Laser damage distinguishing device
By combining damage lasers and probe lasers, and utilizing a beam sampling analyzer and automated displacement stage control, the problem of difficulty in identifying small-sized damage in existing technologies has been solved, achieving high-precision and high-repeatability laser damage detection.
Patent Information
- Application Number
- CN202423148782.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-19
- Publication Date
- 2025-12-23
- Estimated Expiration
- 2034-12-19
AI Technical Summary
Existing laser damage identification methods are difficult to accurately identify small-sized damage and are prone to misjudgment. Furthermore, they lack repeatability and accuracy. The existing methods are difficult to improve detection accuracy and repeatability within the current technology.
The test piece is simultaneously irradiated by a damage laser and a probe laser. Scattered images are acquired by a beam sampling analyzer, and combined with the automated control of the displacement stage, comparative detection is achieved, thereby improving the accuracy of the judgment.
It improves the accuracy and repeatability of laser damage detection, reduces false positives, and achieves efficient laser damage discrimination.
Smart Images
Figure CN223711424U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to laser damage detection technical field, specifically, relate to a kind of laser damage discrimination device. BACKGROUND
[0002] Laser often has extremely high energy density, laser equipment inevitably encounters the problem that laser causes damage to optical devices and optical materials, which requires mastering the laser damage resistance of optical devices and optical materials to provide reliable reference for laser design and use, and laser damage discrimination test can evaluate the laser damage resistance of optical devices and optical materials.
[0003] The existing laser damage discrimination is usually detected by plasma flash method. In detection, CCD is used to magnify the surface of the sample to be tested in cooperation with a microscope, and the surface of the sample to be tested is irradiated by laser. The tester judges whether the test point is damaged by directly observing the sample surface morphology change on the display and the plasma flash phenomenon when the laser is irradiated. However, such detection method is difficult to distinguish the damage with small size, and the displacement platform is manually controlled by personnel each time, so the precision is relatively low and the repeatability is not high. Some detection methods by laser scattering usually use a photoelectric probe to collect the scattering signal of the damage point. Although such method can distinguish the damage with small size, it may misjudge the original defect of the optical element, which also reduces the discrimination accuracy. UTILITY MODEL CONTENT
[0004] The utility model aims to provide a kind of laser damage discrimination device, it can judge whether the surface of the sample to be tested is damaged by collecting the scattering image of the probe laser source, which improves the detection precision, test repeatability and discrimination accuracy.
[0005] The embodiment of the utility model is realized as follows:
[0006] In one aspect of the utility model, a laser damage discrimination device is provided, which includes a controller, a light beam sampling analyzer, a light source assembly and a displacement table for carrying a sample to be tested. The displacement table and the light beam sampling analyzer are electrically connected to the controller. The light source assembly includes a damage laser and a probe laser. The damage laser beam emitted by the damage laser and the probe laser beam emitted by the probe laser both irradiate the same position of the sample to be tested. The damage laser beam is used to form a damage area at the irradiated position of the sample to be tested. The probe laser beam transmits through the sample to be tested and then enters the light beam sampling analyzer. The light beam sampling analyzer is used to form a scattering image of the irradiated position of the sample to be tested according to the received probe laser beam, and transmit the scattering image to the controller. The controller can drive the displacement table to move relative to the light emitting side of the laser to adjust the irradiated position of the sample to be tested.
[0007] Optionally, the light source assembly further comprises a first dichroic mirror, the first dichroic mirror is arranged on the light exit side of the damage laser and the probe laser, and the damage laser beam emitted by the damage laser and the probe laser beam emitted by the probe laser are combined by the first dichroic mirror and then irradiate the object to be measured.
[0008] Optionally, the light source assembly further comprises a first converging lens, the first converging lens is arranged on the light exit side of the first dichroic mirror.
[0009] Optionally, the laser damage discrimination device further comprises an attenuator, the attenuator is arranged on the light exit side of the damage laser, and the controller is electrically connected with the attenuator, so as to adjust the energy density resolution of the damage laser beam emitted by the damage laser through the attenuator.
[0010] Optionally, the light source assembly further comprises a variable aperture diaphragm, the variable aperture diaphragm is arranged on the light exit side of the probe laser and coaxially arranged with the light exit hole of the probe laser.
[0011] Optionally, the light source assembly further comprises a plurality of replaceable attenuating pieces arranged on the light exit hole of the probe laser, the probe laser beam sequentially passes through the aperture diaphragm and the attenuating pieces and irradiates the object to be measured, and different attenuating pieces have different light intensity attenuation degrees for the probe laser beam.
