Coating equipment

Abstract

The utility model discloses coating equipment, which is characterized in that a rotatable turntable is arranged in a coating chamber, a plurality of accommodating structures for accommodating target materials are arranged on the turntable, and a jacking mechanism is arranged for jacking the target materials to positions corresponding to first through holes, so that ion beams can irradiate the target materials. The target materials in the different accommodating structures can be set to be different target materials, so that when the target material for coating needs to be replaced, only the rotating disc needs to be rotated and the target material is jacked to the position corresponding to the first through hole, the target material does not need to be replaced after the vacuum of the coating chamber is broken, and a new target material does not need to be filled after the target material is used up, namely, the target material is replaced by the target material. Under the condition that the coating cavity is kept in a vacuum state, the types of the target materials can be replaced, vacuum coating of different target materials is achieved, time consumed for material replacement is shortened, and production efficiency is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of ion plating, in particular to a plating equipment. BACKGROUND

[0002] Vacuum ion plating is a kind of plating technology combining evaporation and sputtering. It is based on ion bombardment. The material or workpiece to be plated is heated to a molten state. High-energy ion bombardment is used to deposit a thin film of metal or semiconductor on the surface of the substrate by chemical deposition, thereby obtaining a thin film with specific structure and performance. Currently, the equipment used for vacuum ion plating has the problems of complicated replacement or replenishment of target material and low efficiency. In addition, the current vacuum ion plating equipment cannot meet the demand of simultaneous plating test of multiple types of target materials. Each time of plating can only be carried out for a single type of target material. CONTENT OF THE INVENTION

[0003] The present application discloses a plating equipment, which can replace the type of target material while maintaining the vacuum state of the plating chamber, realize vacuum plating of different target materials, reduce the time consumption of replacing materials, and improve the production efficiency.

[0004] The present application discloses a plating equipment, comprising:

[0005] A plating box having a plating chamber, the plating box is provided with a first through hole communicating with the plating chamber;

[0006] A turntable is rotatably arranged in the plating chamber, and the turntable is provided with a plurality of accommodating structures, each of which is used for accommodating a target material;

[0007] An ion emission device is arranged in the plating box, and the ion emission device emits an ion beam into the plating chamber through the first through hole; and

[0008] A jacking mechanism is arranged in the plating box, and the jacking mechanism can at least partially extend into the accommodating structure to drive the target material to move away from the accommodating structure and to a position corresponding to the first through hole, so that the ion emission device emits the ion beam to the target material.

[0009] The ion emission device is arranged on the coating box, and a first through hole corresponding to the ion emission device is arranged on the coating box, so that the ion emission device can emit an ion beam into the coating chamber through the first through hole. A rotatable turntable is arranged in the coating chamber, a plurality of accommodation structures for accommodating target materials are arranged on the turntable, and a jacking mechanism is arranged for jacking the target material to a position corresponding to the first through hole, so that the ion beam can irradiate the target material. Among them, the target materials in different accommodation structures can be set as different target materials, so when it is necessary to replace the target material for coating, it is only necessary to rotate the turntable and jack the target material to the position corresponding to the first through hole, without the need to replace the target material after breaking the vacuum of the coating chamber, nor the need to fill new target materials after the target material is exhausted. That is, the coating equipment of the present application can replace the type of target material while maintaining the vacuum state of the coating chamber, and realize vacuum coating of different target materials.

[0010] In a possible implementation, the accommodation structure is provided with a second through hole, the turntable is provided with a third through hole, and the coating box is further provided with a fourth through hole and a first sealing pipe. The second through hole, the third through hole and the fourth through hole are sequentially communicated, one end of the first sealing pipe is arranged in the coating box and surrounds the fourth through hole, the other end of the first sealing pipe is connected to the jacking mechanism, and the first sealing pipe has a first sealing channel in communication with the fourth through hole.

[0011] The jacking mechanism comprises a driving part and a jacking part, and the jacking part is located in the first sealing pipe.

[0012] The driving part is used to drive the jacking part to extend into the accommodation structure through the first sealing pipe, the fourth through hole, the third through hole and the second through hole, so that the jacking part drives the target material to move to the position corresponding to the first through hole.

[0013] The accommodation structure, the turntable and the coating box are respectively provided with the second through hole, the third through hole and the fourth through hole which are in communication with each other, so that the jacking mechanism can extend into the coating chamber through these through holes and drive the target material to move. Meanwhile, by arranging the first sealing pipe, a closed jacking channel can be formed by the first sealing pipe, the jacking channel is in communication with the coating chamber and corresponds to one second through hole which corresponds to the first through hole, so that the jacking part of the jacking mechanism can drive the target material to move to the position corresponding to the first through hole. In this way, the target material can be replaced while maintaining a stable vacuum environment in the coating chamber, and the efficiency of replacing the target material is improved.

[0014] In a possible implementation, the other end of the first sealing pipe is connected to the driving part, or the first sealing pipe is a deformable sealing pipe, and the other end of the first sealing pipe is connected to the jacking part.

[0015] The first sealing tube is connected to the coating chamber at one end and surrounds the fourth through hole, which can ensure the sealing of the connection between the first sealing tube and the coating chamber. The other end of the sealing tube can be connected to the driving part, and the jacking part is located in the sealing tube. In this way, the entire movement of the jacking part can be realized inside the first sealing tube, which can ensure better maintenance of the vacuum degree of the coating chamber when jacking the target material. Alternatively, the first sealing tube can be a deformable sealing tube, one end of which is connected to the coating chamber and surrounds the fourth through hole, and the other end is connected to the jacking part. When the jacking part is driven to move, the first sealing tube can deform in response to the movement of the jacking part, ensuring the normal movement of the jacking part while maintaining the sealing of the first sealing tube. This can reduce the assembly precision requirement between different components and improve flexibility.

