Liquid medicine tank cooling system and wet etching machine

Abstract

The utility model provides a liquid medicine tank cooling system and a wet etching machine, and belongs to the technical field of etching, and the liquid medicine tank cooling system comprises a cooling circulation assembly which is arranged outside a liquid medicine tank and is provided with a liquid outlet and a liquid inlet; the cooling pipeline assembly is arranged in the liquid medicine tank and comprises a circulating pipeline, a plurality of driving fan blades and a plurality of driven fan blades; one end of the circulating pipeline is communicated with the liquid outlet, the other end of the circulating pipeline is communicated with the liquid inlet, the driving fan blade is located inside the circulating pipeline, the driven fan blade is located outside the circulating pipeline, and the driving fan blade and the driven fan blade are coaxially connected; when the cooling liquid circularly flows back and forth in the cooling circulation assembly and the circulation pipeline, the driving fan blades are driven to rotate, and the driving fan blades drive the driven fan blades to rotate together. The rotation of the driven fan blades enables the liquid medicine in the liquid medicine tank to fully and circularly flow, so that the cooling uniformity and the cooling speed of the liquid medicine are improved, the temperature replacement efficiency is improved, the cooling waiting time is shortened, and the operation speed of a production line is increased.

Description

TECHNICAL FIELD

[0001] The utility model belongs to etching technical field, concretely relates to a kind of liquid tank cooling system and wet etching machine. BACKGROUND

[0002] When etching is carried out using wet etching machine, liquid tank is mainly used to mix etching liquid, since etching liquid temperature can affect etching rate and taper angle (Taper angle), when taper angle needs to be adjusted, therefore, etching liquid in liquid tank is usually heated or cooled to meet etching requirements.When etching liquid needs to be heated, heating wire laid in liquid tank is used to heat etching liquid, which can achieve fast heating speed.

[0003] When etching liquid needs to be cooled, conventional method directly uses ambient static cooling method, however, this method is slow, and then a method of laying pure water cooling pipeline connected to process cooling water (PCW) system in liquid tank is used to cool etching liquid.However, this method has faster temperature drop near pipeline laying place, slower temperature drop far from pipeline laying place, resulting in low temperature replacement efficiency, long cooling waiting time, and affecting production line operation. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a kind of liquid tank cooling system and wet etching machine, to solve the technical problems of low temperature replacement efficiency, long cooling waiting time and affecting production line operation of conventional method of laying pure water cooling pipeline in liquid tank.

[0005] To achieve the above-mentioned purpose, the utility model adopts the technical scheme of:

[0006] In the first aspect, the utility model provides a kind of liquid tank cooling system, comprising: cooling circulation component, configured to be arranged outside liquid tank, with liquid outlet and liquid inlet;And cooling pipeline component, configured to be arranged inside liquid tank, comprising circulation pipeline, a plurality of driving fan blades and a plurality of driven fan blades;Wherein, one end of the circulation pipeline is communicated with the liquid outlet, the other end of the circulation pipeline is communicated with the liquid inlet, the driving fan blade is located inside the circulation pipeline, the driven fan blade is located outside the circulation pipeline, the driving fan blade is coaxially connected with the driven fan blade;When cooling liquid reciprocatingly circulates in the cooling circulation component and the circulation pipeline, the driving fan blade is driven to rotate, and the driving fan blade drives the driven fan blade to rotate together.

[0007] In some possible implementation manners, the circulating pipeline is provided with a plurality of mounting holes, a sealing bearing is arranged in the mounting hole, a transmission shaft is arranged in the sealing bearing, and the driving fan blade and the driven fan blade are respectively connected to two ends of the transmission shaft.

[0008] In some possible implementation manners, the transmission shaft has a radial step between the driving fan blade and the circulating pipeline, and a first sealing ring is arranged between the radial step and the circulating pipeline; and / or the transmission shaft has a radial step between the driven fan blade and the circulating pipeline, and a first sealing ring is arranged between the radial step and the circulating pipeline.

[0009] In some possible implementation manners, the transmission shaft forms a limiting recess, and the first sealing ring has a limiting protrusion, and the first sealing ring is fitted in the limiting recess through the limiting protrusion.

