Silicon carbide product measuring device

By designing a silicon carbide product measurement device, the planar measurement of the silicon carbide boat support is completed using automated linear motion, solving the problem of low measurement efficiency of silicon carbide boat support and realizing efficient automated measurement.

CN223710532UActive Publication Date: 2025-12-23CHENGDU VOLKEN SEMICON MATERIAL CO LTD
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Patent Information

Application Number
CN202520223947.2
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-02-12
Publication Date
2025-12-23
Estimated Expiration
2035-02-12

AI Technical Summary

Technical Problem

The measurement efficiency of silicon carbide boat supports is low, the amount of manual labor is large, and it is difficult to complete the flatness measurement efficiently.

Method used

Design a silicon carbide product measuring device, including a platform, a moving part, a digital dial indicator, a connecting rod, a support spring, and a drive assembly, to achieve planar measurement of the silicon carbide boat support through automated linear motion, reducing repetitive manual labor.

Benefits of technology

This improved the measurement efficiency of silicon carbide boat support, reduced repetitive work for staff, and increased the automation level of measurement.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to the technical field of silicon carbide product production equipment, and particularly discloses a silicon carbide product measuring device, which comprises an object placing table for placing a silicon carbide boat support; the moving part is movably arranged on the object placing table and located above the silicon carbide boat support; the digital display dial indicator is vertically arranged on the moving part; the abutting rod is arranged on the moving component in a sliding mode in the vertical direction; one end is used for abutting against the probe of the digital display dial indicator, and the other end abuts against the silicon carbide boat support in a rolling manner; the supporting spring is used for elastically supporting the abutting rod and providing the trend of moving close to the silicon carbide boat support for the abutting rod; the driving assembly is used for driving the moving part to do reciprocating motion along a straight line; according to the utility model, the point-taking measurement operation of the silicon carbide boat support can be automatically completed along a straight line, the repeated labor amount of workers is reduced, and the measurement efficiency of the silicon carbide boat support can be effectively improved.
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Description

Technical Field

[0001] This utility model relates to the technical field of silicon carbide product manufacturing equipment, and in particular to a silicon carbide product measuring device. Background Technology

[0002] Boat supports are critical load-bearing components in the diffusion process equipment of the photovoltaic industry. Common boat support materials used in the photovoltaic industry include quartz and silicon carbide. Traditional quartz boat supports have a relatively short lifespan, approximately 3-6 months, while silicon carbide boat supports can replace quartz boat supports, offering a much longer lifespan of over 5 years. Using silicon carbide boat supports can significantly reduce operating costs, minimize downtime due to maintenance and repairs, and reduce production capacity losses.

[0003] After the silicon carbide boat support is manufactured, it needs to be placed flat on the workbench, and the staff will use a dial indicator to measure the flatness of different planes of the silicon carbide boat support.

[0004] However, during the entire measurement process, staff need to take multiple measurements on the same plane of the silicon carbide boat support, which involves a large amount of manual labor and results in low measurement efficiency for the entire silicon carbide boat support. Utility Model Content

[0005] In view of the above problems, this utility model provides a silicon carbide product measuring device, the purpose of which is to improve the measurement efficiency of silicon carbide boat support.

[0006] To achieve the above-mentioned objectives, the technical solution adopted by this utility model is as follows:

[0007] A silicon carbide product measuring device is provided, comprising: a platform for placing a silicon carbide boat support; a movable component movably disposed on the platform above the silicon carbide boat support; a digital dial indicator vertically disposed on the movable component; a contact rod slidably disposed on the movable component in a vertical direction; one end of the rod abutting the probe of the digital dial indicator, and the other end rotatably abutting the silicon carbide boat support; a support spring for elastically supporting the contact rod and providing a tendency for the contact rod to move closer to the silicon carbide boat support; and a drive assembly for driving the movable component to reciprocate along a straight line.

[0008] Furthermore, the device also includes: a first mounting block, fixedly mounted on the moving part, with a digital dial indicator mounted on the first mounting block via a threaded connection; a second mounting block, fixedly mounted on the moving part, with a contact rod slidably mounted within the second mounting block; a third mounting block, fixedly mounted on the contact rod; a support rod, slidably mounted within the second mounting block, with one end of the support rod fixedly connected to the third mounting block, and a support spring disposed between the second and third mounting blocks.

[0009] Furthermore, the device also includes a limiting nut, which is threadedly installed on the end of the support rod away from the third mounting block.

[0010] Furthermore, the device also includes: a roller rotatably mounted on the abutment rod via a mounting shaft for rolling contact with the silicon carbide boat support.

