Continuous vacuum coating device
By setting up a conveyor and a lifting and rotating mechanism in the vacuum chamber, the continuous rotation of the rotating workpiece frame is achieved, which solves the problems of low production efficiency and energy waste in the existing technology, and realizes efficient continuous coating production and uniform coating effect.
Patent Information
- Application Number
- CN202423043241.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-10
- Publication Date
- 2025-12-23
- Estimated Expiration
- 2034-12-10
AI Technical Summary
Existing rotary hanging coating machines have low production efficiency. The repeated vacuuming, heating, cooling, and vacuum breaking processes waste energy. Furthermore, they cannot support linear or rotary transmission of the entire workpiece rack, making it impossible to achieve continuous mass production of multi-layer and multi-type films.
A conveyor frame and a lifting and rotating mechanism are set up inside the vacuum chamber. The central support rod of the rotating workpiece frame extends into the upper fixed cylinder for fixation. The workpiece frame is driven to rotate by the lifting and rotating mechanism to achieve revolution and rotation. Combined with a servo motor and telescopic drive device, continuous production is achieved without repeating the processes of vacuuming, preheating, coating, cooling, vacuum breaking, and part removal.
It improves production efficiency, reduces energy waste, achieves uniform coating on workpiece surfaces, and supports the mass production of continuous, multi-layered, and multi-type thin films.
Smart Images
Figure CN223705710U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to vacuum coating technical field, concretely is a kind of continuous vacuum coating device. BACKGROUND
[0002] The existing co-rotating and self-rotating type hanger coating machine is mostly single-chamber machine, the product is fixed on the self-rotating hanger, driven to rotate by the motor at the bottom of the vacuum coating machine, uses fixed magnetron sputtering cathode, and the surface of the workpiece on the workpiece frame is coated and processed, and after one or multiple layers of film are completed, the vacuum is broken and the workpiece is taken out. The coating machine has the processes of vacuum pumping, preheating, coating, cooling, vacuum breaking and workpiece taking out for each furnace, and the production efficiency is low. The repeated processes of vacuum pumping, heating, cooling and vacuum breaking also waste a lot of energy. Moreover, the co-rotating and self-rotating structure cannot support the linear transmission or rotary transmission of the complete workpiece frame, and cannot be used for continuous mass production of multiple layers and multiple types of thin film. CONTENT OF THE UTILITY MODEL
[0003] The utility model aims at providing a kind of continuous vacuum coating device to solve at least one aspect of the problems and defects raised in the above background.
[0004] A kind of continuous vacuum coating device, including vacuum cavity, the upper fixed cylinder, co-rotating and self-rotating workpiece frame and conveying frame are arranged in the vacuum cavity, conveying frame is arranged at the bottom of vacuum cavity, the co-rotating and self-rotating workpiece frame is arranged on conveying frame, the upper fixed cylinder is arranged above conveying frame, and top lifting rotating mechanism is arranged below conveying frame and corresponds to the position of the upper fixed cylinder.
[0005] Further, the co-rotating and self-rotating workpiece frame includes a tray and a plurality of support rods, the top of the tray is rotatably provided with a main gear, the axis of the main gear is fixedly connected with a central support rod, one end of the support rod is rotatably mounted on the top of the tray, and a slave gear is fixedly sleeved on the support rod, the slave gear is engaged with the main gear and located in the same plane.
[0006] Further, one side of the main gear close to the tray and the top of the tray are both provided with annular grooves, the two annular grooves are oppositely matched to form a sliding channel, and the sliding channel is provided with a plurality of ball bearings.
[0007] Further, the co-rotating and self-rotating workpiece frame further includes a top cover plate, one end of the support rod away from the tray is rotatably mounted on the top cover plate, and the central support rod penetrates through the top cover plate.
[0008] Further, the upper fixed cylinder includes a fixed cylinder base, the fixed cylinder base is mounted on the inner wall of the vacuum cavity, one side of the fixed cylinder base close to the conveying frame is provided with a lower tapered hole cylinder, the lower tapered hole cylinder is rotatably provided with a connecting key inside, one end of the connecting key close to the conveying frame is provided with a limiting block, one side of the limiting block close to the conveying frame is provided with a limiting groove, and one end of the central support rod away from the tray is provided with a positioning block matched with the limiting groove.
