Vacuum conveying equipment and vacuum conveying system

Abstract

The utility model provides vacuum conveying equipment and a vacuum conveying system.The vacuum conveying equipment comprises an exchange bin vacuum pump set and a main cavity vacuum pump set, the main cavity vacuum pump set is connected with a main cavity of the vacuum conveying system, the exchange bin vacuum pump set is connected with an exchange bin of the vacuum conveying system, and the exchange bin is connected with the main cavity through an isolating valve; the volume of the main chamber is greater than that of the exchange bin; the main chamber vacuum pump set is used for reducing the air pressure of the main chamber; the exchange bin vacuum pump group is used for reducing air pressure of the exchange bin; when the isolation valve is opened, a conveying device in the exchange bin is allowed to convey the sample to the main chamber. According to the vacuum conveying equipment provided by the embodiment of the invention, when the sample is conveyed every time, the air pressure of the main chamber is only changed slightly, so that the time for vacuumizing the main chamber during conveying every time can be shortened, and the influence of gas as a temperature carrier on equipment in the main chamber is also reduced through less gas exchange; therefore, the stability and the conveying efficiency of vacuum conveying can be improved.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of vacuum conveying, and particularly relates to a vacuum conveying device and a vacuum conveying system. BACKGROUND

[0002] Vacuum conveying is a technology for material handling and sample transmission in a vacuum environment, and is widely applied to the fields of semiconductor manufacturing, flat panel display manufacturing, aerospace, biomedicine and the like. At present, there are multiple ways for sample transmission in a vacuum environment, but the stability and conveying efficiency of vacuum conveying are poor. Therefore, how to improve the stability and conveying efficiency of vacuum conveying is a problem to be solved. CONTENT OF THE UTILITY MODEL

[0003] In view of the problems existing in the prior art, the application provides a vacuum conveying device and a vacuum conveying system, which can improve the stability and conveying efficiency of vacuum conveying.

[0004] The application provides the following solutions.

[0005] In a first aspect, the application provides a vacuum conveying device, comprising an exchange chamber vacuum pump group and a main chamber vacuum pump group, the main chamber vacuum pump group being connected to a main chamber of a vacuum conveying system, the exchange chamber vacuum pump group being connected to an exchange chamber of the vacuum conveying system, the exchange chamber being connected to the main chamber through an isolation valve, and the volume of the main chamber being greater than the volume of the exchange chamber;

[0006] The main chamber vacuum pump group is used to reduce the air pressure of the main chamber.

[0007] The exchange chamber vacuum pump group is used to reduce the air pressure of the exchange chamber.

[0008] When the isolation valve is opened, the conveying device in the exchange chamber is allowed to convey the sample to the main chamber.

[0009] In some possible embodiments, the main chamber vacuum pump group comprises a main chamber connection pump, a main chamber fore pump, a main chamber fore valve and a main chamber vacuum gauge.

[0010] The first end of the main chamber connection pump is communicated with the main chamber, and the main chamber fore pump is connected to the second end of the main chamber connection pump through the main chamber fore valve.

[0011] The main chamber vacuum gauge is communicated with the main chamber, and is used to measure the air pressure in the main chamber.

[0012] In some possible embodiments, the main chamber fore pump is used to make the air pressure of the main chamber less than or equal to a third air pressure threshold value.

[0013] The main chamber connection pump and the main chamber fore pump are used to make the air pressure of the main chamber less than a first air pressure threshold value.

[0014] The third gas pressure threshold is greater than the first gas pressure threshold.

[0015] In some possible embodiments, the main chamber vacuum pump set further comprises a main chamber gas release valve;

[0016] The first end of the main chamber gas release valve is connected to the main chamber, and the second end of the main chamber gas release valve is connected to the nitrogen gas.

