Pretreatment device for silane-containing waste gas

Abstract

The utility model discloses a pretreatment device for silane-containing waste gas. The pretreatment device comprises a pretreatment tank, a waste gas supply pipeline, a liquid receiving nozzle, a water supply pipeline, an overflow pipeline and a waste gas discharge pipeline, the waste gas supply pipeline is communicated with one side of the top of the pretreatment tank and is used for introducing silane-containing waste gas into the pretreatment tank; the water supply pipeline is communicated with one side of the bottom of the pretreatment tank and is used for introducing water into the pretreatment tank; the liquid receiving nozzle is arranged at the end part of the waste gas supply pipeline in the pretreatment tank and is positioned at the water level of the pretreatment tank, the overflow pipeline is communicated with the other side of the middle upper part of the pretreatment tank, and an overflow pipeline valve is arranged on the overflow pipeline; and the waste gas discharge pipeline is communicated with the other side of the top of the pretreatment tank and is externally connected to a deinsectization device. The utility model relates to the technical field of waste gas treatment and can solve the problem that a waste gas supply part at an inlet of a disinfestation tower is blocked by silicon dioxide in the prior art.

Description

Technical Field

[0001] This utility model relates to the field of waste gas treatment technology, and in particular to a pretreatment device for silane-containing waste gas. Background Technology

[0002] Waste gas containing silane components such as trichlorosilane and silicon tetrachloride is generally treated by hydrolysis and neutralization in a treatment tower with alkaline disinfectant liquid circulation to render it harmless. When silicon tetrachloride is treated with sodium hydroxide aqueous solution, a hydrolysis reaction of silicon tetrachloride occurs: SiCl4 + 2H2O → SiO2 + 4HCl. The neutralization reaction with hydrogen chloride produced in the hydrolysis reaction is: HCl + NaOH → NaCl + H2O, producing solid SiO2 (silicon dioxide).

[0003] Because silica has very low solubility in water, it adheres and accumulates at the contact point between waste gas and alkaline treatment liquid. During long-term continuous treatment operation, the waste gas supply section at the inlet of the treatment tower becomes clogged with silica, making continuous operation difficult. Therefore, there is a need for a pretreatment device for silane-containing waste gas that can solve the problem of silica clogging at the waste gas supply section at the inlet of the treatment tower in existing technologies. Summary of the Invention

[0004] The purpose of this invention is to provide a pretreatment device for silane-containing waste gas, which can solve the problem of the waste gas supply section at the inlet of the purging tower being blocked by silica in the prior art.

[0005] This utility model is implemented as follows:

[0006] A pretreatment device for silane-containing waste gas includes a pretreatment tank, a waste gas supply pipeline, a liquid receiving nozzle, a water supply pipeline, an overflow pipeline, and a waste gas discharge pipeline. The waste gas supply pipeline is connected to the top side of the pretreatment tank and introduces the silane-containing waste gas into the pretreatment tank. The water supply pipeline is connected to the bottom side of the pretreatment tank and introduces water into the pretreatment tank. The liquid receiving nozzle is located at the end of the waste gas supply pipeline within the pretreatment tank, and is positioned at the water level in the pretreatment tank. The overflow pipeline is connected to the other side of the upper middle part of the pretreatment tank, and an overflow valve is installed on the overflow pipeline. The waste gas discharge pipeline is connected to the other side of the top of the pretreatment tank and is externally connected to a pest control device.

[0007] The liquid receiving nozzle has a gas release port at its front end, with the front end of the gas release port located below the water surface in the pretreatment tank and the rear end of the gas release port above the water surface, so that some waste gas can escape from the liquid receiving nozzle through the gas release port.

[0008] A nitrogen supply pipeline is provided between the waste gas supply pipeline and the liquid receiving nozzle, so that nitrogen can be introduced into the liquid receiving nozzle through the nitrogen supply pipeline.

[0009] The pretreatment tank is equipped with a partition, the upper end of which is higher than the water surface and the lower end of which is higher than the bottom surface of the pretreatment tank, dividing the pretreatment tank into two chambers with the bottom connected. The exhaust gas supply pipeline, liquid receiving nozzle and water supply pipeline are located in the first chamber, and the overflow pipeline and exhaust gas discharge pipeline are located in the second chamber.

[0010] The height of the water supply pipeline is lower than the height of the lower end of the partition.

[0011] The bottom of the partition is bent toward the second chamber to form an oblique flow guide surface.

[0012] The bottom of the second chamber of the pretreatment tank is equipped with a maintenance drainage pipeline, and a drainage pipeline valve is installed on the maintenance drainage pipeline.

