Dust-free storage device for silicon carbide wafers

Abstract

The dust-free silicon carbide wafer storage device comprises a shell, a rotating disc is arranged at the bottom in the shell, the upper portion of the rotating disc is fixedly connected with a base, a plurality of positioning grooves distributed in a matrix mode are formed in the upper end of the base, a shaft rod is connected to the middle of the upper portion of the base in an inserted mode, and a movable plate is arranged at the position, located on one side of the shaft rod, of the upper end of the shell. A through groove is formed in the middle of the movable plate, bristles are arranged on the two sides in the through groove, a clamping block is arranged in the middle of the side, away from the shaft rod, of the movable plate, a clamping groove matched with the clamping block is formed in the shell, a cover plate is arranged at the position, located above the movable plate, of the shell, and a connecting pipe is arranged at the upper end of the side, close to the movable plate, of the shell. The storage device is simple in structure and good in wafer protection effect, the wafers are convenient to take and place, the phenomenon that dust enters the storage device in the wafer storage process is effectively avoided, and the follow-up machining smoothness of the wafers is effectively guaranteed.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer storage technical field, especially a silicon carbide wafer dustless storage device. BACKGROUND

[0002] The silicon wafer is the silicon element purification, then these pure silicon is made into long silicon crystal bar, becomes the material of quartz semiconductor of manufacturing integrated circuit, after the photographic process, grinds, polishes, slices etc. procedure, the polycrystalline silicon is fused and pulled out single crystal silicon crystal bar, then is cut into a piece a piece thin wafer, and the wafer is the basic raw material of manufacturing IC, in the production process of wafer, it is inevitable to store the wafer, and the usual practice is to directly prevent the wafer on the storage rack, and the storage rack is exposed to air, which can easily cause dust accumulation on the wafer surface, affecting subsequent production, therefore, we provide a silicon carbide wafer dustless storage device. UTILITY MODEL CONTENTS

[0003] In order to solve the above problems, the utility model provides a silicon carbide wafer dustless storage device. The utility model solves the problem that the wafer is inevitably stored in the production process of wafer, and the usual practice is to directly prevent the wafer on the storage rack, and the storage rack is exposed to air, which can easily cause dust accumulation on the wafer surface, affecting subsequent production.

[0004] The utility model discloses a silicon carbide wafer dustless storage device, including the casing, the bottom of casing is equipped with the carousel, carousel top is fixedly connected with the base, the base upper end is equipped with a plurality of positioning slots of the radial matrix arrangement, the shaft rod is inserted in the middle of base top, the movable plate is equipped with the through slot in the middle, the movable plate is equipped with the brush in the through slot, the movable plate is equipped with the clamping block in the middle away from the shaft rod, the casing is equipped with the clamping groove matched with the clamping block, the casing is equipped with the cover plate above the movable plate, the connecting pipe is equipped with the connecting pipe on the side of casing near the movable plate upper end, and the connecting pipe is extended to the movable plate below in the one end of casing.

[0005] In the scheme, the cover plate is equipped with four positioning blocks of the matrix arrangement below, and the casing is equipped with the positioning hole matched with the positioning block.

[0006] In the scheme, the casing is equipped with the arc groove on the side away from the shaft rod of movable plate.

[0007] In the scheme, the valve is equipped on the connecting pipe.

[0008] In the scheme, the rubber pad is equipped in the positioning slot.

[0009] In the scheme, the shaft rod is fixedly connected with the rotating disc through the casing above, and the rotating disc is equipped with the antiskid line outside.

[0010] In the scheme, the shell is provided with four anti-skid blocks arranged in a matrix below.