[0017] In some possible embodiments, the exchange chamber vacuum pump set comprises an exchange chamber connection pump, an exchange chamber vacuum gauge, a bypass valve, an exchange chamber foreline valve, and an exchange chamber foreline pump;

[0018] The first end of the exchange chamber connection pump is connected to the exchange chamber, and the second end of the exchange chamber connection pump is connected to the exchange chamber foreline pump through the exchange chamber foreline valve;

[0019] The first end of the exchange chamber vacuum gauge is connected to the exchange chamber, and the exchange chamber vacuum gauge is used to measure the gas pressure in the exchange chamber.

[0020] The first end of the bypass valve is connected to the first end of the exchange chamber vacuum gauge, and the second end of the bypass valve is connected to the second end of the exchange chamber connection pump.

[0021] In some possible embodiments, the exchange chamber foreline pump is used to make the gas pressure in the exchange chamber less than or equal to a fourth gas pressure threshold;

[0022] The exchange chamber foreline pump and the exchange chamber connection pump are used to make the gas pressure in the exchange chamber less than a second gas pressure threshold.

[0023] In some possible embodiments, the exchange chamber vacuum pump set further comprises an exchange chamber gas release valve;

[0024] The first end of the exchange chamber gas release valve is connected to the first end of the bypass valve, and the second end of the exchange chamber gas release valve is connected to the nitrogen gas.

[0025] In a second aspect, the present application provides a vacuum transfer system, comprising a main chamber, an exchange chamber, an isolation valve, an exchange chamber vacuum pump set, and a main chamber vacuum pump set, the main chamber vacuum pump set is connected to the main chamber, the exchange chamber vacuum pump set is connected to the exchange chamber, the exchange chamber is connected to the main chamber through the isolation valve, and the volume of the main chamber is greater than the volume of the exchange chamber.

[0026] The main chamber vacuum pump set is used to reduce the gas pressure in the main chamber.

[0027] The exchange chamber vacuum pump set is used to reduce the gas pressure in the exchange chamber.

[0028] When the isolation valve is opened, the transfer device in the exchange chamber is allowed to transfer the sample to the main chamber.

[0029] In some possible embodiments, the main chamber vacuum pump set comprises a main chamber connection pump, a main chamber foreline pump, a main chamber foreline valve, and a main chamber vacuum gauge.

[0030] The first end of the main chamber connecting pump is connected to the main chamber, and the second end of the main chamber connecting pump is connected to the main chamber through the main chamber pre-pump and the main chamber pre-pump valve.

[0031] The first end of the main chamber connecting pump is connected to the main chamber, and the second end of the main chamber connecting pump is connected to the main chamber through the main chamber pre-pump and the main chamber pre-pump valve.

[0032] In some possible embodiments, the main chamber pre-pump is configured to reduce the pressure in the main chamber to be less than or equal to a third pressure threshold.

[0033] The main chamber connecting pump and the main chamber pre-pump are configured to reduce the pressure in the main chamber to be less than a first pressure threshold.

[0034] The third pressure threshold is greater than the first pressure threshold.

[0035] In some possible embodiments, the main chamber vacuum pump group further comprises a main chamber vent valve.

[0036] The first end of the main chamber vent valve is connected to the main chamber, and the second end of the main chamber vent valve is connected to nitrogen.

[0037] In some possible embodiments, the exchange chamber vacuum pump group comprises an exchange chamber connecting pump, an exchange chamber vacuum gauge, a bypass valve, an exchange chamber pre-pump and an exchange chamber pre-pump valve.

[0038] The first end of the exchange chamber connecting pump is connected to the exchange chamber, and the second end of the exchange chamber connecting pump is connected to the exchange chamber through the exchange chamber pre-pump and the exchange chamber pre-pump valve.

[0039] The first end of the exchange chamber vacuum gauge is connected to the exchange chamber, and the exchange chamber vacuum gauge is configured to measure the pressure in the exchange chamber.

[0040] The first end of the bypass valve is connected to the first end of the exchange chamber vacuum gauge, and the second end of the bypass valve is connected to the second end of the exchange chamber connecting pump.

[0041] In some possible embodiments, the exchange chamber pre-pump is configured to reduce the pressure in the exchange chamber to be less than or equal to a fourth pressure threshold.

