Adjustable supporting leg for anti-micro-vibration base

Abstract

The adjustable supporting leg comprises an upper supporting leg body and a lower supporting leg body, the bottom of the upper supporting leg body is connected with a supporting seat in a bolted mode, the supporting seat comprises a base, two parallel vertical plates are perpendicularly welded to the top of the base, the two sides of the lower portion of the upper supporting leg body are each provided with four adjusting holes arranged in a rectangular mode, and the two sides of the lower portion of the upper supporting leg body are each provided with a through hole. The upper supporting leg is inserted between the two vertical plates and is fixed to the vertical plates in a bolted mode through a second bolt penetrating through the adjusting holes, an adjusting bolt is installed in the middle of the bottom of the upper supporting leg, a supporting plate is vertically welded to the top of the lower supporting leg, and the supporting plate is fixed to the base in a bolted mode through a first bolt. The aluminum profile upper supporting leg and the square steel tube lower supporting leg are fixed in a bolted mode, the base and the adjusting bolt which are connected in a bolted mode are arranged at the bottom of the upper supporting leg, the supporting leg bearing capacity is large, height adjustment of the supporting leg can be achieved, meanwhile, the micro-vibration prevention capacity of the base can be guaranteed, bolted connection is adopted, universality is good, and the application range is wide.

Description

TECHNICAL FIELD

[0001] The utility model relates to integrated circuit process device technical field, concretely is a kind of adjustable support leg for anti-microvibration pedestal. BACKGROUND

[0002] At present, the semiconductor industry develops rapidly, and the upgrading of semiconductor process precision production equipment is also faster and faster,

[0003] Semiconductor process precision production equipment requires higher and higher precision, and the equipment is more and more sensitive to the environment such as micro-vibration, a little micro-vibration will reduce the yield of equipment output, and even make the equipment cannot work normally, so the isolation of micro-vibration becomes more and more important. The traditional anti-microvibration pedestal has concrete pedestal and steel structure pedestal, the traditional pedestal design structure is fixed, and cannot realize lifting adjustment, even if part of the pedestal can realize lifting, but usually adopts foot cup form, which reduces the anti-microvibration performance of the pedestal, and is usually suitable for the equipment with low anti-microvibration requirement, and cannot meet the anti-microvibration requirement of the pedestal. UTILITY MODEL CONTENTS

[0004] The utility model aims at providing a kind of adjustable support leg for anti-microvibration pedestal to solve the problems in the above background technology.

[0005] The technical scheme of the utility model is as follows:

[0006] A kind of adjustable support leg for anti-microvibration pedestal, including upper leg and lower leg, the upper leg bottom is bolted with support seat, the support seat includes base, two parallel vertical plates are vertically welded on the top of the base, four adjusting holes in rectangular arrangement are respectively formed in the lower part of the upper leg, the upper leg is inserted into the middle of two vertical plates, and is bolted and fixed with vertical plate by bolt two passing through adjusting hole, adjusting bolt is installed in the middle of the bottom of the upper leg, the lower leg top is vertically welded with support plate, the support plate is bolted and fixed with base by bolt one, the upper leg top is vertically welded with top plate, the top plate is provided with mounting hole one, the lower leg bottom is vertically welded with bottom plate, and the bottom plate is provided with mounting hole two.

[0007] Further, the upper leg is aluminum profile leg.

[0008] Further, the lower leg is square steel pipe leg.

[0009] Further, the base, the top plate, the support plate and the bottom plate are all made of steel plate into rectangular structure.

[0010] Further, bolt hole is formed in the bottom of the upper leg, and the height of the leg is adjusted by thread adjustment of adjusting bolt and bolt hole.

[0011] The utility model discloses beneficial effect is:

[0012] The utility model discloses a base is prevented slightly to be vibrated, and the upper support leg and the square steel pipe lower support leg are fixed with bolt connection, and the bottom of upper support leg is provided with the base and adjusting bolt of bolt connection, and the support leg carrying capacity is big, can realize the height adjustment of support leg, can guarantee the anti -vibration ability of base simultaneously, all adopt bolt connection mode connection, and the universality is good, and the scope of application is wide, and the structure is reasonable simple, and the production cost is low, and the installation is convenient. BRIEF DESCRIPTION OF DRAWINGS

[0013] Fig. 1 It is the structural schematic diagram of the utility model.

