Liquid cooling connector with sealing structure
By designing a liquid cooling connector with a sealed structure in the chemical mechanical polishing equipment, the problem of cooling water leakage was solved, and stable control of the polishing disc temperature was achieved, ensuring polishing quality.
Patent Information
- Application Number
- CN202423290401.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-30
- Publication Date
- 2025-12-23
- Estimated Expiration
- 2034-12-30
AI Technical Summary
In existing technologies, the temperature control of the grinding disc is unstable due to cooling water leakage during chemical mechanical polishing, which affects the processing quality.
A liquid cooling connector with a sealing structure is designed, including a housing, a main shaft and a sealing structure. By setting a water injection chamber and a water outlet chamber inside the housing, and setting a dynamic ring and a stationary ring sealing structure at the top and bottom of the housing respectively, cooling water leakage is prevented.
It effectively prevents cooling water leakage, maintains a stable grinding disc temperature, and ensures the normal operation of the chemical mechanical polishing process.
Smart Images
Figure CN223708941U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The application relates to the technical field of grinding equipment, and in particular to a liquid cooling connector with a sealing structure. BACKGROUND
[0002] Chemical-mechanical polishing (CMP) is a key link for wafer planarization. In the chemical-mechanical polishing process, a wafer is pressed on a polishing pad surface by a polishing head, and the wafer surface is polished by means of the relative movement between the wafer and the polishing pad and the abrasive particles in the polishing liquid. In the polishing process, a large amount of heat is generated due to the friction and micro-cutting action between the wafer and the polishing pad, resulting in excessively high temperature. However, for chemical-mechanical polishing, the chemical action between the chemical components in the polishing liquid and the wafer surface needs to be carried out at a certain temperature. If the temperature is too high, the chemical action is too fast, and the chemical action and mechanical removal action are unbalanced, which will greatly affect the wafer processing quality, so the temperature in the chemical-mechanical polishing process needs to be controlled.
[0003] At present, the way to cool the grinding disc is generally to continuously introduce cooling water into the bottom of the grinding disc, so as to take away the heat generated by the grinding disc and achieve the cooling of the grinding disc. However, this cooling method is prone to internal cooling water leakage, thereby affecting the normal work of the grinding disc. CONTENT OF THE INVENTION
[0004] Therefore, the application provides a liquid cooling connector with a sealing structure.
[0005] According to an aspect of the application, a liquid cooling connector with a sealing structure is provided, comprising a housing, a main shaft and a sealing structure.
[0006] The housing is a hollow structure, and an annular water injection chamber and a water outlet chamber are pre-set inside the housing, the water injection chamber is suitable for being connected with a cooling water pump, and the water outlet chamber is suitable for being connected with a recovery tank.
[0007] The main shaft is rotatably arranged in the housing, and a first water passage and a second water passage communicating with the top of the main shaft are respectively formed in the side wall, the two ends of the first water passage are respectively communicated with the water injection chamber and the water inlet hole of the grinding disc, and the two ends of the second water passage are respectively communicated with the water outlet chamber and the water outlet hole of the grinding disc.
[0008] The sealing structure is arranged in the housing, and seals the top of the housing and the water injection chamber, and the bottom of the housing and the water outlet chamber.
[0009] In a possible implementation, the sealing structure comprises: a dynamic ring and a static ring.
[0010] The static ring is a ring structure with a preset thickness, is made of graphite, has a sealing ring groove on one side wall, and has a sealing surface on the other end. The sealing surface of the static ring abuts against the dynamic ring. The static ring is provided with a flange plate in the circumferential direction. Two openings are formed in the flange plate and abut against the pins on the shell in a tangent manner. The bottom surface of the flange plate of the static ring is adapted to contact the elastic element.
[0011] The dynamic ring is a ring structure with a thickness, is sleeved on the outside of the main shaft, is fixed to the main shaft through the limiting structure on the main shaft, and is made of silicon carbide.
[0012] In a possible implementation, a spring hole is formed in the inside of the shell.
[0013] The spring hole is provided with an elastic element, and the two ends of the elastic element contact the bottom of the spring hole and the static ring, respectively.
[0014] In a possible implementation, the sealing surface of the static ring abuts against the dynamic ring, and a ring-shaped sealing groove is formed in the circumferential direction. The sealing groove is provided with a sealing ring.
[0015] In a possible implementation, the water injection chamber and the water outlet chamber are arranged above and below each other, and the water injection chamber and the water outlet chamber are isolated and not communicated. The water injection chamber is located above the water outlet chamber.
[0016] In a possible implementation, the sealing structure is two, and is arranged above the water injection chamber and below the water outlet chamber, respectively.