[0042] The exchange chamber pre-pump and the exchange chamber connecting pump are configured to reduce the pressure in the exchange chamber to be less than a second pressure threshold.

[0043] In some possible embodiments, the exchange chamber vacuum pump group further comprises an exchange chamber vent valve.

[0044] The first end of the exchange chamber vent valve is connected to the first end of the bypass valve, and the second end of the exchange chamber vent valve is connected to nitrogen.

[0045] In some possible embodiments, an active damping device is further included, and the active damping device is arranged below the main chamber.

[0046] The vacuum conveying device provided by the embodiments of the present application reduces the air pressure of the main chamber through the main chamber vacuum pump set, reduces the air pressure of the exchange chamber through the exchange chamber vacuum pump set, then opens the isolation valve, and the conveying device in the exchange chamber conveys the sample to the main chamber. In this way, the air pressure of the main chamber is only slightly changed each time the sample is conveyed, the time for vacuumizing the main chamber each time the sample is conveyed can be reduced, and through less gas exchange, the influence of gas as a temperature carrier on the equipment in the main chamber is also reduced, thereby improving the stability and conveying efficiency of the vacuum conveying.

[0047] Other advantages of the present application will be described in more detail in conjunction with the following description and drawings.

[0048] It should be understood that the above description is only a summary of the technical solutions of the present application, so as to enable a clearer understanding of the technical means of the present application, so that the content of the description can be implemented. In order to make the above and other purposes, characteristics and advantages of the present application more obvious and easy to understand, the specific embodiments of the present application are described below. BRIEF DESCRIPTION OF DRAWINGS

[0049] By reading the detailed description of the exemplary embodiments below, those skilled in the art will understand the advantages and benefits described herein and other advantages and benefits. The drawings are only for the purpose of illustrating exemplary embodiments and are not considered as limiting the present application. Moreover, the same reference numbers are used throughout the drawings to represent the same components. In the drawings:

[0050] Figure 1 a schematic diagram of a vacuum conveying device provided by the embodiments of the present application;

[0051] Figure 2 a schematic diagram of another vacuum conveying device provided by the embodiments of the present application;

[0052] Figure 3 a schematic diagram of a vacuum conveying system provided by the embodiments of the present application.

[0053] In the drawings, the list of components represented by each reference number is as follows:

[0054] Isolation valve 100; main chamber 200; exchange chamber 300; exchange chamber vacuum pump set 400; exchange chamber connection pump 401; exchange chamber vacuum gauge 402; bypass valve 403; exchange chamber front stage valve 404; exchange chamber front stage pump 405; exchange chamber gas release valve 406; main chamber vacuum pump set 500; main chamber connection pump 501; main chamber front stage pump 502; main chamber front stage valve 503; main chamber vacuum gauge 504; main chamber gas release valve 505.

[0055] In the drawings, the same or corresponding reference numbers represent the same or corresponding parts. DETAILED DESCRIPTION

[0056] Exemplary embodiments of the present application will be described in detail with reference to the accompanying drawings. While exemplary embodiments of the present application are shown in the drawings, it should be understood that the present application can be embodied in various forms without being limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the application to those skilled in the art.

[0057] In the description of embodiments of the present application, it will be understood that terms such as "include" or "has" are intended to indicate that there are constituent features, numbers, steps, actions, parts or combinations thereof, described in the specification, and do not exclude the possibility that one or more other features, numbers, steps, actions, parts or combinations thereof exist. The terms "first", "second", and the like are used only to facilitate the description and are not intended to indicate or imply relative importance or quantity of the technical features. Thus, features defined by "first", "second", and the like can explicitly or implicitly include one or more of such features. In the description of embodiments of the present application, the term "a plurality" means two or more, unless otherwise specified.

[0058] Unless otherwise specified, " / " means or, for example, A / B can mean A or B; "and / or" in this document is only a description of the relationship between associated objects, which means that there can be three relationships, for example, A and / or B can mean that A exists alone, A and B exist together, and B exists alone. For the convenience of description, spatial relationship words such as "under", "below", "above", "up" and the like can be used herein to describe the relationship of one element or feature to other elements or features shown in the drawings. It will be understood that these spatial relationship words are intended to include other orientations of the device in use or operation in addition to the orientation depicted in the drawings.

