Device for detecting thickness and shape of substrate

Abstract

The utility model discloses thickness and shape detection equipment for a substrate, and relates to the technical field of detection equipment. The device comprises a machine table, and a first conveyor belt device, a second conveyor belt device, a lifting device, a first mechanical arm, a second mechanical arm, a third conveyor belt device, a thickness detection device, a fourth conveyor belt device, a shape detection camera, a thickness defective product removing mechanism and a shape defective product removing mechanism which are arranged on the machine table, according to the utility model, stacking type feeding of the substrates can be realized, the substrates can be automatically conveyed, trays can be automatically recycled, thickness detection, shape detection and thickness detection defective product kicking-off and shape detection defective products can be automatically detected, a mode of simultaneously detecting a plurality of products can be realized, the product quality requirement can be met, the production efficiency can be improved, shutdown is not needed when defective products are kicked off, and the production efficiency is improved. Meanwhile, the labor cost is saved.

Description

TECHNICAL FIELD

[0001] The utility model relates to work piece detection equipment technical field, especially a kind of thickness and shape detection equipment of substrate. BACKGROUND

[0002] With the rapid development of science and technology, detection equipment plays a more and more important role in many fields, and the quality of products needs strict control. Automatic detection equipment plays a crucial role in the manufacturing industry. At present, the thickness of the substrate is detected by laser thickness gauge, and visual detection prevents material mixing. However, the artificial continuously puts the material one by one, and needs to stop the line to take out the defective product when NG. The multiple products cannot be detected simultaneously, which causes low processing efficiency and cannot guarantee the production capacity. The design defect of the equipment is highlighted. UTILITY MODEL CONTENT

[0003] The utility model solves the technical problem in the prior art, provides a thickness and shape detection equipment of substrate, which can realize the stacking type feeding of substrate, automatically convey the substrate, automatically recycle the tray, automatically complete the thickness detection, automatically complete the shape detection, automatically kick out the defective product of thickness detection and shape detection, realize the detection mode of multiple products at the same time, which can meet the product quality requirements and improve the production efficiency. The defective product is kicked out without stopping the machine, which saves the labor cost.

[0004] The utility model discloses a technical scheme for solving the above technical problems: a kind of thickness and shape detection equipment of substrate, including machine table and install on the first conveyor belt device of machine table, second conveyor belt device, lifting device, first mechanical arm, second mechanical arm, third conveyor belt device, thickness detection device, fourth conveyor belt device, shape detection camera, thickness defective product removal mechanism and shape defective product removal mechanism;The first conveyor belt device is used to convey the tray with substrate of multiple layers to second conveyor belt device on;The second conveyor belt device is used to receive and carry the tray with substrate of multiple layers;The lifting device is installed at the lower end of second conveyor belt device, for driving second conveyor belt device to descend or step up;The first mechanical arm is used to remove substrate in the tray on second conveyor belt device to thickness detection device;The second mechanical arm is used to remove empty tray after removing substrate on second conveyor belt device to third conveyor belt device;The third conveyor belt device is used to receive and output empty tray;The thickness detection device is used to detect whether the thickness of substrate is qualified;The fourth conveyor belt device is used to receive substrate after thickness detection and transmit substrate;The shape detection camera is installed above fourth conveyor belt device, for detecting whether the shape of substrate on fourth conveyor belt device is qualified;The thickness defective product removal mechanism is installed on one side of fourth conveyor belt device, for removing substrate of unqualified thickness detection;The shape defective product removal mechanism is installed on one side of fourth conveyor belt device, for removing substrate of unqualified shape detection.

[0005] In the above technical scheme, the lifting device includes support base plate, screw rod elevator, lifting plate and several guide rods, the screw rod elevator is installed at the middle of support base plate, the lifting plate is installed at the power output end of screw rod elevator and above support base plate, the guide rods are vertically arranged, both ends of support base plate are respectively provided with guide sleeves, the guide rods slide through the corresponding guide sleeves on support base plate, the upper end of guide rod is fixedly connected with lifting plate, and the second conveyor belt device is installed above lifting plate.

