Tool for three-coordinate detection

Abstract

The utility model belongs to the technical field of work fixtures, and discloses a three-coordinate detection tool, which comprises a base extending along a horizontal first direction; the mounting plates are arranged on the base in a sliding mode in the first direction, and the mounting plates can be fixed to a plurality of point positions on the sliding path of the mounting plates; each mounting plate is provided with the corresponding clamping assembly, the clamping assemblies can be fixed to multiple height positions on the mounting plates, each clamping assembly comprises a supporting block and a quick clamp, and the quick clamps are used for clamping a to-be-detected part to the supporting blocks. According to the tool for three-coordinate detection, the clamping point position can be flexibly adjusted according to the length size and the height size of the to-be-detected part, so that the to-be-detected parts with different sizes can be rapidly and effectively clamped, multiple types of clamps do not need to be arranged, and the tool cost is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to tool fixture technical field especially uses tool for three coordinates detection. BACKGROUND

[0002] In the semiconductor industry, the related parts need to be detected in height, thickness, parallelism and hole diameter, and the main detection object is the sheet part, which includes large and small sheet size, and the traditional fixture cannot quickly and effectively adjust and clamp different size sheets, and usually needs to be equipped with multiple fixtures.

[0003] Therefore, the tool for three coordinate detection is needed to solve the above technical problems. UTILITY MODEL CONTENT

[0004] The utility model discloses a tool for three coordinates detection, can flexibly adjust the clamping point according to the length size and height size of the part to be measured, thereby quickly and effectively clamping different size parts to be measured, and multiple fixtures are not needed, and the tool cost is reduced.

[0005] In order to achieve this purpose, the utility model adopts the following technical scheme:

[0006] A tool for three coordinates detection is provided, comprising:

[0007] A base is provided along a horizontal first direction;

[0008] A plurality of mounting plates are provided along the first direction and are slidably arranged on the base, and the mounting plates can be fixed on a plurality of point positions on the sliding path;

[0009] A clamping assembly is provided on each mounting plate, and the clamping assembly can be fixed on a plurality of height positions on the mounting plate, and the clamping assembly comprises a support block and a quick clamp, and the quick clamp is used to clamp the part to be measured on the support block.

[0010] As a preferred technical scheme, a horizontal sliding groove is provided on the base, the horizontal sliding groove is provided along the first direction, and the lower end of the mounting plate is inserted into the horizontal sliding groove.

[0011] As a preferred technical scheme, a plurality of first fastening screw holes are provided on one side wall of the horizontal sliding groove, the first fastening screw holes are arranged along the first direction, the tool for three coordinates detection further comprises a first compression screw, the first compression screw is threadedly connected to the first fastening screw hole, and the mounting plate is pressed against the other side wall of the horizontal sliding groove.

[0012] As a preferred technical scheme, the mounting plate is provided with a vertical sliding groove, the vertical sliding groove is arranged along the vertical direction, and one side of the supporting block is inserted into the vertical sliding groove.

[0013] As a preferred technical scheme, the first side wall of the vertical sliding groove is provided with a plurality of second fastening screw holes, the plurality of second fastening screw holes are arranged along the vertical direction, the three-coordinate detection tool further comprises a second compression screw, the second compression screw is threadedly connected to the second fastening screw hole, and the supporting block is pressed against the second side wall of the vertical sliding groove.

[0014] As a preferred technical scheme, the second side wall of the vertical sliding groove is further provided with a plurality of third fastening screw holes, the plurality of third fastening screw holes are arranged along the vertical direction, the three-coordinate detection tool further comprises a third compression screw, the third compression screw is threadedly connected to the third fastening screw hole, and the supporting block is pressed against the first side wall of the vertical sliding groove.

[0015] As a preferred technical scheme, the mounting plate is further provided with a plurality of fourth fastening screw holes, the plurality of fourth fastening screw holes are arranged side by side with the plurality of second fastening screw holes, the three-coordinate detection tool further comprises a fourth compression screw, the fourth compression screw is threadedly connected to the fourth fastening screw hole, the quick clamp is provided with a plurality of mounting through holes, the second compression screw and the fourth compression screw are both arranged in the mounting through hole, and the quick clamp is compressed on the mounting plate.