[0010] In some possible implementation manners, the inner wall and / or the outer wall of the circulating pipeline is formed with a ring-shaped protrusion adjacent to the mounting hole, a second sealing ring and a third sealing ring are arranged between the protrusion and the transmission shaft, the second sealing ring is sleeved on the transmission shaft, the outer ring of the second sealing ring is in a non-connected relationship with the protrusion, and the third sealing ring is sleeved on the inner ring of the protrusion, and the inner ring of the third sealing ring is in a non-connected relationship with the transmission shaft.

[0011] In some possible implementation manners, the circulating pipeline comprises at least one group of main pipelines and a plurality of auxiliary pipelines, the main pipeline is provided with a partition plate to divide the main pipeline into a liquid inlet pipeline and a liquid outlet pipeline, the liquid inlet pipeline is communicated with the liquid outlet, the liquid outlet pipeline is communicated with the liquid inlet, the auxiliary pipeline is communicated with the liquid inlet pipeline and / or the liquid outlet pipeline and is arranged at an angle, and the driving fan blade and the driven fan blade are arranged at any wall position of the main pipeline and / or any wall position of the auxiliary pipeline, and the rotation axes of the driving fan blade and the driven fan blade are arranged at an angle with respect to the pipeline axes of the main pipeline and / or the auxiliary pipeline.

[0012] In some possible implementation manners, the liquid inlet pipeline and the liquid outlet pipeline are both communicated with a plurality of auxiliary pipelines, the driving fan blade and the driven fan blade are located in the auxiliary pipeline, and the number of the driving fan blades is greater than or equal to the number of the driven fan blades.

[0013] In some possible implementation manners, the auxiliary pipeline is a U-shaped pipeline communicated with the liquid inlet pipeline and / or the liquid outlet pipeline, and the driving fan blade and the driven fan blade are located at the corner or the straight line of the U-shaped pipeline at different positions of the auxiliary pipeline.

[0014] In some possible implementation manners, the auxiliary pipeline is a columnar pipeline in communication with the liquid inlet pipeline and / or the liquid outlet pipeline, a partition plate is arranged in the columnar pipeline to divide the columnar pipeline into a first one-way pipeline and a second one-way pipeline in communication with each other, and a one-way flow path from the first one-way pipeline to the second one-way pipeline is formed, the driving fan blade and the driven fan blade are located at a corner between the first one-way pipeline and the second one-way pipeline, or the driving fan blade and the driven fan blade are located at a straight line of the first one-way pipeline or a straight line of the second one-way pipeline.

[0015] In some possible implementation manners, the cooling circulation assembly comprises a condenser having the liquid outlet and the liquid inlet, and a plurality of auxiliary fans arranged outside the condenser.

[0016] In a second aspect, the utility model also provides a wet etching machine, including the liquid tank cooling system that any implementation way is as above, wherein, the wet etching machine is equipped with liquid tank, the cooling circulation assembly is arranged in the outside of liquid tank, the cooling pipeline assembly is arranged in the inside of liquid tank.

[0017] The liquid tank cooling system and the wet etching machine provided by the utility model have at least the following technical effects: compared with the prior art, the liquid tank cooling system comprises a cooling circulation assembly and a cooling pipeline assembly, wherein the two ends of the circulation pipeline are in communication with the liquid outlet and the liquid inlet respectively, so that the cooling liquid reciprocatingly circulates between the cooling circulation assembly and the cooling pipeline assembly, heat exchange and cooling are carried out, further, the driving fan blade is arranged in the inside of the circulation pipeline, and the driven fan blade is arranged outside the circulation pipeline, the driving fan blade is driven to rotate by the reciprocating circulation of the cooling liquid, the driving fan blade drives the driven fan blade to rotate, the rotation of the driven fan blade makes the liquid in the liquid tank circulate fully, the uniformity and the cooling speed of the liquid are improved, the temperature replacement efficiency is improved, the waiting time for cooling is reduced, the production line operation speed is accelerated, and the rotation of the driving fan blade and the driven fan blade is driven by the circulation of the cooling liquid, so that an additional power source is not needed, the driving structure is simplified, the utilization mode and the utilization efficiency of the cooling liquid are improved. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical scheme in the embodiments of the utility model, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description, and obviously, the drawings in the following description are only some embodiments of the utility model, and those skilled in the art can also obtain other drawings according to these drawings without creating any creative labor.

[0019] Figure 1 It is a structural schematic view of the liquid tank cooling system provided by an embodiment of the utility model.

