Measuring probe for open-grinding all-in-one machine and open-grinding all-in-one machine

Abstract

The utility model discloses a measuring probe for an opening and grinding all-in-one machine and the opening and grinding all-in-one machine. The measuring probe for the open grinding all-in-one machine comprises a measuring head, a first-section measuring rod and a second-section measuring rod which are connected in sequence, the measuring head is cylindrical; the central axis of the measuring head, the central axis of the first-section measuring rod and the central axis of the second-section measuring rod coincide. The length of the measuring head is smaller than that of the measuring rod; the area of the cross section of the measuring head is larger than that of the cross section of the measuring rod. The measuring probe is beneficial to reducing measuring arc errors.

Description

Technical Field

[0001] This utility model relates to a measuring probe for a grinding and polishing machine and the grinding and polishing machine itself. Background Technology

[0002] After being drawn into single crystal wafers in the single crystal workshop, they enter the machining workshop for processing. The machining workshop primarily processes the single crystal wafers by using a multi-head cutting machine to cut long single crystal wafers into multiple short single crystal wafers of the target size. Then, a squaring machine cuts the single crystal wafers of the target size into semi-finished single crystal square bars. Finally, an integrated grinding and polishing machine grinds the semi-finished single crystal square bars to create the finished single crystal square bars.

[0003] The existing rotatable four-station machining center integrates loading and unloading stations, two squaring stations, and grinding and turning stations. It can process single crystal wafer rods after one clamping. During the grinding and turning station, a measuring probe is used to measure the size of the semi-finished single crystal wafer rod. The grinding allowance of the semi-finished single crystal wafer rod is calculated based on the measured size, and the grinding process is carried out according to the grinding process.

[0004] Because the integrated squaring and grinding machine processes the single crystal wafer rod at four separate stations before rotating it to the next station, due to differences in the precision of the equipment, there is an angular error between the rotated single crystal wafer rod and its original position. Therefore, when the semi-finished single crystal wafer rod rotates to the grinding station after squaring, the measuring probe will produce a measurement position deviation when measuring the curved surface of the semi-finished single crystal wafer rod. The original measuring probe head is a spherical measuring head (e.g., ...). Figure 1 As shown, when measuring the curved surface, point contact is used, which amplifies the measurement error and makes it impossible to calculate the grinding allowance and cutting of the semi-finished single crystal square rod curved surface. Insufficient rough grinding will lead to an increase in the fine grinding allowance, an increase in cutting, and a reduction in processing efficiency. Excessive rough grinding will lead to a decrease in the fine grinding allowance, and there is a risk that the finished curved surface will not be finely ground. Excessive fine grinding will lead to an oversized dimension, and insufficient fine grinding will lead to an undersized dimension. Utility Model Content

[0005] In view of this, one objective of this utility model is to provide a measuring probe for an integrated grinding and opening machine, which can increase the contact area during measurement and reduce the measurement arc error, thereby improving the production efficiency and processing quality of crystal rods. Another objective of this utility model is to provide an integrated grinding and opening machine.

[0006] The present invention achieves the above objectives by adopting the following technical solution.

[0007] On the one hand, this utility model provides a measuring probe for an integrated grinding machine, comprising a measuring head, a first measuring rod, and a second measuring rod connected in sequence;

[0008] The measuring head is cylindrical;

[0009] The central axis of the measuring head, the central axis of one section of the measuring rod, and the central axis of the two sections of the measuring rod coincide;

[0010] The length of the measuring head is less than the length of the measuring rod section;

[0011] The cross-sectional area of ​​the measuring head is greater than the cross-sectional area of ​​the measuring rod section.

[0012] In this invention, the measuring head is cylindrical, and its measuring contact area is much larger than that of a cylinder. Figure 1 The spherical measuring head shown has a large measuring contact area, which reduces the measuring arc error of the integrated grinding and opening machine, thereby improving the production efficiency and processing quality of crystal rods. For those skilled in the art, replacing the spherical measuring head with a cylindrical measuring head in an integrated grinding and opening machine is not a conventional choice.