[0016] As a preferred technical scheme, the quick clamp comprises a lock column with adjustable extension length, the front end of the lock column is provided with an elastic rubber head, and the elastic rubber head is used for extruding the measured part.

[0017] As a preferred technical scheme, the base is provided with a plurality of countersunk connection holes, and the base can be fastened to the workbench surface through fastening screws arranged in the countersunk connection holes.

[0018] As a preferred technical scheme, the three-coordinate detection tool comprises two mounting plates; and / or

[0019] Each mounting plate is provided with at least two clamping assemblies distributed along the vertical direction.

[0020] The utility model discloses the beneficial effects of:

[0021] The jig for three-coordinate detection provided by the utility model comprises a plurality of mounting plates sliding along a horizontal first direction on a base, and the mounting plates are provided with clamping assemblies. On the one hand, the mounting plates can be fixed on a plurality of point positions on the sliding path, and therefore the horizontal positions of the clamping assemblies can also be moved, so that the horizontal point positions of clamping are adjusted according to the width size of the parts to be detected; on the other hand, the clamping assemblies can be fixed on a plurality of height positions on the mounting plates, so that the height point positions of clamping are adjusted according to the height size of the parts to be detected. In conclusion, the jig for three-coordinate detection provided by the utility model can flexibly adjust the clamping point positions according to the length size and the height size of the parts to be detected, so that different sizes of the parts to be detected can be quickly and effectively clamped, and a plurality of clamps do not need to be equipped, so that the jig cost is reduced. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 is a structure diagram of the jig for three-coordinate detection provided by the utility model Figure One ;

[0023] Figure 2 is a structure diagram of the jig for three-coordinate detection provided by the utility model Figure Two .

[0024] In the drawings:

[0025] 10, base; 11, horizontal sliding groove; 12, first fastening screw hole; 13, counter-sunk connecting hole;

[0026] 20, mounting plate; 21, vertical sliding groove; 22, second fastening screw hole; 23, third fastening screw hole; 24, fourth fastening screw hole;

[0027] 30, support block;

[0028] 40, quick clamp; 41, lock column; 42, elastic rubber head;

[0029] 51, first pressing screw; 52, second pressing screw; 53, third pressing screw; 54, fourth pressing screw. DETAILED DESCRIPTION

[0030] The utility model will be further described in detail in combination with the drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the utility model and are not limited to the utility model. In addition, it should be noted that, in order to facilitate the description, only the parts related to the utility model are shown in the drawings but not all structures.

[0031] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0032] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0033] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0034] like Figure 1 and Figure 2 As shown, this embodiment provides a coordinate measuring machine (CMM) fixture for clamping a part to be measured, so as to perform dimensional inspections on the part, such as height, thickness, parallelism, and hole diameter. The fixture provided in this embodiment is particularly suitable for clamping thin plate-like parts. The CMM fixture includes a base 10, a plurality of mounting plates 20, and a clamping assembly. The base 10 extends along a first horizontal direction. The plurality of mounting plates 20 are mounted on the base 10. Each mounting plate 20 is equipped with a clamping assembly, which includes a support block 30 and a quick clamp 40. The quick clamp 40 is used to clamp the part to be measured onto the support block 30.

[0035] Furthermore, such as Figure 1 and Figure 2 As shown, several mounting plates 20 are slidably disposed on the base 10 along the first direction, and the mounting plates 20 can be fixed at multiple points on their sliding path, and the clamping components can be fixed at multiple height positions on the mounting plates 20.