[0020] Figure 2 is Figure 1 an enlarged schematic view of structure A shown in the figure;

[0021] Figure 3 is Figure 1 an enlarged schematic view of structure B shown in the figure;

[0022] Figure 4 is a schematic view of the circulation pipeline when installing the sealing bearing according to an embodiment of the present application;

[0023] Figure 5 is a schematic view of the circulation pipeline when installing the sealing bearing according to another embodiment of the present application.

[0024] Explanation of reference signs:

[0025] 1, a liquid tank cooling system, 10, a cooling circulation assembly, 11, a condenser, 111, a liquid outlet, 112, a liquid inlet, 12, an auxiliary fan, 13, a first connecting pipe, 14, a second connecting pipe, 15, a sealing element, 20, a cooling pipeline assembly, 21, a circulation pipeline, 211, a main pipeline, 2111, a liquid inlet pipeline, 2112, a liquid outlet pipeline, 212, an auxiliary pipeline, 213, a partition plate, 214, a mounting hole, 215, a protruding portion, 22, a driving fan blade, 23, a driven fan blade, 30, a sealing bearing, 40, a transmission shaft, 41, a radial step, 42, a limiting groove, 50, a first sealing ring, 51, a limiting protruding portion, 60, a second sealing ring, 70, a third sealing ring, 2, a liquid tank. DETAILED DESCRIPTION

[0026] In order to make the technical problems, technical solutions and beneficial effects of the present application clearer, the present application will be further described in detail below in combination with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and do not limit the present application.

[0027] It should be noted that when an element is referred to as being "fixed to", "fixed", "connected to", "connected", "provided on", "provided with", "fixedly provided on" another element, there can or can not be a middle element. In addition, when an element is referred to as being "connected to" another element, it can be mechanically connected, electrically connected, communicatively connected, and the like, according to the conventional understanding of those skilled in the art. In this document, the words "upper", "lower", "left", "right", "clockwise", "counterclockwise", and the like, which indicate the orientation or positional relationship, are based on the simplified description shown in the drawings, and are not limited to having a specific orientation or positional relationship. "First", "second", "third", and the like, are intended to distinguish different objects, and are not used to describe a specific order. "Multiple" refers to two or more quantities; "several" refers to one or more quantities.

[0028] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the present application belongs.

[0029] Please refer to Figures 1 to 5 , the liquid tank cooling system and the wet etching machine provided by the embodiments of the present application will be described.

[0030] Please refer to Figure 1 , the liquid tank cooling system 1 provided by the embodiments of the present application, comprising: a cooling circulation assembly 10, configured to be arranged outside a liquid tank 2, having a liquid outlet 111 and a liquid inlet 112; and a cooling pipeline assembly 20, configured to be arranged inside the liquid tank 2, comprising a circulation pipeline 21, a plurality of driving fan blades 22 and a plurality of driven fan blades 23; wherein one end of the circulation pipeline 21 is in communication with the liquid outlet 111, the other end of the circulation pipeline 21 is in communication with the liquid inlet 112, the driving fan blades 22 are located inside the circulation pipeline 21, the driven fan blades 23 are located outside the circulation pipeline 21, and the driving fan blades 22 are coaxially connected with the driven fan blades 23; when the cooling liquid reciprocally circulates in the cooling circulation assembly 10 and the circulation pipeline 21, the driving fan blades 22 are driven to rotate, and the driving fan blades 22 drive the driven fan blades 23 to rotate together.

[0031] Specifically, the liquid outlet 111 and the liquid inlet 112 are in communication with the circulation pipeline 21 through the first connecting pipe 13 and the second connecting pipe 14, respectively. The cooling circulation assembly 10 is used to cool and cool the cooling liquid flowing out of the circulation pipeline 21, and is also used to make the cooling liquid circulate, thereby providing the cooling liquid with the power to flow into and out of the circulation pipeline 21. For example Figure 1 As shown in the figure, the cooling liquid can form a counterclockwise reciprocating circulation flow path.

[0032] In order to increase the rotating area of the driving fan blade 22 and the driven fan blade 23, a spiral fan blade can be used to improve the stirring capacity. Since the driving fan blade 22 is located inside the circulating pipeline 21 and the driven fan blade 23 is located outside the circulating pipeline 21, the overall volume of the driving fan blade 22 is smaller than that of the driven fan blade 23.