[0013] In this invention, one section of the measuring rod can act as a buffer, reducing the impact between the measuring head and the two sections of the measuring rod and preventing the two sections of the measuring rod from becoming loose. Furthermore, controlling the length of the first section of the measuring rod within a set range can reduce the bending and deformation of the probe rod during use. At the same time, the first section of the measuring rod acts as an insulator, separating the measuring head and the reference surface to prevent direct contact and damage to the measuring head.

[0014] According to one embodiment of this utility model, a section of the measuring rod can be cylindrical. Specifically, it can be a smooth cylinder. Figure 1 Compared to the connection structure of the fixed spherical measuring head in the previous invention (which is similar to a gripper that holds the spherical measuring head), the structure of the measuring rod of this invention is simpler and easier to manufacture, which can reduce production costs.

[0015] According to the measuring probe of this utility model, preferably, one section of the measuring rod is cylindrical. That is, one section of the measuring rod is a cylinder. This allows the two sections of the measuring rod to be connected to the cylindrical measuring head, and also provides a buffering and isolation effect for the measuring head. In addition, it facilitates manufacturing.

[0016] According to the measuring probe of this utility model, preferably, the surface of one section of the measuring rod is unthreaded. It is a smooth cylinder, serving as a connection and buffer.

[0017] According to the measuring probe of this utility model, preferably, the two measuring rods are cylindrical; the length of the two measuring rods is greater than the length of the single measuring rod. The two measuring rods are also used to connect the reference surface connecting rod of the integrated grinding machine.

[0018] According to the measuring probe of this utility model, preferably, the diameter of the two measuring rods is smaller than the diameter of the single measuring rod. That is, the cross-sectional area of ​​the two measuring rods is smaller than the cross-sectional area of ​​the single measuring rod. This allows the measuring probe to be connected to the reference surface of the integrated grinding machine while also reducing raw material costs.

[0019] According to the measuring probe of this utility model, preferably, the surfaces of the two measuring rods are provided with threads. This facilitates the connection of the measuring probe to the reference surface of the integrated grinding machine.

[0020] According to the measuring probe of this utility model, preferably, the thread is a tapping thread.

[0021] According to the measuring probe of this utility model, preferably, the surface of the measuring head is unthreaded.

[0022] According to the measuring probe of this utility model, preferably, the measuring probe is a one-piece molded structure. This facilitates manufacturing, effectively prevents accuracy errors caused by welding, and results in low cost and stable structure.

[0023] Furthermore, this utility model also provides an integrated grinding and opening machine, including the measuring probe as described above. More specifically, the integrated grinding and opening machine of this utility model includes a reference surface connecting rod and the measuring probe as described above; the end of the two measuring rods away from the first measuring rod is connected to the reference surface connecting rod. In this way, the measuring probe can be fixed on the reference surface connecting rod.

[0024] The measuring probe of this invention for an integrated grinding and polishing machine uses a cylindrical measuring head, which increases the contact area during arc measurement. This reduces measurement errors caused by variations in the arc height and low point due to different rotation angles during each crystal ingot grinding, and by the small contact area during additional measurements. It also reduces measurement errors caused by the roughness of the machined arc surface. Furthermore, the measuring rod section directly connected to the measuring head is cylindrical, acting as a buffer to reduce bending and deformation of the probe rod during use, minimizing false triggering caused by probe rod collisions and improving measurement accuracy. It also separates the measuring head from the reference surface, preventing direct contact and damage to the measuring head. Moreover, the measuring probe of this invention is easy to clean and maintain, less prone to impurity accumulation, and also helps reduce measurement errors. In addition, the measuring probe of this invention for an integrated grinding and polishing machine has a simpler structure and lower cost, making it more suitable for widespread application. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the structure of a measuring probe used in an integrated grinding machine in the prior art.

[0026] Figure 2This is a schematic diagram of the measuring probe of the present invention used in a grinding and polishing machine.

[0027] Figure 3 for Figure 2 A top-down view.