[0017] In a possible implementation, a preset interval distance is provided between the sealing surface of the static ring and the flange plate, and the cross-sectional diameter of the flange plate is greater than the annular cross-sectional diameter of the water injection chamber.
[0018] In a possible implementation, the shell comprises a shell and a bottom cover.
[0019] The inside of the shell is hollow, and the bottom is open.
[0020] The bottom cover is detachably arranged at the bottom of the shell and is bolted to the shell.
[0021] In a possible implementation, a bearing is further included.
[0022] The bearing is arranged in the inside of the shell, and the outer side of the bearing is connected to the inside of the shell, and the inner side of the bearing is connected to the main shaft.
[0023] In a possible implementation, the main shaft is provided with a mounting hole flange at the top, and is arranged outside the shell and at a certain distance from the top of the shell.
[0024] The flange is bolted to the bottom of the grinding disc.
[0025] The liquid cooling connector with a sealing structure has the following advantages: after the connector is installed at the bottom of the grinding disc, the main shaft 200 rotates with the grinding disc, while the shell 100 remains stationary, and the connector injects cooling water towards the bottom of the grinding disc and discharges water carrying heat away. By arranging the sealing structure 300 at the lower part of the water outlet chamber in the connector, and arranging the same sealing structure above the water injection chamber, water leakage of the water injection chamber and the water outlet chamber arranged in the shell 100 is avoided.
[0026] Other features and aspects of the present application will become apparent from the following detailed description of exemplary embodiments with reference to the drawings. BRIEF DESCRIPTION OF DRAWINGS
[0027] The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate exemplary embodiments, features, and aspects of the present application and serve to explain the principles of the present application.
[0028] Figure 1 A cross-sectional view of the liquid cooling connector with a sealing structure according to an embodiment of the present application is shown;
[0029] Figure 2 An enlarged cross-sectional view of the liquid cooling connector with a sealing structure according to an embodiment of the present application is shown;
[0030] Figure 3 A front view of the liquid cooling connector with a sealing structure according to an embodiment of the present application is shown;
[0031] Figure 4 A schematic view of the main structure of the liquid cooling connector with a sealing structure according to an embodiment of the present application is shown. DETAILED DESCRIPTION
[0032] Various exemplary embodiments, features, and aspects of the present application will be described in detail below with reference to the accompanying drawings. The same reference numerals in the drawings represent functionally identical or similar elements. Although various aspects of the embodiments are shown in the drawings, the drawings are not necessarily drawn to scale unless specifically indicated.
[0033] It should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application or simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.
[0034] In addition, the terms "first", "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined as "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "multiple" is two or more, unless otherwise explicitly specified.
[0035] The word "exemplary" here means "serving as an example, an implementation, or an illustration". Any implementation described as "exemplary" here is not necessarily to be construed as superior or better than other implementations.
[0036] In addition, in order to better illustrate the present application, a large number of specific details are given in the specific embodiments below. Those skilled in the art should understand that the present application can also be implemented without certain specific details. In some examples, methods, means, elements and circuits familiar to those skilled in the art are not described in detail, in order to highlight the main idea of the present application.
[0037] As shown in Figures 1-4 The liquid cooling connector with a sealing structure according to the present application includes a shell 100, a main shaft 200 and a sealing structure 300. The shell 100 is a hollow structure, and an annular water injection chamber and a water outlet chamber are pre-set inside. The water injection chamber is suitable for connecting a cooling water pump, and the water outlet chamber is suitable for connecting a recovery tank. The main shaft 200 is rotatably arranged inside the shell 100, and a first water passage and a second water passage are respectively arranged on the side wall and communicate with the top of the main shaft 200. The two ends of the first water passage respectively communicate with the water injection chamber and the water inlet hole of the grinding disc, and the two ends of the second water passage respectively communicate with the water outlet chamber and the water outlet hole of the grinding disc. The sealing structure 300 is arranged inside the shell 100, and seals the top of the water injection chamber and the bottom of the water outlet chamber.