[0009] Further, the lower conical hole cylinder comprises communicated upper cylinder, middle cylinder and lower cylinder, the caliber of the middle cylinder is smaller than the caliber of the upper cylinder and the lower cylinder, the clamping key is provided with a clamping block away from one end of the conveying frame, the clamping block is arranged in the upper cylinder and matched with the structure of the upper cylinder, the limiting block is arranged in the lower cylinder, the spring is sleeved on the clamping key, and the spring is arranged in the lower cylinder.
[0010] Further, the fixed cylinder base is provided with a fixed cylinder insulation block between the fixed cylinder base and the inner wall of the vacuum cavity.
[0011] Further, the jacking rotary mechanism comprises a servo motor, the servo motor is arranged below the conveying frame, the servo motor is associated with a telescopic driving device, and the output shaft of the servo motor is fixed towards the upper fixed cylinder.
[0012] Further, the servo motor is arranged at the bottom of the vacuum cavity, the output shaft of the servo motor penetrates the outer bottom surface of the vacuum cavity and extends into the inside, and the outer bottom surface of the vacuum cavity is provided with sealing devices at positions penetrated by the output shaft of the servo motor.
[0013] Further, the output shaft of the servo motor is provided with a tray insulation pad close to one end of the upper fixed cylinder, one surface of the tray insulation pad close to the upper fixed cylinder is provided with a tray guide pin, and the bottom of the tray is provided with a limiting hole matched with the tray guide pin.
[0014] Compared with the prior art, the beneficial effects of the utility model lie in:
[0015] 1. The conveying frame is arranged in the vacuum cavity, the jacking rotary mechanism is arranged below the conveying frame, the upper fixed cylinder is arranged above the conveying frame, the position of the upper fixed cylinder corresponds to the jacking rotary mechanism, when the public self-rotating workpiece frame filled with products to be plated reaches the position of the jacking rotary mechanism under the transportation of the conveying frame, the public self-rotating workpiece frame is lifted up by the jacking rotary mechanism, the center support rod of the public self-rotating workpiece frame is fixed in the upper fixed cylinder, and the public self-rotating workpiece frame is driven to rotate by the jacking rotary mechanism, the public self-rotating workpiece frame is lowered to the conveying frame by the jacking rotary mechanism after plating, and is transmitted to the next process by the conveying frame, so that continuous equipment production is formed through repeated circulation, and the processes of vacuumizing, preheating, plating, cooling, vacuum breaking and taking out are not repeated, so that the production efficiency is higher.
[0016] 2. When the public self-rotating workpiece frame is lifted up by the jacking rotary mechanism, the center support rod of the public self-rotating workpiece frame is lifted into the fixed cylinder and is fixed, the main gear on the center support rod cannot rotate due to the fixation of the center support rod, when the tray rotates, the slave gear meshing with the main gear revolves around the main gear and simultaneously rotates, and through the revolution and rotation, the surface of the product to be plated on the support rod can be uniformly sputtered and plated, so that the preparation of workpiece surface plating is completed. BRIEF DESCRIPTION OF DRAWINGS
[0017] For the convenience of those skilled in the art to understand, the utility model will be further described below in conjunction with the drawings.
[0018] Figure 1 It is the whole structure schematic view of the utility model;
[0019] Figure 2 It is another structure schematic view of the utility model;
[0020] Figure 3 It is the structure schematic view of the utility model in the rotation of workpiece frame;
[0021] Figure 4 It is the structure schematic view of the utility model in the cooperation of center support and upper fixed cylinder;
[0022] Figure 5 It is the structure schematic view of the utility model in the cooperation of main gear and tray;
[0023] Figure 6 It is the structure schematic view of the utility model in the cooperation of main gear and from gear;
[0024] Figure 7 It is the structure schematic view of the utility model in the jacking rotary mechanism.
[0025] In the drawing: 1, vacuum cavity;101, inlet;102, outlet;2, upper fixed cylinder;201, fixed cylinder insulating block;202, fixed cylinder base;203, lower cone hole cylinder;204, connecting key;205, spring;206, limit block;3, rotation of workpiece frame;301, tray;302, top cover plate;303, main gear;304, center support;3041, positioning block;305, support rod;306, from gear;307, limit hole;4, conveying frame;5, jacking rotary mechanism;501, air cylinder;502, tray guide pin;503, guide rod;504, mounting plate;505, servo motor;506, sealing device;507, tray insulating pad. DETAILED DESCRIPTION
[0026] In order to make the utility model purposes, technical scheme and advantages more clearly, the following is combined with the drawings and examples, the utility model is further detailedly explained.It should be understood that the specific embodiments described here are only used to explain the utility model, and are not used to limit the utility model, that is, the described embodiments are only a part of the embodiments of the utility model, and are not all the embodiments.Usually the components of the utility model embodiments described and shown in the drawings here can be arranged and designed in various different configurations.