[0028] The annotations in the attached figures are explained as follows:

[0029] 1-Spherical measuring head;

[0030] 10 - Measuring head, 20 - First section measuring rod, 30 - Second section measuring rod. Detailed Implementation

[0031] The present invention will be further described below with reference to specific embodiments, but the scope of protection of the present invention is not limited thereto.

[0032] Example 1

[0033] Figure 2 This is a schematic diagram of the measuring probe of the present invention used in a grinding and polishing machine. Figure 3 for Figure 2 A top-down view.

[0034] like Figure 2 and Figure 3 As shown, the measuring probe for the integrated grinding machine in this embodiment includes a measuring head 10, a first measuring rod 20, and a second measuring rod 30 connected in sequence.

[0035] The measuring head 10 of this invention is cylindrical. This differs from the spherical measuring head 1 of the prior art (see...). Figure 1 (Spherical measuring head).

[0036] The first measuring rod 20 and the second measuring rod 30 are both cylindrical.

[0037] The central axis of the measuring head 10, the central axis of the first section of the measuring rod 20, and the central axis of the second section of the measuring rod 30 coincide.

[0038] The length of the measuring head 10 is less than the length of a section of the measuring rod 20. The cross-sectional area of ​​the measuring head 10 is greater than the cross-sectional area of ​​a section of the measuring rod 20, meaning the diameter of the measuring head 10 is greater than the diameter of a section of the measuring rod 20. The surface of the measuring head 10 is smooth and unthreaded.

[0039] The surface of a section of measuring rod 20 is smooth and without threads.

[0040] The length of the second measuring rod 30 is greater than the length of the first measuring rod 20. The diameter of the second measuring rod 30 is smaller than the diameter of the first measuring rod 20.

[0041] The second measuring rod 30 has a threaded surface along the circumferential direction, which is a tapping thread.

[0042] The measuring probe in this embodiment is a one-piece molded structure, that is, the measuring head 10, the first measuring rod 20, and the second measuring rod 30 are molded as one piece.

[0043] Example 2

[0044] This embodiment provides an integrated grinding and polishing machine, which includes the measuring probe described in Embodiment 1, and a reference surface connecting rod. The end of the two-section measuring rod 30 away from the first-section measuring rod 20 is connected to the reference surface connecting rod, thereby fixing the measuring probe to the reference surface connecting rod.

[0045] This utility model is not limited to the above-described embodiments. Any modifications, improvements, or substitutions that can be conceived by those skilled in the art without departing from the essential content of this utility model fall within the scope of this utility model.

Claims

1. An open mill all-in-one machine characterized by, The opening and grinding integrated machine is a four-station rotatable processing mode integrated machine, which integrates the feeding and discharging station, two square opening stations and a grinding station; the probe measures the size of the semi-finished crystal bar during the grinding process; The opening and grinding integrated machine comprises a crystal bar measuring probe and a reference surface connecting rod; The probe comprises a measuring head, a first measuring rod and a second measuring rod connected in sequence; the second measuring rod is connected to the reference surface connecting rod at the end away from the first measuring rod; The measuring head is cylindrical; the surface of the measuring head is threadless; The central axis of the measuring head, the central axis of the first measuring rod and the central axis of the second measuring rod are coincident; The length of the measuring head is less than the length of the first measuring rod; The cross-sectional area of the measuring head is greater than the cross-sectional area of the first measuring rod; The first measuring rod is cylindrical; the surface of the first measuring rod is threadless; the first measuring rod is provided to serve as a buffer to reduce the impact of the measuring head and the second measuring rod, prevent the second measuring rod from loosening, and control the length of the first measuring rod within a set range to reduce the bending and deformation of the probe rod during use; the first measuring rod is also provided to serve as an isolation function to separate the measuring head and the reference surface, prevent direct contact and damage to the measuring head; The second measuring rod is cylindrical; the surface of the second measuring rod is provided with threads; the threads are tapping threads; The length of the second measuring rod is greater than the length of the first measuring rod; The diameter of the second measuring rod is less than the diameter of the first measuring rod; The probe is an integrated structure. ​

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