[0006] In the above technical scheme, the first mechanical arm is installed above between second conveyor belt device and thickness detection device, and the first mechanical arm includes first support, X-axis transmission mechanism, first Y-axis transmission mechanism, first cylinder support plate, first cylinder and first suction disc mechanism;The first support is installed above machine table, the X-axis transmission mechanism is installed above first support, the first Y-axis transmission mechanism is installed above X-axis transmission mechanism, the first cylinder support plate is installed above first Y-axis transmission mechanism, the first cylinder is installed at the lower end of first cylinder support plate, and the cylinder telescopic rod of first cylinder extends downward and connects the first suction disc mechanism.

[0007] In the above technical solution, the first conveyor belt device, the second conveyor belt device and the third conveyor belt device are arranged in a row in sequence, the second mechanical arm is installed above one side of the second conveyor belt device and the third conveyor belt device, the second mechanical arm comprises a second support, a second Y-axis transmission mechanism, a second cylinder support plate, a second cylinder and a second suction disc mechanism, the second Y-axis transmission mechanism is installed on the second support, the second cylinder support plate is installed on the second Y-axis transmission mechanism, the second cylinder is installed at the lower end of the second cylinder support plate, and the cylinder telescopic rod of the second cylinder extends downward and is connected with the second suction disc mechanism.

[0008] In the above technical solution, the thickness detection device comprises a first pulley support, a first pulley set, a first conveying belt, a second pulley support, a second pulley set, a second conveying belt and a laser thickness gauge; the first pulley support and the second pulley support are respectively installed on the machine table, the first pulley set is installed on the first pulley support, the first conveying belt is wound on the first pulley set, the second pulley set is installed on the second pulley support, and the second conveying belt is wound on the second pulley set; the upper ends of the first conveying belt and the second conveying belt are parallel to each other, and are used for supporting and conveying the substrate; and the laser thickness gauge is installed on the first pulley support and / or the second pulley support, and is used for measuring the thickness of the substrate.

[0009] In the above technical solution, the laser thickness gauge comprises a first upper laser thickness gauge, a first lower laser thickness gauge, a second upper laser thickness gauge and a second lower laser thickness gauge; the first upper laser thickness gauge and the first lower laser thickness gauge are installed on the first pulley support, and the first upper laser thickness gauge faces the upper side of one end of the substrate, and the first lower laser thickness gauge faces the lower side of one end of the substrate; and the second upper laser thickness gauge and the second lower laser thickness gauge are installed on the second pulley support, and the second upper laser thickness gauge faces the upper side of the other end of the substrate, and the second lower laser thickness gauge faces the lower side of the other end of the substrate.

[0010] In the above technical solution, two parallel slide rails are arranged on the machine table, the lower end of the second pulley support is provided with two sliding blocks, and the sliding blocks are slidingly installed on the corresponding slide rails; the thickness detection device further comprises an adjusting screw rod, the adjusting screw rod is parallel to the slide rails, the second pulley support is provided with a screw nut, the middle part of the adjusting screw rod passes through the screw nut and is in transmission cooperation with the screw nut, one end of the adjusting screw rod is rotationally connected with the first pulley support, and the other end of the adjusting screw rod is provided with a rotating handle.

[0011] In the above technical scheme, one end of the fourth conveying belt device is located below one end of the thickness detection device, the thickness defective product removing mechanism comprises a third cylinder and a first push plate, the third cylinder is installed on one side of the fourth conveying belt device and close to the thickness detection device, and a cylinder telescopic rod of the third cylinder is connected with the first push plate.

[0012] In the above technical scheme, the shape defective product removing mechanism comprises a fourth cylinder and a second push plate, the fourth cylinder is installed on one side of the fourth conveying belt device and below the shape detection camera, and a cylinder telescopic rod of the fourth cylinder is connected with the second push plate.