[0013] Compared with the prior art, this utility model has the following advantages:

[0014] 1. This utility model is equipped with a pretreatment tank, an exhaust gas supply pipeline, a liquid receiving nozzle, a water supply pipeline, and an exhaust gas discharge pipeline. The water supply pipeline introduces water into the pretreatment tank, and the exhaust gas supply pipeline introduces silane-containing exhaust gas into the pretreatment tank through the liquid receiving nozzle, where it undergoes a hydrolysis reaction with water. This converts the silane components in the silane-containing exhaust gas into silicon dioxide and hydrogen chloride, ensuring that the exhaust gas entering the pest control equipment through the exhaust gas discharge pipeline is essentially free of silane. Thus, the pretreatment of the exhaust gas prevents the exhaust gas supply section at the inlet of the pest control equipment from being blocked by silicon dioxide, ensuring the continuous operation of the pest control equipment.

[0015] 2. Because this utility model has a liquid receiving nozzle with a gas release port, some gas can escape from the gas release port, which can reduce the resistance of the liquid receiving part and reduce the water surface fluctuation at the liquid receiving nozzle, thereby carrying out the hydrolysis reaction with high efficiency. At the same time, it can also prevent the liquid receiving nozzle from being blocked due to the precipitation of silica.

[0016] 3. This utility model has a partition plate with its lower end higher than the water supply pipeline, which divides the pretreatment tank into a first chamber for hydrolysis reaction and a second chamber for discharging waste gas and wastewater. The bottoms of the first chamber and the second chamber are connected and the connection part is provided with a guide surface, which can make the water flow more smoothly from the first chamber into the second chamber, effectively avoiding water surface fluctuation in the first chamber, and thus preventing the liquid receiving nozzle and its gas release port from being blocked by the precipitated silica.

[0017] 4. Because this utility model is equipped with a nitrogen supply pipeline, nitrogen is introduced through the nitrogen supply pipeline to purge the inside of the liquid receiving nozzle, which can prevent silica from adhering to the inside of the liquid receiving nozzle and the gas release port, thereby preventing the liquid receiving nozzle and its gas release port from being blocked.

[0018] 5. Because this utility model is equipped with a maintenance drainage pipeline, the wastewater in the pretreatment tank can be discharged quickly, avoiding the overflow pipeline from being blocked and causing poor drainage. This allows the pretreatment device to operate continuously without affecting the continuous operation of the pest control equipment, and also facilitates the maintenance of the pretreatment device. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the main structure of the pretreatment device for silane-containing waste gas of this utility model (without partitions installed);

[0020] Figure 2 This is a schematic diagram of the main structure of the pretreatment device for silane-containing waste gas of this utility model (with mounting partition);

[0021] Figure 3 This is a three-dimensional structural diagram (with mounting partition) of the pretreatment device for silane-containing waste gas according to this utility model;

[0022] Figure 4 This is a front view of the liquid receiving nozzle in the pretreatment device for silane-containing waste gas of this utility model.

[0023] In the diagram, 1 is the pretreatment tank, 2 is the exhaust gas supply pipeline, 3 is the liquid receiving nozzle, 31 is the gas release port, 4 is the water supply pipeline, 5 is the overflow pipeline, 6 is the exhaust gas discharge pipeline, 7 is the overflow pipeline valve, 8 is the baffle plate, 81 is the guide surface, 9 is the nitrogen supply pipeline, 10 is the maintenance drainage pipeline, and 11 is the drainage pipeline valve. Detailed Implementation

[0024] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0025] Please see the appendix Figure 1 A pretreatment device for silane-containing waste gas includes a pretreatment tank 1, a waste gas supply pipeline 2, a liquid receiving nozzle 3, a water supply pipeline 4, an overflow pipeline 5, and a waste gas discharge pipeline 6. The waste gas supply pipeline 2 is connected to the top side of the pretreatment tank 1 and introduces the silane-containing waste gas into the pretreatment tank 1. The water supply pipeline 4 is connected to the bottom side of the pretreatment tank 1 and introduces water into the pretreatment tank 1. The liquid receiving nozzle 3 is located at the end of the waste gas supply pipeline 2 in the pretreatment tank 1 and is positioned at the water level in the pretreatment tank 1. The overflow pipeline 5 is connected to the other side of the upper middle part of the pretreatment tank 1 and is equipped with an overflow pipeline valve 7. The waste gas discharge pipeline 6 is connected to the other side of the top of the pretreatment tank 1 and is connected to a pest control device.

[0026] Before neutralization using the alkaline disinfection liquid in the disinfection tower, silane-containing waste gas is introduced through the liquid receiving nozzle 3 installed at the liquid receiving part of the waste gas supply pipeline 2 connected to the pretreatment tank 1. The silane-containing waste gas comes into contact with the water supplied to the pretreatment tank 1 through the water supply pipeline 4 and undergoes a hydrolysis reaction, converting the silane component in the silane-containing waste gas into silicon dioxide and hydrogen chloride, thereby achieving pretreatment of the silane-containing waste gas and alleviating the problem of silicon dioxide blockage at the inlet of the disinfection equipment.