[0011] The advantages and beneficial effects of the utility model lie in: the utility model provides a silicon carbide wafer dust-free storage device, the transmission of the shaft rod makes the base rotate, when the base rotates, the positioning groove above the base can pass through the through groove in sequence, so that the round crystal can pass through the through groove and be placed in the positioning groove, when the round crystal passes through the through groove, the bristles can clean the dust on the surface of the round crystal, meanwhile, the connecting pipe is connected with the air extraction equipment, when the air extraction equipment works, it extracts air in the shell through the connecting pipe, so that the dust cleaned by the bristles can be discharged through the connecting pipe. BRIEF DESCRIPTION OF DRAWINGS

[0012] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all the other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0013] Figure 1 It is a structural schematic view of the utility model;

[0014] Figure 2 It is a structural schematic view of the utility model after the cover plate is split;

[0015] Figure 3 It is a sectional view of the utility model;

[0016] Figure 4 It is a structural schematic view of part A of the utility model.

[0017] In the drawing: 1, shell 2, rotating disc 3, base 4, positioning groove

[0018] 5, shaft rod 6, movable plate 7, through groove 8, bristle

[0019] 9, clamping block 10, clamping groove 11, cover plate 12, positioning block

[0020] 13, positioning hole 14, arc groove 15, connecting pipe 16, valve

[0021] 17, rubber pad 18, rotating disc 19, anti-skid pattern 20, anti-skid block. Detailed Implementation

[0022] The specific embodiments of this utility model will be further described below with reference to the accompanying drawings and examples. The following examples are only used to more clearly illustrate the technical solution of this utility model and should not be construed as limiting the scope of protection of this utility model.

[0023] like Figures 1-4 As shown, this utility model is a cleanroom storage device for silicon carbide wafers, including a housing 1. A turntable 2 is located at the bottom of the housing 1, and the turntable 2 is movably connected to the housing 1. The upper part of the turntable 2 is fixedly connected to a base 3. The turntable 2 allows the base 3 to rotate inside the housing 1. The upper end of the base 3 has multiple radially arranged positioning slots 4, which can be placed inside the positioning slots 4 for stable storage. A shaft 5 is inserted into the center of the upper part of the base 3. A movable plate 6 is located on one side of the shaft 5 at the upper end of the housing 1. The end of the movable plate 6 near the shaft 5 is movably connected to the housing 1. A through groove 7 is located in the center of the movable plate 6. Brushes 8 are provided on both sides of the through groove 7. Wafers can be placed inside the positioning slots 4 through the through groove 7. When the wafer passes through the through groove 7, the brushes 8 can... To clean the dust on the surface of the wafer, the movable plate 6 has a locking block 9 in the middle on the side away from the shaft 5. The housing 1 has a locking groove 10 that matches the locking block 9. The locking block 9 can be locked into the locking groove 10. Through the cooperation between the locking block 9 and the locking groove 10, the movable plate 6 and the housing 1 can be stably connected. The housing 1 has a cover plate 11 above the movable plate 6. The cover plate 11 can seal the through groove 7. The cover plate 11 can effectively prevent dust from entering the housing 1. The upper end of the housing 1 near the movable plate 6 has a connecting pipe 15. The connecting pipe 15 extends from the inside of the housing 1 to the bottom of the movable plate 6. The connecting pipe 15 can be connected to an external air extraction device. When the air extraction device is working, it extracts air from the inside of the housing 1 through the connecting pipe 15, so that the dust cleaned by the brush 8 can be discharged through the connecting pipe 15.

[0024] The cover plate 11 is provided with four positioning blocks 12 arranged in a matrix below it. The housing 1 is provided with positioning holes 13 that match the positioning blocks 12. The positioning blocks 12 are inserted into the positioning holes 13. Through the mutual cooperation between the positioning blocks 12 and the positioning holes 13, the cover plate 11 and the housing 1 can be stably connected.

[0025] The housing 1 has an arc groove 14 on the side of the movable plate 6 away from the shaft 5. The arc groove 14 makes it easier to open and close the movable plate 6.

[0026] The connecting pipe 15 is equipped with a valve 16, which can control the opening and closing of the connecting pipe 15.

[0027] The rubber pad 17 is arranged in the positioning groove 4, and can protect the contact surface between the wafer and the positioning groove 4, so that the wafer and the positioning groove 4 are prevented from being damaged.

