Multi-pipeline water supply device of vacuum coating machine

Abstract

The utility model discloses a multi-pipeline water supply device of a vacuum coating machine, which relates to the technical field of vacuum coating machines and comprises a first fixing plate and a second fixing plate, the second fixing plate is fixedly connected to one side of the outer surface of the first fixing plate, and connecting plates are fixedly mounted on the upper surface of the first fixing plate and the upper surface of the second fixing plate. The upper surface of the connecting plate is provided with a mounting assembly and a water supply assembly. According to the utility model, the water supply assembly is arranged, the plurality of holes are formed in the upper part of the outer surface of the conveying pipe in a penetrating manner, and the water distribution pipes are fixedly connected in the holes, so that water in the conveying pipe can enter the water distribution pipes to convey and supply water to a plurality of different pipelines connected with the water distribution pipes, and sufficient water is provided for the vacuum coating machine for use; multi-pipeline water supply for the vacuum coating machine is realized, and the water use requirement of the vacuum coating machine is met; and by arranging the mounting assembly, the water supply assembly is mounted above the connecting plate, so that the water supply pipeline is more stable in use during water supply.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum coating machine technical field, concretely relates to a kind of multi-pipe water supply device of vacuum coating machine. BACKGROUND

[0002] Vacuum coating machine mainly refers to a kind of coating that needs to be carried out under higher vacuum degree, specifically includes many kinds, including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering and many other kinds.The main idea is divided into evaporation and sputtering two.

[0003] At present, when coating film, the cooling water quantity and temperature of electron gun, ion source, crystal control probe, crucible and other components in the coating process of coating machine have very big influence on coating stability.But usually, coating machine is all using a water discharge to concentrate water supply, if using the same water discharge, when cooling water supply water quantity is not completely enough, the component with large water consumption will divide most of cooling water, leading to that electron gun, ion source, crystal control probe, crucible and other components with small water consumption cannot be fully cooled.

[0004] As disclosed in a kind of new water supply device for vacuum coating machine of Chinese patent CN218812067U, the new water supply device for vacuum coating machine, including total water supply mechanism, ice water machine, the water outlet of total water supply mechanism is connected with first water inlet pipe by first ball valve, the first water inlet pipe is connected with second water inlet pipe by second ball valve, the second water inlet pipe is connected with the water outlet of ice water machine by third ball valve, the water inlet of total water supply mechanism is connected with first drain pipe by fourth ball valve, the first drain pipe is connected with second drain pipe by fifth ball valve, the second drain pipe is connected with the water inlet of ice water machine by sixth ball valve.

[0005] The above device carries out the pipeline of less water supply, when a large amount of water supply is needed in vacuum coating machine work, the supply of water cannot well meet the demand, the water supply pipeline of most water supply devices of vacuum coating machine is not designed more pipeline to carry out water supply, cannot well meet water demand.

[0006] Therefore, a kind of multi-pipe water supply device of vacuum coating machine is proposed to solve the above problems. UTILITY MODEL CONTENT

[0007] The utility model aims at: to solve the problems raised in the above background art, the utility model provides a kind of multi-pipe water supply device of vacuum coating machine.

[0008] The utility model to achieve the above purpose specifically adopts the following technical solutions:

[0009] A multi-pipe water supply device for a vacuum coating machine includes a first fixing plate and a second fixing plate. The second fixing plate is fixedly connected to one side of the outer surface of the first fixing plate. A connecting plate is fixedly installed on the upper surface of the first fixing plate and the upper surface of the second fixing plate. An installation component is provided on the upper surface of the connecting plate, and a water supply component is provided on the upper surface of the connecting plate.

[0010] Furthermore, the mounting assembly includes a mounting plate fixedly mounted on the upper surface of the connecting plate, a fixed cylinder fixedly mounted on the upper surface of the mounting plate, a crossbar fixedly mounted on the upper surface of the fixed cylinder, a tripod fixedly mounted on one side of the outer surface of the crossbar, and a reinforcing plate fixedly connected between the bottom surface of the tripod and one side of the outer surface of the crossbar.

