Supporting guide rail mechanism and evaporation coating equipment

Abstract

The utility model discloses a supporting guide rail mechanism and evaporation coating equipment. The supporting guide rail mechanism comprises a mounting base and a guide rail, the guide rail is movably arranged on the mounting base, the guide rail comprises a supporting face, the supporting face is suitable for supporting a movable part, and the guide rail can rotate relative to the mounting base so as to adjust the inclination of the supporting face relative to a first plane. And therefore, the supporting surface can be tightly attached to the movable part, and the supporting stability is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to evaporation coating equipment technical field more specifically, it is a kind of support guide rail mechanism and evaporation coating equipment. BACKGROUND

[0002] In the related art, PVD (Physical Vapor Deposition, physical vapor deposition) evaporation coating machine generally includes cover plate and cavity, winding mechanism is arranged on the cover plate, the material to be coated is arranged on the winding mechanism, the cover plate can be sealed and arranged in the cavity, so that the material to be coated is evaporated and coated in the cavity.

[0003] When installing the cover plate, the distal end of the winding mechanism is arranged on the guide rail of the inner wall of the cavity through the roller, and then slides into the cavity with the cover plate. In order to improve the contact stress condition of the roller and the guide rail, the roller and the guide rail are made into a line contact mode. However, due to size, position error and other reasons, there may be a gap between the roller and the guide rail, which makes it difficult to completely fit, thereby affecting the stability of the support of the winding mechanism.

[0004] Therefore, it is necessary to provide a new technical solution to solve the above technical problems. UTILITY MODEL CONTENT

[0005] An object of the utility model is to provide a new technical solution for a support guide rail mechanism.

[0006] According to the first aspect of the utility model, a support guide rail mechanism is provided. The support guide rail mechanism comprises:

[0007] The mounting seat and the guide rail are movably arranged on the mounting seat. The guide rail comprises a support surface, and the support surface is suitable for supporting a movable part. The guide rail can rotate relative to the mounting seat to adjust the inclination of the support surface relative to the first plane.

[0008] Optionally, the mounting seat comprises a support member and a mounting member. The support member is arranged on the mounting member, and the guide rail is arranged on the support member. The guide rail and the mounting member have a gap therebetween.

[0009] Optionally, one end of the guide rail away from the support surface is a connecting surface. The support member is supported on the connecting surface. The support member divides the connecting surface into a first surface and a second surface. The first surface and the second surface have a gap therebetween and the mounting member.

[0010] Optionally, the support member is located at the middle position of the connecting surface.

[0011] Optionally, the support member comprises a roller shaft, and the roller shaft is arranged on the mounting member along the length direction of the guide rail.

[0012] Optionally, the mounting member is provided with a limiting slot, and the roller shaft portion is embedded in the limiting slot.

[0013] Optionally, the mounting member is provided with a limiting slot, and the roller shaft portion is embedded in the limiting slot.

[0014] Optionally, the mounting member is provided with a limiting slot, and the roller shaft portion is embedded in the limiting slot.

[0015] Optionally, the mounting member is provided with a limiting slot, and the roller shaft portion is embedded in the limiting slot.

[0016] According to the second aspect of the present application, an evaporation coating equipment is provided. The evaporation coating equipment comprises a cavity and the support rail mechanism as described in the above embodiments, and the support rail mechanism is installed on the inner wall of the cavity.

[0017] One technical effect of the present application is that the rail is movably arranged on the mounting seat, the rail comprises a support surface, the support surface is suitable for supporting the movable member, the rail can rotate relative to the mounting seat to adjust the inclination of the support surface relative to the first plane, thereby facilitating the support surface to closely contact with the movable member and improving the stability of the support.

[0018] Other features and advantages of the present application will become apparent from the following detailed description of exemplary embodiments thereof, taken in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF DRAWINGS

[0019] The accompanying drawings incorporated in and forming a part of the specification illustrate embodiments of the present application and, together with the description, serve to explain the principles of the application.