[0013] The beneficial effects of the utility model are: the utility model mainly includes the steps of feeding, moving the substrate and the tray, thickness detection, shape detection and defective product removal; 1) in the feeding step, first, under the action of the lifting device, the second conveying belt device and the first conveying belt device keep the same height, then the tray with the substrate stacked in the code is placed on one end of the first conveying belt device, then the first conveying belt device and the second conveying belt device work, the tray with the substrate stacked in the code is conveyed to the second conveying belt device, then the first conveying belt device and the second conveying belt device stop working, the lifting device drives the second conveying belt device to descend, and the first mechanical arm moves the substrate; 2) in the step of moving the substrate and the tray, the first mechanical arm moves the substrate in the tray on the second conveying belt device to the thickness detection device, the second mechanical arm moves the empty tray after the substrate on the second conveying belt device to the third conveying belt device, and the lifting device drives the second conveying belt device to step up until all the substrates and trays on the second conveying belt device are removed; 3) in the thickness detection step, the thickness detection device detects whether the thickness of the substrate is qualified; 4) in the shape detection step, the shape detection camera detects whether the shape of the substrate on the fourth conveying belt device is qualified; 5) in the defective product removal step, the thickness defective product removing mechanism removes the substrate with unqualified thickness, and the shape defective product removing mechanism removes the substrate with unqualified shape. Therefore, the utility model can realize the code stacking feeding of the substrate, automatically convey the substrate, automatically recycle the tray, automatically complete the thickness detection, automatically complete the shape detection, automatically remove the substrate with unqualified thickness and shape, realize the mode that multiple products are detected at the same time, can meet the product quality requirement, can improve the production efficiency, and the defective product is removed without stopping the machine, and the labor cost is saved. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is the overall structural drawing of the utility model.

[0015] Figure 2 It is the overall structural drawing of the utility model after the removing machine body.

[0016] Figure 3 is a structural diagram of the second conveying belt device and the lifting device.

[0017] Figure 4 is a structural diagram of the first mechanical arm.

[0018] Figure 5 is a structural diagram of the second mechanical arm.

[0019] Figure 6 is a structural diagram of the thickness detection device.

[0020] Figure 7 is a structural diagram of the fourth conveying belt device, the shape detection camera, the thickness defective product removal mechanism and the shape defective product removal mechanism. DETAILED DESCRIPTION

[0021] The structural principle and working principle of the utility model will be further described in detail below in combination with the drawings.

[0022] As shown in Figures 1-3 , the substrate 100 detected by the utility model is a metal sheet-shaped workpiece approximately rectangular, and after being processed and formed, the substrate 100 is placed neatly in the tray 200; in the process of carrying, multiple trays 200 with the substrate 100 are stacked together in a palletized manner.

[0023] As shown in Figures 1-7The utility model discloses a kind of thickness and shape detection equipment of substrate, including machine table 1 and install first conveyor belt device 2, second conveyor belt device 3, lifting device 4, first mechanical arm 5, second mechanical arm 6, third conveyor belt device 7, thickness detection device 8, fourth conveyor belt device 9, shape detection camera 10, thickness defective product removal mechanism 11 and shape defective product removal mechanism 12 on machine table 1;The first conveyor belt device 2 is used to convey the tray 200 with substrate 100 of multiple layers of stacking to the second conveyor belt device 3;The second conveyor belt device 3 is used to receive and carry the tray 200 with substrate 100 of multiple layers of stacking;The lifting device 4 is installed at the lower end of second conveyor belt device 3, for driving second conveyor belt device 3 to descend or step up;The first mechanical arm 5 is used to remove substrate 100 in tray 200 on the second conveyor belt device 3 to thickness detection device 8;The second mechanical arm 6 is used to remove empty tray 200 after removing substrate 100 on the second conveyor belt device 3 to third conveyor belt device 7;The third conveyor belt device 7 is used to receive and output empty tray 200;The thickness detection device 8 is used to detect whether the thickness of substrate 100 is qualified;The fourth conveyor belt device 9 is used to receive substrate 100 after thickness detection and transmit substrate 100;The shape detection camera 10 is installed above fourth conveyor belt device 9, for detecting whether the shape of substrate 100 on fourth conveyor belt device 9 is qualified;The thickness defective product removal mechanism 11 is installed on one side of fourth conveyor belt device 9, for removing substrate 100 that thickness detection is unqualified;The shape defective product removal mechanism 12 is installed on one side of fourth conveyor belt device 9, for removing substrate 100 that shape detection is unqualified.