[0033] The reciprocating circulation flow of the cooling liquid provides power for the rotation of the driving fan blade 22, and then the driving fan blade 22 can drive the driven fan blade 23 to rotate without other power sources, realizing the multiple use of the cooling liquid. The driven fan blade 23 can more greatly stir the liquid medicine in the liquid medicine tank 2, so that the liquid medicine can be more uniformly cooled and the cooling speed is improved.

[0034] In addition, the cooling liquid can be water, glycerol mixed liquid, ethylene glycol mixed liquid, etc., which is not specifically limited.

[0035] The liquid medicine tank cooling system 1 provided by the embodiment of the utility model has at least the following technical effects: compared with the prior art, the liquid medicine tank cooling system 1 comprises a cooling circulation assembly 10 and a cooling pipeline assembly 20, wherein the two ends of the circulating pipeline 21 are communicated with the liquid outlet 111 and the liquid inlet 112 respectively, and then the cooling liquid reciprocatingly circulates between the cooling circulation assembly 10 and the cooling pipeline assembly 20 to flow, exchanges heat and cools, further, the driving fan blade 22 is arranged in the inside of the circulating pipeline 21, and the driven fan blade 23 is arranged outside the circulating pipeline 21, the reciprocating circulation flow of the cooling liquid drives the driving fan blade 22 to rotate, and then the driving fan blade 22 drives the driven fan blade 23 to rotate, the rotation of the driven fan blade 23 makes the liquid medicine in the liquid medicine tank 2 fully circulate, the cooling uniformity and the cooling speed of the liquid medicine are increased, the temperature replacement efficiency is improved, the cooling waiting time is reduced, the production line operation speed is accelerated, and the rotation of the driving fan blade 22 and the driven fan blade 23 is driven by the circulation flow of the cooling liquid, without additional power source, the driving structure is simplified, and the utilization mode and the utilization efficiency of the cooling liquid are increased.

[0036] The structure of the cooling circulation assembly 10 and the cooling pipeline assembly 20 will be described in detail below, but is not limited to the following embodiments.

[0037] Please refer to Figure 1 In some embodiments, the cooling circulation assembly 10 comprises a condenser 11 with a liquid outlet 111 and a liquid inlet 112, and a plurality of auxiliary fans 12 arranged outside the condenser 11. In this embodiment, the condenser 11 is a conventional device with a pump structure to realize the inflow and outflow of the cooling liquid. In order to improve the cooling and cooling speed of the condenser 11 to the cooling liquid, the auxiliary fan 12 is arranged outside the condenser 11, which has a power source and can accelerate the cooling and cooling speed of the cooling liquid.

[0038] For the convenience of installation of the auxiliary fan 12, a grid-shaped support can be arranged outside the condenser 11, and then the plurality of auxiliary fans 12 can be arranged more uniformly and conveniently.

[0039] Of course, in other embodiments, the auxiliary fan 12 can not be arranged, or a plurality of connected condensers 11 can be arranged, and no specific limitation is made thereto.

[0040] Please refer to Figure 4 and Figure 5 In some embodiments, the circulating pipeline 21 is provided with a plurality of mounting holes 214, a sealing bearing 30 is arranged in the mounting hole 214, a transmission shaft 40 is arranged in the sealing bearing 30, and the driving fan blade 22 and the driven fan blade 23 are respectively connected to the two ends of the transmission shaft 40. In this embodiment, the driving fan blade 22 and the driven fan blade 23 are arranged on the same transmission shaft 40, which can reduce power loss as much as possible and increase the number of rotations of the driven fan blade 23. The transmission shaft 40 is arranged in the sealing bearing 30 arranged in the mounting hole 214, which can greatly realize the sealing of the inside and outside of the circulating pipeline 21, prevent the liquid medicine from entering the circulating pipeline 21 from the mounting hole 214, and prevent the cooling liquid from flowing out of the circulating pipeline 21 from the mounting hole 214.

[0041] In order to further improve the sealing when the driving fan blade 22 and the driven fan blade 23 are arranged, for example, please refer to Figure 4 The transmission shaft 40 has a radial step 41 between the driving fan blade 22 and the circulating pipeline 21, and a first sealing ring 50 is arranged between the radial step 41 and the circulating pipeline 21; and / or the transmission shaft 40 has a radial step 41 between the driven fan blade 23 and the circulating pipeline 21, and a first sealing ring 50 is arranged between the radial step 41 and the circulating pipeline 21.

