Film thickness adjusting device of ion sputtering coating machine

Abstract

The utility model belongs to the technical field of ion sputtering coating machines, and discloses a film thickness adjustable device of an ion sputtering coating machine, which comprises a vacuum coating chamber, a coating platform is arranged in the vacuum coating chamber, an ion beam sputtering composite coating mechanism body is arranged in the vacuum coating chamber, and the ion beam sputtering composite coating mechanism body is arranged in the vacuum coating chamber. A thickness adjusting assembly is mounted in the vacuum coating chamber and comprises a connecting plate, the connecting plate is mounted on the surface of the ion beam sputtering composite coating mechanism body, mounting plates are mounted on the bottom surface of the connecting plate, and a movable rod is rotationally connected between the two mounting plates; the surface of the movable rod is provided with a special-shaped baffle plate, and the special-shaped baffle plate is attached to a sputtering port of the ion beam sputtering composite coating mechanism body. The ion beam sputtering composite coating mechanism has the advantages that the coating thickness can be adjusted, manual observation is avoided, and the practicability is further improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to ion sputtering coating machine technical field, specifically a kind of ion sputtering coating machine film layer thickness adjustable device. BACKGROUND

[0002] Ion beam sputtering coating machine is used ion source to emit ion, after extraction, acceleration, focusing, make it into beam, with this ion beam bombardment placed in high vacuum target, the atom sputtered is coated. Ion beam sputtering coating optical element can help demanding laser optical application to achieve the highest performance possible. The thin film on these optical elements has dense, non-porous and uniform coating, so it has no drift and temperature insensitive performance;

[0003] At present, in the coating operation, the existing ion beam sputtering coating machine cannot effectively adjust the coating thickness, mostly adopts manual observation method to control the film thickness, which is time-consuming and laborious, and has low practicability.

[0004] Therefore, aiming at the above problems, a kind of ion sputtering coating machine film layer thickness adjustable device is provided. UTILITY MODEL CONTENTS

[0005] To solve the problems presented in the above background art, the utility model provides a kind of ion sputtering coating machine film layer thickness adjustable device, with the advantages of being able to adjust the coating thickness, avoiding manual observation and further improving practicability.

[0006] To achieve the above purpose, the utility model provides the following technical scheme: a kind of ion sputtering coating machine film layer thickness adjustable device, including vacuum coating chamber, the inside of vacuum coating chamber is installed with coating platform, the inside of vacuum coating chamber is installed with ion beam sputtering composite coating mechanism body, the inside of vacuum coating chamber is installed with thickness adjusting assembly;

[0007] The thickness adjusting assembly includes a connecting plate, the surface of the ion beam sputtering composite coating mechanism body is provided with a connecting plate, the bottom surface of the connecting plate is provided with a mounting plate, two mounting plates are rotatably connected with a movable rod, the surface of the movable rod is provided with a special-shaped baffle, and the special-shaped baffle is attached to the sputtering port of the ion beam sputtering composite coating mechanism body.

[0008] The through hole provided on the surface of the vacuum coating chamber is rotatably connected with a connecting rod, one end of the connecting rod penetrates the vacuum coating chamber and is connected with one end of the movable rod, the surface of the vacuum coating chamber is provided with a fixed plate, the surface of one side of the fixed plate is provided with a driving motor, the surface of the fixed plate is provided with a timing mechanism, and the timing mechanism and the driving motor are electrically connected, the surface of the vacuum coating chamber is provided with a driving assembly.

[0009] Preferably, the surface of the movable rod is sleeved with a torsion spring, one end of the torsion spring is connected with the mounting plate, and the other end of the torsion spring is connected with the special-shaped baffle.

[0010] Preferably, the disc on the special-shaped baffle is of the same caliber as the sputtering port of the ion beam sputtering composite coating mechanism body.

[0011] Preferably, a controller is mounted on one side surface of the vacuum coating chamber and electrically connected with the timing mechanism.

[0012] Preferably, the driving assembly comprises a gear one, one end of one of the connecting rods is provided with the gear one, a borrow rod is rotatably connected to the surface of the vacuum coating chamber, the surface of the borrow rod is provided with a gear two, and a synchronous belt is wound between the borrow rod and the other connecting rod.

[0013] Preferably, the gear one and the gear two are engaged.

[0014] Preferably, the surface of the borrow rod and the other connecting rod is provided with a synchronous wheel, and the synchronous belt is wound between the two synchronous wheels.

[0015] Compared with the prior art, the utility model has the advantages that:

[0016] 1、The thickness adjusting assembly is arranged, the thickness of coating can be adjusted according to the length of time, manual observation is avoided, and practicality is greatly improved.