[0024] The utility model mainly includes loading step, the step of moving and delivering base plate and tray, thickness detection step, shape detection step and defective material removal step, 1) in the loading step process, first under the action of lifting device 4, make second conveyer belt device 3 with first conveyer belt device 2 keep same height, then put the tray 200 of stacking type stacking with base plate 100 on the one end of first conveyer belt device 2, then first conveyer belt device 2 and second conveyer belt device 3 work, the tray 200 of stacking type stacking with base plate 100 is conveyed to second conveyer belt device 3, then, first conveyer belt device 2 and second conveyer belt device 3 stop working, lifting device 4 drives second conveyer belt device 3 to descend, waits for first mechanical arm 5 to move and deliver base plate 100, 2) in the step of moving and delivering base plate 100 and tray 200, first mechanical arm 5 moves and delivers base plate 100 in tray 200 on second conveyer belt device 3 to thickness detection device 8, second mechanical arm 6 moves and delivers empty tray 200 after removing base plate 100 on second conveyer belt device 3 to third conveyer belt device 7, lifting device 4 then drives second conveyer belt device 3 stepwise to ascend until all base plate 100 and tray 200 on second conveyer belt device 3 are removed, 3) in the thickness detection step, thickness detection device 8 detects whether the thickness of base plate 100 is qualified, 4) in the shape detection step, shape detection camera 10 detects whether the shape of base plate 100 on fourth conveyer belt device 9 is qualified, 5) in the defective material removal step, thickness defective material removal mechanism 11 removes base plate 100 that is not qualified in thickness detection, shape defective material removal mechanism 12 removes base plate 100 that is not qualified in shape detection.

[0025] As Figures 1-3 Shown, the lifting device 4 includes support base plate 41, screw lifting machine 42, lifting plate 43 and several guide rods 44, the screw lifting machine 42 is installed in the middle part of support base plate 41, the lifting plate 43 is installed on the power output end of screw lifting machine 42 and is located above support base plate 41, the guide rod 44 is vertically arranged, both ends of support base plate 41 are respectively equipped with guide sleeve 45, the guide rod 44 slides through the corresponding guide sleeve 45 on support base plate 41, the upper end of guide rod 44 is fixedly connected with lifting plate 43, and the second conveyer belt device 3 is installed on the lifting plate 43. Screw lifting machine 42 drives lifting plate 43 to ascend or descend, and then drives second conveyer belt device 3 to ascend or descend.

[0026] As Figure 1 , Figure 2 And Figure 4As shown, the first mechanical arm 5 is installed above between the second conveying belt device 3 and the thickness detecting device 8, the first mechanical arm 5 comprises a first support 51, an X-axis transmission mechanism 52, a first Y-axis transmission mechanism 53, a first cylinder support plate 54, a first cylinder 55 and a first suction disc mechanism 56; the first support 51 is installed above the machine table 1, the X-axis transmission mechanism 52 is installed above the first support 51, the first Y-axis transmission mechanism 53 is installed above the X-axis transmission mechanism 52, the first cylinder support plate 54 is installed above the first Y-axis transmission mechanism 53, the first cylinder 55 is installed at the lower end of the first cylinder support plate 54, the cylinder telescopic rod of the first cylinder 55 extends downward and connects the first suction disc mechanism 56. The X-axis transmission mechanism 52 can drive the first Y-axis transmission mechanism 53 to move back and forth along the X-axis direction, the first Y-axis transmission mechanism 53 can drive the first cylinder support plate 54 to move back and forth along the Y-axis direction, the first cylinder 55 can drive the first suction disc mechanism 56 to rise or fall, and the first suction disc mechanism 56 can suck or release the substrate 100.