[0042] It can be understood that the part of the transmission shaft 40 located in the circulating pipeline 21 and the part of the transmission shaft 40 located outside the circulating pipeline 21 can be selectively provided with the first sealing ring 50, or both can be provided with the first sealing ring 50.

[0043] Specifically, the transmission shaft 40 is formed with a radial step 41 extending in a ring shape in the radial direction, the first sealing ring 50 is sleeved on the outer ring of the transmission shaft 40, the first sealing ring 50 is arranged more closely between the radial step 41 and the pipe wall of the circulating pipeline 21, and the first sealing ring 50 can rotate synchronously in the rotation process of the transmission shaft 40. Moreover, the coverage range of the first sealing ring 50 is greater than the hole diameter of the mounting hole 214, so as to improve the sealing performance.

[0044] In addition, a limiting groove 42 can be formed on the transmission shaft 40, and the first sealing ring 50 has a limiting protrusion 51, and the first sealing ring 50 is fitted in the limiting groove 42 through the limiting protrusion 51, further improving the position reliability of the first sealing ring 50.

[0045] The radial shape of the first sealing ring 50 can be block-shaped, wavy, toothed, etc.

[0046] Alternatively, for example, referring to Figure 5 , the inner wall and / or the outer wall of the circulation pipeline 21 is formed with an annular protrusion 215 adjacent to the mounting hole 214, and the second sealing ring 60 and the third sealing ring 70 are arranged between the protrusion 215 and the transmission shaft 40; the second sealing ring 60 is sleeved on the transmission shaft 40, and the outer ring of the second sealing ring 60 is in a non-connected relationship with the protrusion 215; the third sealing ring 70 is sleeved on the inner ring of the protrusion 215, and the inner ring of the third sealing ring 70 is in a non-connected relationship with the transmission shaft 40.

[0047] It can be understood that the part of the transmission shaft 40 located in the circulation pipeline 21 and the part located outside the circulation pipeline 21 can be selectively provided with the second sealing ring 60 and the third sealing ring 70, or both can be provided with the second sealing ring 60 and the third sealing ring 70.

[0048] Specifically, the second sealing ring 60 and the third sealing ring 70 are arranged in the axial direction of the transmission shaft 40, but it is not limited which one is closer to the pipe wall of the circulation pipeline 21. The second sealing ring 60 can rotate synchronously with the transmission shaft 40, and the third sealing ring 70 does not rotate with the transmission shaft 40.

[0049] The second sealing ring 60 and the third sealing ring 70 form a double-layer sealing, and the outer ring of the second sealing ring 60 and the inner ring of the third sealing ring 70 form a labyrinth structure with a height difference, improving the sealing performance.

[0050] The radial shape of the second sealing ring 60 and the third sealing ring 70 can be block-shaped, wavy, toothed, etc. When it is set to be wavy or toothed, it can increase the difficulty of the overflow of the cooling liquid or the liquid medicine.

[0051] Of course, the part of the transmission shaft 40 located in the circulation pipeline 21 and the part located outside the circulation pipeline 21 can be provided with the same sealing structure, or different sealing structures.

[0052] For example, referring to Figure 1 and Figure 2In some embodiments, the circulation pipeline 21 includes at least one main pipeline 211 and several secondary pipelines 212. The main pipeline 211 is provided with a partition plate 213 to divide the main pipeline 211 into an inlet pipeline 2111 and an outlet pipeline 2112. The inlet pipeline 2111 is connected to the outlet 111, the outlet pipeline 2112 is connected to the inlet 112, and the secondary pipelines 212 are connected to the inlet pipeline 2111 and / or the outlet pipeline 2112 and are arranged at an angle.

[0053] Specifically, the circulation pipeline 21 may include a main pipeline 211 and several secondary pipelines 212, or it may include multiple sets of a main pipeline 211 and several secondary pipelines 212. The secondary pipelines 212 can increase the cooling area of ​​the coolant and the liquid medicine, thereby improving the cooling effect.

[0054] by Figure 1 Taking the direction shown as an example, the main pipeline 211 is usually cylindrical. The main pipeline 211 is equipped with a partition plate 213, which divides the main pipeline 211 into an inlet pipeline 2111 and an outlet pipeline 2112 on the left and right sides respectively. The left side is the outlet pipeline 2112 connected to the inlet port 112, and the right side is the inlet pipeline 2111 connected to the outlet port 111, forming a unidirectional flow path from the inlet pipeline 2111 to the outlet pipeline 2112.