[0020] Figure 1 is a structural schematic view of the evaporation coating equipment of one embodiment of the present application.

[0021] Figure 2 is Figure 1 is an enlarged view of A shown.

[0022] Figure 3 is a side view of the evaporation coating equipment of one embodiment of the present application.

[0023] Figure 4 is a top view of the evaporation coating equipment of one embodiment of the present application.

[0024] Figure 5 is Figure 4 is a sectional view of A-A shown.

[0025] Figure 6 yes Figure 5 The enlarged view of the local structure at point B is shown.

[0026] Figure label:

[0027] 1. Mounting base; 11. Mounting component; 111. Through hole; 2. Guide rail; 21. Support surface; 22. Connecting surface; 3. Connecting component; 4. Washer; 5. Moving part; 6. Winding mechanism; 7. Cover plate; 8. Cavity; 10. Supporting guide rail mechanism. Detailed Implementation

[0028] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that, unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps set forth in these embodiments do not limit the scope of the present invention.

[0029] The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the invention or its application or use.

[0030] Techniques, methods, and equipment known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and equipment should be considered part of the specification.

[0031] In all the examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values.

[0032] It should be noted that similar labels and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be discussed further in subsequent figures.

[0033] According to one embodiment of this application, a support guide rail mechanism is provided. Figures 1 to 5 As shown, the support guide rail mechanism 10 includes: a mounting base 1 and a guide rail 2. The guide rail 2 is movably disposed on the mounting base 1. The guide rail 2 includes a support surface 21, which is used to support the movable part 5. The guide rail 2 can rotate relative to the mounting base 1 to adjust the inclination of the support surface 21 relative to the first plane.

[0034] In this example, the guide rail 2 is movably mounted on the mounting base 1. The guide rail 2 has a support surface 21, which is suitable for supporting the movable component 5. The movable component 5 can roll or slide along the support surface 21. The guide rail 2 can rotate relative to the mounting base 1 to adjust the inclination of the support surface 21 relative to the first plane, thereby facilitating a tight fit between the support surface 21 and the movable component 5 and improving the stability of the support.

[0035] It should be noted that the first plane can be a horizontal plane, the supporting surface 21 can be parallel to the first plane when the guide rail 2 does not support the movable piece 5, the movable piece 5 is placed on the supporting surface 21 and can move along the supporting surface 21, when the movable piece 5 deviates, the guide rail 2 can be driven to rotate relative to the mounting base 1, so that the supporting surface 21 can be driven to rotate, so as to adjust the inclination of the supporting surface 21 relative to the first plane, so that the supporting surface 21 can be closely attached to the movable piece 5, so as to ensure the stability of the support.

[0036] For example, the movable piece 5 can be a roller, the roller can roll along the supporting surface 21, and the roller can be in line contact with the supporting surface 21. When the movable piece 5 is not placed on the supporting surface 21, the supporting surface 21 is parallel to the first plane, when the axis of the movable piece 5 is parallel to the first plane, the movable piece 5 is pressed on the supporting surface 21, one side of the movable piece 5 can be completely attached to the supporting surface 21 and can roll along the supporting surface 21. When the movable piece 5 deviates, that is, the axis of the movable piece 5 is inclined relative to the first plane, the movable piece 5 is pressed on the supporting surface 21, the movable piece 5 can drive the corresponding guide rail 2 to rotate, so as to adjust the inclination of the supporting surface 21 relative to the first plane, so that the supporting surface 21 is parallel to the axis of the movable piece 5, so that the side of the movable piece 5 in contact with the supporting surface 21 can be completely attached to the supporting surface 21.

[0037] The movable piece 5 can also be other structures, such as a sliding block, and the like, which can be determined by those skilled in the art according to actual conditions, and will not be specifically limited herein.

[0038] In this example, the guide rail 2 and the mounting piece 11 can be made of stainless steel or aluminum alloy, and the like, which can be determined by those skilled in the art according to actual conditions, and will not be specifically limited herein.

