also has at least one first waist-shaped hole 1024 extending in the second direction and / or the third direction, and the support assembly 101 also has at least one second threaded part. Wherein, the paddle adjusting device 100 further comprises: at least one second screw member 104, each second screw member 104 passes through one first waist-shaped hole 1024 and is screwed with the second threaded part.

[0043] Exemplarily, the support assembly 101 has at least one second threaded hole 1015, and the second threaded part is a thread in the second threaded hole 1015.

[0044] Exemplarily, the second screw member 104 is a screw or a bolt.

[0045] Exemplarily, as the top and the bottom of the first fixing block 1022 respectively have two first waist-shaped holes 1024 extending in the second direction (from bottom to top direction), the top and the bottom of the support assembly 101 respectively have two second threaded holes 1015 extending in the third direction. The two outer side walls of the fixing assembly 102 (e.g., the first fixing block 1022) in the second direction (from right to left direction) respectively have two first waist-shaped holes 1024 extending in the third direction, and the two outer side walls of the support assembly 101 in the second direction respectively have two second threaded holes 1015 extending in the second direction.

[0046] Through this structure, each second screw member 104 can only move in the extension direction of the first waist-shaped hole 1024 into which it is inserted, so as to be able to limit the direction of rotation of the fixing assembly 102 and prevent the rotation direction of the fixing assembly 102 from deviating.

[0047] In some embodiments, as shown in Figure 2 , Figure 4 and Figure 5As shown, the propeller adjustment device 100 further includes at least one first nut 105 and / or at least one second nut 106. When the propeller adjustment device 100 has at least one first nut 105, the at least one first nut 105 is disposed on the side of the fixing component 102 away from the support component 101, and each first nut 105 is screwed to a first threaded member 1031. When the propeller adjustment device 100 has at least one second nut 106, the at least one second nut 106 is disposed on the side of the fixing component 102 away from the support component 101, and each second nut 106 is screwed to a second threaded member 104.

[0048] The first screwed member 1031 can be tightened by setting the first nut 105, thereby improving the structural stability of the propeller adjustment device 100. The second screwed member 104 can be tightened by setting the second nut 106, thereby improving the structural stability of the propeller adjustment device 100.

[0049] In some embodiments, such as Figure 2 , Figure 4 and Figure 5 As shown, the propeller structure 200 has at least two second planes, and the fixing component 102 also has at least one second through hole 1027 extending along a first direction. Each second through hole 1027 has at least one second arcuate inner wall, and each second through hole 1027 allows a propeller structure 200 to pass through. The propeller adjustment device 100 further includes at least one rotating block 107 and a second locking component 108. Each rotating block 107 has at least one second arcuate surface 1071 and at least one third plane 1072. At least one rotating block 107 is disposed within each second through hole 1027. The second arcuate surface 1071 of each rotating block 107 contacts one of the second arcuate inner walls of a second through hole 1027, and the third plane 1072 of each rotating block 107 contacts the second plane of the propeller structure 200, so that the rotating block 107 can rotate relative to the fixing component 102 and drive the propeller structure 200 to rotate. The second locking component 108 is connected to the fixing component 102 and abuts against at least one second plane of the propeller structure 200, and is configured to fix the attitude of the propeller structure 200.

[0050] For example, the paddle structure 200 has a rectangular cross-sectional shape, meaning it has four second planes. A paddle structure 200 with a rectangular cross-sectional shape is more stable and has less deformation than a paddle structure 200 with a circular cross-sectional shape. Alternatively, the paddle structure 200 can also have a polygonal cross-sectional shape other than a rectangle.

[0051] For example, the second fixing block 1023 has a second through hole 1027.

[0052] For example, the second locking component 108 includes a screw or bolt.

[0053] Exemplarily, the first fixed block 1022 has a first groove, and the second fixed block 1023 has a second groove. When the first fixed block 1022 is connected with the second fixed block 1023, the first groove and the second groove are opposite to each other, and the groove walls of the first groove and the second groove are fitted to communicate the first groove and the second groove to form the second through hole 1027.