[0011] Furthermore, the water supply assembly includes a conveying module and a water distribution module. The conveying module includes a pump housing disposed on one side of the outer surface of the first fixed plate. The output end of the pump housing is connected to a conveying pipe. A first pipe fixing component is fixedly connected to the outer surface of the conveying pipe, and the bottom surface of the first pipe fixing component is fixedly connected to the upper surface of the connecting plate. Holes are sequentially and evenly spaced through the upper part of the outer surface of the conveying pipe, and a water distribution pipe is fixedly connected to the inner wall of the hole. A second ball valve is fixedly connected to the upper end of the water distribution pipe. A sixth connecting pipe is connected to the output end of the second ball valve, and a self-controlled flow meter is fixedly connected to the upper end of the sixth connecting pipe. A first flow meter is connected to the output end of the self-controlled flow meter. A mounting flange is fixedly connected to the upper end of the first flow meter. A fifth connecting pipe is fixedly connected to the upper surface of the mounting flange. A first check valve is fixedly connected through the fifth connecting pipe, and a fourth connecting pipe is fixedly connected to the output end of the first check valve. A third connecting pipe is fixedly connected to the upper end of the fourth connecting pipe.

[0012] Furthermore, the water distribution module includes a second pipe fixing component fixedly installed on the upper surface of the connecting plate. A first outlet pipe is fixedly connected inside the second pipe fixing component. A first instrument valve is fixedly installed on the upper surface of the first outlet pipe. A pressure gauge is fixedly connected to the upper end of the first instrument valve. A first ball valve is fixedly connected to the upper end of the first outlet pipe. A first connecting pipe is fixedly connected to the upper end of the first ball valve. A second instrument valve is fixedly connected to one side of the outer surface of the first connecting pipe. A first connecting flange is fixedly connected to the upper end of the first connecting pipe. A No. 2 connecting pipe is fixedly installed on the upper surface of the flange. A No. 2 connecting flange is fixedly connected to the upper surface of the No. 2 connecting pipe. The upper end of the No. 2 connecting flange is fixedly connected to the bottom surface of one end of the No. 3 connecting pipe. A No. 2 check valve is fixedly connected to the other end of the No. 3 connecting pipe. A No. 7 connecting pipe is fixedly connected to the bottom surface of the No. 2 check valve. A No. 2 flow meter is fixedly connected to the bottom end of the No. 7 connecting pipe. An No. 8 connecting pipe is fixedly connected to the bottom end of the No. 8 connecting pipe. A No. 3 ball valve is fixedly connected to the output end of the No. 3 ball valve. A No. 2 outlet pipe is connected to the output end of the No. 3 ball valve.

[0013] Further, the horizontal frame upper surface is fixedly provided with a third pipe fixing member, and the inner wall of the third pipe fixing member is fixedly connected with the outer surface of a third connecting pipe.

[0014] Further, the second pipe fixing members are equidistantly and sequentially distributed on the upper surface of the connecting plate, and the water distribution pipes are equidistantly and sequentially distributed in the inner walls of the holes penetrating through the upper portion of the outer surface of the conveying pipe.

[0015] The utility model discloses the beneficial effects are as follows:

[0016] The utility model discloses a water supply assembly is set, and a plurality of holes are penetrated through the upper portion of the outer surface of the conveying pipe, and the water distribution pipes are fixedly connected in these holes, realize that the water in the conveying pipe can enter the water distribution pipe and carry out water supply to the different plurality of pipes connected, provide sufficient water for the vacuum coating machine and use, realize the multi-pipe water supply of vacuum coating machine, satisfy the water use demand of vacuum coating machine, and the water supply pipe use is more stable when supplying water through the installation assembly of setting up and installing the water supply assembly above the connecting plate. DRAWINGS

[0017] Figure 1 It is the first visual angle structure schematic diagram of the utility model,

[0018] Figure 2 It is the water supply frame structure schematic diagram of the utility model,

[0019] Figure 3 It is the installation assembly structure schematic diagram of the utility model,

[0020] Figure 4 It is the water supply assembly structure schematic diagram of the utility model.