[0012] Optionally, the light source assembly further comprises a second dichroic mirror, the second dichroic mirror is arranged on the light exit side of the object to be measured along the light path; the damage laser beam and the probe laser beam enter the second dichroic mirror along the light path, so that the probe laser beam enters the beam sampling analyzer.
[0013] Optionally, the light source assembly further comprises a spatial filter, the spatial filter is arranged on the light exit side of the second dichroic mirror along the light path.
[0014] Optionally, the light source assembly further comprises a second converging lens, the second converging lens is arranged on the light exit side of the second dichroic mirror along the light path.
[0015] Optionally, the displacement table comprises a table top and X-axis moving assembly, Y-axis moving assembly and Z-axis moving assembly which are respectively drivingly connected with the table top, and the controller is electrically connected with the X-axis moving assembly, the Y-axis moving assembly and the Z-axis moving assembly respectively, so as to drive the table top to move along the X-axis, the Y-axis and the Z-axis respectively.
[0016] The beneficial effects of the utility model include:
[0017] The application provides a laser damage discrimination device, which comprises a controller, a light beam sampling analyzer, a light source assembly and a displacement table for carrying a to-be-tested member, the displacement table and the light beam sampling analyzer are electrically connected with the controller respectively; the light source assembly comprises a damage laser and a detection laser, a damage laser beam emitted by the damage laser and a detection laser beam emitted by the detection laser are both irradiated to the same position of the to-be-tested member, and the damage laser beam is used for forming a damage area at the irradiated position of the to-be-tested member; when the surface of the to-be-tested member appears damage, the detection laser irradiated to the damage point cannot pass through smoothly and scattering phenomenon appears; the detection laser beam transmits through the to-be-tested member and then is incident on the light beam sampling analyzer, the light beam sampling analyzer is used for forming a scattering image of the irradiated position of the to-be-tested member according to the received detection laser beam, and the scattering image is transmitted to the controller; when only the detection laser beam transmits through the to-be-tested member, the to-be-tested member is not irradiated, the controller can also drive the light beam sampling analyzer to collect the scattering image of the detection laser light source at this time, and the detection laser scattering images before and after the to-be-tested member is irradiated are compared, so as to reduce misjudgment and improve discrimination accuracy; the controller can drive the displacement table to move relative to the light emitting side of the laser to adjust the irradiated position of the to-be-tested member, and the repeatability and the test precision of the inspection can be improved. The laser damage discrimination device can judge whether the surface of the to-be-tested member is damaged by collecting the scattering image of the detection laser light source, and the detection precision, the repeatability of the test and the discrimination accuracy are improved. BRIEF DESCRIPTION OF DRAWINGS
[0018] In order to more clearly illustrate the technical scheme of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.
[0019] Figure 1 Figure 1 is a structural schematic diagram of the laser damage discrimination device provided by the embodiments of the present application;
[0020] Figure 2 Figure 2 is another structural schematic diagram of the laser damage discrimination device provided by the embodiments of the present application.
[0021] Figure legend: 100-laser damage discrimination device; 110-controller; 120-light beam sampling analyzer; 130-displacement table; 141-damage laser; 142-detection laser; 143-first dichroic mirror; 144-first converging lens; 145-variable pinhole diaphragm; 146-attenuation sheet; 147-second dichroic mirror; 148-space filter; 149-second converging lens; 150-attenuator; 200-to-be-tested member. DETAILED DESCRIPTION
[0022] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme of the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are some but not all of the embodiments of the present application. The components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.
[0023] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of the present application.
[0024] It should be noted that: similar reference numbers and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.
[0025] In the description of the present application, it should be noted that the orientations or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the orientations or positional relationships shown in the drawings, or the orientations or positional relationships commonly placed when the product of the present application is used, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", "third", etc. are only used for differentiation in description, and cannot be understood as indicating or implying relative importance.
[0026] In addition, the terms "horizontal", "vertical", etc. do not mean that the components must be absolutely horizontal or vertical, but can be slightly inclined. For example, "horizontal" only means that its direction is relatively more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.
[0027] In the description of the present application, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set", "mount", "connected", "connected" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be the communication inside two elements. For those of ordinary skill in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.