[0054] Through the structure, the rotating block 107 can rotate relative to the fixed assembly 102, thereby driving the paddle structure 200 to rotate to adjust the posture of the paddle structure 200, and the upper surface of the paddle structure 200 can be accurately adjusted to be horizontal. In addition, if the fixed assembly 102 can rotate relative to the rotating structure of the support assembly 101 as in the above embodiment, the posture of the paddle structure 200 can be adjusted more greatly, the flexibility of adjusting the posture of the paddle structure 200 is improved, the installation and maintenance time is reduced, and the cost is reduced. By setting the second locking assembly 108, the posture of the rotating block 107 can be fixed.

[0055] In some embodiments, the number of rotating blocks 107 is at least two, and each second through hole 1027 contains two oppositely arranged rotating blocks 107. The two rotating blocks 107 form an accommodation space, the paddle structure 200 passes through the accommodation space, and two second planes of the paddle structure 200 respectively contact one third plane 1072 of the two rotating blocks 107.

[0056] Exemplarily, the second through hole 1027 has two oppositely arranged second arc-shaped inner walls, and each rotating block 107 has one second arc-shaped surface 1071 respectively contacting one second arc-shaped inner wall.

[0057] Through the structure, the rotating block 107 can clamp the paddle structure 200, thereby stably driving the paddle structure 200 to rotate.

[0058] In some embodiments, the fixing assembly 102 has at least two third threaded portions extending along a second direction, the second direction having an included angle with the first direction. The second locking assembly 108 includes at least two third screw members 1081, each of which is screwed with one of the third threaded portions. The paddle structure 200 has oppositely arranged third and fourth sides 201 and 202 along the second direction, and the paddle structure 200 has second planes at the third and fourth sides 201 and 202, respectively. In a case where all the third screw members 1081 are arranged at the third and fourth sides 201 and 202, respectively, the third screw members 1081 are configured to abut the second planes of the third and fourth sides 201 and 202, respectively, and at least one of the third screw members 1081 arranged at the third side 201 and at least one of the third screw members 1081 arranged at the fourth side 202 are arranged at the same side of the rotation center of the paddle structure 200 along a third direction, the third direction intersecting the first and second directions. Alternatively, in a case where all the third screw members 1081 abut the same second plane, all the third screw members 1081 are arranged at both sides of the rotation center of the paddle structure 200 along the third direction, respectively.

[0059] Exemplarily, the fixing assembly 102 (e.g., the first fixing block 1022) has at least two third threaded holes 1025 extending along the second direction, and the third threaded portions are threads in the third threaded holes 1025.

[0060] Exemplarily, the third screw members 1081 are screws or bolts.

[0061] Exemplarily, the third screw members 1081 are four, the third side 201 (e.g., the left side of the paddle structure 200) is provided with two third screw members 1081, and the fourth side 202 (e.g., the right side of the paddle structure 200) is provided with two third screw members 1081. Among them, one of the third screw members 1081 arranged at the third side 201 and one of the third screw members 1081 arranged at the fourth side 202 are arranged at one side (e.g., the upper side) of the rotation center of the paddle structure 200 along the third direction, and the other of the third screw members 1081 arranged at the third side 201 and the other of the third screw members 1081 arranged at the fourth side 202 are arranged at the other side (e.g., the lower side) of the rotation center of the paddle structure 200 along the third direction.

[0062] Exemplarily, the third screw members 1081 are two, one of the third screw members 1081 is arranged at one side (e.g., the upper side) of the rotation center of the paddle structure 200 along the third direction, and the other of the third screw members 1081 is arranged at the other side (e.g., the lower side) of the rotation center of the paddle structure 200 along the third direction.

[0063] This structure can stabilize the attitude of the rotating block 107 and the propeller structure 200.