[0016] In a possible implementation, the accommodation structure is provided with a second through hole, the coating chamber is further provided with a feeding through hole and a feeding sealing tube, the feeding through hole corresponds to and communicates with the second through hole of any of the accommodation structures, the feeding sealing tube has a feeding channel communicating with the second through hole, the feeding sealing tube is provided with a feeding port and a sealing valve closing the feeding channel, the feeding port is located on the side of the sealing valve away from the coating chamber; one end of the feeding sealing tube is connected to the coating chamber and surrounds the feeding through hole;

[0017] The coating device further comprises a feeding device, the other end of the feeding tube is connected to the feeding device; the feeding device comprises a feeding driving part and a feeding jacking part, the feeding jacking part is located in the feeding sealing tube; the feeding driving part is used to drive the feeding jacking part to extend into the accommodation structure through the feeding sealing tube, the sealing valve, the feeding through hole and the second through hole, so that the feeding jacking part drives the target material to be fed to move into the accommodation structure.

[0018] The coating box is provided with a feeding through hole communicated with the second through hole of any one of the containing structures, and a feeding channel communicated with the feeding through hole. A sealing valve for closing the feeding channel is arranged in a feeding sealing pipe. One end of the feeding sealing pipe is connected to the coating box and surrounds the feeding through hole, and the other end is connected to the feeding device. The feeding sealing pipe is provided with a feeding opening on the side of the sealing valve away from the coating box, for adding target material. The feeding lifting part of the feeding device is located in the feeding sealing pipe. The feeding driving part of the feeding device can drive the feeding lifting part to extend into the inside of the containing structure through the feeding sealing pipe, the sealing valve, the feeding through hole and the second through hole. In this way, since the feeding opening is located on the side of the sealing valve away from the coating box, the vacuum degree of the coating chamber will not be damaged during discharging. The containing structure can be fed by using the feeding device, the feeding sealing pipe and the feeding through hole. Since the sealing valve can maintain the closure of the feeding channel during feeding, new target material can be added while maintaining the vacuum degree of the coating chamber. There is no need to add target material after breaking the vacuum of the coating chamber, which can reduce the experimental / production steps and improve efficiency.

[0019] In a possible implementation, the coating device further comprises a feeding tank and a vacuum generating device. The feeding tank and the vacuum generating device are arranged in the coating box and are both located outside the coating box. The feeding tank has a feeding chamber communicated with the feeding opening. The feeding chamber is used to accommodate target material to be fed so that the target material to be fed enters the feeding channel through the feeding opening. The vacuum generating device is used to vacuumize the feeding chamber.

[0020] The feeding tank has a feeding chamber communicated with the feeding opening. The vacuum generating device can vacuumize the feeding chamber. After the target material to be added is placed in the feeding chamber, the feeding chamber is closed, and the vacuum generating device is used to vacuumize the feeding chamber, so that the part of the feeding sealing pipe between the feeding driving part and the sealing valve is in a vacuum state. In this way, feeding can be realized while maintaining the vacuum degree of the coating chamber.

[0021] In a possible implementation, the other end of the feeding sealing pipe is connected to the feeding driving part, or the feeding sealing pipe is a deformable sealing pipe, and the other end of the feeding sealing pipe is connected to the feeding lifting part.

[0022] The one end of the feeding sealing tube is connected with the coating chamber and surrounds the feeding through hole, which can ensure the sealing of the connection between the feeding sealing tube and the coating chamber. The other end of the feeding sealing tube can be connected with the feeding driving part, and the feeding lifting part is located in the feeding sealing tube. In this way, the whole movement process of the feeding lifting part can be realized in the feeding sealing tube, and the vacuum degree of the coating chamber can be maintained when the target material is lifted. Alternatively, the feeding sealing tube can be a deformable sealing tube, one end of which is connected with the coating chamber and surrounds the feeding through hole, and the other end of which is connected with the feeding lifting part. When the feeding lifting part is driven to move, the feeding sealing tube can be deformed according to the movement of the feeding lifting part, which can ensure the normal movement of the feeding lifting part while maintaining the sealing of the feeding sealing tube, and can reduce the assembly precision requirement between different parts and improve the flexibility.

[0023] In a possible implementation, the sealing valve is a flexible sealing valve.

[0024] By setting the sealing valve as a flexible sealing valve, the sealing valve can seal the feeding channel by its elasticity when no feeding is performed, so that the coating chamber can maintain a vacuum state. When feeding is performed, the target material and the feeding lifting part can sequentially open the sealing valve when the feeding lifting part lifts the target material to be added upward. The sealing valve closely adheres to the surface of the target material and the feeding lifting part under the action of elasticity, so that the feeding channel can still maintain sealing during the whole feeding process.

[0025] In a possible implementation, the coating equipment further comprises a rotating driving mechanism, the rotating driving mechanism comprises a magnetic bearing and a rotating wheel, the magnetic bearing is arranged on the coating chamber, the rotating wheel is arranged on the inside of the vacuum chamber, and the rotating disc is arranged on the side of the rotating wheel away from the magnetic bearing; the magnetic bearing is used for suspending and supporting the rotating wheel and driving the rotating wheel to rotate the rotating disc.

[0026] By setting the rotating driving mechanism for driving the rotating disc to rotate as a magnetic bearing and a rotating wheel, the magnetic bearing can be used to suspend and support the rotating wheel, and a through hole for connecting the magnetic bearing and the rotating wheel on the coating chamber is not needed, which can reduce the number of openings on the coating chamber, maintain better sealing of the coating chamber, and be beneficial to forming a vacuum environment in the coating chamber for coating.

[0027] In a possible implementation, the ion emitting devices are multiple, the first through holes are multiple, the multiple ion emitting devices are arranged on the coating chamber, and the multiple ion emitting devices and the multiple first through holes are arranged in one-to-one correspondence, and the lifting mechanism is used for driving the multiple target materials to move in one-to-one correspondence with the multiple first through holes.

