Multi-station vacuum coating device

Abstract

The utility model relates to the technical field of vacuum coating equipment, in particular to a multi-station vacuum coating device. Comprising a machine body, a material placing assembly, a vacuum pumping and discharging assembly and a coating material distributing assembly, the machine body is provided with a vacuum cavity, the material placing assembly is rotatably installed in the vacuum cavity and used for placing a workpiece to be coated, ensuring uniform material receiving of the workpiece and ensuring uniform coating thickness, and the vacuum pumping and discharging assembly is communicated with the vacuum cavity through a pipeline. And the coating material distribution assembly is located in the vacuum cavity and provided with a discharging opening right facing the material swinging assembly, the stirring and overturning functions are achieved, it is guaranteed that the coating material is pure and evenly released, and the coating quality, the thickness uniformity and the production efficiency are improved through the optimal design of the device.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating equipment technology, and in particular to a multi-station vacuum coating device. Background Technology

[0002] Vacuum coating technology is a process that deposits a thin film on the surface of a workpiece in a vacuum environment using physical or chemical methods. This technology is widely used in optics, electronics, decoration, packaging, and other fields to improve the wear resistance, corrosion resistance, conductivity, and other properties of workpieces. With the continuous development of industrial production, higher demands are being placed on the efficiency and quality of coating processes.

[0003] In existing vacuum coating technologies, single-station vacuum coating equipment places the workpiece in a fixed position and deposits the coating material onto the workpiece surface in a vacuum environment through a specific coating material supply device. However, during the coating process, the distribution and supply of the coating material are relatively simple, and the workpiece remains in a fixed position throughout the process, which may lead to uneven coating thickness and poor coating quality. In addition, single-station equipment has limited functionality and cannot simultaneously coat multiple different types of workpieces, resulting in low production efficiency. Therefore, there is an urgent need for a multi-station vacuum coating equipment to ensure uniform coating thickness, improve coating quality, and increase production efficiency. Utility Model Content

[0004] To overcome the shortcomings of the prior art, this utility model provides a multi-station vacuum coating device, which solves the technical problems of uneven coating thickness and poor coating quality during the coating process.

[0005] To achieve the above objectives, this utility model is implemented through the following technical solution:

[0006] A multi-station vacuum coating apparatus, comprising:

[0007] The body includes a vacuum chamber;

[0008] A material placement assembly, rotatably mounted within a vacuum chamber, is used to place the workpiece to be plated;

[0009] A vacuum pumping assembly, wherein the pumping inlet of the vacuum pumping assembly is connected to a vacuum chamber via a pipe;

[0010] A coating material distribution assembly is disposed within a vacuum chamber. The coating material distribution assembly includes a feeding port, which is directly opposite the material distribution assembly.

[0011] Based on the above structure, the principle of the multi-station vacuum coating device is as follows: the vacuum chamber provides a relatively sealed vacuum environment to avoid the influence of external air and other impurities on the coating quality during the coating process, ensuring the purity and uniformity of the coating; the rotatable material placement component allows the workpieces placed on it to be positioned sequentially at different locations, ensuring uniform material reception and uniform coating thickness; the vacuum extraction component extracts air and other gases from the vacuum chamber, bringing the vacuum chamber to the required vacuum level for coating and meeting the environmental requirements of the coating process; the coating material distribution component located in the vacuum chamber ensures that the coating material is released in a vacuum environment, avoiding reactions with external air, ensuring the purity of the coating material, improving coating quality, and ensuring that the coating material is uniformly covered on the workpieces to be coated.

[0012] Furthermore, in a multi-station vacuum coating apparatus of this application, the material placement assembly includes: a turntable, a set of placement stages, and a first driving device. The turntable is installed at the bottom of the vacuum chamber, and the set of placement stages is arranged in an array along the center of the turntable. The first driving device is installed at the bottom outside the vacuum chamber, and its driving end is connected to the turntable. As a preferred embodiment of this application, in this multi-station vacuum coating apparatus, the turntable is used to transport the workpieces to be coated on the placement stages to different positions within the vacuum chamber, ensuring uniform material reception and consistent coating thickness. Each placement stage is used to place the workpiece, providing a reliable placement position. The placement stages are arranged in an array along the center of the turntable, ensuring that the distance from each placement stage to the material feeding port of the coating material distribution assembly is relatively consistent, which helps to ensure the uniform amount and distribution of coating material received by each workpiece, further improving the consistency of coating quality.