[0021] Fig. 1 is a fixed plate; 2 is a second fixed plate; 3 is a mounting assembly; 301 is a connecting plate; 302 is a mounting plate; 303 is a fixed cylinder; 304 is a cross frame; 305 is a tripod; 306 is a reinforcing plate; 4 is a water supply assembly; 401 is a pump machine box; 402 is a conveying pipe; 403 is a first pipe fixing piece; 404 is a second pipe fixing piece; 405 is a first water outlet pipe; 406 is a first instrument valve; 407 is a pressure gauge; 408 is a first ball valve; 409 is a first connecting pipe; 410 is a second instrument valve; 411 is a first connecting flange; 412 is a second connecting pipe; 413 is a second connecting flange; 414 is a third connecting pipe; 415 is a fourth connecting pipe; 416 is a first check valve; 417 is a fifth connecting pipe; 418 is a mounting flange; 419 is a first flowmeter; 420 is a self-control flowmeter; 421 is a sixth connecting pipe; 422 is a second ball valve; 423 is a water distribution pipe; 424 is a second check valve; 425 is a seventh connecting pipe; 426 is a second flowmeter; 427 is an eighth connecting pipe; 428 is a third ball valve; 429 is a second water outlet pipe; 430 is a third pipe fixing piece. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.

[0023] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative labor are within the scope of protection of the present application.

[0024] It should be noted that: similar reference numerals and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings. In addition, the terms "first", "second", etc. are only used for differentiation in description, and cannot be understood as indicating or implying relative importance.

[0025] The electrical components appearing in the text are all electrically connected with a master controller and 220V mains, and the master controller can be a conventional known device such as a computer for control.

[0026] In the description of the embodiments of the utility model, it needs to be explained that the directions or position relations indicated by the terms "inner", "outer", "upper" and the like are based on the directions or position relations shown in the drawings, or are the directions or position relations in which the utility model product is usually placed during use, and are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the utility model.

[0027] As shown in Figures 1-4 A kind of multi-pipe water supply device of vacuum coating machine, including No. 1 fixed plate 1 and No. 2 fixed plate 2, No. 2 fixed plate 2 is fixedly connected to the outer surface one side of No. 1 fixed plate 1, the upper surface of No. 1 fixed plate 1 and the upper surface of No. 2 fixed plate 2 are fixedly installed with connecting plate 301, the upper surface of connecting plate 301 is provided with mounting assembly 3, the upper surface of connecting plate 301 is provided with water supply assembly 4;No. 1 fixed plate 1 and No. 2 fixed plate 2 are fixed to connecting plate 301, provide stable bottom installation, mounting assembly 3 arranged on the upper surface of connecting plate 301 provides stable installation to the pipeline of water supply, and the multi-pipe water supply treatment of vacuum coating machine is carried out by the water supply assembly 4 arranged.

[0028] Mounting assembly 3 includes mounting plate 302 fixedly installed on the upper surface of connecting plate 301, mounting plate 302 is fixedly installed with fixed cylinder 303 on the upper surface, and fixed cylinder 303 is fixedly installed with crossbeam 304 on the upper surface, crossbeam 304 is fixedly installed with tripod 305 on the outer surface one side, and the bottom surface of tripod 305 is fixedly connected with reinforcing plate 306 between the outer surface one side of crossbeam 304;Mounting plate 302 and fixed cylinder 303 fixedly installed on the upper surface of connecting plate 301 provide a certain installation height for installation of water supply pipeline, and crossbeam 304 and tripod 305 fixedly installed on the outer surface one side of fixed cylinder 303 enhance the strength and stability of overall installation.

[0029] The water supply component 4 includes a conveying module and a water distribution module. The conveying module includes a pump housing 401 disposed on one side of the outer surface of the first fixed plate 1. The output end of the pump housing 401 is connected to a conveying pipe 402. A first pipe fixing component 403 is fixedly connected to the outer surface of the conveying pipe 402, and the bottom surface of the first pipe fixing component 403 is fixedly connected to the upper surface of the connecting plate 301. Holes are sequentially and evenly spaced through the upper part of the outer surface of the conveying pipe 402, and a water distribution pipe 423 is fixedly connected to the inner wall of the hole. A second ball valve 422 is fixedly connected to the upper end of the water distribution pipe 423. The output end of the second ball valve 422 is connected to a sixth connecting pipe 421, and the upper end of the sixth connecting pipe 421 is fixedly connected to... A self-controlled flow meter 420 is connected, and the output end of the self-controlled flow meter 420 is connected to a first flow meter 419. The upper end of the first flow meter 419 is fixedly connected to a mounting flange 418. The upper surface of the mounting flange 418 is fixedly connected to a fifth connecting pipe 417. A first check valve 416 is fixedly connected through the fifth connecting pipe 417. The output end of the first check valve 416 is fixedly connected to a fourth connecting pipe 415. The upper end of the fourth connecting pipe 415 is fixedly connected to a third connecting pipe 414. The pump box 401 is connected to a water source through a water pipe. The pump box 401 pumps the water into the delivery pipe 402, and then into the distribution pipe 423 for diversion, realizing water supply through multiple pipes.

