Laser processing equipment under vacuum environment

Abstract

The utility model relates to laser processing equipment in a vacuum environment, which comprises a base, a vacuum device arranged on the base and used for placing a workpiece, a dynamic focusing mechanism used for processing and scanning the workpiece, and a lifting driving mechanism used for driving the dynamic focusing mechanism to do lifting motion, the driving end of the lifting driving mechanism is connected with the dynamic focusing mechanism, the lifting driving mechanism is located on one side of the vacuum device, the dynamic focusing mechanism is located above the vacuum device, the vacuum device comprises a vacuum box body, and a vacuum cavity used for containing a machined part is formed in the vacuum box body. A protection window with a quartz lens is arranged at the top end of the vacuum box body, an observation window is arranged at the side end of the vacuum box body, and an interface assembly used for being connected with a vacuum generator, an air pressure detection meter and a dust collecting device is arranged on the vacuum box body. The laser processing equipment not only meets the vacuum processing requirement of the processed part, but also improves the processing efficiency and the processing universality.

Description

TECHNICAL FIELD

[0001] The utility model relates to galvanometer processing technical field, in particular to a laser processing equipment under vacuum environment. BACKGROUND

[0002] The laser processing equipment in prior art directly carries out laser cutting processing to the workpiece on the platform, due to the special environment requirement of certain workpiece, needs processing under vacuum environment, however the existing laser processing equipment cannot satisfy the processing requirement of this kind of workpiece under vacuum environment. SUMMARY

[0003] The utility model solves the technical problem to provide a laser processing equipment under vacuum environment, the laser processing equipment not only satisfies the vacuum processing requirement of workpiece, improves processing efficiency and processing versatility.

[0004] The utility model solves the technical problem adopting the technical scheme: a laser processing equipment under vacuum environment, including base, the base is provided with vacuum device for placing workpiece, the dynamic focusing mechanism for processing scanning to workpiece and the lifting drive mechanism for driving dynamic focusing mechanism and lifting motion, the drive end of lifting drive mechanism is connected with dynamic focusing mechanism, lifting drive mechanism is located one side of vacuum device, and dynamic focusing mechanism is located above vacuum device.

[0005] The vacuum device includes vacuum box body, is provided with vacuum cavity for placing workpiece in vacuum box body, is provided with the protection window with quartz mirror on the top end of vacuum box body, is provided with observation window on the side end of vacuum box body, and is provided with interface assembly for being connected with vacuum generator, air pressure detection table and dust collection device on vacuum box body.

[0006] In one embodiment, the dynamic focusing mechanism of the laser processing equipment under vacuum environment includes an adapter plate and a galvanometer, one end of the adapter plate is connected with the drive end of the lifting drive mechanism, the other end of the adapter plate is connected with the galvanometer, and the side end of the galvanometer is provided with a high-precision position sensor for detecting the distance between the dynamic focusing mechanism and the workpiece.

[0007] In one embodiment, the lifting drive mechanism of the laser processing equipment under vacuum environment includes a support seat and a lifting platform, the support seat is installed on the base, and the lifting platform is installed on the support seat.

[0008] In one embodiment, the vacuum box body of the laser processing equipment under vacuum environment is an integrally welded structure, and the material of the vacuum box body is stainless steel.

[0009] In one embodiment, the vacuum chamber of the laser processing equipment in the vacuum environment is provided with a door, which is hinged to the vacuum chamber, and the observation window is installed on the door.

[0010] In one embodiment, the vacuum chamber of the laser processing equipment in the vacuum environment is provided with an adjustment component for adjusting the position of the workpiece. The adjustment component includes a tray, a rotary drive component for driving the workpiece to rotate, and a dual-axis drive component. The rotary drive component is mounted on the tray, and a fixing component for fixing the workpiece is provided on the drive end of the rotary drive component. The dual-axis drive component is mounted in the vacuum chamber, and the drive end of the dual-axis drive component is connected to the tray. The tray and the vacuum chamber slide together.

[0011] The beneficial effects of this application are as follows:

[0012] This application provides a laser processing device in a vacuum environment. The laser processing device, by setting up a vacuum device, a dynamic focusing mechanism and a lifting drive mechanism in coordination, can realize laser processing operation on the workpiece inside the vacuum device. Furthermore, the lifting drive mechanism drives the dynamic focusing mechanism to perform lifting and lowering movements. The focal length of the dynamic focusing mechanism on the workpiece can be adjusted according to the type of workpiece to ensure the accuracy of scanning, thereby improving the processing precision and efficiency of the workpiece.

[0013] The vacuum device of this laser processing equipment, in conjunction with the vacuum generator, effectively guarantees the processing environment of the workpiece and ensures the processing requirements under vacuum conditions.

[0014] The laser processing equipment in this vacuum environment uses a high-precision position sensor to detect the height of the galvanometer, which ensures the accuracy of the processing focal length and also guarantees the consistency of the laser processing spot. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of a laser processing device in a vacuum environment, as described in an embodiment of this application.

[0016] Figure 2 This is a schematic diagram from another perspective of a laser processing device in a vacuum environment, as an embodiment of this application.