[0017] 2、The driving assembly is arranged, the operation personnel can conveniently use, the two special-shaped baffles can be simultaneously operated by the user, and the practicality of the device is greatly improved. DRAWINGS

[0018] Figure 1 It is a whole structure schematic view of the utility model;

[0019] Figure 2 It is a structure schematic view of the rear part of the vacuum coating chamber of the utility model;

[0020] Figure 3 It is a structure schematic view of the special-shaped baffle and movable rod of the utility model;

[0021] Figure 4 It is a structure schematic view of the gear one and gear two of the utility model.

[0022] In the diagram: 1. Vacuum coating chamber; 12. Coating platform; 13. Ion beam sputtering composite coating mechanism body; 2. Thickness adjustment component; 21. Connecting plate; 22. Mounting plate; 23. Movable rod; 24. Irregular baffle; 25. Connecting rod; 26. Fixing plate; 27. Drive motor; 28. Timing mechanism; 29. ​​Torsion spring; 210. Controller; 3. Drive component; 31. Gear 1; 32. Borrowing rod; 33. Gear 2; 34. Synchronous belt; 35. Synchronous pulley. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] like Figures 1 to 4 As shown, this utility model provides an adjustable film thickness device for an ion sputtering coating machine, including a vacuum coating chamber 1, a coating platform 12 installed inside the vacuum coating chamber 1, an ion beam sputtering composite coating mechanism body 13 installed inside the vacuum coating chamber 1, and a thickness adjustment component 2 installed inside the vacuum coating chamber 1.

[0025] The thickness adjustment component 2 includes a connecting plate 21. The connecting plate 21 is mounted on the surface of the ion beam sputtering composite coating mechanism body 13. The mounting plate 22 is mounted on the bottom surface of the connecting plate 21. A movable rod 23 is rotatably connected between the two mounting plates 22. A shaped baffle 24 is mounted on the surface of the movable rod 23. The shaped baffle 24 is in contact with the sputtering port of the ion beam sputtering composite coating mechanism body 13.

[0026] A connecting rod 25 is rotatably connected to a through hole on the surface of the vacuum coating chamber 1. One end of the connecting rod 25 passes through the vacuum coating chamber 1 and is connected to one end of the movable rod 23. A fixed plate 26 is installed on the surface of the vacuum coating chamber 1. A drive motor 27 is installed on one side of the fixed plate 26. A timing mechanism 28 is installed on the surface of the fixed plate 26. The timing mechanism 28 is electrically connected to the drive motor 27, thereby enabling the coating thickness to be adjusted according to the length of time, avoiding manual observation and greatly improving practicality.

[0027] Specifically, a torsion spring 29 is fitted on the surface of the movable rod 23. One end of the torsion spring 29 is connected to the mounting plate 22, and the other end of the torsion spring 29 is connected to the irregular baffle 24, so that the position of the movable rod 23 can be reset, further facilitating the operation of the user.

[0028] like Figures 1 to 4As shown, the blocking disc on the special-shaped baffle 24 is the same in diameter as the sputtering port of the ion beam sputtering composite coating mechanism body 13, so that the ion beam sputtering composite coating mechanism body 13 can be blocked, and a small amount of particles can be prevented from sputtering after coating.

[0029] Further, the controller 210 is installed on one side surface of the vacuum coating chamber 1 and electrically connected with the timing mechanism 28, so that the user can conveniently control.

[0030] As shown in the drawings, Figures 1 to 4 The driving assembly 3 comprises a gear one 31, one end of one of the connecting rods 25 is provided with the gear one 31, the surface of the vacuum coating chamber 1 is rotatably connected with a borrow bit rod 32, the surface of the borrow bit rod 32 is provided with a gear two 33, and the synchronous belt 34 is arranged between the borrow bit rod 32 and the other connecting rod 25, so that the user can conveniently operate, and the user can conveniently operate the two special-shaped baffles 24 at the same time, greatly improving the practicability of the device.

[0031] Further, the gear one 31 and the gear two 33 are engaged, so that the two special-shaped baffles 24 can be moved.

[0032] It is worth emphasizing that the surfaces of the borrow bit rod 32 and the other connecting rod 25 are provided with synchronous wheels 35, and the synchronous belt 34 is arranged between the two synchronous wheels 35, so that the borrow bit rod 32 and the connecting rod 25 can be conveniently rotated synchronously.

[0033] The structure of the motor is prior art and will not be described in detail; at the same time, the utility model also includes a power supply, a controller and a switch, which are not the main technical points of the patent and will not be described in detail. The wiring diagram of the motor in the utility model belongs to the common knowledge in the art, and its working principle is already known technology. Its type is selected according to actual use, so the motor will not be explained in detail.

[0034] Working principle and process: when the ion beam sputtering composite coating mechanism body 13 is coated, the thickness of the coating is adjusted by using a time control method, so that the thickness of the coating can be effectively adjusted.

