PECVD furnace body cabinet

Abstract

The utility model discloses a PECVD (Plasma Enhanced Chemical Vapor Deposition) furnace body cabinet, which comprises a furnace body cabinet framework, a furnace body component arranged on the furnace body cabinet framework, a maintenance channel, a gas circuit board component and an electrical control component, the furnace body component is positioned on one side of the maintenance channel, and the gas circuit board component and the electrical control component are positioned on the other side of the maintenance channel. A furnace door assembly is arranged at a furnace opening of the furnace body assembly, a waste gas chamber is arranged on the outer side of the furnace door assembly, and the maintenance channel extends to the furnace door assembly. The gas circuit board assembly has the advantages that a maintenance channel is reserved, the length of a connecting pipeline of the gas circuit board assembly is shortened, and maintenance is convenient.

Description

TECHNICAL FIELD

[0001] The utility model relates to solar cell manufacturing equipment technical field, concretely relates to a kind of PECVD furnace body cabinet. BACKGROUND

[0002] In order to reduce the emission of greenhouse gases, solar cells as renewable environmental protection energy have been universally concerned by countries around the world, especially photovoltaic industry dominated by solar cells. Tube type PECVD equipment is the key technology equipment for Topcon solar cell preparation, which can not only integrate three processes of tunneling oxide layer, poly layer and poly doping, realize Topcon structure preparation through one equipment, but also reduce battery back metal complex and improve conversion efficiency, and has wide application in photovoltaic industry equipment field.

[0003] PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment mainly uses plasma polymerization method to deposit silicon nitride antireflection film on solar cell wafer to improve the photoelectric conversion efficiency of solar cell. The equipment uses electric furnace body to maintain the temperature in quartz tube reaction chamber at about 500 degrees, and then uses high-frequency glow discharge to generate plasma to promote gas molecule decomposition, combination and ionization, and deposit on solar cell wafer after reaction.

[0004] The furnace body cabinet supports reaction chamber, transformer, power regulator and other components in the whole PECVD equipment structure, these components involve cooling water, strong current and various gases, and need to be separated and arranged, once water and electricity contact, it may cause short circuit of the whole equipment and even fire, resulting in serious consequences; early commissioning, regular maintenance and later modification of the equipment need manual operation, good maintenance space layout not only increases the convenience of maintenance, reduces the probability of personnel injury, but also improves the work efficiency of furnace body cabinet operation and improves the overall sense of equipment; as the supporting equipment of reaction chamber, there are many types of electrical wiring, reasonable wiring layout not only facilitates wiring and later maintenance inspection, but also reduces the use of wiring and saves cost; the heat preservation performance of furnace body cabinet has great influence on the heating and cooling of reaction chamber, directly affects the process effect, good heat preservation performance can ensure the stability of process, and also reduces the change frequency of furnace heating current and unnecessary heating energy consumption.

[0005] At present, the furnace body cabinet structure does not reserve maintenance channel, installation and maintenance are not convenient, and wiring layout does not achieve wiring separation, which is not conducive to electrical maintenance and inspection and affects work efficiency; in addition, the electrical board in traditional design is in source cabinet instead of furnace body cabinet, interconnection pipeline is long and complex, which is not only inconvenient to install, but also causes additional cost increase, and the scientificity and rationality of the whole design are lacking. Utility Model Content

[0006] The technical problem to be solved by this utility model is to overcome the shortcomings of the prior art and provide a PECVD furnace cabinet that has reserved a maintenance channel, shortened the length of the connecting pipe of the gas circuit board assembly, and facilitates maintenance.

[0007] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0008] A PECVD furnace cabinet includes a furnace cabinet frame, a furnace body assembly mounted on the furnace cabinet frame, a maintenance channel, a gas circuit board assembly, and an electrical control assembly. The furnace body assembly is located on one side of the maintenance channel, and the gas circuit board assembly and the electrical control assembly are located on the other side of the maintenance channel. A furnace door assembly is provided at the furnace opening of the furnace body assembly, and an exhaust gas chamber is provided on the outside of the furnace door assembly. The maintenance channel extends to the furnace door assembly.

[0009] As a further improvement to the above technical solution:

[0010] The maintenance channel is a hollow channel.

[0011] The maintenance channel includes a lower maintenance channel and an upper maintenance channel. The lower maintenance channel is equipped with a foot pedal, and the upper maintenance channel is equipped with a handle.

[0012] Both the lower and upper maintenance channels are provided with a first horizontal cable tray, and the middle of the first horizontal cable trays of the two layers are connected by a first vertical cable tray.