[0017] Figure 3 This is a schematic diagram of the adjustment components of a laser processing device in a vacuum environment, as described in an embodiment of this application.

[0018] in:

[0019] 1. Base; 2. Vacuum device; 3. Dynamic focusing mechanism; 4. Lifting drive mechanism; 21. Vacuum chamber; 22. Protective window; 23. Observation window; 24. Interface assembly; 25. Chamber door; 26. Adjustment assembly; 261. Tray; 262. Rotation drive assembly; 263. Dual-axis drive assembly; 264. Fixing assembly; 31. Adapter plate; 32. Galvanometer; 33. High-precision position sensor; 41. Support base; 42. Lifting platform. Detailed Implementation

[0020] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0021] like Figure 1 As shown, an embodiment of this application provides a laser processing device in a vacuum environment, including a base 1. The base 1 is provided with a vacuum device 2 for placing a workpiece, a dynamic focusing mechanism 3 for scanning the workpiece, and a lifting drive mechanism 4 for driving the dynamic focusing mechanism 3 to move up and down. The driving end of the lifting drive mechanism 4 is connected to the dynamic focusing mechanism 3. The lifting drive mechanism 4 is located on one side of the vacuum device 2, and the dynamic focusing mechanism 3 is located above the vacuum device 2.

[0022] The vacuum device 2 includes a vacuum chamber 21, which contains a vacuum cavity for placing the workpiece. The top of the vacuum chamber 21 is provided with a protective window 22 with a quartz lens, and the side of the vacuum chamber 21 is provided with an observation window 23. The vacuum chamber 21 is provided with an interface assembly 24 for connecting to a vacuum generator, a pressure gauge and a dust collection device.

[0023] Specifically, the lifting driving mechanism 4 and the vacuum device 2 are installed on the base 1 through high-strength bolts, and the driving end of the lifting driving mechanism 4 is connected with the dynamic focusing mechanism 3. The workpiece is placed in the vacuum box body 21 of the vacuum device 2, then the box door 25 of the vacuum box body 21 is closed, then the vacuum cavity of the vacuum box body 21 is subjected to vacuumizing treatment by the vacuum generator, when the pressure detection table detects that the pressure value in the vacuum box body 21 reaches the specified pressure value, the vacuum generator is turned off to ensure that the pressure of the vacuum cavity is constant, then the dust collecting device is opened, and then the vacuum generator is turned on again, and when the internal pressure is constant, the inert gas channel is opened to restore the pressure of the vacuum cavity, and then the inert gas circulation is performed. The lifting driving mechanism 4 drives the dynamic focusing mechanism 3 to move up and down, when the dynamic focusing mechanism 3 reaches the specified height, the light path of the galvanometer 32 of the dynamic focusing mechanism 3 passes through the protective window 22 with a quartz lens of the vacuum box body 21 to scan and position the workpiece in the vacuum box body 21, and the laser is installed on one side of the dynamic focusing mechanism 3, and the galvanometer 32 precisely controls the position of the laser processing of the laser. The dust particles generated in the processing process are discharged out of the vacuum box body 21 through the dust collector. The pressure detection table monitors the pressure value in the vacuum box body 21 in real time to ensure the pressure of the vacuum box body 21. The processing state of the workpiece can be observed through the observation window 23 on the vacuum box body 21.

[0024] In the above structure, by arranging the vacuum device 2, the sealing property of the workpiece during processing is ensured, and the stability of the processing environment is also ensured. By arranging the lifting driving mechanism 4 to drive the dynamic focusing mechanism 3 to adjust the processing focal length of the workpiece, the processing accuracy and processing efficiency of the workpiece can be ensured, and the device can be applied to various specifications of workpieces. The laser processing device not only meets the vacuum processing requirements of the workpiece, but also improves the processing efficiency and processing versatility.

[0025] As shown in Figure 2 In one embodiment, the dynamic focusing mechanism 3 of the laser processing device in the vacuum environment includes an adapter plate 31 and a galvanometer 32, one end of the adapter plate 31 is connected with the driving end of the lifting driving mechanism 4, the other end of the adapter plate 31 is connected with the galvanometer 32, and the side end of the galvanometer 32 is provided with a high-precision position sensor 33 for detecting the distance between the dynamic focusing mechanism 3 and the workpiece. The high-precision position sensor 33 can detect the distance between the galvanometer 32 and the workpiece, and the lifting driving mechanism 4 adjusts the height of the galvanometer 32 according to the distance detection signal. The arrangement of the high-precision position sensor 33 improves the accuracy of the lifting driving mechanism 4 driving the galvanometer 32 to adjust, ensures that the processing focal length precision of the galvanometer 32 when processing different workpieces reaches the micron level, ensures the consistency of the laser processing spot, and improves the processing accuracy and processing efficiency.

[0026] As shown in Figure 2As shown in the drawings, in one of the embodiments, the lifting driving mechanism 4 of the laser processing equipment in the vacuum environment comprises a support base 41 and a lifting platform 42, the support base 41 is installed on the base 1, and the lifting platform 42 is installed on the support base 41. This setting facilitates the driving of the galvanometer 32 to adjust the height up and down, thereby improving the versatility of the equipment.