[0013] Furthermore, in a multi-station vacuum coating apparatus of this application, the vacuum pumping assembly includes a first vacuum pump and a second vacuum pump. The inlet of the first vacuum pump is connected to the vacuum chamber via a pipe, and the outlet of the first vacuum pump is connected to the inlet of the second vacuum pump via a pipe. As a preferred embodiment of this application, in this multi-station vacuum coating apparatus, the first vacuum pump is used to first evacuate the vacuum chamber, rapidly reducing the gas pressure inside the chamber and quickly bringing it from atmospheric pressure to a lower vacuum level. Subsequently, the second vacuum pump further extracts gas from the vacuum chamber, achieving a higher vacuum level to meet the high vacuum environment requirements of the coating process and ensure the coating...

[0014] The film coating process is not affected by residual gas, thus improving the coating quality. The first and second vacuum pumps work in series to form a two-stage pumping system, which can quickly achieve preliminary pumping and meet high vacuum requirements, thereby improving the pumping efficiency and performance of the entire vacuum pumping assembly and thus increasing production efficiency.

[0015] Furthermore, in a multi-station vacuum coating apparatus of this application, a door is rotatably mounted on the vacuum chamber, and the door is provided with an inspection window. As a preferred embodiment of this application, in this multi-station vacuum coating apparatus, the operator can place the workpiece on the loading platform of the material handling assembly when the door is open, or remove the workpiece after coating is completed; the inspection window allows the operator to observe the coating process inside the chamber in real time.

[0016] By observing, any abnormalities that may occur during the coating process can be detected in a timely manner, so that process parameters can be adjusted or corresponding measures can be taken to ensure coating quality.

[0017] Furthermore, in a multi-station vacuum coating apparatus of this application, a set of lighting devices is provided inside the vacuum chamber, and the set of lighting devices are detachably installed on adjacent side walls inside the vacuum chamber. As a preferred embodiment of this application, the set of lighting devices in the multi-station vacuum coating apparatus of this application provides necessary illumination for the interior of the chamber, enabling the operator to observe the situation inside the vacuum chamber more clearly.

[0018] Furthermore, in a multi-station vacuum coating apparatus of this application, the coating material distribution assembly includes: a base plate disposed above a turntable; a stirring component, a material cylinder, and a tilting component disposed on the base plate; the stirring component and the tilting component being spaced apart on the base plate; the material cylinder being disposed between the stirring component and the tilting component and suspended above the discharge port; and the tilting component being used to tilt the material cylinder. The stirring component includes: stirring blades, a vertical frame, and a second driving device; the vertical frame is disposed on the base plate; the second driving device is mounted on the vertical frame; the stirring blades are disposed inside the material cylinder; and the second driving device is drively connected to the stirring blades. As a preferred embodiment of this application, in a multi-station vacuum coating apparatus, the stirring component is used to ensure that the coating material is thoroughly and uniformly mixed in the material cylinder, preventing stratification, clumping, or other phenomena, ensuring the consistency of the coating material composition, thereby improving the coating quality; the tilting component is used to tilt the material cylinder, guiding the coating material inside the cylinder into the discharge port.

[0019] Furthermore, in a multi-station vacuum coating apparatus of this application, the flipping component includes: a clamping part adapted to the material cylinder, a mounting frame, and a third driving device. The mounting frame is mounted on a base plate, and the clamping part and the third driving device are respectively mounted on both sides of the mounting frame. The material cylinder is placed on the clamping part, and the clamping part is drively connected to the third driving device. As a preferred embodiment of this application, in a multi-station vacuum coating apparatus, the clamping part ensures that the material cylinder will not fall off or shift position during the flipping process. By driving the clamping part to flip the material cylinder through the third driving device, the position and state of the material cylinder can be controlled in the vacuum coating apparatus to meet the requirements of the coating material during the coating process.

[0020] Furthermore, in a multi-station vacuum coating apparatus of this application, a set of universal adjusting wheels is provided at the bottom of the machine body, and the universal adjusting wheels are spaced apart along the circumference of the machine body. As a preferred embodiment of this application, the universal adjusting wheels in the multi-station vacuum coating apparatus of this application allow the entire multi-station vacuum coating apparatus to be easily moved within the work area. By adjusting the height of the universal adjusting wheels, the levelness of the equipment can be finely adjusted to a certain extent to ensure that the equipment is in a level state during use.

[0021] As can be seen from the above technical solution, this utility model has the following beneficial effects:

[0022] This utility model provides a multi-station vacuum coating device. By setting a rotatable material feeding component, the workpiece is uniformly fed to ensure uniform coating thickness. It is equipped with a two-stage vacuum pumping component that works in series to improve pumping efficiency and vacuum degree. It also uses a coating material feeding component with stirring and turning functions to ensure the purity and uniform release of coating material, thereby ensuring uniform coating thickness of workpiece, improving coating quality and production efficiency. Attached Figure Description

[0023] Figure 1 This is a three-dimensional structural schematic diagram of a multi-station vacuum coating device according to an embodiment of this application;

[0024] Figure 2 This is a schematic diagram of the internal structure of a multi-station vacuum coating device according to an embodiment of this application;

[0025] Figure 3 This is a three-dimensional structural schematic diagram of the coating material distribution assembly in a multi-station vacuum coating apparatus according to an embodiment of this application.