[0064] In some embodiments, the fixing component 102 further has at least one second oblong hole 1026 extending along a second direction, which intersects the first direction, and the rotating block 107 further has at least one fourth threaded portion. The paddle adjusting device 100 further includes at least one fourth screw connector 109, each fourth screw connector 109 passing through a second oblong hole 1026 and screwed to a fourth threaded portion.

[0065] For example, the rotating block 107 has at least one fourth threaded hole 1073, and the fourth threaded portion is the thread within the fourth threaded hole 1073.

[0066] For example, the fourth screw connector 109 is a screw or bolt.

[0067] For example, the top and bottom of the second fixing block 1023 each have a second waist-shaped hole 1026 extending in a second direction (such as from right to left), and two rotating blocks 107 are arranged vertically opposite each other in the second through hole 1027. The upper rotating block 107 has a fourth threaded hole 1073 extending in a third direction (such as from bottom to top), and the lower rotating block 107 also has a fourth threaded hole 1073 extending in a third direction.

[0068] With this structure, each fourth screw 109 can only move along the extension direction of the second oblong hole 1026 into which it is inserted, thereby limiting the direction of rotation of the fixing assembly 102 and preventing the rotation direction of the fixing assembly 102 from deviating.

[0069] In some embodiments, such as Figure 2 , Figure 4 and Figure 5 As shown, the propeller adjustment device 100 further includes at least one third nut 111 and / or at least one fourth nut 112. When the propeller adjustment device 100 has at least one third nut 111, the at least one third nut 111 is disposed on the side of the fixing component 102 away from the support component 101, and each third nut 111 is screwed to a third threaded member 1081. When the propeller adjustment device 100 has at least one fourth nut 112, the at least one fourth nut 112 is disposed on the side of the fixing component 102 away from the support component 101, and each fourth nut 112 is screwed to a fourth threaded member 109.

[0070] The third screw-in component 1081 can be tightened by setting the third nut 111, thereby improving the structural stability of the propeller adjustment device 100. The fourth screw-in component 109 can be tightened by setting the fourth nut 112, thereby improving the structural stability of the propeller adjustment device 100.

[0071] In some embodiments, the paddle adjusting device 100 further comprises at least one clamping member 110, each clamping member 110 is arranged between the second locking assembly 108 and the second plane and is configured to protect the paddle structure 200.

[0072] Exemplarily, the clamping member 110 is a plate structure.

[0073] By arranging the clamping member 110, the second locking assembly 108 can be prevented from directly contacting the paddle structure 200 and causing damage to the paddle structure 200.

[0074] In some embodiments, the following steps 1-10 can be performed to install and adjust the posture of the paddle structure 200.

[0075] Step 1, pass the support assembly 101 through the first through hole 1021 of the first fixing block 1022.

[0076] Step 2, screw the second screw member 104 through the first waist-shaped hole 1024 and the second threaded portion.

[0077] Step 3, rotate the first fixing block 1022 clockwise or counterclockwise to rotate the first fixing block 1022 to an appropriate posture (for example, the upper surface of the first fixing block 1022 is horizontal, and the side wall of the first fixing block 1022 is parallel to the first plane 1014), and fasten the second screw member 104 by the second nut 106.

[0078] Step 4, screw the first screw member 1031 with the first threaded portion and abut against the first plane 1014, and then screw the first nut 105 with the first screw member 1031.

[0079] Step 5, place one rotating block 107 into the second recess, and screw the fourth screw member 109 through the second waist-shaped hole 1026 of the second fixing block 1023 and the fourth threaded portion of one rotating block 107.

[0080] Step 6, place another rotating block 107 into the first recess, and screw the fourth screw member 109 through the second waist-shaped hole 1026 of the first fixing block 1022 and the fourth threaded portion of one rotating block 107.

[0081] Step 7, splice the first fixing block 1022 and the second fixing block 1023, place the paddle structure 200 into the accommodating space formed between one rotating block 107 and another rotating block 107, and screw the first fixing block 1022 and the second fixing block 1023 by screws.