[0039] In this example, the supporting guide rail mechanism 10 of the utility model is installed in the cavity 8 of the evaporation coating equipment, and can be used to support the winding mechanism 6, or the supporting guide rail mechanism 10 can also be used for other equipment, which can be determined by those skilled in the art according to actual conditions, and will not be specifically limited herein.

[0040] In one example, as shown in Figure 6 The mounting base 1 includes a supporting piece and a mounting piece 11, the supporting piece is arranged on the mounting piece 11, the guide rail 2 is arranged on the supporting piece, and the guide rail 2 has a gap with the mounting piece 11.

[0041] As shown in Figure 6As shown, in this example, the support member is arranged on the mounting member 11, and the guide rail 2 is arranged on the support member. The end of the guide rail 2 away from the support surface 21 is arranged on the support member, and there is a gap between the guide rail 2 and the mounting member 11, which can play a role of avoiding, so that the guide rail 2 can rotate on the support member, thereby adjusting the support surface 21. Moreover, the mounting member 11 can also play a role of supporting and limiting the guide rail 2, which can prevent the guide rail 2 from rotating too much.

[0042] It should be noted that the specific value of the gap between the guide rail 2 and the mounting member 11 can be determined by the person skilled in the art according to the actual situation, which is not specifically limited here.

[0043] In this example, the support member is arranged on the mounting member 11, and the mounting member 11 can be connected with the inner wall of the cavity 8. For example, the mounting member 11 can be fixedly connected with the inner wall of the cavity 8 by rivets, screws or bolts and the like.

[0044] In one example, the end of the guide rail 2 away from the support surface 21 is a connecting surface 22, the support member is supported on the connecting surface 22, and the support member separates the connecting surface 22 into a first surface and a second surface, and there is a gap between the first surface and the mounting member 11 and between the second surface and the mounting member 11.

[0045] In this example, the guide rail 2 can be a plate structure, one end of the guide rail 2 is the support surface 21, and the opposite end is the connecting surface 22 which is suitable for abutting against the support member. The movable member 5 can move or rotate along the length direction of the guide rail 2, and along the width direction of the guide rail 2, the connecting surface 22 has a first surface and a second surface on both sides of the first support member, i.e., the support member separates the connecting surface 22 into a first surface and a second surface. There is a gap between the first surface and the mounting member 11 and between the second surface and the mounting member 11, so that both ends of the guide rail 2 can rotate in the forward or reverse direction on the support member, thereby improving the applicability of the support guide rail 2 structure.

[0046] In one example, the support member is located at the middle position of the connecting surface 22. That is, the support member can be supported at the middle position of the connecting surface 22. For example, the support member can be supported at the middle position along the width direction of the connecting surface 22, so that the widths of the first surface and the second surface are equal, thereby facilitating the guide rail 2 to keep balance when the movable member 5 is not placed, i.e., the support surface 21 can be parallel to the first plane.

[0047] Alternatively, the person skilled in the art can also arrange the support member to one side according to the actual situation, which is not specifically limited here.

[0048] In one example, the support member includes a roller shaft which is arranged on the mounting member 11 along the length direction of the guide rail 2.

[0049] In this example, the support member is provided as a roller shaft, which is mounted to the mounting member 11 and can be arranged along the length direction of the guide rail 2. The roller shaft can be a cylindrical shaft, and the connecting surface 22 of the guide rail 2 can be in linear contact with the roller shaft, so as to improve the smoothness of the rotation of the guide rail 2.

[0050] In this example, the roller shaft can also be rotatably arranged on the mounting member 11, so as to further improve the smoothness of the rotation of the guide rail 2.

[0051] In this example, the roller shaft can be provided as one, and the length of the roller shaft can correspond to the length of the guide rail 2. For example, the length of the roller shaft can be equal to the length of the guide rail 2, or the length of the roller shaft can also be shorter than the length of the guide rail 2. Alternatively, the roller shaft can also be provided as a plurality of roller shafts, which are arranged at intervals on the mounting member 11, and the axes of the plurality of roller shafts coincide. Of course, the specific length and structure of the roller shaft can be determined by the person skilled in the art according to the actual situation, and are not specifically limited herein.