[0027] The wastewater containing silica in the pretreatment tank 1 will be discharged through the overflow pipe 5 after the water level rises to the overflow pipe 5. Most of the silane components will be removed by hydrolysis. The pretreated waste gas will be supplied to the scavenging tower and other scavenging equipment through the waste gas discharge pipe 6. When neutralization is performed using alkaline scavenging liquid, the liquid receiving part at the inlet of the scavenging tower will not be blocked by silica.

[0028] Please see the appendix Figure 4 The liquid receiving nozzle 3 has a gas release port 31 at its front end, with the front end of the gas release port 31 located below the water surface in the pretreatment tank 1 and the rear end of the gas release port 31 above the water surface, so that some waste gas can escape from the gas release port 31 to the liquid receiving nozzle 3.

[0029] By setting a gas release port 31 at the front end of the liquid receiving nozzle 3, a portion of the gas can escape from the gas release port 31, while most of the waste gas undergoes a hydrolysis reaction with water, as shown in the attached diagram. Figure 4 As shown by the arrow, it can reduce the resistance of the liquid receiving part and reduce water surface fluctuation, thereby carrying out the hydrolysis reaction with high efficiency. At the same time, it can also prevent the liquid receiving nozzle 3 from being blocked due to the precipitation of silica in the liquid receiving nozzle 3.

[0030] Preferably, the gas release port 31 can be serrated, arched, or any other shape depending on the actual usage requirements, as long as a portion of the gas can escape from the liquid receiving nozzle 3 through the gas release port 31 to reduce water surface ripples.

[0031] Please see the appendix Figure 2 and attached Figure 3 A nitrogen supply line 9 is provided between the waste gas supply line 2 and the liquid receiving nozzle 3, so that nitrogen can be introduced into the liquid receiving nozzle 3 through the nitrogen supply line 9.

[0032] By periodically supplying nitrogen gas through the nitrogen supply pipeline 9 to the liquid receiving nozzle 3 and purging the inside of the liquid receiving nozzle 3, the silica adhering to or accumulating at the gas release port 31 at the front end of the liquid receiving nozzle 3 or inside the liquid receiving nozzle 3 can be removed, thus achieving stable operation of the pretreatment device.

[0033] Please see the appendix Figure 2 and attached Figure 3The pretreatment tank 1 is equipped with a partition 8. The upper end of the partition 8 is higher than the water surface, and the lower end of the partition 8 is higher than the bottom surface of the pretreatment tank 1, dividing the pretreatment tank 1 into two chambers with the bottom connected. The exhaust gas supply pipeline 2, the liquid receiving nozzle 3 and the water supply pipeline 4 are located in the first chamber, and the overflow pipeline 5 and the exhaust gas discharge pipeline 6 are located in the second chamber.

[0034] If the water surface in the first chamber fluctuates, and the gas release port 31 is completely submerged in the fluctuating water, it will promote the precipitation of silica at the tip of the liquid receiving nozzle 3 and cause blockage due to the precipitated silica. The baffle 8 ensures that the water flows from the first chamber to the second chamber, as shown in the attached diagram. Figure 2 As shown by the arrow, the liquid level fluctuation caused by the overflow pipe 5 is concentrated in the second chamber, which can alleviate the liquid level fluctuation in the first chamber and prevent the liquid receiving nozzle 3 with gas release port 31 from being immersed in water, thus maintaining the anti-clogging effect of the liquid receiving nozzle 3 with gas release port 31 stably.

[0035] Preferably, the shape of the partition 8 can be rectangular or any other arbitrary shape, as long as the water flows from the bottom of the first chamber to the second chamber to alleviate the water surface fluctuations in the first chamber.

[0036] Please see the appendix Figure 2 The height of the water supply pipeline 4 is lower than the height of the lower end of the partition 8.

[0037] Water supplied from the water supply line 4 will not impact the baffle 8 when it passes through the bottom of the pretreatment tank 1 and below the baffle 8. The water flow from the first chamber to the second chamber will be smoother, thereby improving the stability of the liquid level in the first chamber and thus improving the anti-clogging effect of the liquid receiving nozzle 3 with gas release port 31.

[0038] Please see the appendix Figure 2 and attached Figure 3 The bottom of the partition 8 is bent toward the second chamber to form an oblique guide surface 81.

[0039] By setting the guide surface 81, the water in the first chamber can flow more smoothly to the second chamber, so as to avoid water surface fluctuation in the first chamber.