[0028] By setting the ion emitting device as multiple, and setting multiple through holes corresponding to the ion emitting device on the coating box, multiple ion emitting devices can work simultaneously and perform coating, so as to realize vacuum coating of the composite material film layer. In addition, different target material combinations can be realized by changing the combination of target materials.

[0029] In a possible implementation, the jacking mechanisms are multiple, the ion emitting devices are multiple, and the first through holes are multiple. The multiple jacking mechanisms are arranged on the coating box, the multiple ion emitting devices are arranged on the coating box, and the multiple ion emitting devices and the multiple first through holes are arranged in one-to-one correspondence. The multiple jacking mechanisms are used to drive the multiple target materials in one-to-one correspondence, so that the multiple target materials move to be in one-to-one correspondence with the multiple first through holes.

[0030] The jacking mechanisms are arranged as multiple, and different jacking mechanisms correspond to different target materials. In this way, when the target materials are jacked up, specific target materials can be selected for operation according to actual needs, so that the target materials can be controlled more flexibly.

[0031] Compared with the prior art, the present application has at least the following beneficial effects:

[0032] The coating equipment disclosed in the present application is provided with an ion emitting device on a coating box, and a first through hole corresponding to the ion emitting device is arranged on the coating box, so that the ion emitting device can emit an ion beam into the inside of a coating chamber through the first through hole. A rotatable turntable is arranged in the coating chamber, multiple accommodation structures for accommodating target materials are arranged on the turntable, and a jacking mechanism is arranged for jacking up the target materials to positions corresponding to the first through holes, so that the ion beam can irradiate the target materials. The target materials in different accommodation structures can be different target materials. In this way, when the target materials for coating are needed to be replaced, the target materials can be jacked up to positions corresponding to the first through holes by rotating the turntable, without the need to replace the target materials after breaking the vacuum in the coating chamber, or to fill new target materials after the target materials are exhausted. That is, the type of the target materials can be replaced while the vacuum state of the coating chamber is maintained, so as to realize vacuum coating of different target materials. BRIEF DESCRIPTION OF DRAWINGS

[0033] In order to more clearly illustrate the technical solutions in the present application, the drawings needed to be used in the present application will be briefly introduced as follows. Obviously, the drawings in the following description are only some examples of the present application, and other drawings can be obtained by those skilled in the art without any creative effort.

[0034] Figure 1 is a schematic diagram of the three-dimensional structure of the coating equipment of the embodiment of the present application;

[0035] Figure 2 is a schematic view of the internal structure of the coating equipment shown in Figure 1

[0036] Figure 3 is a top view of the turntable and accommodating structure of the embodiment of the present application;

[0037] Figure 4 is a sectional view of the turntable and accommodating structure along the line A-A' shown in Figure 3

[0038] Figure 5 is a perspective view of the coating equipment with a feeding device in the embodiment of the present application;

[0039] Figure 6 is a perspective view of the feeding device shown in Figure 5

[0040] Figure 7 is a front view of the internal structure of the coating equipment shown in Figure 5

[0041] Figure 8 is a top view of the rotating drive mechanism and the turntable shown in Figure 7

[0042] Figure 9 is a sectional view of the rotating drive mechanism and the turntable along the line B-B' shown in Figure 8 DETAILED DESCRIPTION

[0043] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of protection of the present application.

[0044] In the present application, the terms "upper", "inner", "outer", "middle" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. These terms are mainly used to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0045] In addition, the above-mentioned part of the terms can be used to represent other meanings in addition to the orientation or positional relationship, for example, the term "upper" can also be used to represent a certain dependent relationship or connection relationship in some cases. Those of ordinary skill in the art can understand the specific meanings of these terms in the present application according to the specific circumstances.​​​​​​

[0046] In addition, the terms "provided with", "connected" should be broadly understood. For example, it can be fixed connection, detachable connection, or integral structure; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, or internal communication between two devices, elements or components. For those skilled in the art, the specific meaning of the above terms in this application can be understood according to the specific circumstances.

[0047] In addition, the terms "first", "second" and the like are mainly used to distinguish different devices, elements or components (the specific types and structures may be the same or different), and are not intended to indicate or imply the relative importance and quantity of the indicated devices, elements or components. Unless otherwise stated, the meaning of "multiple" is two or more.

[0048] Currently, the target material of the RPD (Rapid Precursor Delivery) device used by the perovskite solar cell is first vacuumed in the pre-exhaust chamber, and then the target is filled in the process chamber. In the coating experiment, the type of target needs to be frequently replaced to test the coating effect of different target combinations. When replacing the target, the target can only be taken out after breaking the vacuum, or the target can be replaced after the target is exhausted. In this way, replacing the target will waste a lot of time, resulting in low test and production efficiency.

[0049] In the related art, in order to be able to add or replace the target while maintaining the vacuum degree of the coating chamber, a design scheme of setting multiple vacuum chambers is mainly adopted. Specifically, the coating chamber surrounded by the coating box is divided into a process chamber and a filling chamber, the process chamber is used for coating the workpiece, and the filling chamber is used for filling the target. The process chamber and the filling chamber are in communication with each other, and a valve is arranged between the process chamber and the filling chamber. When adding or replacing, the valve between the process chamber and the filling chamber is closed, and the filling chamber is opened for adding or replacing. After adding or replacing is completed, the filling chamber is closed, the filling chamber is vacuumed, and then the valve can be opened for normal coating. The above setting can realize the supplement or replacement of the target without breaking the vacuum environment of the process chamber.

[0050] However, the inventors have found through research that in the above scheme, only one kind of target can be supplemented or replaced each time, that is, only a single material can be tested during coating, and multiple targets cannot be coated at the same time. In addition, although the above scheme can not break the vacuum environment of the process chamber, each time the target is supplemented or replaced, the vacuum environment of the filling chamber is broken, and after the target is supplemented or replaced, the filling chamber needs to be vacuumed again. In fact, there is still a process of breaking the vacuum and vacuuming, and the time-consuming of supplementing or replacing the target cannot be effectively reduced.