[0052] In this example, the support member can also have other structures, for example, the support member can also be provided as a protruding portion structure protruding from the end of the mounting member 11 towards the guide rail 2. For example, the protruding portion can be semicylindrical or the like. The specific structure of the support member can be determined by the person skilled in the art according to the actual situation, and is not specifically limited herein.

[0053] In one example, the mounting member 11 is provided with a limiting groove, and the roller shaft portion is embedded in the limiting groove. The roller shaft portion protrudes from the end surface of the mounting member 11 towards the guide rail 2, and the guide rail 2 is arranged on the roller shaft. The height of the protrusion of the roller shaft is the gap between the connecting surface 22 and the mounting member 11. The roller shaft portion is embedded in the limiting groove, and the guide rail 2 is pressed above the roller shaft, so as to limit the roller shaft. The limiting groove is used to limit the roller shaft, which has a simple structure and can also save space. The structure and size of the limiting groove can be determined according to the structure and size of the roller shaft, for example, the limiting groove can be a rectangular groove or the like, and the person skilled in the art can determine according to the actual situation, and is not specifically limited herein.

[0054] In one example, as shown in Figure 6 The support guide rail mechanism 10 also includes a connecting member 3, one end of which is connected to the mounting member 11, and the other end is connected to the guide rail 2.

[0055] As shown in Figure 6As shown in the example, one end of the connecting member 3 is connected to the mounting member 11, and the other end is connected to the guide rail 2. The guide rail 2 can be mounted to the mounting member 11 through the connecting member 3 to ensure the stability of the guide rail 2. The connecting member 3 can be movable relative to the mounting member 11, so that the guide rail 2 can be rotated relative to the mounting member 11. The connecting member 3 can be provided in multiple, for example, the connecting member 3 can be located on the opposite sides of the support member along the length direction.

[0056] In one example, as shown in the figure, Figure 6 The mounting member 11 is provided with a through hole 111, one end of the connecting member 3 is inserted into the through hole 111 and connected to the guide rail 2, and there is a gap between the connecting member 3 and the inner wall of the through hole 111.

[0057] As shown in the figure, Figure 6 In this example, the mounting member 11 is provided with a through hole 111 along the thickness direction, one end of the connecting member 3 can be inserted into the through hole 111 and fixedly connected to the guide rail 2, so that the guide rail 2 can be mounted to the mounting member 11. The part of the connecting member 3 in the through hole 111 has a certain gap with the inner wall of the through hole 111, so that the connecting member 3 can be movable relative to the mounting member 11, so that the guide rail 2 can be rotated relative to the mounting member 11. Of course, the specific value of the gap between the connecting member 3 and the inner wall of the through hole 111 can be determined by the person skilled in the art according to the actual situation, which is not limited here.

[0058] In this example, the end of the guide rail 2 towards the mounting member 11 is provided with a threaded hole, the connecting member 3 can be a bolt, one end of the bolt can be inserted into the through hole 111 and screwed to the guide rail 2, and the end of the connecting member 3 away from the guide rail 2 has a bolt head which can abut against the surface of the mounting member 11. Alternatively, the connecting member 3 can also be other types of connecting structure, such as screw, stud or rivet structure, which can be determined by the person skilled in the art according to the actual situation, which is not limited here.

[0059] In one example, as shown in the figure, Figure 6 The end of the connecting member 3 away from the mounting member 11 can abut against the mounting member 11, and the connecting member 3 and the mounting member 11 have a gasket 4 therebetween.

