PCW system integrated water return valve set device for semiconductor production

Abstract

The utility model provides a PCW system integrated water return valve group device for semiconductor production, which comprises a pipe joint, a movable joint A, a stop valve, a detection device, a flow meter and a movable joint D. The pipe joint is in threaded connection with the movable joint A through a joint nut A. The other end of the movable joint A is connected with the stop valve, the other end of the stop valve is connected with the detection device, and the flow meter is connected with the detection device. The other end of the detection device is connected with a movable joint B, the movable joint B is connected with a movable joint C I through a joint nut B, the other end of the movable joint C I is in threaded connection with a flowmeter, the other end of the flowmeter is in threaded connection with a movable joint C II, and the other end of the movable joint C II is in threaded connection with a movable joint D through a joint nut C. By means of the integrated modular design, installation is rapid and convenient, the construction period is shortened, the fool-proof effect is good, all assemblies are connected in a threaded welding mode, pipeline combination points are reduced, and the hidden danger of pipeline leakage is greatly reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to PCW system technical field, concretely is a PCW system integrated return valve group device for semiconductor production. BACKGROUND

[0002] At present, the semiconductor industry develops rapidly, and the upgrading of semiconductor process precision production equipment is also faster and faster, and the installation and reconstruction of corresponding semiconductor precision production equipment are also more and more. For semiconductor factories, especially the construction of chip manufacturing industry semiconductor factories, the construction period is a very key factor, which often determines whether the product can succeed in the market.

[0003] And in the process of producing chips, the PCW system plays a crucial role as a cooling circulation system, and at present, the various valve groups of the PCW system of the semiconductor factory are completed on site, the progress plan is difficult to control, the installation and deployment period is long, the proportion of on-site construction in the whole project time is large, and there are more pipeline connection points and large leakage hazards. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a PCW system integrated return valve group device for semiconductor production to solve the problems in the above background technology.

[0005] The technical scheme of the utility model is as follows:

[0006] A PCW system integrated return valve group device for semiconductor production, comprising a pipe joint, a movable joint A, a stop valve, a detection device, a flowmeter and a movable joint D, the pipe joint is threadedly connected with the movable joint A through a joint nut A, the other end of the movable joint A is connected with the stop valve, the other end of the stop valve is connected with the detection device, the other end of the detection device is connected with a movable joint B, the movable joint B is connected with a movable joint C one through a joint nut B, the other end of the movable joint C one is threadedly connected with the flowmeter, the other end of the flowmeter is threadedly connected with a movable joint C two, and the other end of the movable joint C two is threadedly connected with the movable joint D through a joint nut C.

[0007] Further, the structure of the detection device is a tee joint, a base is welded on the top channel of the detection device, the base is threadedly connected with a pressure and temperature double display meter, and anaerobic glue is applied when the base and the pressure and temperature double display meter are threadedly connected.

[0008] Further, the stop valve is a stainless steel stop valve.

[0009] Further, the connection mode of the movable joint A, the detection device and the stop valve is all welding after thread locking.

[0010] Furthermore, the connection between the detection device and the live joint B is a socket welding method.

[0011] Furthermore, a sealing ring A is installed between the pipe fitting and the union A, a sealing ring B is installed between the union B and the union C1, and a sealing ring C is installed between the union C2 and the union D.

[0012] Furthermore, when the union C1 and union C2 are threadedly connected to the flow meter, anaerobic adhesive is applied.

[0013] The beneficial effects of this utility model are as follows:

[0014] This utility model integrates a shut-off valve, flow meter, detection device, and pressure and temperature dual display meter into a modular design. During installation, it is connected to the main pipeline via a connector, making installation quick and convenient, shortening the construction period, and providing good error prevention, which greatly reduces the rate of human installation errors. Furthermore, the connection of each component by threaded welding reduces pipeline joint points and significantly reduces the risk of pipeline leakage. In addition, the integrated modular design reduces the space required. Attached Figure Description

[0015] Fig. 1 This is a schematic diagram of the structure of this utility model.

[0016] Fig. 2 This is a schematic diagram of the exploded structure of this utility model.

[0017] In the diagram, 1-pipe fitting, 2-union A, 3-stop valve, 4-detection device, 401-base, 5-union B, 6-union C-1, 7-flow meter, 8-union C-2, 9-union D, 10-pressure and temperature dual display gauge, 11-fitting nut A, 12-fitting nut B, 13-fitting nut C, 14-sealing ring A, 15-sealing ring B, 16-sealing ring C. Detailed Implementation

[0018] The technical solution of this utility model will be clearly and completely described below with reference to the embodiments. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of this utility model.