[0026] Figure 4 This is a simplified diagram showing the connection between the vacuum chamber, the first vacuum pump, and the second vacuum pump in a multi-station vacuum coating apparatus according to an embodiment of this application.

[0027] In the diagram: 1-Main body; 11-Vacuum chamber; 110-Inspection window; 111-Door; 2-Material handling assembly; 21-Turntable; 22-Placement platform; 23-First drive device; 3-Vacuum extraction assembly; 31-First vacuum pump; 32-Second vacuum pump; 4-Coating material distribution assembly; 40-Discharge port; 41-Base plate; 42-Stirring component; 421-Stirring blade; 422-Upright frame; 423-Second drive device; 43-Material cylinder; 44-Tilting component; 441-Clamping part; 442-Mounting frame; 443-Third drive device; 5-Lighting device; 6-Universal adjusting wheel. Detailed Implementation

[0028] like Figure 1 , 2 As shown, a multi-station vacuum coating apparatus includes:

[0029] Body 1, the body 1 including a vacuum chamber 11;

[0030] Material placement assembly 2 is rotatably installed in vacuum chamber 11 and is used to place the workpiece to be plated.

[0031] Vacuum pumping assembly 3, wherein the pumping inlet of the vacuum pumping assembly 3 is connected to the vacuum chamber 11 via a pipe;

[0032] The coating material distribution assembly 4 is disposed in the vacuum chamber 11. The coating material distribution assembly 4 includes a feeding port 40, which is directly opposite the material placement assembly 2.

[0033] Based on the above structure, the principle of the multi-station vacuum coating device is as follows: the vacuum chamber 11 provides a relatively sealed vacuum environment to avoid the influence of external air and other impurities on the coating quality during the coating process, ensuring the purity and uniformity of the coating; the rotatable material placement assembly 2 allows the workpieces placed on it to be positioned sequentially at different locations, ensuring uniform material reception and uniform coating thickness; the vacuum extraction assembly 3 extracts air and other gases from the vacuum chamber 11, making the vacuum chamber 11 reach the vacuum level required for coating and meeting the environmental requirements of the coating process; the coating material distribution assembly 4 set in the vacuum chamber 11 ensures that the coating material is released in a vacuum environment, avoiding contact with external air and reactions, ensuring the purity of the coating material, improving the coating quality, and ensuring that the coating material is uniformly covered on the workpieces to be coated.

[0034] In this embodiment, the material placement assembly 2 includes: a turntable 21, a set of placement platforms 22, and a first driving device 23. The turntable 21 is installed at the bottom of the vacuum chamber 11. The set of placement platforms 22 is arranged in an array along the center of the turntable 21. The first driving device 23 is installed at the bottom outer side of the vacuum chamber 11, and the driving end of the first driving device 23 is connected to the turntable 21. The turntable 21 is used to transport the workpieces to be plated on the placement platforms 22 to different positions within the vacuum chamber 11, ensuring uniform material reception and consistent coating thickness. Each placement platform 22 is used to place the workpieces to be plated, providing a reliable placement position. The placement platforms 22 are arranged in an array along the center of the turntable 21, so that the distance from each placement platform 22 to the material feeding port 40 of the coating material distribution assembly 4 is relatively consistent, which helps to ensure the amount and distribution of coating material received by each workpiece are uniform, further improving the consistency of coating quality. The first driving device 23 is an electric motor.

[0035] like Figure 4 As shown, in this embodiment, the vacuum pumping assembly 3 includes a first vacuum pump 31 and a second vacuum pump 32. The inlet of the first vacuum pump 31 is connected to the vacuum chamber 11 via a pipe, and the outlet of the first vacuum pump 31 is connected to the inlet of the second vacuum pump 32 via a pipe. The first vacuum pump 31 is used to first pump the gas from the vacuum chamber 11, which can quickly reduce the gas pressure in the vacuum chamber 11, allowing the chamber to quickly enter a lower vacuum stage from a normal pressure state. Subsequently, the second vacuum pump 32 further pumps the gas from the vacuum chamber 11, allowing the vacuum chamber 11 to reach a higher vacuum level, so as to meet the requirements of the high vacuum environment for the coating process, ensure that the coating process is not affected by residual gas, and improve the coating quality. The first vacuum pump 31 and the second vacuum pump 32 work in series to form a two-stage pumping system, which can quickly achieve preliminary pumping and achieve the high vacuum requirements, improving the pumping efficiency and performance of the entire vacuum pumping assembly 3, thereby improving production efficiency. The first vacuum pump 31 is a reciprocating vacuum pump, and the second vacuum pump 32 is a turbomolecular pump.