[0055] When there is one secondary pipeline 212, it can be connected to either the inlet pipeline 2111 or the outlet pipeline 2112. When there are multiple secondary pipelines 212, typically some are connected to the inlet pipeline 2111 and others are connected to the outlet pipeline 2112. The secondary pipeline 212 is set at an angle to the corresponding inlet pipeline 2111 and outlet pipeline 2112, for example, 60 degrees, 90 degrees, 120 degrees, etc.

[0056] Taking 90 degrees as an example, multiple secondary pipes 212 are respectively set in the circumferential direction of the circulation pipe 21, and in the axial direction of the circulation pipe 21, the multiple secondary pipes 212 can be at different heights to achieve better cooling effect.

[0057] And, the plurality of driving vanes 22 and the plurality of driven vanes 23 can be arranged at any wall position of the main pipe 211 and / or at any wall position of the sub-pipe 212, and the rotation axis of the driving vanes 22 and the driven vanes 23 is arranged at an angle with the pipe axis of the corresponding main pipe 211 and / or sub-pipe 212. For example, the driving vanes 22 and the driven vanes 23 can be arranged at any circumferential position of the main pipe 211 and / or the sub-pipe 212, and the rotation axis of the driving vanes 22 and the driven vanes 23 can be perpendicular to the pipe axis of the main pipe 211 or the sub-pipe 212, or can be arranged at an acute angle or an obtuse angle with the pipe axis of the main pipe 211 or the sub-pipe 212; for another example, the driving vanes 22 and the driven vanes 23 can be arranged at any end surface position of the main pipe 211 and / or the sub-pipe 212, and the rotation axis of the driving vanes 22 and the driven vanes 23 can be parallel to the pipe axis of the main pipe 211 or the sub-pipe 212, or can be arranged at an acute angle or an obtuse angle with the pipe axis of the main pipe 211 or the sub-pipe 212. In addition, different driving vanes 22 and driven vanes 23 can be arranged at different positions and angles, and no specific limitation is made thereto.

[0058] Please refer to Figure 1 In some embodiments, the liquid inlet pipe 2111 and the liquid outlet pipe 2112 are both communicated with a plurality of sub-pipes 212, the driving vanes 22 and the driven vanes 23 are arranged in the sub-pipes 212, and the number of the driving vanes 22 is greater than or equal to the number of the driven vanes 23. In this embodiment, the driving vanes 22 and the driven vanes 23 are arranged in the sub-pipes 212, which can increase the stirring range of the driven vanes 23 and improve the stirring efficiency of the driven vanes 23.

[0059] When the number of the driving vanes 22 is equal to the number of the driven vanes 23, each driving vane 22 corresponds to each driven vane 23; when the number of the driving vanes 22 is greater than the number of the driven vanes 23, there are driving vanes 22 that do not drive the driven vanes 23, and these driving vanes 22 can accelerate the circulation speed of the cooling liquid and improve the temperature replacement efficiency.

[0060] The shape of the sub-pipe 212 is illustrated below, but is not limited to the following embodiments.

[0061] For example, as Figure 1 and Figure 3As shown, the sub-pipeline 212 is a U-shaped tube in communication with the liquid inlet pipeline 2111 and / or the liquid outlet pipeline 2112, and the driving fan blade 22 and the driven fan blade 23 are located at the corners of the U-shaped tube at different positions of the sub-pipeline 212. In this embodiment, the sub-pipeline 212 is a U-shaped tube, which can form a one-way flow path and increase the cooling area of the coolant and the chemical liquid. Since the flow direction of the coolant changes at the corner, the driving fan blade 22 is arranged at the corner, which can further improve the rotation ability of the driving fan blade 22, increase the stirring frequency of the driven fan blade 23, and improve the cooling speed and temperature replacement efficiency.