[0051] The inventors attempted to shorten the vacuuming time of the packing chamber by reducing its size. However, while this approach could reduce the time required for replenishing or replacing the target to some extent, it still failed to address the issues of being able to coat only a single target and needing to stop the equipment during target replenishment or replacement. Furthermore, replacing or replenishing the target still required disrupting the vacuum environment of the packing chamber, necessitating re-vacuuming after loading.

[0052] To address the aforementioned technical problems, this application discloses a coating apparatus. A turntable is installed within the coating chamber, and multiple accommodating structures for holding target materials are arranged on the turntable. Different accommodating structures can accommodate different target materials. When switching between different target materials for coating, it is only necessary to rotate the turntable to move the accommodating structure containing the target material to the target position (corresponding to the position of the ion emission device), and then lift the target material in the accommodating structure to the position corresponding to the ion emission device. This eliminates the need for replenishing or replacing material in the filling chamber, thus saving the process of breaking and evacuating the vacuum in the filling chamber. The type of target material can be changed while maintaining a vacuum state in the coating chamber, achieving vacuum coating of different target materials, reducing material change time, and improving production efficiency.

[0053] Please refer to the following: Figure 1 and Figure 2 ,in, Figure 1 This is a three-dimensional structural schematic diagram of the coating equipment 100 according to an embodiment of this application. Figure 2 yes Figure 1 A schematic diagram of the internal structure of the coating equipment shown.

[0054] The coating equipment 100 includes a coating tank 110, an ion emission device 120, a turntable 130, and a lifting mechanism 140.

[0055] The coating chamber 110 has a coating chamber 111, which can accommodate the workpiece to be coated (not shown). The coating chamber 111 may be equipped with at least one of a bracket, hook, or clamp to fix the workpiece to be coated; this application does not specifically limit this.

[0056] It is understandable that the workpiece to be coated can be a metal component such as a screw or nut, or a ceramic component or a plastic component, as long as the workpiece to be coated is suitable for vacuum ion plating technology. This application does not make any specific limitations in this regard.

[0057] An ion emission device 120 is mounted on a coating chamber 110, which is also provided with a first through-hole 112. The ion beam emitted by the ion emission device 120 enters the coating chamber 111 through the first through-hole 112. When the ion beam bombards the target material, it can melt or sublimate the target material, thereby achieving ion plating.

[0058] The rotary disc 130 is arranged in the coating chamber 111, and can be connected to the coating box 110 and rotatable relative to the coating box 110. The rotary disc 130 is provided with a plurality of accommodating structures 131, each of which has an accommodating space for accommodating a target material. It can be understood that different accommodating structures 131 can accommodate different target materials, for example, one accommodating structure 131 can accommodate zinc metal, another accommodating structure can accommodate chromium metal, and other accommodating structures 131 can accommodate aluminum oxide.

[0059] Optionally, the accommodating structures 131 can be arranged in two or more. For example, there can be 5, 6 or more accommodating structures 131, so as to increase the number of different target material combinations. Of course, as other embodiments, the plurality of accommodating structures can also accommodate the same target material.

[0060] The jacking mechanism 140 is arranged in the coating box 110, and at least part of the jacking mechanism 140 can extend into the accommodating structure 131 to drive the target material in the accommodating structure 131 to separate from the accommodating structure 131 and move to a position corresponding to the first through hole 112, so that the ion beam emitted by the ion emitting device 120 can bombard the target material.

[0061] In this way, only the target material accommodated in different accommodating structures 131 needs to be jacked up, so that the switching of different target materials can be completed, the type of target material can be replaced while the coating chamber 111 maintains a vacuum state, the vacuum coating of different target materials is realized, the time consumption for replacing the target material is reduced, and the production efficiency is improved.

[0062] In some embodiments, the workpiece to be coated can be arranged at the upper part of the coating chamber 111, and the bottom of the coating box 110 can be provided with an air outlet duct (not shown in the figure), which is used to deliver a gas flow to the coating chamber 111. The gas flow is used to blow the target material melted, evaporated or sublimated, so that the target material melted, evaporated or sublimated is deposited on the surface of the workpiece to be coated, thereby forming a preset film layer on the surface of the workpiece to be coated.

[0063] It can be understood that the gas flow delivered by the air outlet duct can be an inert gas such as helium, neon, argon, or the gas flow delivered by the air outlet duct can also be nitrogen. The specific selection can be made according to the actual situation, and the present application does not make specific limitation thereto.

[0064] In some embodiments, the ion emission device 120 can be arranged in a plurality, and the plurality of ion emission devices 120 are arranged on the coating box 110 at intervals. For example, the plurality of ion emission devices 120 can be arranged at intervals in the circumferential direction of the coating box 110, can be arranged at intervals along the height direction H of the coating box 110, or can be arranged at intervals along both the circumferential direction and the height direction H of the coating box 110. Hereinafter, the plurality of ion emission devices 120 arranged at intervals in the circumferential direction of the coating box 110 are taken as an example for description, but the present application is not limited thereto.

[0065] It can be understood that the first through hole 112 on the coating box 110 is also arranged in a plurality, and arranged at intervals in the circumferential direction of the coating box 110. The ion emission device 120 and the first through hole 112 are arranged one-to-one, so that each ion emission device 120 can emit an ion beam into the coating chamber 111 through the corresponding first through hole 112. The lifting mechanism 140 can drive the plurality of target materials to correspond to the plurality of first through holes 112. In this way, different ion emission devices 120 can be used to bombard different target materials, and different target material combinations can be used for coating experiments according to actual needs or preset combinations, thereby improving the flexibility of the coating experiment. In addition, the plurality of target materials can be simultaneously lifted to the corresponding positions by the lifting mechanism 140, thereby reducing the number of components of the coating equipment 100 and simplifying the structure of the coating equipment 100.