[0060] As shown in the figure, Figure 6As shown, in this example, the mounting component 11 has a countersunk hole on the side facing away from the guide rail 2, and the bottom wall of the countersunk hole has a through hole 111. One end of the connector 3 is connected to the guide rail 2, and the diameter of the other end is larger than the inner diameter of the through hole 111, so that it can abut against the bottom wall of the countersunk hole, thereby connecting the guide rail 2 to the mounting component 11. For example, the connector 3 is a bolt, which is set in the countersunk hole, thereby helping to reduce the overall volume of the guide rail support mechanism 10. Furthermore, the bolt being recessed in the countersunk hole can improve the flatness of the end of the mounting component 11 facing away from the guide rail 2, which is beneficial for the installation of other components.

[0061] like Figures 1 to 6 As shown, in this example, a washer 4 is also provided between the connector 3 and the mounting member 11. That is, one end of the washer 4 abuts against the mounting member 11, and the other end abuts against the connector 3. By providing the washer 4, the mounting member 11 can be protected to a certain extent, preventing it from being crushed. It also helps to improve the stability and reliability of the connection of the connector 3.

[0062] The washer 4 can be made of an elastic material, giving it a certain degree of elasticity so that the connector 3 can move within the through hole 111 of the mounting part 11 under the influence of the guide rail 2. Furthermore, when the guide rail 2 is not equipped with the movable part 5, the washer 4 can keep the guide rail 2 in a balanced position.

[0063] According to another embodiment of the present invention, an evaporation coating apparatus is provided. For example... Figures 1 to 4 As shown, the evaporation coating equipment includes a cavity 8 and a support guide mechanism 10 as described in the above embodiment, wherein the support guide mechanism 10 is installed on the inner wall of the cavity 8.

[0064] The supporting guide rail mechanism 10 includes a mounting base 1 and a guide rail 2. The guide rail 2 is movably mounted on the mounting base 1 and includes a supporting surface 21. The supporting surface 21 is adapted to support the movable component 5. The guide rail 2 is rotatable relative to the mounting base 1 to adjust the inclination of the supporting surface 21 relative to a first plane. The supporting surface 21 is adapted to support the movable component 5, which can roll or slide along the supporting surface 21. The rotatability of the guide rail 2 relative to the mounting base 1 to adjust the inclination of the supporting surface 21 relative to the first plane facilitates a tight fit between the supporting surface 21 and the movable component 5, improving the stability of the support.

[0065] like ​ As shown, in this example, the evaporation coating apparatus also includes a cover plate 7 and a winding mechanism 6, with the winding mechanism 6 disposed on one side of the cover plate 7. The winding mechanism 6 is suitable for winding the material to be coated. An evaporation tank is provided inside the cavity 8. The cover plate 7 can drive the winding mechanism 6 into the cavity 8, and the cover plate 7 can seal the open end of the cavity 8.

[0066] One end of the winding mechanism 6 is connected to the cover plate 7, and the other end is provided with a movable element 5, wherein the movable element 5 can be a roller. The inner wall of the cavity 8 is provided with a support rail mechanism 10, and the roller can be placed on the rail 2, thereby being able to support the winding mechanism 6. The opposite sides of the winding mechanism 6 are provided with movable elements 5, and the inner walls of the opposite sides of the cavity 8 are provided with support rail 2 structures. The movable elements 5 on both sides are supported on the rails 2 on both sides. For example, when the rails 2 on both sides are not in the same plane due to welding errors or assembly errors, etc., when the movable elements 5 on both sides are in contact with the rails 2, the rails 2 can be driven to rotate relative to the mounting element 11, so that the support surface 21 is automatically adjusted to the appropriate angle, so that the movable element 5 can be closely attached to the support surface 21, thereby improving the reliability and stability of the support of the winding mechanism 6.

[0067] Of course, the evaporation coating equipment of the present application also includes all the beneficial effects of the above-mentioned embodiments, which will not be repeated here.

[0068] The above embodiments focus on the differences between the various embodiments, and the different optimization features between the various embodiments can be combined to form a more optimal embodiment without contradiction. In view of the brevity of the text, it will not be repeated here.

[0069] Although some specific embodiments of the present application have been described in detail through examples, those skilled in the art should understand that the above examples are only for illustration, not for limiting the scope of the present application. Those skilled in the art should understand that the above embodiments can be modified without departing from the scope and spirit of the present application. The scope of the present application is defined by the appended claims.