[0027] Therefore, the following detailed description of embodiments of the application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of the application. Based on the embodiments of the application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the application.
[0028] Please refer to Figures 1-7 As shown in the drawings, Figure 1 , Figure 2 The vacuum cavity 1 and the upper fixed cylinder 2 in the drawings are cross sections, and a conveying frame 4 is omitted) In the embodiments of the application, a continuous vacuum coating device comprises a vacuum cavity 1 and a jacking rotating mechanism 5, the vacuum cavity 1 is internally provided with a conveying frame 4, the conveying frame 4 is provided with a public and self-rotating workpiece frame 3, the vacuum cavity 1 is internally provided with an upper fixed cylinder 2, the upper fixed cylinder 2 is arranged above the conveying frame 4, the jacking rotating mechanism 5 is arranged below the conveying frame 4 and corresponds to the position of the upper fixed cylinder 2; wherein the conveying frame 4 is arranged in two rows and is driven by a motor, a hollow part through which the jacking rotating mechanism 5 passes is arranged between the two rows of conveying frames 4, the public and self-rotating workpiece frame 3 filled with products to be coated enters the vacuum cavity 1 from an inlet 101 and falls on the two rows of conveying frames 4, and moves to the position of the jacking rotating mechanism 5 along with the operation of the conveying frame 4, at this time, the jacking rotating mechanism 5 rises through the hollow part and lifts the public and self-rotating workpiece frame 3.
[0029] Specifically, the rotating and revolving workpiece frame 3 comprises a tray 301 and a plurality of support rods 305, the top of the tray 301 is rotatably provided with a main gear 303, the axis of the main gear 303 is fixedly connected with a central support rod 304, one end of the support rod 305 is rotatably installed on the top of the tray 301, a slave gear 306 is fixedly sleeved on the support rod 305, the slave gear 306 is engaged with the main gear 303 and located in the same plane; the products to be coated are hung on the support rods 305, when the rotating and revolving workpiece frame 3 is lifted by the lifting and rotating mechanism 5, the central support rod 304 on the rotating and revolving workpiece frame 3 will extend into the upper fixed cylinder 2 and be limited from rotating, at this time, the lifting and rotating mechanism 5 will drive the tray 301 to rotate, since the central support rod 304 is limited from rotating, the main gear 303 on the central support rod 304 also cannot rotate, therefore, the slave gear 306 engaged with the main gear 303 will revolve around the main gear 303 and simultaneously rotate, driving the support rods 305 to rotate, so that the products to be coated on the support rods 305 revolve around the main gear 303 and simultaneously rotate, through the revolution and rotation, the products can be uniformly sputtered and coated when magnetron sputtering coating is performed, when the coating is completed, the lifting and rotating mechanism 5 will be lowered, lowering the rotating and revolving workpiece frame 3 to the conveying frame 4, the conveying frame 4 is used to leave the vacuum cavity 1 through the outlet 102 and be transmitted to the next process, so as to repeatedly form continuous coating production, without repeatedly performing the processes of vacuumizing, preheating, coating, cooling, breaking vacuum and taking out the workpiece, so as to reduce the energy waste rate and improve the production efficiency.
[0030] In some embodiments, referring to Figure 5 As shown, one side of the main gear 303 close to the tray 301 and the top of the tray 301 are both provided with annular grooves, the two annular grooves oppositely match to form a sliding channel, the sliding channel is provided with a ball, through the cooperation of the sliding channel and the ball, the main gear 303 can relatively rotate with the tray 301.
[0031] In some embodiments, referring to Figure 3 As shown, the rotating and revolving workpiece frame 3 further comprises a top cover plate 302, one end of the support rod 305 away from the tray 301 is rotatably installed on the top cover plate 302, the central support rod 304 penetrates through the top cover plate 302, the design of the top cover plate 302 can make the support rod 305 more stable without blocking the central support rod 304.