[0066] When the plurality of target materials are simultaneously lifted to the corresponding positions, a part of the ion emission devices 120 can be started, and the other part of the ion emission devices 120 can be turned off, so that the target materials expected to be formed are bombarded by the ion beam, and the remaining target materials are not bombarded by the ion beam.

[0067] In some embodiments, the lifting mechanism 140 can be arranged in a plurality, and the plurality of lifting mechanisms 140 are arranged on the coating box 110, and the lifting mechanism 140 and the accommodation structure 131 are arranged one-to-one. In this way, each target material can be independently controlled by the corresponding lifting mechanism 140, thereby improving the flexibility of the coating experiment. The present application takes the ion emission device 120 and the lifting mechanism 140 arranged in two as an example for description, but the present application is not limited thereto.

[0068] Please refer to Figure 1 , Figure 2 , Figure 3 and Figure 4 , Figure 3 is a top view schematic diagram of the turntable and the accommodation structure of the embodiment of the present application, Figure 4 is Figure 3A cross-sectional view of the rotary disc and the accommodating structure along the line A-A' is shown. In some embodiments, the accommodating structure 131 is provided with a second through hole 131a, the rotary disc 130 is provided with a third through hole 132, and the coating box 110 is further provided with a fourth through hole (not shown in the figure). The second through hole 131a, the third through hole 132 and the fourth through hole are sequentially communicated, and the jacking mechanism 140 extends into the accommodating structure 131 through the fourth through hole, the third through hole 132 and the second through hole 131a, so as to lift the target target material to a position corresponding to the first through hole 112, so that the ion beam can irradiate the target target material.

[0069] In some embodiments, the target material is fixed between the accommodating structure 131 and the target material by friction, that is, when the target material enters the accommodating structure 131, the surface of the target material is in contact with the inner surface of the accommodating structure 131, and the target material is in contact with the inner surface of the accommodating structure 131 under the action of gravity, so that the target material is fixed in the accommodating structure 131.

[0070] In some embodiments, the accommodating structure 131 can be provided with an elastic bearing component (not shown in the figure) inside, and the target material is placed in the accommodating structure 131, and the elastic bearing component bears the target material. The elastic bearing component can be an elastic structure with a through hole, and when the jacking mechanism 140 lifts the target material, the jacking mechanism 140 passes through the elastic bearing component and pushes the target material to move.

[0071] Optionally, the elastic bearing component can be a structure made of rubber, silicone, foam and the like, or a structure composed of one or more metal springs. It can be understood that when the elastic bearing component is composed of multiple metal springs, the multiple metal springs can be arranged in a circumferential direction inside the accommodating structure 131, and when the jacking mechanism 140 enters the inside of the accommodating structure 131, the jacking mechanism 140 pushes open the multiple metal springs and pushes the target material to move, and when the jacking mechanism 140 exits the accommodating structure 131, the multiple metal springs are automatically reset.

[0072] It should be noted that the target target material is a target material corresponding to the target type film layer. For example, when it is desired to form an aluminum oxide film layer on the workpiece to be coated, the target target material is an aluminum oxide member. When it is desired to form a film layer composed of other materials, the target target material is a member formed of the corresponding material. When it is desired to form a composite film layer composed of multiple materials, the target target material is multiple, and each is a member formed of a different material.

[0073] Again referring to Figures 2 to 4In some embodiments, the lifting mechanism 140 is arranged at the bottom of the coating box 110. The lifting mechanism 140 includes a driving part 141 and a lifting part 142, the driving part 141 and the lifting part 142 are connected, the driving part 141 is used to drive the lifting part 142 to move, so that the lifting part 142 passes through the fourth through hole, the third through hole 132 and the second through hole 131a, and then enters the accommodating structure 131. When the driving part 141 continues to drive the lifting part 142 to move, the lifting part 142 can lift the target material in the accommodating structure 131, so that the target material moves to a position corresponding to the first through hole 112 along the height direction of the coating equipment 100.

[0074] Optionally, the driving part 141 can be a motor, a pneumatic cylinder or an electric cylinder, and the lifting part 142 can be a rod connected to the output end of the driving part 141. The lifting part 142 can move upward or downward along the height direction of the coating equipment 100 under the driving of the driving part 141.

[0075] In some embodiments, the coating box 110 is further provided with a first sealing pipe 113, the first sealing pipe 113 is used to form a closed channel, so that the lifting part 142 moves at least partially in the closed channel, so as to maintain the vacuum state of the coating chamber 111, and prevent the coating chamber 111 from breaking vacuum during the process of lifting the target material.

[0076] In some embodiments, one end of the first sealing pipe 113 is connected to the coating box 110 and surrounds the fourth through hole, that is, the pipe wall of one end of the first sealing pipe 113 surrounds the edge of the fourth through hole on the coating box 110. In this way, the sealing property of the connection between the first sealing pipe 113 and the coating box 110 can be ensured, and air leakage at this position can be avoided, so that the vacuum environment of the coating chamber 111 is stable.

[0077] In some embodiments, the other end of the first sealing pipe 113 is connected to the lifting mechanism 140, so that the lifting part 142 is arranged in the first sealing pipe 113. For example, the other end of the first sealing pipe 113 can be connected to the driving part 141 and is in closed connection with the driving part 141, so that the lifting part 142 is entirely in the closed first sealing pipe 113, and the entire movement process of the lifting part 142 is in the closed first sealing pipe 113. In this way, the vacuum state of the coating chamber 111 can be maintained during the process of lifting the target material.

[0078] Optionally, the first sealing tube 113 can be a rigid tube or a flexible tube. For example, the first sealing tube 113 is a rigid tube, such as a quartz tube, a glass tube, a corundum tube, a metal tube, or a plastic tube, etc. In this way, the first sealing tube 113 can be kept stable during use, and the sealing effect can be better maintained. It can be understood that as long as the first sealing tube 113 can maintain the vacuum degree of the coating chamber 111 during the movement of the lifting part 142, and does not affect the normal movement of the lifting part 142, the specific type of the first sealing tube 113 is not limited in the embodiment.