[0011] Furthermore, the drive assembly includes: a mounting platform, disposed on the shelf and above the silicon carbide boat support; a lead screw, rotatably disposed on the mounting platform and connected to the moving part via a threaded drive; a guide rod, parallel to the lead screw and fixedly disposed on the mounting platform, with the moving part slidably disposed on the guide rod; and a drive motor, the output shaft of which is connected to the lead screw.

[0012] Furthermore, the device also includes: a vertically mounted hydraulic cylinder, the main body of which is fixedly mounted on the platform, and the piston rod of which is connected to the mounting platform.

[0013] Furthermore, the device also includes several top blocks, which are detachably mounted on the platform by screws and are located around the silicon carbide boat support.

[0014] The beneficial effects of this utility model are as follows: by using this utility model, the measurement of points on the same side of the silicon carbide boat support can be automatically completed along a straight line on the plane to be tested, reducing the repetitive workload of the staff and effectively improving the measurement efficiency of the silicon carbide boat support. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall installation of the measuring device provided in the embodiments of this application.

[0016] Figure 2 for Figure 1 Enlarged diagram of point A.

[0017] The components include: 1. Display platform; 2. Moving parts; 3. Digital dial indicator; 4. Abutment rod; 5. Support spring; 61. First mounting block; 62. Second mounting block; 63. Third mounting block; 64. Support rod; 65. Limit nut; 7. Roller; 81. Mounting platform; 82. Lead screw; 83. Guide rod; 84. Drive motor; 85. Hydraulic cylinder; 9. Top block. Detailed Implementation

[0018] To better understand the above technical solutions, the following will provide a detailed explanation of the technical solutions in conjunction with the accompanying drawings and specific implementation methods.

[0019] Reference Figure 1 and Figure 2As shown in the embodiment of this application, a silicon carbide product measuring device is disclosed, comprising: a platform 1 for placing a silicon carbide boat support; a movable component 2 movably disposed on the platform 1 above the silicon carbide boat support; a digital micrometer 3 vertically disposed on the movable component 2; a contact rod 4 slidably disposed on the movable component 2 along the vertical direction; one end of the rod is used to contact the probe of the digital micrometer 3, and the other end is rotatably contacting the silicon carbide boat support; a support spring 5 for elastically supporting the contact rod 4 and providing a tendency for the contact rod 4 to move closer to the silicon carbide boat support; and a drive assembly for driving the movable component 2 to reciprocate along a straight line.

[0020] In practical use, the silicon carbide boat to be measured is placed flat on the platform 1. One of the planes of the silicon carbide boat to be tested is placed under the moving part 2. Then, one end of the abutment rod 4 is placed against the silicon carbide boat. The probe of the digital micrometer 3 is in a compressed state. The value displayed by the digital micrometer 3 at this time is recorded as the reference scale. Finally, the drive component is started, which drives the moving part 2 to move in a straight line. During the movement of the moving part 2, the drive component stops intermittently several times, and the value displayed by the digital micrometer 3 when the drive component stops is recorded.

[0021] It is worth mentioning that multiple measurements should be taken along different straight lines within one plane of the silicon carbide boat support; similarly, measurements can be taken on other planes of the silicon carbide boat support to obtain information on its flatness.

[0022] By using this invention, the measurement of silicon carbide boat supports can be automatically completed along a straight line on the plane to be tested, reducing the repetitive workload of staff and effectively improving the measurement efficiency of silicon carbide boat supports.

[0023] Specifically, the device further includes: a first mounting block 61, fixedly mounted on the moving part 2, with a digital micrometer 3 mounted on the first mounting block 61 via a threaded connection; a second mounting block 62, fixedly mounted on the moving part 2, with a contact rod 4 slidably mounted inside the second mounting block 62; a third mounting block 63, fixedly mounted on the contact rod 4; a support rod 64, slidably mounted inside the second mounting block 62, with one end of the support rod 64 fixedly connected to the third mounting block 63, and a support spring 5 disposed between the second mounting block 62 and the third mounting block 63.

[0024] In this embodiment, two support rods 64 are provided, and two support springs 5 ​​are respectively sleeved on the two support rods 64. The two support rods 64 are symmetrically located on both sides of the abutment rod 4, which improves the stability of the movement of the support rods 64.

[0025] Specifically, the device also includes a limiting nut 65, which is threadedly installed on the end of the support rod 64 away from the third mounting block 63, to limit the stroke of the support rod 64 and prevent the support rod 64 from popping out.

[0026] Specifically, the device also includes: a roller 7, which is rotatably mounted on the abutment rod 4 via a mounting shaft, for rolling contact with the silicon carbide boat support; to prevent scratching the silicon carbide boat support and to ensure the surface quality of the silicon carbide boat support.