[0082] Step 8, rotate the fourth screw joint 109 clockwise or counterclockwise to rotate the two rotating blocks 107 and drive the paddle structure 200 to rotate, so that the upper surface of the paddle structure 200 is rotated to a horizontal state, and then the fourth nut 112 is fastened to the fourth screw joint 109.

[0083] Step 9, place the two clamping members 110 into the second through hole 1027, and respectively locate the two clamping members 110 at two sides of the paddle structure 200.

[0084] Step 10, screw the third screw joint 1081 with the third threaded part, abut the third screw joint 1081 with the clamping member 110, and then screw the third nut 111 with the third screw joint 1081.

[0085] Based on the same concept, as shown in Figures 1 to 5 The embodiment of the present application also provides a transportation device 300, which comprises the paddle structure 200 and the paddle adjusting device 100 in the above embodiment. The paddle structure 200 is configured to carry products. The paddle adjusting device 100 is connected with the paddle structure 200 and is configured to adjust the posture of the paddle structure 200.

[0086] Exemplarily, the products are silicon wafers or glass substrates.

[0087] The above describes the basic principles of the present application in combination with specific embodiments, but it should be pointed out that the advantages, advantages, effects and the like mentioned in the present application are only examples and are not limited, and these advantages, advantages, effects and the like cannot be considered as the must-have of each embodiment of the present application. In addition, the above specific details are only for the purpose of example and for the purpose of understanding, and are not limited to the above specific details, and the present application must be realized by using the above specific details.

[0088] The block diagram of the device, apparatus, equipment, system involved in the present application is only an illustrative example and is not intended to require or imply the connection, arrangement and configuration shown in the block diagram. As those skilled in the art will recognize, these devices, apparatus, equipment, system can be connected, arranged and configured in any way. Words such as "include", "contain", "have" and the like are open-ended words, which mean "include but not limited to", and can be used interchangeably. The words "or" and "and" used herein mean the word "and / or", and can be used interchangeably unless the context clearly indicates otherwise. The word "such as" used herein means the phrase "such as but not limited to", and can be used interchangeably.

[0089] It should also be noted that in the device, equipment and method of the present application, each component or each step can be decomposed and / or recombined. These decompositions and / or recombination should be considered as equivalent solutions of the present application.

[0090] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the generic principles defined herein can be applied to other aspects without departing from the scope of the application. Thus, the present application is not intended to be limited to the aspects shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0091] The above description has been presented to enable any person skilled in the art to make or use the application. Numerous modifications to the aspects described herein will be readily apparent to those skilled in the art, and the principles defined herein can be applied to other aspects without departing from the scope of the application. Thus, the present application is not intended to be limited to the aspects shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A paddle adjustment device, characterized in that, The paddle adjusting device is configured to adjust the posture of the paddle structure, and the paddle adjusting device comprises: a support assembly having at least one first arc-shaped surface extending in a first direction and at least one first flat surface extending in the first direction; a fixing assembly connected with the paddle structure, the fixing assembly having a first through hole extending in the first direction, the first through hole having a first arc-shaped inner wall extending in the first direction, wherein the support assembly passes through the first through hole, and the first arc-shaped surface is in contact with the first arc-shaped inner wall to enable the fixing assembly to rotate relative to the support assembly, and the paddle structure extends in the first direction; a first locking assembly connected with the fixing assembly and abutting against at least one first flat surface, and configured to lock the fixing assembly and the support assembly.

2. The paddle adjustment device of claim 1, wherein, The fixing assembly has at least two first threaded portions extending in a second direction, and the second direction intersects the first direction; The first locking assembly comprises: at least two first threaded members, each first threaded member being screwed with one first threaded portion; The support assembly has a first side and a second side oppositely arranged in the second direction, and the support assembly has the first flat surface on the first side and the second side, respectively, in the case that all first threaded members are arranged on the first side and the second side of the support assembly, respectively, the first threaded members are configured to abut against the first flat surface on the first side and the first flat surface on the second side, respectively, and at least one first threaded member on the first side and at least one first threaded member on the second side are arranged on the same side of the rotation center of the fixing assembly in a third direction, and the third direction intersects the first direction and the second direction; Alternatively, in the case that all first threaded members abut against the same first flat surface, all first threaded members are arranged on both sides of the rotation center of the fixing assembly in the third direction, respectively.