[0040] Please see the appendix Figure 2 and attached Figure 3 The second chamber of the pretreatment tank 1 is provided with a maintenance drainage pipeline 10 at the bottom, and a drainage pipeline valve 11 is provided on the maintenance drainage pipeline 10.

[0041] When the overflow pipeline 5 becomes blocked due to silica or other substances, or when the amount of silica or other substances accumulated in the pretreatment tank 1 increases, the water in the pretreatment tank 1 can be drained by closing the overflow pipeline valve 7 and opening the drain pipeline valve 11 through the maintenance drain pipeline 10. This allows the removal equipment connected to the exhaust gas discharge pipeline 6 to operate continuously without stopping it.

[0042] Please see the appendix Figure 1 To be continued Figure 4 The working process and working principle of this utility model are as follows:

[0043] Water supply line 4 inputs water into pretreatment tank 1. Silane-containing waste gas is input into the liquid receiving part of pretreatment tank 1 through waste gas supply line 2 and liquid receiving nozzle 3. Part of the silane-containing waste gas escapes from liquid receiving nozzle 3 through gas release port 31. Most of the silane-containing waste gas undergoes hydrolysis reaction with water, converting the silane component in the silane-containing waste gas into silicon dioxide and hydrogen chloride.

[0044] By pretreating the silane components through the hydrolysis reaction in the pretreatment tank 1, the waste gas, which is essentially free of silane, enters the purifying equipment through the waste gas discharge pipeline 6. This prevents the waste gas supply section at the inlet of the purifying equipment from being blocked by silica, thus enabling the purifying equipment to operate continuously. The wastewater in the pretreatment tank 1 can be discharged through the overflow pipeline 5.

[0045] The above are merely preferred embodiments of the present utility model and are not intended to limit the scope of protection of the present utility model. Therefore, any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the scope of protection of the present utility model.

Claims

1. A pretreatment device for silane-containing off-gas, characterized by: The device comprises a pretreatment tank (1), a waste gas supply pipeline (2), a liquid receiving nozzle (3), a water supply pipeline (4), an overflow pipeline (5) and a waste gas discharge pipeline (6); the waste gas supply pipeline (2) is communicated with one side of the top of the pretreatment tank (1) and passes the silane-containing waste gas into the pretreatment tank (1), the water supply pipeline (4) is communicated with one side of the bottom of the pretreatment tank (1) and passes the water into the pretreatment tank (1); the liquid receiving nozzle (3) is arranged at the end of the waste gas supply pipeline (2) in the pretreatment tank (1), and the liquid receiving nozzle (3) is located at the water level of the pretreatment tank (1), the overflow pipeline (5) is communicated with the other side of the middle upper part of the pretreatment tank (1), and the overflow pipeline (5) is provided with an overflow pipeline valve (7); the waste gas discharge pipeline (6) is communicated with the other side of the top of the pretreatment tank (1) and is externally connected to a pest control device.

2. The silane-containing off-gas pretreatment device according to claim 1, characterized by: The front end of the liquid receiving nozzle (3) is formed with a gas release port (31), the front end of the gas release port (31) is located below the water surface in the pretreatment tank (1), and the rear end of the gas release port (31) is higher than the water surface, so that part of the waste gas can escape from the liquid receiving nozzle (3) through the gas release port (31).

3. The silane-containing off-gas pretreatment device according to claim 1, characterized by: The waste gas supply pipeline (2) and the liquid receiving nozzle (3) are provided with a nitrogen gas supply pipeline (9), so that nitrogen gas can be passed into the liquid receiving nozzle (3) through the nitrogen gas supply pipeline (9).

4. The silane-containing off-gas pretreatment device according to claim 1, characterized by: The pretreatment tank (1) is provided with a partition plate (8), the upper end of the partition plate (8) is higher than the water surface, the lower end of the partition plate (8) is higher than the bottom surface of the pretreatment tank (1), the pretreatment tank (1) is divided into two chambers which are communicated at the bottom, and the waste gas supply pipeline (2), the liquid receiving nozzle (3) and the water supply pipeline (4) are located in the first chamber, and the overflow pipeline (5) and the waste gas discharge pipeline (6) are located in the second chamber.

5. The silane-containing off-gas pretreatment device according to claim 4, characterized by: The height of the water supply pipeline (4) is lower than the height of the lower end of the partition plate (8).

6. A silane-containing off-gas pre-treatment device according to claim 4 or 5, characterized in that: The bottom of the partition plate (8) is bent towards the second chamber, forming an inclined flow guide surface (81).

7. The silane-containing off-gas pretreatment device according to claim 1, characterized by: The second chamber of the pretreatment tank (1) is provided with a maintenance drainage pipeline (10), and the maintenance drainage pipeline (10) is provided with a drainage pipeline valve (11).

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