Spiral target hoop

Abstract

The utility model discloses a spiral target material hoop which comprises a first hoop body and a second hoop body. The first hoop body and the second hoop body are locked and fixed through a bolt after being mutually spliced, so that the target material is hermetically connected with the connecting end of the rotating cathode; the inner wall of the first hoop body and the inner wall of the second hoop body are provided with sequentially-connected threaded grooves used for containing spiral metal sealing rings, and the spiral metal sealing rings are screwed into the sealing grooves in the outer wall of the target along with rotation of the target hoop. By the adoption of the spiral target material hoop, the spiral metal sealing ring can be screwed into the sealing groove in the outer wall of the target material only by sleeving the target material hoop at the sealing end of the target material and then continuously rotating the target material hoop, so that the metal sealing ring can be more accurately attached to the target material, and higher fixing force and stability are provided.

Description

TECHNICAL FIELD

[0001] The utility model relates to target material hoop technical field, especially a spiral target material hoop. BACKGROUND

[0002] In the vacuum magnetron sputtering coating equipment, the target material is usually installed outside the magnetic bar assembly, and cooling water needs to be continuously supplied to the target material to cool the magnetic bar assembly, so the end of the target material needs to be sealed and connected with the connecting end of the rotating cathode.

[0003] In the traditional rotating cathode, the target material hoop is usually used for sealing and connection, but the conventional clamping hoop is currently used for sealing and connection. In the clamping hoop, the metal sealing ring is the key to determine the sealing performance, and it needs to be accurately embedded in the sealing groove of the target material outer wall to realize sealing connection. However, in the actual installation process, when the upper hoop body and the lower hoop body are clamped, the metal sealing ring is in the visual blind area, so the installation worker needs to repeatedly align to make the metal sealing ring embedded in the sealing groove of the target material outer wall. SUMMARY

[0004] Compared with the repeated alignment of the traditional metal sealing ring and the sealing groove of the target material outer wall, the spiral target material hoop only needs to be sleeved on the sealing end of the target material, and then the target material hoop is continuously rotated to rotate the spiral metal sealing ring into the sealing groove of the target material outer wall, so that the metal sealing ring can be more accurately attached to the target material, providing higher fixing force and stability.

[0005] To solve the above technical problems, the utility model provides a spiral target material hoop, which comprises a first hoop body and a second hoop body, the first hoop body and the second hoop body are mutually spliced and locked and fixed by bolts, so as to seal and connect the connecting end of the target material and the rotating cathode.

[0006] The inner walls of the first hoop body and the second hoop body are provided with a continuous thread groove for placing the spiral metal sealing ring, and the spiral metal sealing ring is rotated into the sealing groove of the target material outer wall with the rotation of the target material hoop.

[0007] Preferably, the cross section of the thread groove is semicircular.

[0008] Preferably, the cross section of the spiral metal sealing ring is circular, half of which is embedded in the thread groove and the other half is embedded in the sealing groove of the target material outer wall.

[0009] Preferably, the first hoop body and the second hoop body are provided with a continuous thread hole at one end, and the first hoop body and the second hoop body are locked and fixed by locking bolts.

[0010] Preferably, the other end of the first hoop body and the second hoop body is provided with a connecting pin hole, and the first hoop body and the second hoop body are connected by a connecting pin.

[0011] Preferably, the first hoop body and the second hoop body are further respectively provided with a lock pin, and the lock pin passes through the connecting pin, thereby locking the first hoop body and the second hoop body.

[0012] Compared with the prior art, the helical target material hoop has the beneficial effects that:

[0013] The helical target material hoop of the utility model only needs to be sleeved on the sealing end of the target material, and then continuously rotating the target material hoop can rotate the spiral metal sealing ring into the sealing groove of the outer wall of the target material, so that the metal sealing ring can be more accurately attached to the target material, and higher fixing force and stability are provided. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 is a structural schematic view of the helical target material hoop provided by the utility model;

[0015] Figure 2 is a sectional view of the helical target material hoop A-A provided by the utility model;

[0016] Figure 3 is a sectional view of the helical target material hoop B-B provided by the utility model;

[0017] Figure 4 is a structural schematic view of the connecting position of the first hoop body and the second hoop body provided by the utility model;

[0018] Figure 5 is an enlarged schematic view of the connecting position of the first hoop body and the second hoop body provided by the utility model.