[0027] Specifically, the drive assembly includes: a mounting platform 81, disposed on the platform 1 and above the silicon carbide boat support; a lead screw 82, rotatably disposed on the mounting platform 81 and connected to the moving part 2 via a threaded drive; a guide rod 83, parallel to the lead screw 82, fixedly disposed on the mounting platform 81, and the moving part 2 is slidably disposed on the guide rod 83; and a drive motor 84, the output shaft of which is connected to the lead screw 82.

[0028] In this embodiment, the drive motor 84 is a servo motor. By changing the rotation direction of the servo motor, the movement direction of the moving part 2 can be changed. By controlling the start and stop of the servo motor, the start and stop of the moving part 2 can be realized, which makes it convenient for the staff to read and record the values ​​of the digital micrometer 3.

[0029] In this embodiment, the device further includes: a vertically installed hydraulic cylinder 85, the main body of the hydraulic rod is fixedly set on the platform 1, and the piston rod of the hydraulic cylinder 85 is connected to the mounting platform 81; by setting the hydraulic cylinder 85, the relative distance between the abutment rod 4 and the silicon carbide boat support in the vertical direction can be changed, ensuring that the support spring 5 is in a compressed state during the measurement operation, so as to meet the measurement requirements of silicon carbide boat supports of different specifications.

[0030] Specifically, the device also includes: several top blocks 9, which are detachably installed on the stage 1 by screws and are located around the silicon carbide boat support; the top blocks 9 are used to lock the silicon carbide boat support to be measured, preventing the silicon carbide boat support from moving on the stage 1 and improving the stability of the measurement.

[0031] Those skilled in the art will understand that although preferred embodiments of the present invention have been described, those skilled in the art, once they learn the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of the present invention. Clearly, those skilled in the art can make various alterations and modifications to the present invention without departing from its spirit and scope. Thus, if these modifications and modifications of the present invention fall within the scope of the machine equivalents of the claims of the present invention, the present invention also intends to include these modifications and modifications.

Claims

1. A silicon carbide product measuring device, characterized in that, include: A shelf (1) for placing silicon carbide boats; The movable component (2) is movably mounted on the platform (1) and positioned above the silicon carbide boat support; A digital dial indicator (3) is vertically mounted on the moving part (2); The abutment rod (4) is slidably mounted on the moving part (2) in the vertical direction; one end is used to abut the probe of the digital micrometer (3), and the other end can roll to abut the silicon carbide boat support; A support spring (5) is used to elastically support the abutment rod (4) and to provide the abutment rod (4) with a tendency to move closer to the silicon carbide boat support; A drive component is used to drive the moving part (2) to reciprocate along a straight line.

2. The silicon carbide product measuring device according to claim 1, characterized in that, Also includes: The first mounting block (61) is fixedly mounted on the moving part (2), and the digital micrometer (3) is mounted on the first mounting block (61) by threaded connection; The second mounting block (62) is fixedly mounted on the moving part (2), and the abutment rod (4) is slidably mounted inside the second mounting block (62); The third mounting block (63) is fixedly mounted on the abutment rod (4); A support rod (64) is slidably disposed within the second mounting block (62), one end of which is fixedly connected to the third mounting block (63), and a support spring (5) is disposed between the second mounting block (62) and the third mounting block (63).

3. The silicon carbide product measuring device according to claim 2, characterized in that, Also includes: The limiting nut (65) is installed on the end of the support rod (64) away from the third mounting block (63) by a threaded connection.

4. The silicon carbide product measuring device according to claim 1, characterized in that, Also includes: Rollers (7) are rotatably mounted on the abutment rod (4) via a mounting shaft for rolling contact with the silicon carbide boat support.

5. The silicon carbide product measuring device according to claim 1, characterized in that, The driver components include: The mounting platform (81) is set on the shelf (1) and is located above the silicon carbide boat support; A lead screw (82) is rotatably mounted on a mounting platform (81) and is connected to a moving part (2) via a threaded drive. The guide rod (83) is parallel to the lead screw (82) and is fixedly mounted on the mounting platform (81). The movable part (2) is slidably mounted on the guide rod (83). Drive motor (84), the output shaft of drive motor (84) is connected to lead screw (82).

6. The silicon carbide product measuring device according to claim 5, characterized in that, Also includes: A vertically installed hydraulic cylinder (85) has its main body fixedly mounted on a platform (1), and the piston rod of the hydraulic cylinder (85) is connected to the mounting platform (81).

7. The silicon carbide product measuring device according to claim 1, characterized in that, Also includes: Several top blocks (9) are detachably mounted on the platform (1) by screws, and are located around the silicon carbide boat support.