Tool clamp for polishing small-size crystals

By designing a tooling fixture for polishing small-sized crystals, the problems of low efficiency and high cost of polishing single small-sized crystals are solved. This enables independent control of each component and arbitrary removal rate in batch processing, making it suitable for low-cost production of crystals of different specifications.

CN223719219UActive Publication Date: 2025-12-26SENYI QUANTUM TECH (XIAMEN) CO LTD
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Patent Information

Application Number
CN202520091495.7
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-01-15
Publication Date
2025-12-26
Estimated Expiration
2035-01-15

AI Technical Summary

Technical Problem

Polishing small-sized crystals on a single wafer is inefficient and costly, and traditional disc polishing suffers from uneven removal, making it difficult to meet the needs of large-scale industrial production.

Method used

A tooling fixture for polishing small-sized crystals was designed, including a trimming ring, a polishing planetary plate, a pressure column, and a sample frame. Through optimized design, each component can be polished independently to avoid interference with the removal rate, and the sample frame is fixed by magnetic attraction or limiting structure.

Benefits of technology

It enables independent control of each component during batch polishing, improving polishing efficiency, reducing costs, and is suitable for crystal processing of different specifications and types.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a tool clamp for polishing small-size crystals. The tool clamp comprises a finishing ring, a polishing wandering star piece and a pressing column. The polishing wandering star piece is arranged in the finishing ring and detachably connected with the finishing ring, the outer diameter of the polishing wandering star piece is matched with the inner diameter of the finishing ring, and the polishing wandering star piece is provided with a through hole. The pressing column is arranged in the through hole, the outer diameter of the pressing column is matched with the diameter of the through hole, an inner cavity is formed in the end, making contact with the polishing disc, of the pressing column and used for containing the sample frame, the sample frame is provided with a middle hole used for containing samples, different specifications can be designed according to the samples of different sizes, and flexible and flexible use is achieved. Batch polishing of small-size crystals or glass of different specifications and different types is achieved, the polishing removal rates of single elements do not interfere with one another, and both time and effect can be controlled at will.
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Description

TECHNICAL FIELD

[0001] The utility model relates to the field of crystal processing, concretely relates to a tool fixture for small size crystal polishing. BACKGROUND

[0002] The polishing of the surface of small size crystal is generally carried out in the combined disc mode to reach the surface required by the customer or the next process, but the crystal of some special materials cannot be polished in the combined disc mode due to its physical properties, such as high temperature of the disc which can cause cracking, thin thickness of the crystal which is easy to break, poor surface type which cannot be put on the disc, and brittle crystal which is easy to collapse, and the like, so that only single piece polishing can be carried out. The single piece polishing is low in efficiency and high in cost, and cannot meet the needs of large-scale industrial production.

[0003] The existing polishing mode of small size crystal element is divided into two kinds, one is to use cold glue or hot wax to bond the disc, and the polishing is carried out in batches in the disc, which is high in efficiency and low in cost, but the polishing is carried out in the same disc, the time is consistent, the grinding force is consistent, the size removal is consistent, and the problems of partial polishing not in place or partial polishing excess are easily caused; the second kind is to use single piece polishing, which is slow in speed, high in cost, and can only be used for small batch processing of individual high value crystal. SUMMARY

[0004] In view of the above deficiencies of the prior art, the utility model aims to improve the efficiency and save the cost through the design of a tool fixture for small size crystal polishing.

[0005] In order to achieve the above purpose, the utility model provides a technical scheme that a tool fixture for small size crystal polishing is composed of the following parts: a dressing ring, one end of which in contact with the polishing disc is provided with a concave-convex staggered flow groove, which facilitates the flow of polishing liquid on the polishing pad and simultaneously plays the role of fixing the polishing star piece and dressing the polishing disc; a polishing star piece, which is detachably connected in the dressing ring, the outer diameter of which matches the inner diameter of the dressing ring, and the inside of the polishing star piece has different specifications of through holes for fixing the polishing product; a plurality of pressure columns are arranged in the through holes of the polishing star piece, the outer diameter of which matches the diameter of the through hole, and the pressure column has a certain weight, which plays the role of applying pressure to the sample; one end of the pressure column in contact with the polishing disc is provided with an inner cavity for accommodating a sample frame, and the space volume of the inner cavity matches the sample frame.