[0036] Specifically, the three-coordinate detection tool provided in the embodiment includes a plurality of mounting plates 20 sliding along a horizontal first direction on a base 10, and the mounting plates 20 are provided with clamping assemblies. On the one hand, the mounting plates 20 can be fixed at a plurality of point positions on the sliding path, so that the horizontal positions of the clamping assemblies can also be moved, thereby adjusting the horizontal point positions of clamping according to the width size of the measured part; on the other hand, the clamping assemblies can be fixed at a plurality of height positions on the mounting plates 20, thereby adjusting the height point positions of clamping according to the height size of the measured part. In summary, the three-coordinate detection tool provided in the embodiment can flexibly adjust the clamping point positions according to the length size and height size of the measured part, thereby quickly and effectively clamping measured parts of different sizes without the need to equip multiple fixtures, thereby reducing the cost of the tool.

[0037] For example, at least two clamping assemblies distributed along the vertical direction are installed on each mounting plate 20, and the fixed height of each clamping assembly is adjustable, thereby clamping the measured part at multiple points in the height direction, improving the stability of clamping.

[0038] In the embodiment, the three-coordinate detection tool includes two mounting plates 20, and two clamping assemblies distributed along the vertical direction are installed on each mounting plate 20, and the clamping assemblies on the mounting plates 20 are installed on the side adjacent to the other mounting plate 20. Before measurement, the measured part is placed longitudinally, with the length direction along the horizontal direction and the width direction along the vertical direction, or the setting directions of the length and width are reversed, according to the horizontal span of the measured part, the two mounting plates 20 are adjusted to appropriate interval positions, so that the measured part can be placed between the two mounting plates 20, and then the height positions of the two clamping assemblies are adjusted, so that the two clamping assemblies on the same side can simultaneously clamp the corresponding side of the measured part. During measurement, the clamping assemblies are opened, the quick clamps 40 are released from the support blocks 30, the measured part is inserted between the quick clamps 40 and the support blocks 30 from the top, and then the clamping assemblies are closed again, and each quick clamp 40 clamps the measured part on the support block 30, that is, the fixing of the measured part is completed. When the model of the measured part is changed, the interval between the two mounting plates 20 and the installation height of the clamping assemblies are adjusted accordingly according to the change of the horizontal span and the height of the measured part.

[0039] For example, the base 10 is provided with a horizontal sliding groove 11 extending along the first direction, and the lower end of the mounting plate 20 is inserted into the horizontal sliding groove 11. Specifically, the bottom of the horizontal sliding groove 11 supports the lower end of the mounting plate 20, providing reliable support for the mounting plate 20, and the two side walls of the horizontal sliding groove 11 define the horizontal position of the mounting plate 20, facilitating the operator to directly slide the mounting plate 20 to adjust the position.

[0040] Further, the bottom of the mounting plate 20 is provided with a first limiting protrusion, the first limiting protrusion protrudes to both sides along the horizontal direction perpendicular to the first direction, correspondingly, the bottom of the horizontal sliding groove 11 is provided with a first limiting groove on both sides, the first limiting protrusion is inserted into the first limiting groove, so as to limit the position of the mounting plate 20 in the vertical direction, avoiding the mounting plate 20 directly separating from the horizontal sliding groove 11 upward.

[0041] Illustratively, a plurality of first fastening screw holes 12 are formed in one side wall of the horizontal sliding groove 11, the first fastening screw holes 12 penetrate the side wall of the horizontal sliding groove 11, and the plurality of first fastening screw holes 12 are arranged along the first direction. The tool for three-coordinate detection further comprises a first compression screw 51, which is threadedly connected to the first fastening screw hole 12 and presses the mounting plate 20 against the other side wall of the horizontal sliding groove 11. Specifically, each mounting plate 20 is locked to the base 10 by two first compression screws 51, and the corresponding two first fastening screw holes 12 are spaced apart by another first fastening screw hole 12, that is, the distance between the two first compression screws 51 is the distance between two hole positions, which is less than the width of the mounting plate 20. Therefore, no matter where the mounting plate 20 is located in the horizontal sliding groove 11, it can always be compressed by two or three first compression screws 51, and its fixed position can be adjusted steplessly, with high flexibility.