[0032] In some embodiments, referring to Figure 4As shown, the upper fixing cylinder 2 comprises a fixing cylinder base 202 which is installed on the inner wall of the vacuum cavity 1, and a lower tapered hole cylinder 203 is opened on one side of the fixing cylinder base 202 close to the conveying frame 4, and a connecting key 204 is arranged in the lower tapered hole cylinder 203 and cannot rotate, and a limiting block 206 is arranged on one end of the connecting key 204 close to the conveying frame 4, and a limiting recess is opened on one side of the limiting block 206 close to the conveying frame 4, and a positioning block 3041 is arranged on one end of the center support rod 304 away from the tray 301 and matched with the limiting recess; when the workpiece frame 3 is jacked up, the positioning block 3041 on the center support rod 304 will be clamped into the limiting recess, so as to limit the rotation of the center support rod 304.
[0033] In some embodiments, referring to Figure 4 As shown, the lower tapered hole cylinder 203 comprises an upper cylinder, a middle cylinder and a lower cylinder which are communicated, the caliber of the middle cylinder is smaller than that of the upper cylinder and the lower cylinder, a clamping block is arranged on one end of the connecting key 204 away from the conveying frame 4, the clamping block is arranged in the upper cylinder and matched with the structure of the upper cylinder, the clamping block is designed to limit the rotation of the connecting key 204 on the premise of not limiting the up-down movement of the connecting key 204, the limiting block 206 is arranged in the lower cylinder, a spring 205 is sleeved on the connecting key 204 and arranged in the lower cylinder; when the workpiece frame 3 is jacked up, the connecting key 204 will be jacked up by the center support rod 304 to the upper cylinder, and the spring 205 will provide a counterforce to press the center support rod 304.
[0034] In some embodiments, the fixing cylinder base 202 and the inner wall of the vacuum cavity 1 are provided with a fixing cylinder insulating block 201 for insulating the upper fixing cylinder 2 from the vacuum cavity 1.
[0035] In some embodiments, referring to Figure 7 As shown, the jacking and rotating mechanism 5 comprises a servo motor 505 which is arranged below the conveying frame 4, and the servo motor 505 is associated with a telescopic driving device, and the output shaft of the servo motor 505 is arranged upwardly to the upper fixing cylinder 2, the rotating force is applied to the workpiece frame 3 by the servo motor 505, and the servo motor 505 can be driven to move up and down by the telescopic driving device, so as to drive the workpiece frame 3 to rise and fall.
[0036] In some embodiments, referring to Figure 7 As shown, (in the figure, the sealing device 506 is a sectional view) the servo motor 505 is located below the vacuum cavity 1, the output shaft of the servo motor 505 penetrates through the outer bottom surface of the vacuum cavity 1 and extends into the inside, and the sealing device 506 is arranged at the position where the output shaft of the servo motor 505 penetrates through the outer bottom surface of the vacuum cavity 1.
[0037] Specifically, the telescopic drive device includes a cylinder 501 and a guide rod 503. The cylinder 501 and the guide rod 503 are installed at the bottom of the vacuum chamber 1. A mounting plate 504 is fitted on the guide rod 503. The mounting plate 504 is connected to the servo motor 505. The telescopic part of the cylinder 501 is connected to the mounting plate 504. By telescopically extending or retracting the cylinder 501, the mounting plate 504 can be moved on the guide rod 503, thereby smoothly driving the servo motor 505 to rise and fall.
[0038] In some embodiments, please refer to Figure 5 , Figure 7 As shown, the servo motor 505 output shaft is provided with a tray insulating pad 507 at one end near the upper fixed cylinder 2. The tray insulating pad 507 is made of high-strength, high-temperature resistant insulating engineering plastic material, which plays an insulating and isolation role when supporting the rotating workpiece frame 3.
[0039] The tray insulating pad 507 has a tray guide pin 502 on the side near the upper fixed cylinder 2. The bottom of the tray 301 has a limiting hole 307 that cooperates with the tray guide pin 502. When the servo motor 505 rises, the tray guide pin 502 will be inserted into the limiting hole 307 at the bottom of the tray 301 to fix it, so that the servo motor 505 can better drive the tray 301 to rotate.