[0006] In one preferred embodiment, a limiting and fixing structure matched with the sample frame is arranged in the inner cavity, which realizes the fixation of the sample frame and limits the axial movement of the sample frame and the sample in the pressure column. The limiting and fixing structure is a limiting protrusion or a limiting groove.

[0007] In one preferred embodiment, the sample frame is connected to the pressure column by magnetic attraction.

[0008] The structural features of the present application mainly include:

[0009] 1. The present application realizes batch polishing at the same time, and each element is independently processed, and the polishing removal rate does not interfere with each other, and the number can be more or less, and can be increased or reduced at any time, and is convenient to take, and solves a series of shortcomings of traditional processes.

[0010] 2. The device is cheap and can realize low-cost production. BRIEF DESCRIPTION OF DRAWINGS

[0011] Figure 1 is a use state schematic diagram of the present application.

[0012] Figure 2 is a structure schematic diagram of the present application.

[0013] Figure 3 is a schematic diagram of the dressing ring of the present application.

[0014] Figure 4 is a schematic diagram of the polishing star plate of the present application.

[0015] Figure 5 is an assembly schematic diagram of the pressure column and the sample frame of the present application.

[0016] Figure 6 is Figure 5 a cross-sectional schematic diagram.

[0017] Figure 7 is a cross-sectional schematic diagram of one embodiment.

[0018] Figure 8 is a cross-sectional schematic diagram of another embodiment.

[0019] Reference signs: 1, dressing ring; 2, polishing star plate; 3, pressure column; 4, sample frame; 5, flow groove; 6, through hole; 8, inner cavity; 9, limiting bump; 10, limiting groove; 12, polishing disc; 13, polishing pad; 14, supporting wheel; 15, sample. DETAILED DESCRIPTION

[0020] In order to better understand the technical scheme of the utility model, the utility model embodiments are described in detail below in combination with specific embodiments. It should be clear that the described embodiments are only some of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the utility model protection.

[0021] The terms used in the embodiments of the utility model are only for the purpose of describing specific embodiments, and are not intended to limit the utility model. The singular forms "a", "said" and "the" used in the embodiments of the utility model and the appended claims are also intended to include the plural forms, unless the context clearly indicates otherwise. The test materials used in the utility model are all ordinary commercially available products and can be purchased in the market.

[0022] Referring to Figures 1 to 4 A tool fixture for small-size crystal polishing, as shown in the drawings, comprising a trimming ring 1, a polishing star plate 2 and a pressing column 3, wherein the end of the trimming ring 1 in contact with the polishing disc is provided with a concave-convex staggered flow groove 5, as shown in Figure 3 The flow groove 5 can facilitate the flow of polishing liquid on the polishing pad, and at the same time play the role of fixing the polishing star plate 2 and trimming the polishing disc 12. The polishing star plate 2 is placed in the trimming ring 1 and is detachably connected with the trimming ring 1, the outer diameter of the polishing star plate 2 matches the inner diameter of the trimming ring 1, and the inside of the polishing star plate 2 has different specifications of through holes 6 for fixing the polishing product. The polishing star plate 2 is preferably not to damage the material of the polishing pad 13, such as plastic products. A plurality of pressing columns 3 are placed in the through holes 6 of the polishing star plate 2, the outer diameter of the pressing columns 3 matches the diameter of the through holes 6, and the pressing columns 3 can freely rotate in the through holes 6 along with the rotation of the polishing disc 12. Further, the pressing column 3 has a certain weight, which plays the role of pressing the sample 15. Referring to Figure 5 The end of the pressing column 3 in contact with the polishing disc is provided with an inner cavity 8 for accommodating the sample frame 4, and the space volume of the inner cavity 8 is just enough to accommodate the sample frame 4, that is, when the sample frame 4 is placed in the inner cavity 8, the surface of the sample frame 4 is flush with the edge of the pressing column 3, or slightly higher than the edge of the pressing column 3, as shown in the cross-sectional view of Figure 6 .