[0035] When the coating process is carried out, first, the timing mechanism 28 is timed by the controller 210, when the thickness of the coating reaches the required thickness, the timing mechanism 28 drives the driving motor 27 on the fixed plate 26 to rotate, and the driving motor 27 drives the movable rod 23 between the mounting plate 22 through the connecting rod 25 during rotation, at this time, the movable rod 23 drives the two special-shaped baffles 24 to move, and the movable rod 23 drives the torsional spring 29 to deform during rotation, the torsional spring 29 can assist the movable rod 23 to reset, so that the operator can use conveniently, with the continuous movement of the special-shaped baffle 24, the special-shaped baffle 24 blocks the sputtering port of the ion beam sputtering composite coating mechanism body 13, so as to stop the coating process of the workpiece, and the thickness of the coating is adjusted according to the length of time;

[0036] With the rotation of the driving motor 27, the driving motor 27 drives the other connecting rod 25 to rotate, and the connecting rod 25 and the auxiliary rod 32 are synchronously rotated through the synchronous wheel 35 and the synchronous belt 34, the auxiliary rod 32 drives the gear two 33 to rotate during rotation, and since the gear one 31 and the gear two 33 are engaged, the gear two 33 drives the gear one 31 to rotate during rotation, the gear one 31 drives one of the connecting rods 25 and the other connecting rod 25 to rotate at the same time, so that the two special-shaped baffles 24 are close to or away from each other, thereby facilitating the operator to operate the two special-shaped baffles 24 at the same time, and greatly improving the practicability of the device.

[0037] It should be noted that in this text, relational terms such as first and second are used only to distinguish one entity or operation from another, and do not necessarily require or imply that there is any such actual relationship or order between these entities or operations. Moreover, the terms "include", "contain" or any other variants thereof are intended to cover non-exclusive inclusion, so that the process, method, article or equipment including a series of elements not only includes those elements, but also includes other elements not explicitly listed or inherent to such process, method, article or equipment.

[0038] Although the embodiments of the present application have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and variations can be made to the embodiments without departing from the principles and spirits of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. An adjustable film thickness device for an ion sputtering coating machine, comprising a vacuum coating chamber (1), characterized in that: The vacuum coating chamber (1) is equipped with a coating platform (12), the vacuum coating chamber (1) is equipped with an ion beam sputtering composite coating mechanism body (13), and the vacuum coating chamber (1) is equipped with a thickness adjustment component (2). The thickness adjustment component (2) includes a connecting plate (21). The connecting plate (21) is mounted on the surface of the ion beam sputtering composite coating mechanism body (13). An mounting plate (22) is mounted on the bottom surface of the connecting plate (21). A movable rod (23) is rotatably connected between the two mounting plates (22). A shaped baffle (24) is mounted on the surface of the movable rod (23). The shaped baffle (24) is in contact with the sputtering port of the ion beam sputtering composite coating mechanism body (13). A connecting rod (25) is rotatably connected to a through hole on the surface of the vacuum coating chamber (1). One end of the connecting rod (25) passes through the vacuum coating chamber (1) and is connected to one end of the movable rod (23). A fixing plate (26) is installed on the surface of the vacuum coating chamber (1). A drive motor (27) is installed on one side of the fixing plate (26). A timing mechanism (28) is installed on the surface of the fixing plate (26). The timing mechanism (28) is electrically connected to the drive motor (27). A drive assembly (3) is installed on the surface of the vacuum coating chamber (1).

2. The adjustable film thickness device for an ion sputtering coating machine according to claim 1, characterized in that: A torsion spring (29) is fitted on the surface of the movable rod (23). One end of the torsion spring (29) is connected to the mounting plate (22), and the other end of the torsion spring (29) is connected to the irregular baffle (24).

3. The adjustable film thickness device for an ion sputtering coating machine according to claim 2, characterized in that: The baffle plate on the irregular baffle (24) has the same sputtering port diameter as the body (13) of the ion beam sputtering composite coating mechanism.

4. The adjustable film thickness device for an ion sputtering coating machine according to claim 3, characterized in that: A controller (210) is installed on one side surface of the vacuum coating chamber (1), and the controller (210) is electrically connected to the timing mechanism (28).

5. The adjustable film thickness device for an ion sputtering coating machine according to claim 1, characterized in that: The drive assembly (3) includes a gear (31), one end of one of the connecting rods (25) is equipped with a gear (31), a borrowing rod (32) is rotatably connected to the surface of the vacuum coating chamber (1), a gear (33) is installed on the surface of the borrowing rod (32), and a synchronous belt (34) is wound between the borrowing rod (32) and the other connecting rod (25).

6. The adjustable film thickness device for an ion sputtering coating machine according to claim 5, characterized in that: The first gear (31) and the second gear (33) mesh with each other.

7. The adjustable film thickness device for an ion sputtering coating machine according to claim 6, characterized in that: The surfaces of the borrowing rod (32) and the other connecting rod (25) are each equipped with a synchronous pulley (35), and the synchronous belt (34) is wound between the two synchronous pulleys (35).

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