[0079] In other embodiments, the other end of the first sealing tube 113 is closed and connected to the lifting part 142. For example, the first sealing tube 113 is a deformable sealing tube, which is closed and connected to the lifting part 142, so that the lifting part 142 is partially located in the first sealing tube 113. Specifically, the lifting part 142 is used to lift the end of the target, and the part close to the end is accommodated in the first sealing tube 113, so that the part of the lifting part 142 in contact with the target is in the closed first sealing tube 113 during movement, which can effectively maintain the vacuum degree of the coating chamber 111.

[0080] Optionally, the deformable first sealing tube 113 can be a bellows or a rubber hose, etc. As long as the first sealing tube 113 can effectively maintain the vacuum degree of the coating chamber 111 during the lifting of the target by the lifting part 142, and the lifting part 142 can move normally, the specific material of the first sealing tube 113 is not limited in the embodiment.

[0081] Please see Figure 5 and Figure 6 , Figure 5 is a schematic diagram of the three-dimensional structure of the coating equipment with a feeding device in the embodiment of the present application, Figure 6 is Figure 5 a schematic diagram of the three-dimensional structure of the feeding device shown in some embodiments. The coating equipment 100 further comprises a feeding device 150, which is used to supplement the target to be fed from the outside of the coating box 110 to the accommodation structure 131. The coating box 110 is provided with a feeding through hole (not shown in the figure) and a feeding sealing tube 114. The feeding through hole is in communication with the second through hole 131a of any one of the accommodation structures 131, one end of the feeding sealing tube 114 is connected to the coating box 110, and the other end is surrounded by the feeding through hole. One end of the feeding sealing tube 114 is connected to the feeding device 150. In this way, the closed feeding channel can be provided by using the feeding sealing tube 114, so that the target to be fed is located in the feeding sealing tube 114, and enters the accommodation structure 131 through the feeding sealing tube 114 and the feeding through hole to realize feeding, which can prevent the vacuum environment of the coating chamber 111 from being damaged.

[0082] Please see Figure 7 ,Figure 7 for Figure 5 The diagram shows a front view of the internal structure of the coating equipment. In some embodiments, the feeding device 150 includes a feeding drive unit 151 and a feeding lifting unit 152. The feeding drive unit 151 is connected to the feeding lifting unit 152 and is used to drive the feeding lifting unit 152 so that the feeding lifting unit 152 carries the target material to be fed into the interior of the corresponding receiving structure 131, thereby realizing the feeding of the target material. It can be understood that the feeding lifting unit 152 lifts the target material to be fed into the receiving structure 131 through the feeding sealing tube 114, the feeding through hole and the second through hole 131a.

[0083] Optionally, the feeding drive unit 151 can be a motor, a cylinder or an electric cylinder, and the feeding lifting unit 152 can be a rod connected to the output end of the feeding drive unit 151. The feeding lifting unit 152 can move upward or downward along the height direction H of the coating equipment 100 under the drive of the feeding drive unit 151.

[0084] See you again Figure 6 and Figure 7 In some embodiments, one end of the feeding sealing tube 114 connected to the feeding device 150 is specifically connected to the feeding drive unit 151, and the feeding lifting unit 152 is located in the feeding sealing tube 114, so that the entire movement process of the feeding lifting unit 152 is within the closed feeding sealing tube 114. In this way, it can be ensured that the coating chamber 111 maintains a good vacuum state during the process of lifting the target material to achieve feeding.

[0085] Optionally, the feeding sealing tube 114 can be a rigid tube or a flexible tube. For example, the feeding sealing tube 114 can be a rigid tube, such as a quartz tube, glass tube, corundum tube, metal tube, or plastic tube. In this way, the feeding sealing tube 114 can remain stable during use and better maintain the sealing effect. It is understood that as long as the feeding sealing tube 114 can maintain the vacuum degree of the coating chamber 111 during the movement of the feeding lifting part 152 and does not affect the normal movement of the feeding lifting part 152, this embodiment does not limit the specific type of the feeding sealing tube 114.

[0086] In some embodiments, the other end of the feeding sealing tube 114 is closedly connected to the feeding lifting part 152. For example, the feeding sealing tube 114 is a deformable sealing tube that is closedly connected to the feeding lifting part 152, such that a portion of the feeding lifting part 152 is located within the feeding sealing tube 114. Specifically, the feeding lifting part 152 is used to lift the end of the target material, i.e., the portion near the end is accommodated within the feeding sealing tube 114, so that the portion of the feeding lifting part 152 in contact with the target material remains within the closed feeding sealing tube 114 during movement, effectively maintaining the vacuum level of the coating chamber 111.

[0087] Optionally, the deformable feeding sealing tube 114 can be an extensible sealing tube such as a bellows or a rubber hose or a deformable flexible tube, as long as it can effectively maintain the vacuum degree of the coating chamber 111 and enable the feeding lifting part 152 to move normally during the process of lifting the target material, and the specific material of the feeding sealing tube 114 is not limited in the embodiment.

[0088] In some embodiments, the feeding sealing tube 114 is provided with a feeding port (not shown in the figure) and a sealing valve 114a closing the feeding channel, and the sealing valve 114a is located between the feeding port and the feeding through hole. In this way, the target material to be fed can be placed into the feeding channel through the feeding port, and since the sealing valve 114a is located between the feeding port and the feeding through hole, the sealing valve 114a can keep the feeding channel closed when feeding through the feeding port, so that new target material can be added while maintaining the vacuum degree of the coating chamber 111, without the need to add target material after breaking the vacuum of the coating chamber 111, so as to effectively maintain the vacuum environment of the coating chamber 111, thereby reducing the experimental / production steps and improving the efficiency.

[0089] When feeding, the feeding lifting part 152 carries the target material to be fed, moves in the feeding sealing tube 114, passes through the sealing valve 114a, and then passes through the feeding through hole and the corresponding second through hole 131a to enter the inside of the accommodation structure 131.