[0013] The furnace cabinet frame is equipped with a heat insulation plate assembly, which is located between the maintenance channel and the furnace body assembly. The side of the heat insulation plate assembly closest to the maintenance channel is provided with heat insulation cotton. The first horizontal wiring groove and the first vertical wiring groove are both located on the side of the heat insulation plate assembly closest to the maintenance channel.

[0014] The maintenance channel is a T-shaped maintenance channel, with the long side of the T-shaped maintenance channel extending to the furnace door assembly. The gas circuit board assembly is located between the short side of the T-shaped maintenance channel and the exhaust gas chamber, and the electrical control assembly is located on the other side of the short side of the T-shaped maintenance channel.

[0015] The electrical control assembly includes a main power regulator and an auxiliary thermal regulator located above the main power regulator. Both the main power regulator and the auxiliary thermal regulator have a second horizontal wiring groove on the top of their front sides, and both the main power regulator and the auxiliary thermal regulator have a third horizontal wiring groove on their back sides. Both ends of the main power regulator and the auxiliary thermal regulator have a second vertical wiring groove and a third vertical wiring groove, respectively.

[0016] The gas flow board assembly includes an isolation chamber and a gas flow board located within the isolation chamber. The gas flow board is connected to the air inlet of the furnace body assembly via interconnecting pipes.

[0017] The inner wall of the isolation cavity is provided with heat insulation cotton, and the isolation cavity is provided with a movable door on the side of the long side close to the T-shaped maintenance channel.

[0018] The furnace body cabinet framework is provided with a heat exhaust port above the furnace body assembly, and the heat exhaust port is provided with a movable baffle for controlling the opening degree of the heat exhaust port.

[0019] Compared with the prior art, the PECVD furnace body cabinet has the advantages that:

[0020] The PECVD furnace body cabinet has the advantages that: the maintenance channel is arranged in the furnace body cabinet framework, the furnace body assembly, the furnace door assembly, the gas path plate assembly and the electrical control assembly are distributed on the side of the maintenance channel, the maintenance channel is convenient for the installation and maintenance of the components by the staff, the gas path plate assembly is arranged in the furnace body cabinet, compared with the prior art, the length of the connecting pipeline is shortened, the number of the adapter interfaces is reduced, the installation and maintenance are facilitated, the cost is reduced, and the uniformity of the gas delivery is improved due to the shortened gas delivery distance. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 is a structural schematic view of the PECVD furnace body cabinet.

[0022] Figure 2 is a structural schematic view of the T-shaped maintenance channel.

[0023] Figure 3 is a structural schematic view of the first horizontal wiring groove and the first vertical wiring groove.

[0024] Figure 4 is a structural schematic view of the wiring structure on the front of the electrical control assembly.

[0025] Figure 5 is a structural schematic view of the wiring structure on the back of the electrical control assembly.

[0026] Figure 6 is a structural schematic view of the gas path plate assembly connected with the furnace body assembly.

[0027] Figure 7 is a structural schematic view of the isolation cavity.

[0028] Figure 8 is a structural schematic view of the movable door.

[0029] Figure 9 is a structural schematic view of the heat exhaust port and the movable baffle.

[0030] The numbers in the figure represent: 1, furnace body cabinet skeleton; 12, hot exhaust port; 13, movable baffle; 2, furnace body assembly; 3, T-shaped maintenance channel; 31, lower maintenance channel; 311, foot pedal; 32, upper maintenance channel; 321, handle; 33, first transverse wiring groove; 34, first vertical wiring groove; 4, gas path plate assembly; 41, isolation cavity; 42, gas path plate; 43, interconnection pipeline; 44, heat insulation cotton; 45, movable door; 5, electrical control assembly; 51, main power regulator; 52, auxiliary heating power regulator; 53, second transverse wiring groove; 54, third transverse wiring groove; 55, second vertical wiring groove; 56, third vertical wiring groove; 6, furnace door assembly; 7, waste gas chamber; 8, heat insulation plate assembly. DETAILED DESCRIPTION

[0031] The utility model will be described in further detail below in combination with the drawings and specific embodiments.

[0032] In the description of the utility model, it is understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the utility model.

[0033] In addition, the terms "first" and "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" can explicitly or implicitly include one or more of the features. In the description of the utility model, the meaning of "multiple" is two or more, unless otherwise specifically limited.

[0034] In the utility model, unless otherwise specifically defined and limited, the terms "assembly", "connection", "connection", "fixing" and the like should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication or interaction relationship between two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0035] Figures 1 to 9An embodiment of the PECVD furnace cabinet is shown, the PECVD furnace cabinet of the embodiment comprises a furnace cabinet framework 1, a furnace body assembly 2 arranged on the furnace cabinet framework 1, a maintenance channel 3, a gas circuit board assembly 4 and an electrical control assembly 5, the furnace body assembly 2 is located on one side of the maintenance channel 3, the gas circuit board assembly 4 and the electrical control assembly 5 are located on the other side of the maintenance channel 3, a furnace door assembly 6 is arranged at the furnace mouth of the furnace body assembly 2, a waste gas chamber 7 is arranged outside the furnace door assembly 6, and the maintenance channel 3 extends to the furnace door assembly 6.