[0028] Please refer toFigure 1 The embodiment provides a laser damage discrimination device 100, which comprises a controller 110, a light beam sampling analyzer 120, a light source assembly and a displacement table 130 for carrying a to-be-tested member 200, the displacement table 130 and the light beam sampling analyzer 120 are electrically connected with the controller 110 respectively; the light source assembly comprises a damage laser 141 and a detection laser 142, a damage laser beam emitted by the damage laser 141 and a detection laser beam emitted by the detection laser 142 are irradiated to the same position of the to-be-tested member 200, and the damage laser beam is used for forming a damage area at the irradiated position of the to-be-tested member 200, the detection laser beam is transmitted through the to-be-tested member 200 and then is incident on the light beam sampling analyzer 120, the light beam sampling analyzer 120 is used for forming a scattering image of the irradiated position of the to-be-tested member 200 according to the received detection laser beam, and the scattering image is transmitted to the controller 110; the controller 110 can drive the displacement table 130 to move relative to the light emitting side of the laser to adjust the irradiated position of the to-be-tested member 200.
[0029] Specifically, the application provides a laser damage discrimination device 100, as shown in the figure, which comprises a damage laser 141 and a detection laser 142, the damage laser 141 can emit a damage laser beam with specific energy and characteristics. Figure 1 Preferably, the damage laser 141 of the application can emit a damage laser beam with a wavelength of 355nm and 1064nm, a pulse width of about 10ps, an average power greater than 30W and a single pulse energy greater than 80μJ; such damage laser beam is used for processing the surface of the to-be-tested member 200, and the energy intensity is sufficient to cause damage points on the surface of the to-be-tested member 200, thereby providing a basic condition for subsequent detection and analysis. The detection laser 142 is mainly used for emitting a detection laser beam, preferably, the detection laser 142 of the application can emit a detection laser beam with a wavelength of 635±5nm, an emitting spot size of 3.5mm and a laser power of 5mW. After the damage operation on the to-be-tested member 200, the transmittance and reflectivity of different wavebands in the damage area change obviously, the detection laser irradiated to the damage point cannot pass through smoothly, and thus obvious scattering phenomenon occurs at the point, so as to obtain the damage condition of the surface of the to-be-tested member 200 in cooperation with the light beam sampling analyzer 120. Through such a setting mode, the spot coincidence degree of the two different lasers on the surface of the to-be-tested member 200 is high, and different sizes of irradiation damage points from tens of microns to hundreds of microns can be accurately recognized synchronously, which has high accuracy and precision.
[0030] The existing detection method is usually manually adjusted by an operator when the damage laser beam and the probe laser beam irradiate the surface of the measured object, so that the adjustment accuracy is low and the repeatability is not high. The displacement table 130 is drivenly connected with the controller 110, the displacement table 130 includes a table top and X-axis moving assembly, Y-axis moving assembly and Z-axis moving assembly which are respectively drivingly connected with the table top, and the table top is used for placing the measured object 200; the controller 110 is electrically connected with the X-axis moving assembly, the Y-axis moving assembly and the Z-axis moving assembly to drive the table top to move along the X-axis, the Y-axis and the Z-axis respectively, so that the detection process has good repeatability, and the full-automatic operation of the laser damage discrimination device 100 can be realized, which is beneficial to improve the test efficiency.
[0031] In order to avoid ignoring small size or low intensity damage when detecting by using laser scattering, and to improve the discrimination accuracy, the laser damage discrimination device 100 can first irradiate the surface of the measured object 200 with the probe laser beam before irradiating the surface of the measured object 200 with the damage laser beam, and the light beam sampling analyzer 120 receives the probe laser beam transmitted through the measured object 200, at this time, the light beam sampling analyzer 120 can sample the scattering image of the surface of the measured object 200 without irradiation. Then, the surface of the measured object 200 is irradiated with the damage laser beam, and the light beam sampling analyzer 120 receives the probe laser beam transmitted through the measured object 200, at this time, the light beam sampling analyzer 120 can sample the scattering image of the surface of the measured object 200 with irradiation. In order to facilitate the operator to observe the scattering image, the controller 110 can be connected with a display screen, and the display screen is used for displaying the scattering image. The operator can compare the irradiated image and the non-irradiated scattering image of the surface of the measured object 200, and determine whether the surface of the measured object 200 is damaged by the scattering image, which can effectively reduce the misjudgment and improve the discrimination accuracy.
[0032] It should be noted that, in an embodiment of the present application, first, as shown in Figure 2 The laser damage discrimination device 100 further includes an attenuator 150 arranged on the light exit side of the damage laser 141, and the controller 110 is electrically connected with the attenuator 150 to adjust the energy density resolution of the damage laser beam emitted by the damage laser 141 through the attenuator 150.