[0062] For example, as shown in FIG. 1, the sub-pipeline 212 is a U-shaped tube in communication with the liquid inlet pipeline 2111 and / or the liquid outlet pipeline 2112, and the driving fan blade 22 and the driven fan blade 23 are located at the corners of the U-shaped tube. Figure 1 and Figure 3 As shown, the sub-pipeline 212 is a cylindrical tube in communication with the liquid inlet pipeline 2111 and / or the liquid outlet pipeline 2112, and a partition plate is arranged in the cylindrical tube to divide the cylindrical tube into a first one-way tube and a second one-way tube in communication with each other, and form a one-way flow path from the first one-way tube to the second one-way tube, and the driving fan blade 22 and the driven fan blade 23 are located at the corner between the first one-way tube and the second one-way tube. In this embodiment, the sub-pipeline 212 is a cylindrical tube with a partition plate, and the first one-way tube and the second one-way tube can also form a one-way flow path, thereby increasing the cooling area of the coolant and the chemical liquid.

[0063] Since the flow direction of the coolant changes at the corner, the driving fan blade 22 is arranged at the corner, which can further improve the rotation ability of the driving fan blade 22, increase the stirring frequency of the driven fan blade 23, and improve the cooling speed and temperature replacement efficiency.

[0064] Of course, in other embodiments, the driving fan blade 22 and the driven fan blade 23 can also be arranged at the corner between the main pipeline 211 and the sub-pipeline 212, or can be arranged at any other position, for example, can be arranged at the straight line of the U-shaped tube, or can be arranged at the straight line of the first one-way tube or the straight line of the second one-way tube, and no specific limitation is made.

[0065] Based on the same technical concept, please refer to Figure 1 The utility model discloses an embodiment further provides a wet etching machine, including the chemical liquid tank cooling system 1 of any one embodiment as above, wherein, the wet etching machine is equipped with chemical liquid tank 2, and cooling circulation component 10 is arranged outside chemical liquid tank 2, and cooling pipeline component 20 is arranged inside chemical liquid tank 2. Of course, the wet etching machine also includes other conventional components in the field for realizing etching function, which will not be repeated here.

[0066] Specifically, the cooling circulation assembly 10 can be directly arranged at the bottom and side of the tank body outside the liquid tank 2, and can also be arranged at other positions of the wet etching machine as long as the circulation of the cooling liquid can be realized. For example, the cooling circulation assembly 10 can be arranged at the bottom of the tank body outside the liquid tank 2 by means of bolt connection, welding or the like.

[0067] The outlet 111 and the inlet 112 are respectively communicated with the circulation pipeline 21 through the first connecting pipe 13 and the second connecting pipe 14. For example, the circulation pipeline 21 penetrates the bottom of the tank body of the liquid tank 2, and is then sealingly connected with the first connecting pipe 13 and the second connecting pipe 14. In order to ensure the sealing property of the liquid tank 2, a sealing member 15 is arranged outside the liquid tank 2 to wrap the connection position of the circulation pipeline 21, the first connecting pipe 13 and the second connecting pipe 14.

[0068] The wet etching machine provided by the embodiment of the utility model adopts the liquid tank cooling system 1 described in any one of the above embodiments, and the technical effects are the same, and details are not repeated here.

[0069] It can be understood that the parts in the above embodiments can be freely combined or deleted to form different combined embodiments, and the specific content of each combined embodiment is not repeated here. After the above description, it can be considered that the specification has recorded each combined embodiment, and different combined embodiments can be supported.

[0070] The above only describes preferred embodiments of the utility model, and does not limit the utility model, and any modification, equivalent replacement and improvement within the spirit and principle of the utility model should be included in the protection scope of the utility model.

Claims

1. A chemical tank cooling system, characterized by comprising: The application relates to a cooling circulating assembly (10) and a cooling pipeline assembly (20). The cooling circulating assembly (10) is arranged outside a liquid tank (2) and has a liquid outlet (111) and a liquid inlet (112); the cooling pipeline assembly (20) is arranged inside the liquid tank (2) and comprises a circulating pipeline (21), a plurality of driving vanes (22) and a plurality of driven vanes (23). One end of the circulating pipeline (21) is communicated with the liquid outlet (111), the other end of the circulating pipeline (21) is communicated with the liquid inlet (112), the driving vanes (22) are arranged inside the circulating pipeline (21), the driven vanes (23) are arranged outside the circulating pipeline (21), and the driving vanes (22) are coaxially connected with the driven vanes (23). When cooling liquid reciprocally circulates in the cooling circulating assembly (10) and the circulating pipeline (21), the driving vanes (22) are driven to rotate, and the driving vanes (22) drive the driven vanes (23) to rotate. The circulating pipeline (21) is provided with a plurality of mounting holes (214), sealing bearings (30) are arranged in the mounting holes (214), transmission shafts (40) are arranged in the sealing bearings (30), and the driving vanes (22) and the driven vanes (23) are respectively connected to two ends of the transmission shafts (40).