[0027] As shown in Figure 1 , Figure 2 and Figure 5 , the first conveying belt device 2, the second conveying belt device 3 and the third conveying belt device 7 are arranged in a row in sequence, the second mechanical arm 6 is installed above on one side of the second conveying belt device 3 and the third conveying belt device 7, the second mechanical arm 6 comprises a second support 61, a second Y-axis transmission mechanism 62, a second cylinder support plate 63, a second cylinder 64 and a second suction disc mechanism 65, the second Y-axis transmission mechanism 62 is installed above the second support 61, the second cylinder support plate 63 is installed above the second Y-axis transmission mechanism 62, the second cylinder 64 is installed at the lower end of the second cylinder support plate 63, and the cylinder telescopic rod of the second cylinder 64 extends downward and connects the second suction disc mechanism 65. The second Y-axis transmission mechanism 62 can drive the second cylinder support plate 63 to move back and forth along the Y-axis direction, the second cylinder 64 can drive the second suction disc mechanism 65 to rise or fall, and the second suction disc mechanism 65 can suck or release the tray 200.

[0028] As shown in Figure 1 , Figure 2 and Figure 6As shown, the thickness detection device 8 comprises a first pulley support 81, a first pulley set 82, a first conveying belt 83, a second pulley support 84, a second pulley set 85, a second conveying belt 86, and a laser thickness gauge. The first pulley support 81 and the second pulley support 84 are respectively installed on the machine table 1. The first pulley set 82 is installed on the first pulley support 81. The first conveying belt 83 is wound on the first pulley set 82. The second pulley set 85 is installed on the second pulley support 84. The second conveying belt 86 is wound on the second pulley set 85. The upper ends of the first conveying belt 83 and the second conveying belt 86 are parallel to each other, for supporting and conveying the substrate 100. The laser thickness gauge is installed on the first pulley support 81 and / or the second pulley support 84, for measuring the thickness of the substrate 100. In operation, the first robot arm 5 moves the substrate 100 to the first conveying belt 83 and the second conveying belt 86. The substrate 100 moves with the first conveying belt 83 and the second conveying belt 86. When the substrate 100 passes the position of the laser thickness gauge, the laser thickness gauge measures the thickness of the substrate 100.

[0029] As shown in Figure 1 , Figure 2 and Figure 6 , the laser thickness gauge comprises a first upper laser thickness gauge 87, a first lower laser thickness gauge 88, a second upper laser thickness gauge 89, and a second lower laser thickness gauge 80. The first upper laser thickness gauge 87 and the first lower laser thickness gauge 88 are installed on the first pulley support 81. The first upper laser thickness gauge 87 faces the upper side of one end of the substrate 100, and the first lower laser thickness gauge 88 faces the lower side of the one end of the substrate 100. The second upper laser thickness gauge 89 and the second lower laser thickness gauge 80 are installed on the second pulley support 84. The second upper laser thickness gauge 89 faces the upper side of the other end of the substrate 100, and the second lower laser thickness gauge 80 faces the lower side of the other end of the substrate 100. The first upper laser thickness gauge 87 and the first lower laser thickness gauge 88 are a first group, for measuring the thickness of one end of the substrate 100. The second upper laser thickness gauge 89 and the second lower laser thickness gauge 80 are a second group, for measuring the thickness of the other end of the substrate 100.

[0030] As shown in Figure 1 , Figure 2 and Figure 6As shown, the machine 1 is provided with two parallel slide rails 90, the lower end of the second pulley bracket 84 is provided with two slide blocks 91, the slide blocks 91 are slidingly installed on the corresponding slide rails 90; the thickness detection device 8 further comprises an adjusting screw rod 92, the adjusting screw rod 92 is parallel to the slide rails 90, the second pulley bracket 84 is provided with a screw nut 93, the middle part of the adjusting screw rod 92 penetrates through the screw nut 93 and is in driving cooperation with the screw nut 93, one end of the adjusting screw rod 92 is rotationally connected with the first pulley bracket 81, the other end of the adjusting screw rod 92 is provided with a rotating handle 94. By shaking the rotating handle 94, the adjusting screw rod 92 can be driven to rotate, under the driving cooperation of the adjusting screw rod 92 and the screw nut 93, the second pulley bracket 84 can be driven to move back and forth along the slide rails 90, so as to adjust the distance between the first pulley bracket 81 and the second pulley bracket 84, and then adjust the distance between the first conveying belt 83 and the second conveying belt 86, finally realize the transfer and detection of the substrates 100 with different lengths and sizes.