[0014] Fig. 2 It is the bottom view of upper support leg of the utility model.

[0015] In the drawing, 1 is upper support leg, 101 is adjusting hole, 102 is bolt hole, 2 is lower support leg, 3 is support seat, 301 is base, 302 is vertical board, 4 is adjusting bolt, 5 is top plate, 6 is support plate, 7 is bottom plate, 8 is bolt one, 9 is bolt two, 10 is mounting hole one, 11 is mounting hole two. DETAILED DESCRIPTION

[0016] The utility model will be described clearly and completely to technical scheme of the utility model with combining with example, obviously, the example only is a part of the utility model embodiment, is not all the embodiment. Based on the embodiment in the utility model, all other embodiments that the person of ordinary skill in the art obtains without making creative labor belong to the scope of the utility model protection.

[0017] As Figs. 1-2 Shown, a kind of adjustable support leg for anti-microvibration base, including upper support leg 1 and lower support leg 2, the upper support leg 1 bottom bolt connection has support seat 3, the support seat 3 includes base 301, the base 301 top vertical welding two parallel vertical boards 302, the upper support leg 1 lower portion two sides are respectively provided with four adjusting holes 101 arranged in rectangular, the upper support leg 1 is inserted in the middle of two vertical boards 302, by bolt two 9 passes through adjusting hole 101 and vertical board 302 bolt connection fixed, the upper support leg 1 bottom middle is provided with adjusting bolt 4, the lower support leg 2 top vertical welding has support plate 6, the support plate 6 is bolted with base 3 by bolt one 8, the upper support leg 1 top vertical welding has top plate 5, the top plate 5 is provided with mounting hole one 10, the lower support leg 2 bottom vertical welding has bottom plate 7, and the bottom plate 7 is provided with mounting hole two 11.

[0018] The upper support leg 1 is aluminum profile support leg.

[0019] The lower support leg 2 is square steel pipe support leg.

[0020] The base 3, the top plate 5, the support plate 6 and the bottom plate 7 are all made of steel plates into rectangular structures.

[0021] The bottom of the upper leg 1 is provided with a bolt hole 102, and the adjusting bolt 4 is adjusted to achieve the adjustment of the height of the leg through the bolt hole 102.

[0022] During installation, the base 3 is bolted with the upper leg 1 through the bolt two 9, then the lower leg 2 is bolted with the base 3, the base is hung in the installation position, the top plate 5 is bolted with the base through the bolt one 8, then the bottom plate 7 is fixed with the ground through the bolt, the height of the leg is adjusted through the adjusting bolt 4, when the height is adjusted to the suitable height, the bolt two 9 is tightened, and the height adjustment of the base is realized.

[0023] The above only describes the preferred embodiments of the present application and is not used to limit the present application, and any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. An adjustable support leg for a vibration damping base, comprising an upper support leg and a lower support leg, characterized in that, The upper support leg is bolted to the bottom of a support base, which includes a base. Two parallel vertical plates are vertically welded to the top of the base. Four rectangular adjustment holes are respectively opened on both sides of the lower part of the upper support leg. The upper support leg is inserted between the two vertical plates and is bolted to the vertical plates through the adjustment holes by bolt two. An adjustment bolt is installed in the middle of the bottom of the upper support leg. A support plate is vertically welded to the top of the lower support leg. The support plate is bolted to the base by bolt one. A top plate is vertically welded to the top of the upper support leg. The top plate has a mounting hole one. A bottom plate is vertically welded to the bottom of the lower support leg. The bottom plate has a mounting hole two.

2. The adjustable support leg for an anti-vibration base according to claim 1, characterized in that, The upper support leg is an aluminum profile support leg.

3. The adjustable support leg for an anti-vibration base according to claim 1, characterized in that, The lower support leg is a square steel pipe support leg.

4. An adjustable support leg for an anti-vibration base according to claim 1, characterized in that, The base, top plate, support plate, and bottom plate are all made of steel plates in a rectangular structure.

5. An adjustable support leg for an anti-vibration base according to claim 1, characterized in that, Bolt holes are provided at the bottom of the upper support leg.

Images