[0019] In the figure: 1, first hoop body; 2, second hoop body; 3, thread groove; 4, thread hole; 5, connecting pin hole; 6, connecting pin; 7, lock pin. DETAILED DESCRIPTION

[0020] The utility model will be further described in detail below in combination with the drawings and specific embodiments. The advantages and features of the utility model will be more apparent according to the following description and claims. It should be noted that the drawings are all very simplified and use non-precise proportions, and are only used to facilitate and clearly assist the purpose of explaining the embodiments of the utility model.

[0021] In the description of the utility model, it needs to be understood that, the orientation or positional relation indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like is the orientation or positional relation based on the orientation or positional relation shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as a limitation on the utility model.

[0022] In the description of the utility model, it needs to be understood that, the orientation or positional relation indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like is the orientation or positional relation based on the orientation or positional relation shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as a limitation on the utility model. Embodiment

[0023] The utility model provides a kind of spiral target material hoop, please refer to Figure 1 And Figure 2 , including first hoop body 1 and second hoop body 2;The first hoop body 1 and the second hoop body 2 are mutually spliced and then fixed by bolt locking, to connect the connection end of target material and rotating cathode sealing connection;The first hoop body 1 and the second hoop body 2 inner wall are provided with the thread groove 3 of mutual connection, for placing spiral metal sealing ring, with the rotation of target material hoop, spiral metal sealing ring is rotated into the sealing groove of target material outer wall.

[0024] Specifically, the cross section of the thread groove 3 is semicircular.

[0025] Further, the cross section of the spiral metal sealing ring is circular, half is embedded in the thread groove 3, and the other half is embedded in the sealing groove of the target material outer wall.

[0026] Specifically, please refer to Figure 3 The first hoop body 1 and the second hoop body 2 are provided with the threaded hole 4 of intercommunication at one end, and the first hoop body 1 and the second hoop body 2 are locked and fixed by locking bolt.

[0027] Specifically, please refer to Figure 4 And Figure 5 The first hoop body 1 and the second hoop body 2 are provided with connecting pin hole 5 at the other end, and the first hoop body 1 and the second hoop body 2 are connected by the connecting pin 6 of insertion.

[0028] Further, the first hoop body 1 and the second hoop body 2 are respectively provided with a lock pin 7, and the lock pin 7 passes through the connecting pin 6 at the same time, so as to lock the first hoop body 1 and the second hoop body 2.

[0029] The spiral target material hoop of the utility model only needs to be sleeved on the sealed end of the target material, and then continuously rotates the target material hoop to rotate the spiral metal sealing ring into the sealing groove of the outer wall of the target material, so that the metal sealing ring can be more accurately attached to the target material, and higher fixing force and stability are provided.

[0030] The above description is only a description of the preferred embodiment of the utility model, and does not limit the scope of the utility model in any way, and any change or modification made by the ordinary skilled in the art according to the above disclosure is within the protection scope of the claims.

Claims

1. A helical target clamp, characterized by, It comprises a first hoop body (1) and a second hoop body (2); the first hoop body (1) and the second hoop body (2) are mutually spliced and locked and fixed by bolts, so as to seal and connect the connecting end of the target material and the rotary cathode; The inner wall of the first hoop body (1) and the second hoop body (2) is provided with a thread groove (3) in sequence, which is used for placing a spiral metal sealing ring, and the spiral metal sealing ring is rotated into a sealing groove on the outer wall of the target material with the rotation of the target material hoop.

2. A screw-type target collet as defined in claim 1, wherein The cross section of the thread groove (3) is semicircular.

3. A screw-type target collet as defined in claim 2 wherein, The cross section of the spiral metal sealing ring is circular, one half of which is embedded into the thread groove (3), and the other half is embedded into the sealing groove on the outer wall of the target material.

4. A screw-type target collet as defined in claim 1 wherein, The end, where the first hoop body (1) and the second hoop body (2) are connected, is provided with a threaded hole (4) in communication, and the first hoop body (1) and the second hoop body (2) are locked and fixed by locking bolts.

5. A screw-type target collet as defined in claim 4 wherein, The other end, where the first hoop body (1) and the second hoop body (2) are connected, is provided with a connecting pin hole (5), and the first hoop body (1) and the second hoop body (2) are connected by a penetrating connecting pin (6).

6. A screw-type target collet as defined in claim 5 wherein, The first hoop body (1) and the second hoop body (2) are further respectively provided with a lock pin (7), and the lock pin (7) penetrates the connecting pin (6) at the same time, so as to lock the first hoop body (1) and the second hoop body (2).

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