[0023] Further, referring to Figure 5 The sample frame 4 is provided with a central hole for placing the sample 15, and different specifications can be designed according to different sizes of the sample 15 for flexible and flexible use.

[0024] In one preferred embodiment, the inner diameter of the inner cavity 8 matches the outer diameter of the sample frame 4, but the height of the inner cavity 8 exceeds the thickness of the sample frame 4, and a limiting and fixing structure is arranged in the inner cavity 8 to cooperate with the sample frame 4, so as to fix the sample frame 4 and limit the axial movement of the sample frame 4 and the sample 15 in the pressure column 3. The limiting and fixing structure can be a limiting protrusion 9 on the inner wall of the inner cavity 8 (see Fig. 1). The limiting and fixing structure can also be a limiting groove 10 arranged on the wall of the inner cavity 8 (see Fig. 2), and the limiting groove 10 is uniformly arranged symmetrically along the circumference of the pressure column 3, and the sample frame 4 is provided with a lug (not shown in the figure) matched with the limiting groove 10, so that the sample frame 4 rotates synchronously with the pressure column 3. Figure 7 Figure 8

[0025] In one preferred embodiment, the sample frame 4 is connected with the pressure column 3 by magnetic attraction.

[0026] Specific embodiments: Place the dressing ring 1 on the surface of the polishing pad 13 close to the polishing machine base wheel 14; place the polishing star plate 2 in the dressing ring 1; place the sample frame 4 in the inner cavity 8 of the pressure column 3, clamp the sample 15 to be polished, and place it in the sample frame 4; place the pressure column 3 into the through hole 6 of the polishing star plate 2, and the end with the sample 15 is in contact with the polishing pad 13. After placing other samples 15 to be polished, turn on the power, add the polishing liquid, and turn on the main shaft. The polishing disc 12 rotates, driving the dressing ring 1 to rotate and the polishing star plate 2 to rotate, and the pressure column 3 to rotate, and the sample 15 is polished by the vertical downward pressure of the pressure column 3. After a certain period of time, check whether the surface of each wafer is polished to the required position, and if so, take it out, otherwise, continue to polish; turn over for the second surface polishing.

[0027] The above description is only a preferred embodiment of the present application, and is not intended to limit the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.​​

Claims

1. A tooling fixture for small size crystal polishing, characterized in that, The polishing device comprises a trimming ring, a polishing star plate and a pressing column; the polishing star plate is arranged in the trimming ring and detachably connected with the trimming ring, the outer diameter of the polishing star plate matches the inner diameter of the trimming ring, and the polishing star plate is provided with a through hole; the pressing column is arranged in the through hole and the outer diameter of the pressing column matches the diameter of the through hole, and the end of the pressing column in contact with the polishing disc is provided with an inner cavity for accommodating a sample frame, and the sample frame is provided with a middle hole for placing a sample.

2. A tooling fixture for polishing small size crystals as defined in claim 1, wherein, The end of the trimming ring in contact with the polishing disc is provided with concave-convex staggered flow grooves.

3. The tooling fixture for polishing small size crystals of claim 1, wherein, The space volume of the inner cavity matches the sample frame.

4. The tooling fixture for polishing small size crystals of claim 1, wherein, The inner cavity is provided with a limiting and fixing structure matched with the sample frame, for fixing the sample frame and limiting the axial movement of the sample frame and the sample in the pressing column.

5. A tooling fixture for polishing small size crystals as defined in claim 4, wherein, The limiting and fixing structure is a limiting block or a limiting groove.

6. The tooling fixture for polishing small size crystals of claim 1, wherein, The sample frame is connected with the pressing column in a magnetic attraction mode.