[0019] like Figs. 1-2As shown, a PCW system integrated backwater valve group device for semiconductor production comprises a pipe joint 1, a union joint A 2, a stop valve 3, a detection device 4, a flow meter 7 and a union joint D 9, the pipe joint 1 is threadedly connected with the union joint A 2 through a joint nut A 11, the other end of the union joint A 2 is connected with the stop valve 3, the other end of the stop valve 3 is connected with the detection device 4, the other end of the detection device 4 is connected with a union joint B 5, the union joint B 5 is connected with a union joint C 1 6 through a joint nut B 12, the other end of the union joint C 1 6 is threadedly connected with the flow meter 7, the other end of the flow meter 7 is threadedly connected with a union joint C 2 8, and the other end of the union joint C 2 8 is threadedly connected with the union joint D 9 through a joint nut C 13.

[0020] The detection device 4 is a tee, a base 401 is welded on the top channel of the detection device 4, and a pressure and temperature double display meter 10 is threadedly connected with the base 401, and anaerobic glue is applied when the base 401 is threadedly connected with the pressure and temperature double display meter 10.

[0021] The stop valve 3 is a stainless steel stop valve.

[0022] The connection modes of the union joint A 2, the detection device 4 and the stop valve 3 are all welding after thread locking.

[0023] The connection mode of the detection device 4 and the union joint B 5 is socket welding.

[0024] Sealing rings A 14 are further arranged between the pipe joint 1 and the union joint A 2, sealing rings B 15 are further arranged between the union joint B 5 and the union joint C 1 6, and sealing rings C 16 are further arranged between the union joint C 2 8 and the union joint D 9.

[0025] Anaerobic glue is applied when the union joint C 1 6 and the union joint C 2 8 are threadedly connected with the flow meter 7.

[0026] When the utility model is connected with a main pipeline, the pipe joint 1, the union joint D 9 and the main pipeline are rapidly connected, installation is convenient, the construction period can be shortened, the integrated modular design is good in fool-proof effect, human installation failure rate is greatly reduced, space use is reduced, components are connected in a threaded welding mode, pipeline combination points are reduced, and pipeline leakage hidden dangers are greatly reduced.

[0027] The above merely describes preferred embodiments of the utility model and is not used to limit the utility model, and any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A PCW system integrated backwater valve group device for semiconductor production, comprising a pipe joint, a union joint A, a stop valve, a detection device, a flow meter, and a union joint D, characterized in that, The pipe joint is screwed with the union joint A through a joint nut A, the other end of the union joint A is connected with a stop valve, the other end of the stop valve is connected with a detection device, the other end of the detection device is connected with a union joint B, the union joint B is connected with a union joint C1 through a joint nut B, the other end of the union joint C1 is screwed with a flowmeter, the other end of the flowmeter is screwed with a union joint C2, the other end of the union joint C2 is screwed with a union joint D through a joint nut C.

2. The PCW system integrated backwater valve group device for semiconductor production according to claim 1, characterized by, The detection device is a tee joint, a base is welded on the top channel of the detection device, a pressure and temperature double display meter is screwed with the base, anaerobic glue is applied when the base is screwed with the pressure and temperature double display meter.

3. The PCW system integrated backwater valve group device for semiconductor production according to claim 1, characterized by, The stop valve is a stainless steel stop valve.

4. The PCW system integrated backwater valve group device for semiconductor production according to Claim 1, wherein The connection modes of the union joint A, the detection device and the stop valve are all welded and fixed after screwing and locking.

5. The PCW system integrated backwater valve group device for semiconductor production according to Claim 1, wherein The connection mode of the detection device and the union joint B is socket welding.

6. The PCW system integrated backwater valve group apparatus for semiconductor production according to Claim 1, wherein Sealing rings A are also installed between the pipe joint and the union joint A, sealing rings B are also installed between the union joint B and the union joint C1, and sealing rings C are also installed between the union joint C2 and the union joint D.

7. The PCW system integrated backwater valve group device for semiconductor production according to Claim 1, wherein Anaerobic glue is applied when the union joint C1 and the union joint C2 are screwed with the flowmeter.

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