[0033] Specifically, the attenuator 150 can regulate the energy of the damage laser beam to change the energy of the damage laser beam during transmission to meet different test requirements. The attenuator 150 can regulate the energy level of the damage laser beam to realize irradiation of the surface of the test piece 200 by the damage laser beam with different energy levels, and can cooperate with the displacement table 130 to drive the movement of the test piece 200 to realize irradiation of a plurality of test points of the test piece 200 under different energy levels. The attenuator 150 includes a stepping motor and a wave plate, and the attenuation amount thereof can be changed by the electric mode of the stepping motor. The wave plate can change the polarization state of light, and the stepping motor is in transmission connection with the wave plate. When the stepping motor receives the control signal of the controller 110, the wave plate is rotated together to cause the polarization axis direction or phase delay characteristic of the wave plate to change correspondingly. Since the change of the polarization state of light when passing through the wave plate will affect the transmittance of light, the energy of the damage laser beam after passing through the attenuator 150 can be accurately controlled by controlling the rotation angle of the wave plate.
[0034] Secondly, the light source assembly further includes a first dichroic mirror 143, as shown in Figure 2 The first dichroic mirror 143 is arranged on the light exit side of the damage laser 141 and the probe laser 142, and the damage laser beam emitted by the damage laser 141 and the probe laser beam emitted by the probe laser 142 are combined after passing through the first dichroic mirror 143 and then irradiate the test piece 200.
[0035] Specifically, the first dichroic mirror 143 can selectively reflect and transmit different light beams according to the wavelength of light to realize the combination of the damage laser 141 and the probe laser 142, and form a combined composite laser beam. The combined composite laser beam continues to propagate along the predetermined light path and finally accurately irradiates the test piece 200. Through the arrangement of the first dichroic mirror 143, the damage laser beam and the probe laser beam can act on the test piece 200 at the same time, the probe laser beam can immediately detect the damage area while causing damage to the test piece 200, and the damage condition of the test piece 200 can be obtained through the beam sampling analyzer 120, thereby improving the determination efficiency of the laser damage determination device.
[0036] Thirdly, as shown in Figure 2 The light source assembly further includes a second dichroic mirror 147, which is arranged on the light exit side of the test piece 200 along the light path; the damage laser beam and the probe laser beam enter the second dichroic mirror 147 along the light path to make the probe laser beam enter the beam sampling analyzer 120.
[0037] Specifically, the second dichroic mirror 147 can selectively reflect and transmit different light beams according to the wavelength of the light, so as to separate the damage laser 141 and the probe laser 142, so that the composite laser beam of the damage laser beam and the probe laser beam combined by the first dichroic mirror 143 is separated again, and after the composite laser beam of the damage laser beam and the probe laser beam is split by the second dichroic mirror 147, the probe laser beam is received by the beam sampling analyzer 120, and the damage laser beam is prevented from entering the beam sampling analyzer 120 to damage it, thereby improving the reliability of the laser damage judgment device 100.
[0038] The laser damage judgment device 100 provided by the application comprises a controller 110, a beam sampling analyzer 120, a light source assembly, and a displacement table 130 for carrying a to-be-tested member 200, the displacement table 130 and the beam sampling analyzer 120 are electrically connected to the controller 110; the light source assembly comprises a damage laser 141 and a probe laser 142, a damage laser beam emitted by the damage laser 141 and a probe laser beam emitted by the probe laser 142 are both irradiated to the same position of the to-be-tested member 200, and the damage laser beam is used to form a damage area at the irradiated position of the to-be-tested member 200, when the surface of the to-be-tested member 200 is damaged, the probe laser irradiated to the damage point cannot pass through smoothly and appears scattering phenomenon; the probe laser beam is transmitted through the to-be-tested member 200 and then enters the beam sampling analyzer 120, the beam sampling analyzer 120 is used to form a scattering image of the irradiated position of the to-be-tested member 200 according to the received probe laser beam, and transmit the scattering image to the controller 110; when only the probe laser beam is transmitted through the to-be-tested member 200, the to-be-tested member 200 is not irradiated, the controller 110 can also drive the beam sampling analyzer to collect the scattering image of the probe laser source at this time, and compare the scattering images of the probe laser before and after the to-be-tested member 200 is irradiated, so as to reduce misjudgment and improve the judgment accuracy; the controller 110 can drive the displacement table 130 to move relative to the light emitting side of the laser to adjust the irradiated position of the to-be-tested member 200, so as to improve the repeatability and accuracy of the inspection. The above laser damage judgment device 100 can judge whether the surface of the to-be-tested member 200 is damaged by collecting the scattering image of the probe laser source, thereby improving the detection accuracy, the repeatability of the test, and the judgment accuracy.