[0042] Illustratively, the mounting plate 20 is provided with a vertical sliding groove 21, the vertical sliding groove 21 is arranged extending along the vertical direction, and one side of the supporting block 30 is inserted into the vertical sliding groove 21. Specifically, the two side walls of the vertical sliding groove 21 limit the horizontal position of the supporting block 30 perpendicular to the first direction, which facilitates the operator to directly slide the supporting block 30 to adjust its height position.

[0043] Further, one side of the supporting block 30 extending into the vertical sliding groove 21 is provided with a second limiting protrusion, the second limiting protrusion protrudes to both sides along the horizontal direction perpendicular to the first direction, correspondingly, the bottom of the vertical sliding groove 21 is provided with a second limiting groove on both sides, the second limiting protrusion is inserted into the second limiting groove, so as to limit the position of the supporting block 30 along the first direction, avoiding the supporting block 30 directly separating from the vertical sliding groove 21 outward.

[0044] Illustratively, the two side walls of the vertical sliding groove 21 are respectively named as a first side wall and a second side wall, a plurality of second fastening screw holes 22 are formed in the first side wall of the vertical sliding groove 21, the second fastening screw holes 22 penetrate the first side wall, and the plurality of second fastening screw holes 22 are arranged along the vertical direction. The tool for three-coordinate detection further comprises a second compression screw 52, which is threadedly connected to the second fastening screw hole 22 and presses the supporting block 30 against the second side wall of the vertical sliding groove 21. Specifically, each supporting block 30 is locked to the mounting plate 20 by two second compression screws 52, and the corresponding two second fastening screw holes 22 are arranged adjacent to each other.

[0045] Exemplarily, the second side wall of the vertical sliding groove 21 is further provided with a plurality of third fastening threaded holes 23 penetrating through the second side wall, the plurality of third fastening threaded holes 23 are arranged along the vertical direction, and the plurality of third fastening threaded holes 23 are arranged opposite to the plurality of second fastening threaded holes 22 one by one. The three-coordinate detection tool further comprises third pressing screws 53, the third pressing screws 53 are threadedly connected to the third fastening threaded holes 23 and press the support blocks 30 against the first side wall of the vertical sliding groove 21. Specifically, each support block 30 is locked to the mounting plate 20 by two third pressing screws 53, and the corresponding two third fastening threaded holes 23 are arranged adjacent to each other.

[0046] Exemplarily, the mounting plate 20 is further provided with a plurality of fourth fastening threaded holes 24 penetrating through the mounting plate 20, the plurality of fourth fastening threaded holes 24 are arranged side by side with the plurality of second fastening threaded holes 22, and the three-coordinate detection tool further comprises fourth pressing screws 54 threadedly connected to the fourth fastening threaded holes 24. The quick clamps 40 are provided with a plurality of mounting through holes, the second pressing screws 52 and the fourth pressing screws 54 are both arranged in the mounting through holes and press the quick clamps 40 against the mounting plate 20. Specifically, each quick clamp 40 is locked to the mounting plate 20 by two second pressing screws 52 and two fourth pressing screws 54, and the corresponding two second fastening threaded holes 22 and two fourth fastening threaded holes 24 are arranged adjacent to each other.

[0047] Exemplarily, the quick clamp 40 comprises a lock frame and an adjustable length lock column 41, and the front end of the lock column 41 is provided with an elastic rubber head 42 for extruding the measured part. Specifically, the lock column 41 is arranged in a threaded column structure and is locked to the lock frame by a nut. By rotating the nut, the length of the lock column 41 can be adjusted to adjust the clamping force, and the elastic rubber head 42 can apply an elastic extrusion force to the measured part to avoid damaging the measured part.

[0048] Exemplarily, the elastic rubber head 42 is made of elastic plastic material.

[0049] Exemplarily, the base 10 is provided with a plurality of countersunk connection holes 13 arranged along the first direction at intervals, and the base 10 can be fastened to the workbench surface by fastening screws arranged in the countersunk connection holes 13, so that the three-coordinate detection tool is fixedly installed on the workbench surface, thereby improving the stability of clamping the measured part and improving the measurement accuracy.