[0090] In some embodiments, the sealing valve 114a is a flexible sealing valve. That is, in general, the sealing valve 114a can tightly adhere to the inner wall of the feeding sealing tube 114 by its own elasticity and block the feeding channel, so that the feeding sealing tube 114 remains closed and the coating chamber 111 remains in a vacuum state. When feeding, the target material to be fed and the feeding lifting part 152 move upward and abut against the sealing valve 114a, and when the feeding lifting part 152 further moves and drives the target material to be fed upward, the sealing valve 114a can deform to conform to the target material and the feeding lifting part 152 under the action of its own elasticity, so that the target material and the feeding lifting part 152 pass through the sealing valve 114a. During the entire process, the sealing valve 114a tightly adheres to the surface of the target material and the feeding lifting part 152, so that the feeding channel still maintains airtightness during the entire feeding process, so as to maintain the vacuum degree of the coating chamber 111.

[0091] It can be understood that the sealing valve 114a has a hole through which the target material to be fed and the feeding lifting part 152 pass, and when not feeding, the hole is closed under the elasticity of the sealing valve 114a itself, and only when feeding, the hole is opened by the target material and the feeding lifting part 152, so that the target material and the feeding lifting part 152 can enter the coating chamber 111 and the inside of the accommodation structure 131.

[0092] Again referring toFigure 6 and Figure 7 In some embodiments, the coating device 100 further comprises a feeding tank 160 and a vacuum generating device (not shown in the figure), both of which are arranged outside the coating tank 110 and in the coating tank 110, and the vacuum generating device can perform vacuumization on the feeding chamber 161. Thus, the feeding tank 160 has the feeding chamber 161, which is in communication with the feeding port, and the target material to be fed can be placed into the feeding channel through the feeding chamber 161 and the feeding port. After the target material to be fed is placed into the feeding channel, the feeding tank 160 can be closed, and then the vacuum generating device performs vacuumization on the feeding tank 160 and the part of the feeding sealing pipe 114 between the sealing valve 114a and the feeding device 150, so that the feeding jacking part 152 and the target material to be fed are in a vacuum environment before passing through the sealing valve 114a, which can avoid damaging the vacuum degree of the coating chamber 111 during feeding.

[0093] Please refer to Figures 7 to 9 , Figure 8 for Figure 7 the top view schematic diagram of the rotating drive mechanism and the turntable shown in FIG. 1, Figure 9 for Figure 8 the cross-sectional view schematic diagram of the rotating drive mechanism and the turntable along the line B-B’ shown in FIG. 1. In some embodiments, the coating device 100 further comprises a rotating drive mechanism 170 arranged in the coating tank 110, which is used to drive the rotation of the turntable 130 to drive the movement of the containing structure 131.

[0094] Please refer to Figures 7 to 9 In some embodiments, the rotating drive mechanism 170 comprises a magnetic bearing 171 arranged in the coating tank 110 and a rotating wheel 172 arranged inside the coating tank 110, and the turntable 130 is arranged on the side of the rotating wheel 172 away from the magnetic bearing 171. The magnetic bearing 171 can suspend and support the rotating wheel 172 and drive the rotation of the rotating wheel 172.

[0095] It can be understood that the magnetic bearing 171 suspends and supports the rotating wheel 172 by the action of magnetic force and drives the rotation of the rotating wheel 172. Therefore, the magnetic bearing 171 can be arranged inside or outside the coating tank 110, and it is not necessary to arrange an opening on the coating tank 110 to connect the magnetic bearing 171 and the rotating wheel 172, so as to avoid affecting the sealing property of the coating tank 110 and facilitate the formation of the high-sealing coating chamber 111.

[0096] Please refer to Figure 9In some embodiments, the orthographic projection of the rotating disc 130 on the rotating wheel 172 is greater than the orthographic projection of the rotating wheel 172 in the same direction. In this case, if the orthographic projection of the accommodating structure 131 on the rotating wheel 172 is outside the boundary of the rotating wheel 172, the rotating wheel does not need to be provided with a through hole in communication with the second through hole 131a. If the orthographic projection of the accommodating structure 131 on the rotating wheel 172 is inside the boundary of the rotating wheel 172, or the orthographic projection of the rotating disc 130 on the rotating wheel 172 is not greater than the orthographic projection of the rotating wheel 172 in the same direction, the rotating wheel 172 needs to be provided with a fifth through hole 172a in communication with the second through hole 131a, so that the jacking part 142 or the feeding jacking part 152 can pass through the rotating wheel 172 to enter the accommodating structure 131.

[0097] Similarly, the orthographic projection of the rotating disc 130 on the rotating wheel 172 is greater than the orthographic projection of the magnetic bearing 171 in the same direction. In this case, if the orthographic projection of the accommodating structure 131 on the rotating wheel 172 is outside the boundary of the magnetic bearing 171, the magnetic bearing 171 does not need to be provided with a through hole in communication with the second through hole 131a. If the orthographic projection of the accommodating structure 131 on the rotating wheel 172 is inside the boundary of the magnetic bearing 171, or the orthographic projection of the rotating disc 130 on the rotating wheel 172 is not greater than the orthographic projection of the magnetic bearing 171 in the same direction, the magnetic bearing 171 needs to be provided with a through hole in communication with the second through hole 131a, so that the jacking part 142 or the feeding jacking part 152 can pass through the magnetic bearing 171 to enter the accommodating structure 131.

[0098] In some other embodiments, the rotating driving mechanism 170 can include a motor (not shown in the figure) and a rotating bearing (not shown in the figure), and the coating box 110 is provided with a bearing through hole (not shown in the figure), and the rotating bearing is arranged at the bearing through hole, and the output shaft of the motor is fixedly connected to the rotating disc 130 through the rotating bearing. At the bearing through hole, sealing can be performed by, for example, an O-shaped sealing ring, so that the coating box 110 remains closed. When the output shaft of the motor rotates, the rotating bearing and the rotating disc 130 can be driven to rotate, so as to realize the switching of the target material.