[0040] The above description is merely an example and illustration of the structure of this utility model. Those skilled in the art can make various modifications or additions to the specific embodiments described or use similar methods to replace them, as long as they do not deviate from the structure of the utility model or exceed the scope defined in the claims, they should all fall within the protection scope of this utility model.
Claims
1. A continuous vacuum coating apparatus, characterized by comprising: The utility model provides a vacuum cavity (1) is provided with upper fixed cylinder (2), male and female rotation workpiece frame (3) and conveying frame (4) in the vacuum cavity (1), conveying frame (4) is set up in the bottom of vacuum cavity (1), be equipped with male and female rotation workpiece frame (3) on conveying frame (4), upper fixed cylinder (2) is equipped with in conveying frame (4) top, be equipped with jacking rotary mechanism (5) below conveying frame (4) and with upper fixed cylinder (2) position corresponds.
2. The continuous vacuum coating device according to claim 1, wherein The male and female rotation workpiece frame (3) includes a tray (301) and a plurality of support rods (305), the top of the tray (301) is rotatably provided with a main gear (303), the axis of the main gear (303) is fixedly connected with a central support rod (304), one end of the support rod (305) is rotatably mounted on the top of the tray (301), and a slave gear (306) is fixedly sleeved on the support rod (305), the slave gear (306) is engaged with the main gear (303) and located in the same plane.
3. The continuous vacuum coating device according to claim 2, wherein The main gear (303) is close to the tray (301) on one side, and the top of the tray (301) is provided with an annular groove, and the two annular grooves are matched to form a sliding channel, and the sliding channel is provided with a ball.
4. The continuous vacuum coating device according to claim 2, wherein The male and female rotation workpiece frame (3) further includes a top cover plate (302), one end of the support rod (305) away from the tray (301) is rotatably mounted on the top cover plate (302), and the central support rod (304) penetrates the top cover plate (302).
5. The continuous vacuum coating device according to claim 1, wherein The upper fixed cylinder (2) includes a fixed cylinder base (202), the fixed cylinder base (202) is mounted on the inner wall of the vacuum cavity (1), one side of the fixed cylinder base (202) close to the conveying frame (4) is provided with a lower tapered hole cylinder (203), the lower tapered hole cylinder (203) is rotatably provided with a connecting key (204), one end of the connecting key (204) close to the conveying frame (4) is provided with a limiting block (206), one side of the limiting block (206) close to the conveying frame (4) is provided with a limiting groove, and one end of the central support rod (304) away from the tray (301) is provided with a positioning block (3041) matched with the limiting groove.
6. The continuous vacuum coating device according to claim 5, wherein The lower tapered hole cylinder (203) includes an upper cylinder, a middle cylinder and a lower cylinder in communication, the diameter of the middle cylinder is smaller than the diameters of the upper cylinder and the lower cylinder, one end of the connecting key (204) away from the conveying frame (4) is provided with a clamping block, the clamping block is arranged in the upper cylinder and matched with the structure of the upper cylinder, the limiting block (206) is arranged in the lower cylinder, a spring (205) is sleeved on the connecting key (204) and arranged in the lower cylinder.
7. The continuous vacuum coating device according to claim 5, wherein The fixed cylinder base (202) and the inner wall of the vacuum cavity (1) are provided with a fixed cylinder insulating block (201).
8. The continuous vacuum coating device of claim 1, wherein, The jacking rotary mechanism (5) includes a servo motor (505), the servo motor (505) is arranged below the conveying frame (4), the servo motor (505) is associated with a telescopic driving device, and the output shaft of the servo motor (505) is arranged towards the upper fixed cylinder (2).
9. The continuous vacuum coating device according to claim 8, wherein The servo motor (505) is arranged at the bottom of the vacuum cavity (1), the output shaft of the servo motor (505) penetrates the outer bottom surface of the vacuum cavity (1) and extends into the inside, and a sealing device is arranged at the position where the output shaft of the servo motor (505) penetrates the outer bottom surface of the vacuum cavity (1).
10. The continuous vacuum coating device according to claim 8, wherein The output shaft of the servo motor (505) is provided with a tray insulating pad (507) near one end of the upper fixed cylinder (2), one side of the tray insulating pad (507) near the upper fixed cylinder (2) is provided with a tray guide pin (502), and the bottom of the tray (301) is provided with a limiting hole (307) matched with the tray guide pin (502).