[0059] It should also be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict. The present application will be described in detail below with reference to the accompanying drawings and in conjunction with embodiments.

[0060] As Figure 1As shown, the vacuum conveying device provided by the embodiment of the present application comprises an exchange chamber vacuum pump group 400 and a main chamber vacuum pump group 500. The main chamber vacuum pump group 500 is connected to the main chamber 200 of the vacuum conveying system, and the exchange chamber vacuum pump group 400 is connected to the exchange chamber 300 of the vacuum conveying system. The exchange chamber 300 is connected to the main chamber 200 through an isolation valve 100, and the volume of the main chamber 200 is greater than the volume of the exchange chamber 300. The main chamber vacuum pump group 500 is used to reduce the air pressure of the main chamber 200, and the exchange chamber vacuum pump group 400 is used to reduce the air pressure of the exchange chamber 300. When the isolation valve 100 is opened, the conveying device in the exchange chamber 300 is allowed to convey the sample to the main chamber 200.

[0061] The vacuum conveying system provided by the embodiment of the present application can be applied to the medical field, and can also be applied to other technical fields, which are not limited herein.

[0062] In actual application, the main chamber vacuum control unit in the embodiment of the present application can reduce the air pressure of the main chamber through the main chamber vacuum pump group, so that the air pressure of the main chamber is less than the first air pressure threshold. For example, Figure 2 As shown, the main chamber vacuum pump group 500 provided by the embodiment of the present application can comprise a main chamber connection pump 501, a main chamber fore pump 502, a main chamber fore valve 503 and a main chamber vacuum gauge 504. The first end of the main chamber connection pump 501 is connected to the main chamber 200, and the second end of the main chamber connection pump 501 is connected to the main chamber fore pump 502 through the main chamber fore valve 503. The main chamber vacuum gauge 504 is connected to the main chamber 200, and is used to measure the air pressure in the main chamber 200.

[0063] The embodiment of the present application can first open the main chamber fore valve 503 and start the main chamber fore pump 502. At this time, the main chamber fore pump 502 will quickly pump the main chamber 200. When the main chamber vacuum gauge 504 indicates that the air pressure in the main chamber 200 is less than or equal to the third air pressure threshold, the main chamber connection pump 501 is started. At this time, the main chamber fore pump 502 and the main chamber connection pump 501 jointly pump the main chamber until the air pressure of the main chamber 200 is less than the first air pressure threshold. The first air pressure threshold is usually less than the third air pressure threshold. As an example, the third air pressure threshold can be between 150pa-100pa, and the first air pressure threshold can be about 0.0004pa.

[0064] In this embodiment, the main chamber vacuum pump assembly 500 may further include a main chamber vent valve 505. The first end of the main chamber vent valve 505 is connected to the main chamber 200, and the second end is connected to nitrogen. The main chamber vent valve 505 is typically used to allow nitrogen to enter the main chamber 200 after use, balancing the gas pressure within the main chamber 200. Before starting the main chamber forepump 502, this embodiment may close the main chamber vent valve 505 to prevent it from affecting the vacuuming process of the main chamber 200.

[0065] In practical applications, the vacuum control unit of the exchange chamber in this embodiment can reduce the air pressure in the exchange chamber through the vacuum pump set, so that the air pressure in the exchange chamber is lower than the second air pressure threshold. For example... Figure 2 As shown in this embodiment, the exchange chamber vacuum pump assembly 400 may include: an exchange chamber connecting pump 401, an exchange chamber vacuum gauge 402, a bypass valve 403, an exchange chamber pre-pump valve 404, and an exchange chamber pre-pump 405. The first end of the exchange chamber connecting pump 401 is connected to the exchange chamber 300, and the exchange chamber pre-pump 405 is connected to the second end of the exchange chamber connecting pump 401 via the exchange chamber pre-pump valve 404. The first end of the exchange chamber vacuum gauge 402 is connected to the exchange chamber 300, and the exchange chamber vacuum gauge 402 is used to measure the air pressure inside the exchange chamber 300. The first end of the bypass valve 403 is connected to the first end of the exchange chamber vacuum gauge 402, and the second end of the bypass valve 403 is connected to the second end of the exchange chamber connecting pump 401.