[0039] For example, as Figure 2As shown, the light source assembly further comprises a first converging lens 144, which is arranged along the light path between the first dichroic mirror 143 and the displacement table 130. When the first dichroic mirror 143 combines the damage laser beam and the probe laser beam, the first converging lens 144 can further process the combined laser beam to converge the relatively divergent laser beam, so that the energy of the combined laser beam is more concentrated, thereby increasing the energy density of the combined laser beam when reaching the surface of the test piece 200, so as to more effectively perform damage operation and damage detection on the test piece 200, and improve the discrimination efficiency and use reliability of the laser damage discrimination device 100.
[0040] Optionally, as shown in Figure 2 The light source assembly further comprises a variable aperture diaphragm 145, which is arranged on the light exit side of the probe laser 142 and coaxially arranged with the light exit hole of the probe laser 142.
[0041] Specifically, the variable aperture diaphragm 145 can limit and adjust the light flux passing through it to flexibly adapt to different test requirements. The variable aperture diaphragm 145 can screen and regulate the probe laser beam emitted by the probe laser 142. By changing the aperture size of the aperture diaphragm, the amount of light passing through it and the spot size of the probe laser beam and other optical parameters can be controlled, so as to adjust the intensity distribution of the optical signal. Preferably, the light transmission diameter of the variable aperture diaphragm 145 of the present application is φ1-φ12.
[0042] In an implementable manner of the present application, as shown in Figure 2 The light source assembly further comprises a plurality of replaceable attenuation sheets 146 arranged in the light exit hole of the probe laser 142. The probe laser beam passes through the aperture diaphragm and the attenuation sheet 146 in sequence to the test piece 200. Different attenuation sheets 146 have different degrees of light intensity attenuation for the probe laser beam.
[0043] Specifically, the attenuation sheet 146 can weaken the light intensity of the probe laser beam according to its attenuation characteristics, so as to reduce the light intensity of the probe laser beam to an appropriate range through the attenuation sheet 146. By setting a plurality of replaceable attenuation sheets 146, the light intensity can be adjusted according to different test requirements, thereby improving the adaptability of the laser damage discrimination device 100.
[0044] For example, as shown in Figure 2 The light source assembly further comprises a spatial filter 148, which is arranged along the light path on the light exit side of the second dichroic mirror 147. Through the arrangement of the spatial filter 148, the normal spot of the probe laser beam can be blocked, which is more convenient for the beam sampling analyzer 120 to sample the scattered signal in the probe laser beam, thereby improving the discrimination efficiency.
[0045] For example, asFigure 2 As shown, the light source assembly further comprises a second converging lens 149, which is arranged along the light path on the light exit side of the second dichroic mirror 147. When the second dichroic mirror 147 splits the damage laser beam and the probe laser beam, the second converging lens 149 can converge the more divergent probe laser beam, so that the energy of the probe laser beam is more concentrated, thereby increasing the energy density of the probe laser beam when it reaches the beam sampling analyzer 120, so as to more effectively collect the scattering information of the probe laser beam, and improve the discrimination efficiency and use reliability of the laser damage discrimination device 100.
[0046] The use method of the laser damage discrimination device 100 provided by the present application is as follows:
[0047] First, according to the test needs and the to-be-tested member 200, select the appropriate focal length of the first converging lens 144, the second converging lens 149, the wavelength of the damage laser 141 and the probe laser 142;
[0048] Then, electrically connect the damage laser 141, the attenuator 150, the beam sampling analyzer 120 and the displacement table 130 with the controller 110, and calibrate and run test before testing to determine the repeatability.
[0049] Then, turn on the probe laser 142, before irradiating the surface of the to-be-tested member 200 with the damage laser beam, the surface of the to-be-tested member 200 can be first irradiated with the probe laser beam, and the beam sampling analyzer 120 receives the probe laser beam transmitted through the to-be-tested member 200, at this time the beam sampling analyzer 120 can sample the scattering image of the surface of the to-be-tested member 200 without irradiation;
[0050] Then, irradiate the surface of the to-be-tested member 200 with the damage laser beam, and the beam sampling analyzer 120 receives the probe laser beam transmitted through the to-be-tested member 200, at this time the beam sampling analyzer 120 can sample the scattering image of the surface of the to-be-tested member 200 with irradiation. Observe and compare the scattering images of the to-be-tested member 200 before and after irradiation on the display, and judge whether there is a damage.