[0031] As Figure 1 , Figure 2 and Figure 6 Figure 1 Figure 2 Figure 7 shown, one end of the fourth conveying belt device 9 is located below one end of the thickness detection device 8, the thickness defective product removing mechanism 11 comprises a third cylinder 111 and a first push plate 112, the third cylinder 111 is installed on one side of the fourth conveying belt device 9 and close to the thickness detection device 8, the cylinder telescopic rod of the third cylinder 111 is connected with the first push plate 112. The shape defective product removing mechanism 12 comprises a fourth cylinder 121 and a second push plate 122, the fourth cylinder 121 is installed on one side of the fourth conveying belt device 9 and located below the shape detection camera 10, the cylinder telescopic rod of the fourth cylinder 121 is connected with the second push plate 122, preferably, the fourth cylinder 121 and the second push plate 122 are respectively provided with two groups. Preferably, the fourth conveying belt device 9 of the utility model has a relatively wide width, can convey two rows of substrates, the third cylinder 111 and the fourth cylinder 121 are both installed on the right side of the fourth conveying belt device 9, the qualified substrate is conveyed along the right side of the fourth conveying belt device 9, when the thickness defective product appears, the third cylinder 111 drives the first push plate 112 to work, and pushes the thickness defective product to the left side of the fourth conveying belt device 9; when the shape defective product appears, the fourth cylinder 121 drives the second push plate 122 to work, and pushes the shape defective product to the left side of the fourth conveying belt device 9; in this way, the unqualified substrate is conveyed along the left side of the fourth conveying belt device 9, so that the defective product flow is prevented, and the equipment is also ensured to measure continuously.

[0032] The above is only the preferred embodiment of the present application, and any slight modification, equivalent change and modification made to the above embodiment according to the technical scheme of the present application are within the scope of the technical scheme of the present application.

Claims

1. A substrate thickness and shape detection apparatus, characterized by: The machine table and the first conveyor belt device, the second conveyor belt device, the lifting device, the first mechanical arm, the second mechanical arm, the third conveyor belt device, the thickness detection device, the fourth conveyor belt device, the shape detection camera, the thickness defective product removal mechanism and the shape defective product removal mechanism installed on the machine table; the first conveyor belt device is used to convey the multi-layer stacked tray with substrate to the second conveyor belt device; the second conveyor belt device is used to receive and carry the multi-layer stacked tray with substrate; the lifting device is installed at the lower end of the second conveyor belt device and is used to drive the second conveyor belt device to descend or step up; the first mechanical arm is used to transfer the substrate in the tray above the second conveyor belt device to the thickness detection device; the second mechanical arm is used to transfer the empty tray after removing the substrate above the second conveyor belt device to the third conveyor belt device; the third conveyor belt device is used to receive and output the empty tray; the thickness detection device is used to detect whether the thickness of the substrate is qualified; the fourth conveyor belt device is used to receive the substrate after the thickness detection is completed and transmit the substrate; the shape detection camera is installed above the fourth conveyor belt device and is used to detect whether the shape of the substrate above the fourth conveyor belt device is qualified; the thickness defective product removal mechanism is installed on one side of the fourth conveyor belt device and is used to remove the substrate with unqualified thickness; The shape defective product removal mechanism is installed on one side of the fourth conveyor belt device and is used to remove the substrate with unqualified shape.

2. The substrate thickness and shape detection apparatus according to claim 1, characterized by: The lifting device comprises a support bottom plate, a lead screw lifter, a lifting plate and a plurality of guide rods, the lead screw lifter is installed at the middle of the support bottom plate, the lifting plate is installed at the power output end of the lead screw lifter and above the support bottom plate, the guide rods are vertically arranged, both ends of the support bottom plate are respectively provided with guide sleeves, the guide rods slide through the corresponding guide sleeves on the support bottom plate, the upper end of the guide rod is fixedly connected with the lifting plate, and the second conveyor belt device is installed above the lifting plate.