[0030] The water distribution module includes a second pipe fixing component 404 fixedly installed on the upper surface of the connecting plate 301. A first outlet pipe 405 is fixedly connected inside the second pipe fixing component 404. A first instrument valve 406 is fixedly installed on the upper part of the outer surface of the first outlet pipe 405. A pressure gauge 407 is fixedly connected to the upper end of the first instrument valve 406. A first ball valve 408 is fixedly connected to the upper end of the first outlet pipe 405. A first connecting pipe 409 is fixedly connected to the upper end of the first ball valve 408. A second instrument valve 410 is fixedly connected to one side of the outer surface of the first connecting pipe 409. A first connecting flange 411 is fixedly connected to the upper end of the first connecting pipe 409. A second connecting pipe 412 is fixedly installed on the upper surface of the first connecting flange 411. A second connecting... Flange 413, the upper end of the second connecting flange 413 is fixedly connected to the bottom surface of one end of the third connecting pipe 414, the other end of the third connecting pipe 414 is fixedly connected to the surface of the second check valve 424, the bottom surface of the second check valve 424 is fixedly connected to the seventh connecting pipe 425, the bottom end of the seventh connecting pipe 425 is fixedly connected to the second flow meter 426, the bottom end of the second flow meter 426 is fixedly connected to the eighth connecting pipe 427, the bottom end of the eighth connecting pipe 427 is fixedly connected to the third ball valve 428, the output end of the third ball valve 428 is connected to the second outlet pipe 429; water continues to be transported through the diverted pipes, the pressure gauge 407 is installed to detect the outlet pressure, and the first ball valve 408 and the second flow meter 426 and other equipment are installed to detect the status of water transportation.

[0031] A No. 3 pipe fixing component 430 is fixedly installed on the upper surface of the cross frame 304. The inner wall of the No. 3 pipe fixing component 430 is fixedly connected to the outer surface of the No. 3 connecting pipe 414. The No. 3 pipe fixing component 430 fixes the position of the No. 3 connecting pipe 414 installed above, so as to achieve the stability of the No. 3 connecting pipe 414 distributing water again after the water is distributed.

[0032] Pipe fasteners 404 are distributed at equal intervals on both sides of the upper surface of the connecting plate 301, and water distribution pipes 423 are distributed at equal intervals on the inner wall of the through hole on the upper part of the outer surface of the conveying pipe 402; multiple through holes can be used to install multiple water distribution pipes 423 to distribute water and connect multiple pipes for water supply.

[0033] In summary, the multi-pipe water supply device for this vacuum coating machine supplies water to the machine by connecting the water source through the pump box 401 and water pipes, pumping the water into the delivery pipe 402. The water in the delivery pipe 402 then enters multiple branch pipes 423. The water in the branch pipes 423 flows through the ball valve 422 to the connecting pipe 421, then through the self-controlled flow meter 420, through the flow meter 419, into the connecting pipe 417, and then through the check valve 416 to the connecting pipe 415, flowing to the connecting pipe 414. At both ends of the connecting pipe 414, water is supplied to the vacuum coating machine through the outlet pipes 405 and 429. The water pressure in the outlet pipe 405 is monitored by the pressure gauge 407 to ensure a stable water supply.

[0034] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A multi-pipe water supply device for a vacuum coating machine, comprising a first fixing plate (1) and a second fixing plate (2), wherein the second fixing plate (2) is fixedly connected to one side of the outer surface of the first fixing plate (1), and a connecting plate (301) is fixedly installed on the upper surface of the first fixing plate (1) and the upper surface of the second fixing plate (2), characterized in that: The upper surface of the connecting plate (301) is provided with an installation component (3), and the upper surface of the connecting plate (301) is provided with a water supply component (4).