[0036] The PECVD furnace cabinet, the maintenance channel 3 is arranged in the furnace cabinet framework 1, the furnace body assembly 2, the furnace door assembly 6, the gas circuit board assembly 4 and the electrical control assembly 5 are distributed on the circumferential side of the maintenance channel 3, the staff can install and maintain each assembly through the maintenance channel 3, the gas circuit board assembly 4 is arranged in the furnace cabinet, compared with arranging the gas circuit board assembly 4 in the source cabinet, the length of the connecting pipeline can be shortened, the number of the adapter interfaces can be reduced, the installation and maintenance are facilitated, the cost is reduced, and the uniformity of the gas delivery can be improved due to the shortened gas delivery distance.

[0037] Further, as shown in the drawings, Figure 1 In the embodiment, the maintenance channel 3 is a hollow channel. Air convection is facilitated, and the electrical elements can be cooled.

[0038] Further, as shown in the drawings, Figure 2 In the embodiment, the maintenance channel 3 comprises a lower maintenance channel 31 and an upper maintenance channel 32, the lower maintenance channel 31 is provided with a footboard 311, and the upper maintenance channel 32 is provided with a handle 321. The top and bottom of each assembly can be maintained, and the staff in the lower maintenance channel 31 can enter the upper maintenance channel 32 through the footboard 311 and the handle 321, without the need for an additional ladder for repair work. Preferably, the footboard 311 is a folding footboard, and the handle 321 is a folding handle. When not in use, folding reduces space occupation.

[0039] Further, as shown in the drawings, Figure 3 In the embodiment, the lower maintenance channel 31 and the upper maintenance channel 32 are both provided with a first horizontal wiring groove 33, and the middle portions of the two first horizontal wiring grooves 33 are communicated with a first vertical wiring groove 34. The lower maintenance channel 31 and the upper maintenance channel 32 are both provided with the first horizontal wiring groove 33, the large wires of the upper and lower layers are separated and wired, and the electrical maintenance and inspection are facilitated.

[0040] Further, as shown in the drawings, Figure 1As shown, in the embodiment, the furnace body cabinet framework 1 is provided with a heat insulation plate assembly 8, which is located between the maintenance channel 3 and the furnace body assembly 2, and is provided with heat insulation cotton on the side close to the maintenance channel 3. The first horizontal wiring groove 33 and the first vertical wiring groove 34 are both located on the side of the heat insulation plate assembly 8 close to the maintenance channel 3. The heat loss of the furnace body assembly 2 is reduced, the maintenance channel 3 is prevented from overheating, and the electrical cable is protected. Preferably, the heat insulation plate assembly 8 can be selected as a movable door type, which is convenient to open and close.

[0041] Further, as shown in Figure 1 , in the embodiment, the maintenance channel 3 is a T-shaped maintenance channel, and the long side of the T-shaped maintenance channel extends to the furnace door assembly 6. The gas path plate assembly 4 is located between the short side of the T-shaped maintenance channel and the exhaust chamber 7, and the electrical control assembly 5 is located on the other side of the short side of the T-shaped maintenance channel. The structure is compact, and the maintenance is convenient.

[0042] Further, as shown in Figure 4 and Figure 5 , in the embodiment, the electrical control assembly 5 includes a main power regulator 51 and an auxiliary heat regulator 52 located above the main power regulator 51. The front of the main power regulator 51 and the auxiliary heat regulator 52 is provided with a second horizontal wiring groove 53, and the back of the main power regulator 51 and the auxiliary heat regulator 52 is provided with a third horizontal wiring groove 54. The two ends are respectively provided with a second vertical wiring groove 55 and a third vertical wiring groove 56. The electrical cable on the front of the main power regulator 51 and the auxiliary heat regulator 52 is routed from the corresponding second horizontal wiring groove 53, and the electrical cable on the back is routed from the corresponding third horizontal wiring groove 54. The separation of the wire harness facilitates maintenance.

[0043] Further, as shown in Figure 6 , in the embodiment, the gas path plate assembly 4 includes an isolation cavity 41 and a gas path plate 42 located in the isolation cavity 41. The gas path plate 42 is connected with the gas inlet of the furnace body assembly 2 through an interconnection pipeline 43. Preferably, the isolation cavity 41 is provided with a gas leakage detection device. When gas leakage occurs, the gas is extracted from the periphery, improving the safety performance.