3. The substrate thickness and shape detection apparatus according to claim 1, characterized by: The first mechanical arm is installed above the second conveyor belt device and the thickness detection device, the first mechanical arm comprises a first support, an X-axis transmission mechanism, a first Y-axis transmission mechanism, a first cylinder support plate, a first cylinder and a first suction disc mechanism; the first support is installed on the machine table, the X-axis transmission mechanism is installed on the first support, the first Y-axis transmission mechanism is installed on the X-axis transmission mechanism, the first cylinder support plate is installed on the first Y-axis transmission mechanism, the first cylinder is installed at the lower end of the first cylinder support plate, and the cylinder telescopic rod of the first cylinder extends downward and is connected with the first suction disc mechanism.

4. The substrate thickness and shape detection apparatus according to claim 1, characterized by: The first conveyor belt device, the second conveyor belt device and the third conveyor belt device are arranged in a row in sequence, the second mechanical arm is installed above one side of the second conveyor belt device and the third conveyor belt device, the second mechanical arm comprises a second support, a second Y-axis transmission mechanism, a second cylinder support plate, a second cylinder and a second suction disc mechanism, the second Y-axis transmission mechanism is installed on the second support, the second cylinder support plate is installed on the second Y-axis transmission mechanism, the second cylinder is installed at the lower end of the second cylinder support plate, and the cylinder telescopic rod of the second cylinder extends downward and is connected with the second suction disc mechanism.

5. The substrate thickness and shape detection apparatus according to claim 1, characterized by: The thickness detection device comprises a first pulley support, a first pulley set, a first conveying belt, a second pulley support, a second pulley set, a second conveying belt and a laser thickness gauge; the first pulley support and the second pulley support are respectively installed on a machine table, the first pulley set is installed on the first pulley support, the first conveying belt is wound on the first pulley set, the second pulley set is installed on the second pulley support, and the second conveying belt is wound on the second pulley set; the upper ends of the first conveying belt and the second conveying belt are parallel to each other, and are used for supporting and conveying a substrate; and the laser thickness gauge is installed on the first pulley support and / or the second pulley support, and is used for measuring the thickness of the substrate.

6. The substrate thickness and shape detection apparatus according to claim 5, wherein: The laser thickness gauge comprises a first upper laser thickness gauge, a first lower laser thickness gauge, a second upper laser thickness gauge and a second lower laser thickness gauge; the first upper laser thickness gauge and the first lower laser thickness gauge are installed on the first pulley support, the first upper laser thickness gauge faces the upper side of one end of the substrate, and the first lower laser thickness gauge faces the lower side of the one end of the substrate; and the second upper laser thickness gauge and the second lower laser thickness gauge are installed on the second pulley support, the second upper laser thickness gauge faces the upper side of the other end of the substrate, and the second lower laser thickness gauge faces the lower side of the other end of the substrate.

7. The substrate thickness and shape detection apparatus according to claim 5, characterized by: Two parallel slide rails are arranged on the machine table, the lower end of the second pulley support is provided with two slide blocks, and the slide blocks are slidingly installed on the corresponding slide rails; the thickness detection device further comprises an adjusting screw rod, the adjusting screw rod is parallel to the slide rails, the second pulley support is provided with a screw nut, the middle part of the adjusting screw rod passes through the screw nut and is in transmission cooperation with the screw nut, one end of the adjusting screw rod is rotationally connected with the first pulley support, and the other end of the adjusting screw rod is provided with a rotating handle.

8. The apparatus according to claim 1, wherein: One end of the fourth conveyor belt device is located below one end of the thickness detection device, and the thickness defective product removing mechanism comprises a third cylinder and a first push plate, the third cylinder is installed on one side of the fourth conveyor belt device and close to the thickness detection device, and the cylinder telescopic rod of the third cylinder is connected with the first push plate.

9. The substrate thickness and shape detection apparatus according to claim 8, characterized by: The shape defective product removing mechanism comprises a fourth cylinder and a second push plate, the fourth cylinder is installed on one side of the fourth conveyor belt device and below the shape detection camera, and the cylinder telescopic rod of the fourth cylinder is connected with the second push plate.

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