[0027] As shown in the drawings, Figure 1 As shown in the drawings, in one of the embodiments, the vacuum box 21 of the laser processing equipment in the vacuum environment is a structure of integral welding, and the material of the vacuum box 21 is stainless steel. The integral welding setting improves the airtightness of the vacuum box 21. The setting of the stainless steel material improves the durability of the vacuum box 21.

[0028] As shown in the drawings, Figure 1 and Figure 2 As shown in the drawings, in one of the embodiments, the vacuum box 21 of the laser processing equipment in the vacuum environment is provided with a box door 25, the box door 25 is hinged with the vacuum box 21, and the observation window 23 is installed on the box door 25.

[0029] As shown in the drawings, Figure 3 As shown in the drawings, in one of the embodiments, the vacuum box 21 of the laser processing equipment in the vacuum environment is provided with an adjusting assembly 26 for adjusting the position of the workpiece, the adjusting assembly 26 comprises a supporting plate 261, a rotating driving assembly 262 for driving the workpiece to rotate, and a double-shaft driving assembly 263, the rotating driving assembly 262 is installed on the supporting plate 261, a fixing assembly 264 for fixing the workpiece is arranged on the driving end of the rotating driving assembly 262, the double-shaft driving assembly 263 is installed in the vacuum box 21, the driving end of the double-shaft driving assembly 263 is connected with the supporting plate 261, and the supporting plate 261 is in sliding fit with the vacuum box 21. The workpiece is placed on the fixing assembly 264 of the rotating driving assembly 262, the rotating driving assembly 262 drives the workpiece to rotate to adjust the processing position, and the double-shaft driving assembly 263 can drive the supporting plate 261 to drive the rotating assembly and the workpiece to adjust the horizontal position. This setting facilitates the driving of the workpiece to adjust the position, thereby improving the processing efficiency and the processing accuracy.

[0030] The above-mentioned embodiments only express several implementation manners of the present application, the description is more specific and detailed, but it cannot be understood as the limitation of the scope of the present application. It should be pointed out that, for ordinary skilled in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which all belong to the protection scope of the present application. Therefore, the protection scope of the present application patent should be subject to the appended claims.

Claims

1. A laser processing device for use in a vacuum environment, characterized in that, Includes a base (1), on which is provided a vacuum device (2) for placing the workpiece, a dynamic focusing mechanism (3) for scanning the workpiece, and a lifting drive mechanism (4) for driving the dynamic focusing mechanism (3) to move up and down. The driving end of the lifting drive mechanism (4) is connected to the dynamic focusing mechanism (3). The lifting drive mechanism (4) is located on one side of the vacuum device (2), and the dynamic focusing mechanism (3) is located above the vacuum device (2). The vacuum device (2) includes a vacuum chamber (21), which is provided with a vacuum cavity for placing the workpiece. A protective window (22) with a quartz lens is provided at the top of the vacuum chamber (21), and an observation window (23) is provided at the side of the vacuum chamber (21). An interface assembly (24) for connecting to a vacuum generator, a pressure gauge and a dust collection device is provided on the vacuum chamber (21).

2. The laser processing equipment in a vacuum environment according to claim 1, characterized in that, The dynamic focusing mechanism (3) includes a converter plate (31) and a galvanometer (32). One end of the converter plate (31) is connected to the driving end of the lifting drive mechanism (4), and the other end of the converter plate (31) is connected to the galvanometer (32). A high-precision position sensor (33) for detecting the distance between the dynamic focusing mechanism (3) and the workpiece is provided on the side of the galvanometer (32).

3. The laser processing equipment in a vacuum environment according to claim 1, characterized in that, The lifting drive mechanism (4) includes a support base (41) and a lifting platform (42). The support base (41) is mounted on the base (1), and the lifting platform (42) is mounted on the support base (41).

4. The laser processing equipment in a vacuum environment according to claim 1, characterized in that, The vacuum chamber (21) is an integrally welded structure, and the material of the vacuum chamber (21) is stainless steel.

5. The laser processing equipment in a vacuum environment according to claim 1, characterized in that, The vacuum chamber (21) is provided with a door (25), which is hinged to the vacuum chamber (21), and the observation window (23) is installed on the door (25).

6. The laser processing equipment in a vacuum environment according to claim 1, characterized in that, The vacuum chamber (21) is provided with an adjustment assembly (26) for adjusting the position of the workpiece. The adjustment assembly (26) includes a tray (261), a rotary drive assembly (262) for driving the workpiece to rotate, and a dual-axis drive assembly (263). The rotary drive assembly (262) is mounted on the tray (261). A fixing assembly (264) for fixing the workpiece is provided on the drive end of the rotary drive assembly (262). The dual-axis drive assembly (263) is installed inside the vacuum chamber (21). The drive end of the dual-axis drive assembly (263) is connected to the tray (261). The tray (261) and the vacuum chamber (21) are in sliding fit.

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