[0066] In this embodiment of the application, during step S202, the pre-stage valve 404 and bypass valve 403 of the exchange chamber can be opened first, and the pre-stage pump 405 of the exchange chamber can be started. At this time, the pre-stage pump 405 of the exchange chamber will quickly evacuate the exchange chamber 300. When the vacuum gauge 402 of the exchange chamber indicates that the air pressure inside the exchange chamber 300 is less than or equal to the fourth air pressure threshold, the connecting pump 401 of the exchange chamber is started. When the vacuum gauge 402 of the exchange chamber indicates that the air pressure inside the exchange chamber 300 is less than or equal to the fifth air pressure threshold and the rotational speed of the connecting pump 401 of the exchange chamber is greater than the rotational speed threshold, the bypass valve 403 is closed until the air pressure in the exchange chamber is less than the second air pressure threshold. It should be noted that the second air pressure value is usually less than the fifth air pressure value, and the fifth air pressure value is usually less than the fourth air pressure value. As an example, the fifth air pressure value can be about 100 Pa, and the second air pressure value is about 0.0004 Pa. The speed threshold can be around 80 revolutions per minute. Depending on the volume of the exchange chamber and the model of the pump connected to the exchange chamber, the speed threshold can be other values. This application embodiment does not limit this value.

[0067] In some possible embodiments, the exchange chamber vacuum pump group can further include an exchange chamber gas release valve 406. A first end of the exchange chamber gas release valve 406 is connected to the first end of the bypass valve 403, and a second end of the exchange chamber gas release valve 406 is connected to nitrogen. The exchange chamber gas release valve 406 is usually used to open the exchange chamber gas release valve after the exchange chamber is used, so that nitrogen enters the exchange chamber 300 to balance the air pressure in the exchange chamber. In the embodiments of the present application, the main chamber gas release valve 406 can be closed before the exchange chamber pre-pump 405 is started, so as to avoid the influence of the exchange chamber gas release valve 406 on the vacuumization process of the exchange chamber 300.

[0068] It should be noted that the bypass valve is arranged in the exchange chamber vacuum pump group corresponding to the exchange chamber in the present application. When the exchange chamber pre-pump is just started, the bypass valve is in an open state, so that the exchange chamber pre-pump can be connected to the exchange chamber through two channels, so that the air pressure in the exchange chamber can be rapidly reduced. When the air pressure in the exchange chamber is less than or equal to the fifth air pressure threshold and the rotation speed of the exchange chamber connecting pump is greater than the rotation speed threshold, the bypass valve is closed, so that the air pressure in the exchange chamber can be further reduced. In this way, the time for vacuumizing the exchange chamber can be improved. Since the exchange chamber needs to be vacuumized every time the sample is transferred, the vacuum transfer device provided in the embodiments of the present application can improve the transfer efficiency.

[0069] It should be noted that the volume of the main chamber in the embodiments of the present application is usually greater than the volume of the exchange chamber, and the first air pressure threshold corresponding to the main chamber is usually slightly less than the second air pressure threshold corresponding to the exchange chamber. Therefore, the air pressure in the main chamber is only slightly changed every time the sample is transferred in the vacuum transfer device provided in the embodiments of the present application, so that the time for vacuumizing the main chamber every time the sample is transferred can be reduced. After the main chamber is used, the main chamber gas release valve can be repeatedly opened and closed to make the nitrogen enter the main chamber more slowly. After the exchange chamber is used, the exchange chamber gas release valve can be opened to make the nitrogen enter the exchange chamber. The active damping device arranged at the lower part of the main chamber can further reduce the vibration in the main chamber and improve the stability of the vacuum transfer.