2. The chemical tank cooling system according to claim 1, characterized by Between the driving vanes (22) and the circulating pipeline (21), the transmission shafts (40) have radial steps (41), and first sealing rings (50) are arranged between the radial steps (41) and the circulating pipeline (21).

3. The drug tank cooling system according to claim 2, characterized by And / or, between the driven vanes (23) and the circulating pipeline (21), the transmission shafts (40) have radial steps (41), and first sealing rings (50) are arranged between the radial steps (41) and the circulating pipeline (21). The transmission shafts (40) form limiting grooves (42), and the first sealing rings (50) have limiting convex parts (51), the first sealing rings (50) are fitted in the limiting grooves (42) through the limiting convex parts (51).

4. The chemical tank cooling system according to claim 3, characterized by The inner wall and / or the outer wall of the circulating pipeline (21) is formed with annular convex parts (215) adjacent to the mounting holes (214), and second sealing rings (60) and third sealing rings (70) are arranged between the convex parts (215) and the transmission shafts (40).

5. The drug tank cooling system according to claim 2, characterized by The second sealing rings (60) are sleeved on the transmission shafts (40), the outer rings of the second sealing rings (60) are in non-connected relationship with the convex parts (215), and the third sealing rings (70) are sleeved on the inner rings of the convex parts (215), and the inner rings of the third sealing rings (70) are in non-connected relationship with the transmission shafts (40). ​ 6. The drug tank cooling system according to claim 1, wherein The circulating pipeline (21) comprises at least one set of main pipelines (211) and a plurality of auxiliary pipelines (212), wherein the main pipeline (211) is provided with a partition plate (213) to divide the main pipeline (211) into a liquid inlet pipeline (2111) and a liquid outlet pipeline (2112), the liquid inlet pipeline (2111) is in communication with the liquid inlet (112), the liquid outlet pipeline (2112) is in communication with the liquid outlet (111), the auxiliary pipeline (212) is in communication with the liquid inlet pipeline (2111) and / or the liquid outlet pipeline (2112), and is arranged at an angle. The plurality of driving vanes (22) and the plurality of driven vanes (23) are arranged at any wall position of the main pipeline (211) and / or any wall position of the auxiliary pipeline (212), and the rotation axes of the driving vanes (22) and the driven vanes (23) are arranged at an angle with the pipeline axes of the corresponding main pipeline (211) and / or auxiliary pipeline (212).

7. The drug tank cooling system according to claim 6, wherein The liquid inlet pipeline (2111) and the liquid outlet pipeline (2112) are both in communication with a plurality of auxiliary pipelines (212), the driving vanes (22) and the driven vanes (23) are located in the auxiliary pipelines (212), and the number of the driving vanes (22) is greater than or equal to the number of the driven vanes (23).

8. The drug tank cooling system according to claim 6 or 7, characterized by The auxiliary pipeline (212) is a U-shaped tube in communication with the liquid inlet pipeline (2111) and / or the liquid outlet pipeline (2112), and the driving vanes (22) and the driven vanes (23) are located at the corners or straight lines of the U-shaped tube at different positions of the auxiliary pipeline (212).

9. The drug tank cooling system according to claim 6 or 7, characterized by The auxiliary pipeline (212) is a cylindrical tube in communication with the liquid inlet pipeline (2111) and / or the liquid outlet pipeline (2112), the cylindrical tube is provided with a partition plate to divide the cylindrical tube into a first one-way tube and a second one-way tube in communication with each other, and form a one-way flow path from the first one-way tube to the second one-way tube, the driving vanes (22) and the driven vanes (23) are located at the corners between the first one-way tube and the second one-way tube, or the driving vanes (22) and the driven vanes (23) are located at the straight lines of the first one-way tube or the straight lines of the second one-way tube.

10. A wet etching machine characterized by, The chemical liquid tank cooling system comprises the chemical liquid tank (2), the cooling circulating assembly (10) is arranged outside the chemical liquid tank (2), and the cooling pipeline assembly (20) is arranged inside the chemical liquid tank (2).

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