2. The multi-pipe water supply device for a vacuum coating machine according to claim 1, characterized in that: The mounting assembly (3) includes a mounting plate (302) fixedly mounted on the upper surface of the connecting plate (301). A fixing cylinder (303) is fixedly mounted on the upper surface of the mounting plate (302), and a crossbeam (304) is fixedly mounted on the upper surface of the fixing cylinder (303). A tripod (305) is fixedly mounted on one side of the outer surface of the crossbeam (304), and a reinforcing plate (306) is fixedly connected between the bottom surface of the tripod (305) and one side of the outer surface of the crossbeam (304).

3. The multi-pipe water supply device for a vacuum coating machine according to claim 1, characterized in that: The water supply component (4) includes a conveying module and a water distribution module. The conveying module includes a pump housing (401) disposed on one side of the outer surface of the first fixed plate (1). The output end of the pump housing (401) is connected to a conveying pipe (402). A first pipe fixing component (403) is fixedly connected to the outer surface of the conveying pipe (402), and the bottom surface of the first pipe fixing component (403) is fixedly connected to the upper surface of the connecting plate (301). Holes are sequentially and evenly spaced through the upper part of the outer surface of the conveying pipe (402), and a water distribution pipe (423) is fixedly connected to the inner wall of the hole. A second ball valve (422) is fixedly connected to the upper end of the water distribution pipe (423). 22) The output end is connected to a No. 6 connecting pipe (421), and a self-controlled flow meter (420) is fixedly connected to the upper end of the No. 6 connecting pipe (421). The output end of the self-controlled flow meter (420) is connected to a No. 1 flow meter (419). The upper end of the No. 1 flow meter (419) is fixedly connected to a mounting flange (418). The upper surface of the mounting flange (418) is fixedly connected to a No. 5 connecting pipe (417). A No. 1 check valve (416) is fixedly connected through the No. 5 connecting pipe (417). The output end of the No. 1 check valve (416) is fixedly connected to a No. 4 connecting pipe (415). The upper end of the No. 4 connecting pipe (415) is fixedly connected to a No. 3 connecting pipe (414).

4. The multi-pipe water supply device for a vacuum coating machine according to claim 3, characterized in that: The water distribution module includes a second pipe fixing component (404) fixedly installed on the upper surface of the connecting plate (301). A first outlet pipe (405) is fixedly connected inside the second pipe fixing component (404). A first instrument valve (406) is fixedly installed on the upper part of the outer surface of the first outlet pipe (405). A pressure gauge (407) is fixedly connected to the upper end of the first instrument valve (406). A first ball valve (408) is fixedly connected to the upper end of the first outlet pipe (405). A first connecting pipe (409) is fixedly connected to the upper end of the first ball valve (408). A second instrument valve (410) is fixedly connected to one side of the outer surface of the first connecting pipe (409). A first connecting flange (411) is fixedly connected to the upper end of the first connecting pipe (409). A No. 2 connecting pipe (412) is fixedly installed on the upper surface of the No. 2 connecting pipe (412). A No. 2 connecting flange (413) is fixedly connected to the upper surface of the No. 2 connecting flange (413). The upper end of the No. 2 connecting flange (413) is fixedly connected to the bottom surface of one end of the No. 3 connecting pipe (414). A No. 2 check valve (424) is fixedly connected to the surface of the other end of the No. 3 connecting pipe (414). A No. 7 connecting pipe (425) is fixedly connected to the bottom surface of the No. 2 check valve (424). A No. 2 flow meter (426) is fixedly connected to the bottom end of the No. 2 flow meter (426). A No. 8 connecting pipe (427) is fixedly connected to the bottom end of the No. 8 connecting pipe (427). A No. 3 ball valve (428) is fixedly connected to the bottom end of the No. 3 ball valve (428). A No. 2 outlet pipe (429) is connected to the output end of the No. 3 ball valve (428).

5. A multi-pipe water supply device for a vacuum coating machine according to claim 2, characterized in that: The upper surface of the cross frame (304) is fixedly installed with a No. 3 pipe fastener (430), and the inner wall of the No. 3 pipe fastener (430) is fixedly connected to the outer surface of the No. 3 connecting pipe (414).

6. The multi-pipe water supply device for a vacuum coating machine according to claim 4, characterized in that: The second pipe fixing component (404) is distributed at equal intervals on both sides of the upper surface of the connecting plate (301), and the water distribution pipe (423) is distributed at equal intervals on the inner wall of the hole penetrating the upper part of the outer surface of the conveying pipe (402).

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