[0050] Obviously, the above embodiments of the present application are merely examples for clearly illustrating the present application, and are not intended to limit the implementation modes of the present application. For those skilled in the art, various obvious changes, re-adjustments and replacements can be made without departing from the protection scope of the present application. Here, it is not necessary and also impossible to enumerate all the implementation modes. Any modification, equivalent replacement and improvement made within the spirit and principle of the present application shall be included in the protection scope of the present application claim.

Claims

1. A fixture for coordinate measuring machine (CMM) inspection, characterized in that, include: The base (10) extends in a horizontal first direction; A plurality of mounting plates (20) are slidably disposed on the base (10) along the first direction, and the mounting plates (20) can be fixed at multiple points on their sliding path; The clamping assembly is mounted on each of the mounting plates (20). The clamping assembly can be fixed at multiple height positions on the mounting plate (20). The clamping assembly includes a support block (30) and a quick clamp (40). The quick clamp (40) is used to clamp the part to be tested onto the support block (30).

2. The tooling for coordinate measuring machine according to claim 1, characterized in that, The base (10) is provided with a horizontal slide groove (11), which extends along the first direction, and the lower end of the mounting plate (20) is inserted into the horizontal slide groove (11).

3. The fixture for coordinate measuring machine according to claim 2, characterized in that, The horizontal slide (11) has a plurality of first fastening threaded holes (12) on one side wall. The plurality of first fastening threaded holes (12) are arranged along the first direction. The three-coordinate measuring tool also includes a first clamping screw (51). The first clamping screw (51) is threaded to the first fastening threaded hole (12) and presses the mounting plate (20) against the other side wall of the horizontal slide (11).

4. The fixture for coordinate measuring machine according to claim 1, characterized in that, The mounting plate (20) is provided with a vertical slide groove (21), which extends in the vertical direction, and one side of the support block (30) is inserted into the vertical slide groove (21).

5. The fixture for coordinate measuring machine according to claim 4, characterized in that, The first sidewall of the vertical slide (21) is provided with a plurality of second fastening threaded holes (22), which are arranged in a vertical direction. The three-coordinate measuring tool also includes a second clamping screw (52), which is threaded to the second fastening threaded hole (22) and presses the support block (30) against the second sidewall of the vertical slide (21).

6. The tooling for coordinate measuring machine according to claim 5, characterized in that, The second sidewall of the vertical slide (21) is also provided with a plurality of third fastening thread holes (23), which are arranged in a vertical direction. The three-coordinate measuring tool also includes a third clamping screw (53), which is threaded to the third fastening thread hole (23) and presses the support block (30) against the first sidewall of the vertical slide (21).

7. The fixture for coordinate measuring machine according to claim 5, characterized in that, The mounting plate (20) is also provided with a plurality of fourth fastening threaded holes (24), which are arranged side by side with a plurality of second fastening threaded holes (22). The three-coordinate measuring machine tooling also includes a fourth clamping screw (54), which is threaded to the fourth fastening threaded hole (24). The quick clamp (40) is provided with a plurality of mounting through holes, through which the second clamping screw (52) and the fourth clamping screw (54) pass and clamp the quick clamp (40) to the mounting plate (20).

8. The tooling for coordinate measuring machine according to any one of claims 1-7, characterized in that, The quick clamp (40) includes a locking post (41) with an adjustable extension length. The front end of the locking post (41) is provided with an elastic rubber head (42), which is used to squeeze the part to be tested.

9. The tooling for coordinate measuring machine according to any one of claims 1-7, characterized in that, The base (10) is provided with a plurality of countersunk connection holes (13), and the base (10) can be fastened to the workbench by fastening screws passing through the countersunk connection holes (13).

10. The tooling for coordinate measuring machine according to any one of claims 1-7, characterized in that, The coordinate measuring machine tooling includes two mounting plates (20); and / or Each of the mounting plates (20) is equipped with at least two clamping assemblies distributed in the vertical direction.

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