[0070] The vacuum transfer device provided in the embodiments of the present application can reduce the air pressure in the main chamber through the main chamber vacuum pump group, and reduce the air pressure in the exchange chamber through the exchange chamber vacuum pump group, and then open the isolation valve to make the transfer device in the exchange chamber transfer the sample to the main chamber. In this way, the vacuum transfer device provided in the embodiments of the present application can reduce the time for vacuumizing the main chamber every time the sample is transferred, and through less gas exchange, the influence of the gas as a temperature carrier on the equipment in the main chamber is also reduced, so that the stability and transfer efficiency of the vacuum transfer can be improved.

[0071] According to the vacuum conveying device provided in the above embodiment, the embodiment of the present application further provides a vacuum conveying system.

[0072] As shown in Figure 3 The vacuum conveying system provided by the embodiment of the present application comprises a main chamber 200, an exchange chamber 300, an isolation valve 100, an exchange chamber vacuum pump set 400 and a main chamber vacuum pump set 500, wherein the chamber vacuum pump set 500 is connected to the main chamber 200, the exchange chamber vacuum pump set 400 is connected to the exchange chamber 300, the exchange chamber 300 is connected to the main chamber 200 through the isolation valve 100, and the volume of the main chamber 200 is greater than that of the exchange chamber 300. The main chamber vacuum pump set 500 is used to reduce the air pressure of the main chamber 200; the exchange chamber vacuum pump set 400 is used to reduce the air pressure of the exchange chamber 300; and when the isolation valve 100 is opened, the conveying device in the exchange chamber 300 is allowed to convey the sample to the main chamber 200.

[0073] As a possible implementation, the main chamber vacuum pump set provided by the embodiment of the present application comprises a main chamber connecting pump, a main chamber fore pump, a main chamber fore valve and a main chamber vacuum gauge. The first end of the main chamber connecting pump is communicated with the main chamber, the main chamber fore pump is connected to the second end of the main chamber connecting pump through the main chamber fore valve, and the main chamber vacuum gauge is communicated with the main chamber and is used to measure the air pressure in the main chamber.

[0074] As a possible implementation, the vacuum conveying system in the embodiment of the present application further comprises an active damping device, and the active damping device is arranged below the main chamber.

[0075] It should be noted that the vacuum conveying system in the embodiment of the present application can comprise various components of the above-mentioned embodiments of the vacuum conveying device and achieve the same effects and functions, which will not be described here.

[0076] Although the illustrative embodiments of the present application have been described and illustrated in detail in the above description and accompanying drawings, they should be considered as illustrative and not restrictive, and it should be understood that only certain exemplary embodiments have been shown and described and that all changes and modifications that are within the spirit of the claimed invention are intended to be embraced by the scope of the invention as defined by the appended claims. It should be understood that although the words such as "preferred", "preferably", "preferred" or "more preferably" are used in the above description, it can not be necessary and it can be envisaged that the embodiments without these features are within the scope of the invention, which is defined by the appended claims. When reading the claims, the words such as "one", "one", "at least one" or "at least one part" are not intended to limit the claims to only one item, unless specifically stated in the claims. When the language "at least one part" and / or "a part" is used, the item can include a part and / or the whole item, unless specifically stated otherwise.

[0077] While the principles and spirit of the present application have been described above with reference to several specific embodiments, it is to be understood that the application is not limited to the disclosed specific embodiments, nor does the division of the aspects imply that features from the aspects cannot be combined. It is intended that the application encompass various modifications and equivalent arrangements included within the spirit and scope of the appended claims.

Claims

1. A vacuum conveying apparatus, characterized in that, It includes an exchange chamber vacuum pump group and a main chamber vacuum pump group. The main chamber vacuum pump group is connected to the main chamber of the vacuum transmission system, and the exchange chamber vacuum pump group is connected to the exchange chamber of the vacuum transmission system. The exchange chamber is connected to the main chamber through an isolation valve, and the volume of the main chamber is larger than the volume of the exchange chamber. The main chamber vacuum pump assembly is used to reduce the air pressure in the main chamber; The vacuum pump unit in the exchange chamber is used to reduce the air pressure in the exchange chamber; When the isolation valve is open, it allows the transfer device in the exchange chamber to transfer the sample to the main chamber.