[0038] In this embodiment, after the connecting head is installed at the bottom of the grinding disc, the main shaft 200 rotates with the grinding disc, while the shell 100 remains stationary, and the connecting head injects cooling water towards the bottom of the grinding disc and discharges the water carrying heat. By providing a sealing structure 300 above and below the interior of the connecting head, the water leakage of the water injection chamber and the water outlet chamber provided in the interior of the shell 100 is avoided. Specifically, the shell 100 is a hollow structure, and the interior is provided with an annular water injection chamber and an annular water outlet chamber. The water injection chamber is used to connect the cooling water pump, and the cooling water is injected into the interior of the connecting head through the chamber. The water outlet chamber is connected with the recovery tank, and is used to collect and discharge the used cooling water. The main shaft 200 is rotatably arranged in the interior of the shell 100, and the sidewall is provided with a first water channel and a second water channel respectively communicating with the top of the main shaft 200. The two ends of the first water channel are respectively communicated with the water injection chamber and the water inlet hole of the grinding disc, and are used to deliver the cooling water to the grinding disc. The two ends of the second water channel are respectively communicated with the water outlet chamber and the water outlet hole of the grinding disc, and are used to guide the used cooling water out. The sealing structure 300 is arranged in the interior of the shell 100, and is used to seal the water injection chamber and the top of the shell 100, and the water outlet chamber and the bottom of the shell 100, so as to prevent the cooling water from leaking. The sealing structure 300 comprises a movable ring 320 and a static ring 310. The static ring 310 is an annular structure with a predetermined thickness, and is made of graphite to increase lubricity. One end of the static ring 310 is a main sealing end abutting against the movable ring 320, and the other end is a secondary sealing end provided with a sealing ring groove abutting against the annular wall of the shell. The middle part of the static ring 310 is provided with a flange plate around the circumference, and the flange plate of the fixed plate is provided with a positioning pin hole abutting against the pin arranged in the interior of the shell 100. The movable ring 320 is also an annular structure with a thickness, and is sleeved on the exterior of the main shaft 200. The relative static state of the movable ring 320 and the main shaft 200 is realized by the limiting structure on the main shaft. The movable ring 320 is made of silicon carbide to improve wear resistance.
[0039] In this way, the movable ring 320 can rotate with the rotation of the main shaft 200, and the static ring 310 is relatively stationary with the shell 100. The material of the movable ring 320 is silicon carbide, and the material of the static ring 310 is graphite. When the movable ring 320 and the main shaft 200 rotate, the movable ring 320 and the static ring 310 relatively rotate and can be relatively sealed, thereby avoiding the leakage of cooling water.
[0040] In an embodiment, the sealing structure 300 comprises a dynamic ring 320 and a static ring 310. The static ring 310 is a ring structure with a preset thickness, and has a sealing ring groove on one end of the side wall and a sealing surface on the other end. The sealing surface of the static ring is in abutment with the dynamic ring. The static ring is provided with a flange plate in the circumferential direction, and two openings are formed on the flange plate. The openings are in tangential abutment with the pins on the shell to achieve limiting. The bottom surface of the flange plate of the static ring is in contact with the elastic element. The dynamic ring 320 is a ring structure with a thickness, and is sleeved on the outside of the main shaft 200. The relative static state with the main shaft is achieved through the limiting structure on the main shaft, and the dynamic ring is made of silicon carbide. The sealing surfaces of the static ring 310 and the dynamic ring 320 are in abutment and relative rotation, achieving main sealing. The sealing ring groove is formed on the side wall of the static ring 310, and the sealing ring is embedded in the sealing ring groove. The sealing ring is in abutment with the side wall of the shell, achieving secondary sealing. The main sealing and the secondary sealing achieve the sealing of the water injection chamber and the water outlet chamber.
[0041] In an embodiment, the inside of the shell 100 is provided with a spring hole 400, and a spring is arranged in the spring hole 400. The two ends of the spring are in contact with the bottom of the spring hole 400 and the side of the flange plate of the static ring 310 away from the sealing surface, respectively. The arrangement of the spring can further increase the tightness of the sealing structure 300 and prevent the leakage of cooling water. The spring is in abutment with the side of the static ring away from the sealing surface, so that the sealing of the static ring and the dynamic ring is more tight.
[0042] In an embodiment, the side of the static ring 310 in abutment with the water injection chamber is provided with an annular sealing groove in the circumferential direction. The sealing groove is provided with a sealing ring, which can further improve the sealing effect and ensure that the cooling water will not leak from the gap between the water injection chamber and the static ring 310.
[0043] In an embodiment, the water injection chamber and the water outlet chamber are arranged above and below, and are separated by a specific structure. The water injection chamber is located above the water outlet chamber, which is convenient for the injection and discharge of cooling water, and is also conducive to keeping the structure of the connector compact.
[0044] Further, in the embodiment, the sealing structure 300 is two, which are arranged above the water injection chamber and below the water outlet chamber, respectively. The two sealing structures 300 are the same and achieve the same function.
[0045] In an embodiment, the cross-sectional diameter of the side of the static ring 310 away from the dynamic ring is greater than the annular cross-sectional diameter of the water injection chamber, so that the spring on the shell can abut the side of the flange plate of the static ring away from the sealing surface, achieving effective sealing effect.