[0099] In some embodiments, the rotating driving mechanism 170 can further include a speed reduction mechanism (not shown in the figure), and the output shaft of the motor is linked to the speed reduction mechanism, and the rotating bearing is connected through the speed reduction mechanism. In this way, the speed of the output shaft of the motor can be reasonably controlled through the speed reduction mechanism, so as to avoid that the control precision of the rotating disc 130 is reduced due to the excessively high speed of the motor.

[0100] Optionally, the motor can be a servo motor, a direct drive motor, etc., and the type of the motor is not limited in the present application.

[0101] The above has carried on the detailed introduction to the coating equipment disclosed by the embodiment of the application, the principle and implementation mode of the application are described by using an example in this paper, the above embodiment is only used to help understand the coating equipment and the core idea of the application; at the same time, for the general technical personnel in the art, according to the idea of the application, the specific implementation mode and application range will be changed, and the above is not understood as the limitation of the application.

Claims

1. A coating apparatus, characterized by, The coating equipment comprises: a coating box having a coating cavity, the coating box being provided with a first through hole communicating with the coating cavity; a rotary disc rotatably arranged in the coating cavity, the rotary disc being provided with a plurality of accommodating structures, each of the accommodating structures being used for accommodating a target material; an ion emitting device arranged in the coating box, the ion emitting device emitting an ion beam into the coating cavity through the first through hole; and a jacking mechanism arranged in the coating box, the jacking mechanism being at least partially extendable into the accommodating structure to drive the target material to move to a position corresponding to the first through hole so that the ion emitting device emits the ion beam to the target material.

2. The coating equipment according to claim 1, wherein: the accommodating structure is provided with a second through hole, the rotary disc is provided with a third through hole, the coating box is further provided with a fourth through hole and a first sealing pipe, the second through hole, the third through hole and the fourth through hole are sequentially communicated, one end of the first sealing pipe is arranged in the coating box and surrounds the fourth through hole, the other end of the first sealing pipe is connected to the jacking mechanism, and the first sealing pipe has a first sealing channel communicating with the fourth through hole; the jacking mechanism comprises a driving part and a jacking part, and the jacking part is located in the first sealing pipe; the driving part is used for driving the jacking part to extend into the accommodating structure through the first sealing pipe, the fourth through hole, the third through hole and the second through hole, so that the jacking part drives the target material to move to the position corresponding to the first through hole.

3. The coating equipment according to claim 2, wherein: the other end of the first sealing pipe is connected to the driving part, or the first sealing pipe is a deformable sealing pipe, and the other end of the first sealing pipe is connected to the jacking part.

4. The coating equipment according to claim 1, wherein: the accommodating structure is provided with a second through hole, the coating box is further provided with a feeding through hole and a feeding sealing pipe, the feeding through hole corresponds to and communicates with the second through hole of any one of the accommodating structures, the feeding sealing pipe has a feeding channel communicating with the feeding through hole, the feeding sealing pipe is provided with a feeding opening and a sealing valve arranged in the feeding channel and used for closing the feeding channel, the feeding opening communicates with the feeding channel, and one end of the feeding sealing pipe is connected to the coating box and surrounds the feeding through hole; the coating equipment further comprises a feeding device, the other end of the feeding sealing pipe is connected to the feeding device, the feeding device comprises a feeding driving part and a feeding jacking part, the feeding jacking part is located in the feeding sealing pipe, and the feeding driving part is used for driving the feeding jacking part to extend into the accommodating structure through the feeding opening, the sealing valve, the feeding through hole and the second through hole, so that the feeding jacking part drives the target material to be fed to move into the accommodating structure.

5. The coating equipment according to claim 4, wherein: ​ The coating equipment further comprises a feeding tank and a vacuum generating device, the feeding tank and the vacuum generating device are arranged in the coating tank and are both located outside the coating tank, the feeding tank has a feeding cavity which is communicated with the feeding port; the feeding cavity is used for accommodating the target material to be fed so that the feeding driving part drives the feeding jacking part to drive the target material to be fed to pass through the feeding port and enter the feeding channel, and the vacuum generating device is used for vacuumizing the feeding cavity.

6. The coating equipment according to claim 4, characterized in that, the other end of the feeding sealing pipe is connected to the feeding driving part, or the feeding sealing pipe is a deformable sealing pipe, and the other end of the feeding sealing pipe is connected to the feeding jacking part.

7. The coating equipment according to any one of claims 4-6, characterized in that, the sealing valve is a flexible sealing valve.

8. The coating equipment according to any one of claims 1-6, characterized in that, the coating equipment further comprises a rotating driving mechanism, the rotating driving mechanism comprises a magnetic bearing and a rotating wheel, the magnetic bearing is arranged in the coating tank, the rotating wheel is arranged in the coating cavity, and the rotating disc is arranged on the side of the rotating wheel which is away from the magnetic bearing; the magnetic bearing is used for suspending and supporting the rotating wheel and driving the rotating wheel to drive the rotating disc to rotate.

9. The coating equipment according to any one of claims 1-6, characterized in that, the ion emitting devices are multiple, the first through holes are multiple, multiple ion emitting devices are arranged in the coating tank, and multiple ion emitting devices and multiple first through holes are arranged in one-to-one correspondence, and the jacking mechanism is used for driving multiple target materials to move in one-to-one correspondence with multiple first through holes.

10. The coating equipment according to any one of claims 1-6, characterized in that, the jacking mechanisms are multiple, the ion emitting devices are multiple, and the first through holes are multiple, multiple jacking mechanisms are arranged in the coating tank, multiple ion emitting devices are arranged in the coating tank, and multiple ion emitting devices and multiple first through holes are arranged in one-to-one correspondence; multiple jacking mechanisms are used for driving multiple target materials in one-to-one correspondence so that multiple target materials move in one-to-one correspondence with multiple first through holes.

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