[0051] Then the controller 110 controls the attenuator 150 to irradiate the surface of the damage laser beam to be tested 200 at different energy levels; at the same time, the controller 110 controls the damage laser 141 to set the number of pulses for each irradiation. By using different energy levels of damage laser beams under the same number of pulses, and using different pulse numbers under the same energy level, a plurality of experiments are carried out by using the control variable experiment method, and a plurality of test points are irradiated under each group of experimental conditions to test the probability of obtaining damage of the test points under the group of experimental conditions; after completing a plurality of experiments, the damage threshold of the to-be-tested member 200 is determined according to the experimental results. Repeat the above steps until the test area is tested.
[0052] The above only describes optional embodiments of the present application and is not intended to limit the present application. For those skilled in the art, the present application can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. within the spirit and principles of the present application shall be included in the protection scope of the present application.
[0053] In addition, it should be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, the present application will not describe various possible combinations again.
Claims
1. A laser damage detection device, characterized in that, It includes a controller (110), a beam sampling analyzer (120), a light source assembly, and a displacement stage (130) for carrying the test piece (200), wherein the displacement stage (130) and the beam sampling analyzer (120) are electrically connected to the controller (110); The light source assembly includes a damage laser (141) and a probe laser (142). The damage laser beam emitted by the damage laser (141) and the probe laser beam emitted by the probe laser (142) both irradiate the same position of the test piece (200). The damage laser beam is used to form a damage area at the irradiated position of the test piece (200). The probe laser beam passes through the test piece (200) and then enters the beam sampling analyzer (120). The beam sampling analyzer (120) is used to form a scattering image of the irradiated position of the test piece (200) based on the received probe laser beam and transmit the scattering image to the controller (110). The controller (110) can drive the displacement stage (130) to move relative to the light-emitting side of the laser to adjust the irradiated position of the test piece (200).
2. The laser damage discrimination device according to claim 1, characterized in that, The light source assembly further includes a first dichroic mirror (143), which is disposed on the light-emitting side of the damage laser (141) and the probe laser (142). The damage laser beam emitted by the damage laser (141) and the probe laser beam emitted by the probe laser (142) are combined by the first dichroic mirror (143) and directed toward the test object (200).
3. The laser damage discrimination device according to claim 2, characterized in that, The light source assembly also includes a first converging lens (144), which is disposed on the light-emitting side of the first dichroic mirror (143).
4. The laser damage discrimination device according to claim 1, characterized in that, The laser damage discrimination device (100) further includes an attenuator (150), which is disposed on the light-emitting side of the damage laser (141). The controller (110) is electrically connected to the attenuator (150) and is used to adjust the energy density resolution of the damage laser beam emitted by the damage laser (141) through the attenuator (150).
5. The laser damage discrimination device according to claim 1, characterized in that, The light source assembly also includes a variable aperture stop (145), which is located on the light-emitting side of the probe laser (142) and is coaxially arranged with the light-emitting aperture of the probe laser (142).
6. The laser damage discrimination device according to claim 5, characterized in that, The light source assembly also includes multiple attenuators (146) that can be replaced in the light output aperture of the probe laser (142). The probe laser beam is directed toward the test object (200) through the aperture stop and the attenuators (146) in sequence. Different attenuators (146) have different degrees of light intensity attenuation for the probe laser beam.
7. The laser damage discrimination device according to claim 2, characterized in that, The light source assembly further includes a second dichroic mirror (147), which is disposed along the optical path on the light-emitting side of the test piece (200); the damage laser beam and the probe laser beam are incident on the second dichroic mirror (147) along the optical path, so that the probe laser beam is incident on the beam sampling analyzer (120).
8. The laser damage discrimination device according to claim 7, characterized in that, The light source assembly also includes a spatial filter (148), which is disposed along the light path on the light-emitting side of the second dichroic mirror (147).
9. The laser damage discrimination device according to claim 7, characterized in that, The light source assembly also includes a second converging lens (149), which is disposed along the light path on the light-emitting side of the second dichroic mirror (147).
10. The laser damage discrimination device according to claim 1, characterized in that, The displacement stage (130) includes a table surface and an X-axis movement component, a Y-axis movement component and a Z-axis movement component that are driven and connected to the table surface respectively. The controller (110) is electrically connected to the X-axis movement component, the Y-axis movement component and the Z-axis movement component respectively to drive the table surface to move along the X-axis, Y-axis and Z-axis respectively.