3. The paddle adjustment device of claim 2, wherein, The fixing assembly further has at least one first waist-shaped hole extending in the second direction and / or the third direction, and the support assembly further has at least one second threaded portion; The paddle adjusting device further comprises: at least one second threaded member, each second threaded member passing through one first waist-shaped hole and being screwed with the second threaded portion.

4. The paddle adjustment device of claim 3, wherein, Further comprising: at least one first nut arranged on the side of the fixing assembly away from the support assembly, each first nut being screwed with one first threaded member; and / or, at least one second nut arranged on the side of the fixing assembly away from the support assembly, each second nut being screwed with one second threaded member.

5. The paddle adjustment device of claim 1 or 2, wherein, The paddle structure has at least two second flat surfaces, and the fixing assembly further has at least one second through hole extending in the first direction, each second through hole having at least one second arc-shaped inner wall, and each second through hole being capable of passing one paddle structure; The paddle adjusting device further comprises: at least one rotating block, each of the rotating blocks having at least one second arc surface and at least one third flat surface, each of the rotating blocks being arranged in one of the second through holes, the second arc surface of each of the rotating blocks being in contact with one of the second arc inner walls of one of the second through holes, and the third flat surface of each of the rotating blocks being in contact with the second flat surface of the paddle structure, so that the rotating blocks can rotate relative to the fixed assembly and drive the paddle structure to rotate; a second locking assembly connected with the fixed assembly and abutting against at least one of the second flat surfaces of the paddle structure, and configured to fix the posture of the paddle structure.

6. The paddle adjustment device of claim 5, wherein, The number of the rotating blocks is at least two, and each of the second through holes contains two oppositely arranged rotating blocks, and a containing space is formed between the two rotating blocks, the paddle structure passes through the containing space, and the two second flat surfaces of the paddle structure are respectively in contact with one third flat surface of the two rotating blocks.

7. The paddle adjustment device of claim 5, wherein, The fixed assembly has at least two third threaded parts extending along a second direction, and the second direction has an included angle with the first direction. The second locking assembly comprises: at least two third screwing members, each of the third screwing members being screwed with one of the third threaded parts; The paddle structure has oppositely arranged third and fourth sides in the second direction, and the paddle structure has the second flat surface on the third side and the fourth side respectively, in the case that all the third screwing members are arranged on the third side and the fourth side of the paddle structure respectively, the third screwing members are configured to abut against the second flat surface of the third side and the second flat surface of the fourth side respectively from the third side and the fourth side, and at least one of the third screwing members on the third side and at least one of the third screwing members on the fourth side are arranged on the same side of the rotation center of the paddle structure in a third direction, and the third direction intersects the first direction and the second direction. Alternatively, in the case that all the third screwing members abut against the same second flat surface, all the third screwing members are arranged on both sides of the rotation center of the paddle structure in the third direction respectively.

8. The paddle adjustment device of claim 5, wherein, The fixed assembly further has at least one second waist-shaped hole extending along a second direction, and the second direction intersects the first direction, and the rotating block further has at least one fourth threaded part. The paddle adjusting device further comprises: at least one fourth screwing member, each of the fourth screwing members passing through one of the second waist-shaped holes and being screwed with one of the fourth threaded parts.

9. The paddle adjustment device of claim 5, wherein, Further comprising: at least one clamping member, each of the clamping members being arranged between the second locking assembly and the second flat surface, and configured to protect the paddle structure.

10. A transport apparatus, characterized by Further comprising: a paddle structure configured to carry products; The paddle adjusting device of any one of claims 1-9 is connected with the paddle structure, and configured to adjust the posture of the paddle structure. The paddle adjusting device of any one of claims 1-9 is connected with the paddle structure, and configured to adjust the posture of the paddle structure.

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