[0044] Further, as shown in Figure 7 and Figure 8 , in the embodiment, the inner wall of the isolation cavity 41 is provided with heat insulation cotton 44, and the isolation cavity 41 is provided with a movable door 45 on the side close to the long side of the T-shaped maintenance channel 3. The heat insulation cotton 44 can reduce the heat dissipation of the furnace body assembly 2 and affect the service life of the gas path plate 42. The movable door 45 is provided for the staff to maintain the gas path plate 42 from the T-shaped maintenance channel 3.

[0045] Further, as shown in Figure 9As shown, in the embodiment, the furnace body cabinet framework 1 is provided with a heat exhaust port 12 above the furnace body assembly 2, the heat exhaust port 12 is provided with a movable baffle 13, and the movable baffle 13 is used for controlling the opening degree of the heat exhaust port 12.

[0046] Although the present application has been disclosed with the preferred embodiments, it is not intended to limit the present application. Any person skilled in the art, without departing from the technical scheme of the present application, can make many possible changes and modifications to the technical scheme of the present application by using the disclosed technical contents, or modify equivalent embodiments with equivalent changes. Therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present application shall fall within the scope of protection of the technical scheme of the present application.

Claims

1. A PECVD furnace cabinet, characterized in that: The utility model provides a kind of furnace cabinet frame (1), be located on furnace cabinet frame (1) on furnace body assembly (2), maintenance channel (3), gas path plate assembly (4) and electrical control assembly (5) are equipped, the furnace body assembly (2) is located in maintenance channel (3) one side, the gas path plate assembly (4) and electrical control assembly (5) are located in maintenance channel (3) other side, the furnace door assembly (6) is equipped in the furnace mouth of furnace body assembly (2), the waste gas chamber (7) is equipped outside the furnace door assembly (6), the maintenance channel (3) extends to furnace door assembly (6).

2. The PECVD furnace cabinet of claim 1, wherein: The maintenance channel (3) is a hollow channel.

3. The PECVD furnace cabinet of claim 1, wherein: The maintenance channel (3) includes a lower maintenance channel (31) and an upper maintenance channel (32), the lower maintenance channel (31) is provided with a foot pedal (311), and the upper maintenance channel (32) is provided with a handle (321).

4. The PECVD furnace cabinet of claim 3, wherein: The lower maintenance channel (31) and the upper maintenance channel (32) are both provided with a first horizontal wiring groove (33), and the first horizontal wiring grooves (33) of the two layers are communicated with a first vertical wiring groove (34) in the middle.

5. The PECVD furnace cabinet of claim 4, wherein: The furnace cabinet frame (1) is provided with a heat insulation plate assembly (8) between the maintenance channel (3) and the furnace body assembly (2), and the heat insulation plate assembly (8) is provided with heat insulation cotton on the side close to the maintenance channel (3), and the first horizontal wiring groove (33) and the first vertical wiring groove (34) are both located on the side of the heat insulation plate assembly (8) close to the maintenance channel (3).

6. The PECVD furnace cabinet of claim 1, wherein: The maintenance channel (3) is a T-shaped maintenance channel, the long side of the T-shaped maintenance channel extends to the furnace door assembly (6), the gas path plate assembly (4) is located between the short side of the T-shaped maintenance channel and the waste gas chamber (7), and the electrical control assembly (5) is located on the other side of the short side of the T-shaped maintenance channel.

7. The PECVD furnace cabinet according to any one of claims 1 to 6, characterized in that: The electrical control assembly (5) includes a main power regulator (51) and an auxiliary heat regulator (52) located above the main power regulator (51), the front of the main power regulator (51) and the auxiliary heat regulator (52) is provided with a second horizontal wiring groove (53), the back of the main power regulator (51) and the auxiliary heat regulator (52) is provided with a third horizontal wiring groove (54), and the two ends are respectively provided with a second vertical wiring groove (55) and a third vertical wiring groove (56).

8. The PECVD furnace cabinet according to any one of claims 1 to 6, characterized in that: The gas path plate assembly (4) includes an isolation cavity (41) and a gas path plate (42) located in the isolation cavity (41), and the gas path plate (42) is connected with the gas inlet of the furnace body assembly (2) through an interconnection pipeline (43).

9. The PECVD furnace cabinet of claim 8, wherein: The inner wall of the isolation cavity (41) is provided with heat insulation cotton (44), and the isolation cavity (41) is provided with a movable door (45) on the side close to the long side of the T-shaped maintenance channel (3).

10. The PECVD furnace cabinet according to any one of claims 1 to 6, characterized in that: The furnace cabinet frame (1) is provided with a heat exhaust port (12) above the furnace body assembly (2), the heat exhaust port (12) is provided with a movable baffle (13), and the movable baffle (13) is used for controlling the opening degree of the heat exhaust port (12).

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