[0028] The shaft 5 is fixedly connected with the rotating disc 18 penetrating through the shell 1, the rotating disc 18 is externally provided with anti-skid lines 19, the shaft 5 is movably connected with the shell 1, when the rotating disc 18 is rotated, the rotating disc 18 drives the shaft 5 to rotate, the base 3 is also rotated through the transmission of the shaft 5, when the base 3 is rotated, the positioning grooves 4 above the base 3 can pass through the through grooves 7 in sequence, so that the wafers can be placed in the positioning grooves 4 through the through grooves 7 in sequence, and the anti-skid lines 19 effectively increase the friction between the palm and the rotating disc 18, so that the rotating disc 18 is more convenient to rotate.

[0029] The shell 1 is provided with four anti-skid blocks 20 arranged in a matrix form below the shell 1, and the anti-skid blocks 20 effectively increase the placing stability of the shell 1.

[0030] Specifically, when the wafers are stored, the wafers are placed in the positioning grooves 4 through the through grooves 7, when the wafers pass through the through grooves 7, the bristles 8 can clean the dust on the surface of the wafers, meanwhile, the connecting pipe 15 is externally connected with an air extraction device, when the air extraction device works, the shell 1 is subjected to air extraction through the connecting pipe 15, so that the dust cleaned by the bristles 8 can be discharged through the connecting pipe 15, the rotating disc 18 is rotated, the rotating disc 18 drives the shaft 5 to rotate, the base 3 is also rotated through the transmission of the shaft 5, when the base 3 is rotated, the positioning grooves 4 above the base 3 can pass through the through grooves 7 in sequence, so that the wafers can be placed in the positioning grooves 4 through the through grooves 7 in sequence, the clamping blocks 9 can be clamped in the clamping grooves 10, the movable plate 6 and the shell 1 can be stably connected through the cooperation between the clamping blocks 9 and the clamping grooves 10, when the movable plate 6 is opened, the wafers can be taken out from the shell 1, the cover plate 11 can seal the through grooves 7, and the cover plate 11 can effectively prevent the dust from entering the shell 1.

[0031] The above only describes preferred embodiments of the present application, and is not intended to limit the present application, and any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A dust-free storage device for silicon carbide wafers, comprising a housing (1), characterized in that The bottom of the shell (1) is provided with a rotating disc (2), the upper side of the rotating disc (2) is fixedly connected with a base (3), a plurality of positioning grooves (4) are arranged in a radial matrix on the upper end of the base (3), a shaft rod (5) is inserted into the middle of the upper side of the base (3), a movable plate (6) is arranged on the upper end of the shell (1) on the side of the shaft rod (5), a through groove (7) is formed in the middle of the movable plate (6), brush hairs (8) are arranged on both sides of the through groove (7), a clamping block (9) is arranged in the middle of the side of the movable plate (6) away from the shaft rod (5), a clamping groove (10) matched with the clamping block (9) is arranged on the shell (1), a cover plate (11) is arranged above the movable plate (6), a connecting pipe (15) is arranged on the upper end of the side of the shell (1) close to the movable plate (6), and one end of the connecting pipe (15) extends to below the movable plate (6) in the shell (1).

2. The apparatus according to claim 1, wherein Four positioning blocks (12) are arranged in a matrix below the cover plate (11), and positioning holes (13) matched with the positioning blocks (12) are arranged on the shell (1).

3. The apparatus according to claim 1, wherein An arc groove (14) is arranged on the side of the shell (1) away from the shaft rod (5) of the movable plate (6).

4. The apparatus according to claim 1, wherein A valve (16) is arranged on the connecting pipe (15).

5. The apparatus according to claim 1, wherein A rubber pad (17) is arranged in the positioning groove (4).

6. The apparatus according to claim 1, wherein A rotating disc (18) is fixedly connected with the shell (1) above the shaft rod (5), and anti-skid lines (19) are arranged on the outer side of the rotating disc (18).

7. The apparatus according to claim 1, wherein Four anti-skid blocks (20) are arranged in a matrix below the shell (1).

Images