[0046] In a specific embodiment, the shell 100 comprises a shell and a bottom cover, the shell is hollow inside and has an open bottom, and the bottom cover is detachably arranged at the bottom of the shell and is in sealing connection with the shell, facilitating assembly and disassembly of the shell 100, and facilitating cleaning and maintenance of the inside of the shell 100
[0047] In a specific embodiment, further comprising: a bearing arranged in the inside of the shell 100, and the outside of the bearing is connected with the inside of the shell 100, and the inside of the bearing is connected with the main shaft 200, by arranging the bearing, the frictional resistance of the main shaft 200 during rotation can be effectively reduced, and the rotation flexibility and stability of the main shaft 200 are improved.
[0048] In a specific embodiment, the main shaft 200 is located outside the shell 100 and is provided with a flange 210 in the circumferential direction, and the flange 210 is bolted with the bottom of the grinding disc, by arranging the flange 210, the main shaft 200 and the bottom of the grinding disc are fixedly connected, and the bolt connection is stable and convenient for disassembly.
[0049] The above and other embodiments of the present application are described, the above description is exemplary, not exhaustive, and is not limited to the disclosed embodiments. Many modifications and changes are obvious to those skilled in the art without departing from the scope and spirit of the described embodiments. The choice of terms used herein is intended to best explain the principles, practical application or improvement of technology in the market of the embodiments, or to enable other ordinary skilled in the art to understand the embodiments disclosed herein.
Claims
1. A liquid cooling connector with a sealed structure, suitable for connection to the bottom of a grinding disc, characterized in that, include: Housing, spindle, and sealing structure; The shell is a hollow structure with a pre-set annular water injection chamber and a water outlet chamber inside. The water injection chamber is suitable for connecting to a cooling water pump, and the water outlet chamber is suitable for connecting to a recycling tank. The main shaft is rotatably disposed inside the housing. A first water pipe and a second water pipe are respectively provided on the side wall, which are connected to the top of the main shaft. The two ends of the first water pipe are respectively connected to the water injection chamber and the water inlet of the grinding disc. The two ends of the second water pipe are respectively connected to the water outlet chamber and the water outlet of the grinding disc. The sealing structure is disposed inside the housing, sealing the water injection chamber to the top of the housing, and the water outlet chamber to the bottom of the housing.
2. The liquid cooling connector with a sealing structure according to claim 1, characterized in that, The sealing structure includes: a dynamic ring and a stationary ring; The stationary ring is a ring structure with a preset thickness. The stationary ring is made of graphite. A sealing groove is opened on one side wall and a sealing surface is opened on the other end. The sealing surface of the stationary ring abuts against the rotating ring. The stationary ring is provided with a flange in the circumferential direction. Two openings are opened on the flange. The openings are tangentially abutted against the pins on the housing. The bottom surface of the flange of the stationary ring is suitable for contacting the elastic element. The moving ring is a ring-shaped structure with thickness, sleeved on the outside of the main shaft, and fixed to the main shaft by a limiting structure on the main shaft. The moving ring is made of silicon carbide.
3. The liquid cooling connector with a sealing structure according to claim 2, characterized in that, The housing has a spring hole inside; An elastic element is provided inside the spring hole, with its two ends contacting the bottom of the spring hole and the stationary ring, respectively.
4. The liquid cooling connector with a sealing structure according to claim 3, characterized in that, The stationary ring and the rotating ring abut their sealing surfaces, and an annular sealing groove is formed along the circumferential direction, with a sealing ring provided inside the sealing groove.
5. The liquid cooling connector with a sealing structure according to any one of claims 1-4, characterized in that, The water injection chamber and the water outlet chamber are arranged vertically, and the water injection chamber and the water outlet chamber are isolated and not connected. The water injection chamber is located above the water outlet chamber.
6. The liquid cooling connector with a sealing structure according to claim 5, characterized in that, The sealing structure consists of two parts, one located above the water injection chamber and the other below the water outlet chamber.
7. The liquid cooling connector with a sealing structure according to claim 4, characterized in that, The sealing surface of the stationary ring is spaced at a predetermined distance from the flange, and the cross-sectional diameter of the flange is larger than the annular cross-sectional diameter of the water injection chamber.
8. The liquid cooling connector with a sealing structure according to claim 1, characterized in that, The housing includes a housing and a bottom cover; The shell is hollow inside and has an opening at the bottom; The bottom cover is detachably disposed at the bottom of the housing and is bolted to the housing.
9. The liquid cooling connector with a sealing structure according to claim 1, characterized in that, Also includes: Bearings; The bearing is disposed inside the housing, with its outer side connected to the inside of the housing and its inner side connected to the main shaft.
10. The liquid cooling connector with a sealing structure according to claim 1, characterized in that, The spindle is provided with a mounting flange at the top and is located outside the housing, with a predetermined distance between it and the top of the housing; The flange is bolted to the bottom of the grinding disc.