2. The vacuum conveying apparatus of claim 1, wherein, The main chamber vacuum pump assembly includes: a main chamber connecting pump, a main chamber fore-pump, a main chamber fore-pump, a main chamber fore-pump valve, and a main chamber vacuum gauge; The first end of the main chamber connecting pump is connected to the main chamber, and the main chamber fore-pump is connected to the second end of the main chamber connecting pump through the main chamber fore-pump valve; The main chamber vacuum gauge is connected to the main chamber and is used to measure the air pressure inside the main chamber.

3. The vacuum conveying apparatus of claim 2, wherein, The main chamber pre-pump is used to make the air pressure in the main chamber less than or equal to the third air pressure threshold. The main chamber connecting pump and the main chamber pre-pump are used to keep the air pressure in the main chamber below a first air pressure threshold. The third air pressure threshold is greater than the first air pressure threshold.

4. The vacuum conveyor apparatus of claim 1, wherein, The main chamber vacuum pump unit also includes a main chamber vent valve; The first end of the main chamber vent valve is connected to the main chamber, and the second end of the main chamber vent valve is connected to nitrogen.

5. The vacuum conveyor apparatus of claim 1, wherein, The vacuum pump assembly for the exchange chamber includes: an exchange chamber connecting pump, an exchange chamber vacuum gauge, a bypass valve, an exchange chamber pre-stage valve, and an exchange chamber pre-stage pump. The first end of the exchange chamber connecting pump is connected to the exchange chamber, and the exchange chamber pre-pump is connected to the second end of the exchange chamber connecting pump through the exchange chamber pre-pump valve; The first end of the vacuum gauge of the exchange chamber is connected to the exchange chamber, and the vacuum gauge of the exchange chamber is used to measure the air pressure inside the exchange chamber; The first end of the bypass valve is connected to the first end of the vacuum gauge of the exchange chamber, and the second end of the bypass valve is connected to the second end of the pump connected to the exchange chamber.

6. The vacuum conveyor apparatus of claim 5, wherein, The pre-pump of the exchange chamber is used to make the air pressure in the exchange chamber less than or equal to the fourth air pressure threshold. The pre-pump and the connecting pump of the exchange chamber are used to keep the air pressure in the exchange chamber below a second air pressure threshold.

7. The vacuum conveyor apparatus of claim 5, wherein, The vacuum pump unit for the exchange chamber also includes an vent valve for the exchange chamber. The first end of the vent valve of the exchange chamber is connected to the first end of the bypass valve, and the second end of the vent valve of the exchange chamber is connected to nitrogen.

8. A vacuum conveyor system characterized by, It includes a main chamber, an exchange chamber, an isolation valve, an exchange chamber vacuum pump group, and a main chamber vacuum pump group. The main chamber vacuum pump group is connected to the main chamber, and the exchange chamber vacuum pump group is connected to the exchange chamber. The exchange chamber is connected to the main chamber through an isolation valve, and the volume of the main chamber is larger than the volume of the exchange chamber. The main chamber vacuum pump assembly is used to reduce the air pressure in the main chamber; The vacuum pump unit in the exchange chamber is used to reduce the air pressure in the exchange chamber; When the isolation valve is open, it allows the transfer device in the exchange chamber to transfer the sample to the main chamber.

9. The vacuum conveyor system of claim 8, wherein, The main chamber vacuum pump assembly includes: a main chamber connecting pump, a main chamber fore-pump, a main chamber fore-pump, a main chamber fore-pump valve, and a main chamber vacuum gauge; The main chamber connects a first end of a pump to the main chamber, and the main chamber forepump connects a second end of the main chamber connects pump through the main chamber forevalve to the main chamber. The main chamber vacuum gauge is connected to the main chamber, and the main chamber vacuum gauge is used to measure the air pressure in the main chamber.

10. The vacuum conveyor system of claim 8, wherein, An active damping device is also included, and the active damping device is disposed below the main chamber.

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