Claims

1. A support rail mechanism, characterized by, The mounting base and the guide rail are movably arranged on the mounting base, the guide rail comprises a support surface adapted to support a movable member, and the guide rail is capable of rotating relative to the mounting base to adjust the inclination of the support surface relative to a first plane. The mounting base comprises a support member and a mounting member, the support member is arranged on the mounting member, and the guide rail is arranged on the support member, and the guide rail has a gap with the mounting member.

2. The support rail mechanism of claim 1, wherein, An end of the guide rail away from the support surface is a connecting surface, the support member is supported on the connecting surface, the support member divides the connecting surface into a first surface and a second surface, and the first surface and the second surface both have a gap with the mounting member.

3. The support rail mechanism of claim 2, wherein, The support member is located at a middle position of the connecting surface.

4. The support rail mechanism of claim 3, wherein, The support member comprises a roller shaft arranged on the mounting member along the length direction of the guide rail.

5. The support rail mechanism of claim 2, wherein, The mounting member is provided with a limiting groove, and the roller shaft is partially embedded in the limiting groove.

6. The support rail mechanism of claim 5, wherein, Further comprising a connecting member, one end of the connecting member is connected to the mounting member, and the other end of the connecting member is connected to the guide rail.

7. The support rail mechanism of claim 2, wherein, The mounting member is provided with a through hole, one end of the connecting member is inserted into the through hole and connected to the guide rail, and the connecting member has a gap with the inner wall of the through hole.

8. The support rail mechanism of claim 7, wherein, An end of the connecting member away from the mounting member is capable of abutting against the mounting member, and the connecting member has a gasket with the mounting member.

9. The support rail mechanism of claim 8, wherein, The mounting base and the guide rail are movably arranged on the mounting base, the guide rail comprises a support surface adapted to support a movable member, and the guide rail is capable of rotating relative to the mounting base to adjust the inclination of the support surface relative to a first plane.

10. An evaporation coating apparatus, characterized by The mounting base comprises a support member and a mounting member, the support member is arranged on the mounting member, and the guide rail is arranged on the support member, and the guide rail has a gap with the mounting member. An end of the guide rail away from the support surface is a connecting surface, the support member is supported on the connecting surface, the support member divides the connecting surface into a first surface and a second surface, and the first surface and the second surface both have a gap with the mounting member. The support member is located at a middle position of the connecting surface. The support member comprises a roller shaft arranged on the mounting member along the length direction of the guide rail. The mounting member is provided with a limiting groove, and the roller shaft is partially embedded in the limiting groove. Further comprising a connecting member, one end of the connecting member is connected to the mounting member, and the other end of the connecting member is connected to the guide rail. The mounting member is provided with a through hole, one end of the connecting member is inserted into the through hole and connected to the guide rail, and the connecting member has a gap with the inner wall of the through hole. An end of the connecting member away from the mounting member is capable of abutting against the mounting member, and the connecting member has a gasket with the mounting member. The mounting base and the guide rail are movably arranged on the mounting base, the guide rail comprises a support surface adapted to support a movable member, and the guide rail is capable of rotating relative to the mounting base to adjust the inclination of the support surface relative to a first plane. The mounting base comprises a support member and a mounting member, the support member is arranged on the mounting member, and the guide rail is arranged on the support member, and the guide rail has a gap with the mounting member. An end of the guide rail away from the support surface is a connecting surface, the support member is supported on the connecting surface, the support member divides the connecting surface into a first surface and a second surface, and the first surface and the second surface both have a gap with the mounting member. The support member is located at a middle position of the connecting surface. The support member comprises a roller shaft arranged on the mounting member along the length direction of the guide rail. The mounting member is provided with a limiting groove, and the roller shaft is partially embedded in the limiting groove. Further comprising a connecting member, one end of the connecting member is connected to the mounting member, and the other end of the connecting member is

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