[0036] In this embodiment, a door 111 is rotatably mounted on the vacuum chamber 11, and an inspection window 110 is provided on the door 111. When the door 111 is open, the operator can place the workpiece on the placement platform 22 of the material handling assembly 2, or remove the workpiece after the coating is completed. The inspection window 110 allows the operator to observe the coating situation inside the chamber in real time during the coating process. By observing, any abnormalities that may occur during the coating process can be detected in time, so as to adjust the process parameters or take corresponding measures in a timely manner to ensure the coating quality.

[0037] In this embodiment, a set of lighting devices 5 is provided inside the vacuum chamber 11. These lighting devices 5 are detachably installed on adjacent side walls within the vacuum chamber 11. The set of lighting devices 5 provides necessary illumination for the interior of the chamber, allowing operators to more clearly observe the situation inside the vacuum chamber 11. The set of lighting devices 5 consists of two units, and the lighting devices 5 are explosion-proof lamps.

[0038] like Figure 3 As shown, in this embodiment, the coating material distribution assembly 4 includes: a base plate 41, which is disposed above the turntable 21. The base plate 41 is provided with: a stirring component 42, a material cylinder 43, and a flipping component 44. The stirring component 42 and the flipping component 44 are installed on the base plate 41 at intervals. The material cylinder 43 is disposed between the stirring component 42 and the flipping component 44 and is suspended above the discharge port 40. The flipping component 44 is used to flip the material cylinder 43. The stirring component 42 includes: a stirring blade 421, a support frame 422, and a second driving device 423. The support frame 422 is disposed on the base plate 41, and the second driving device 423 is mounted on the support frame 422. The stirring blade 421 is disposed inside the material cylinder 43, and the second driving device 423 is connected to the stirring blade 421 in a transmission manner. The stirring component 42 is used to ensure that the coating material is fully and evenly mixed in the barrel 43, preventing the coating material from delaminating or clumping, and ensuring the consistency of the coating material composition, thereby improving the coating quality. The tilting component 44 is used to tilt the barrel 43 and guide the coating material in the barrel 43 into the discharge port 40. The second drive device 423 is an electric motor, which is connected to the stirring blade 421 by a belt drive.

[0039] In this embodiment, the flipping component 44 includes: a clamping part 441 adapted to the material cylinder 43, a mounting frame 442, and a third driving device 443. The mounting frame 442 is disposed on the base plate 41. The clamping part 441 and the third driving device 443 are respectively mounted on both sides of the mounting frame 442. The material cylinder 43 is placed on the clamping part 441, and the clamping part 441 is connected to the third driving device 443 in a driving connection. The clamping part 441 ensures that the material cylinder 43 will not fall off or shift position during the flipping process. By driving the clamping part 441 to flip the material cylinder 43 through the third driving device 443, the position and state of the material cylinder 43 can be controlled in the vacuum coating device to meet the requirements of the coating material during the coating process. The third driving device 443 is a stepper motor.

[0040] In this embodiment, a set of universal adjusting wheels 6 is provided at the bottom of the machine body 1, and the universal adjusting wheels 6 are spaced apart around the circumference of the machine body 1. The universal adjusting wheels 6 allow the entire multi-station vacuum coating device to be easily moved within the work area. By adjusting the height of the universal adjusting wheels 6, the levelness of the equipment can be finely adjusted to a certain extent to ensure that the equipment is in a level state during use.

[0041] The technical principles of this utility model have been described above with reference to specific embodiments. These descriptions are merely for explaining the principles of this utility model and should not be construed as limiting the scope of protection of this utility model in any way. Based on the explanation herein, those skilled in the art can conceive of other specific embodiments of this utility model without creative effort, and these embodiments will all fall within the scope of protection of this utility model.

Claims

1. A multi-station vacuum coating device, characterized in that: Include: Machine body (1), the machine body (1) includes vacuum chamber (11); Material swing assembly (2), the material swing assembly (2) is rotatably installed in vacuum chamber (11), and the material swing assembly (2) is used for placing workpiece to be plated; Vacuum exhaust assembly (3), the suction inlet of the vacuum exhaust assembly (3) is communicated with the vacuum chamber (11) through a pipeline; Coating material distribution assembly (4), the coating material distribution assembly (4) is arranged in the vacuum chamber (11), and the coating material distribution assembly (4) comprises: a material outlet (40), the material outlet (40) is opposite to the material swing assembly (2).

2. The multi-station vacuum coating device of claim 1, wherein: The material swing assembly (2) comprises: a turntable (21), a group of shelves (22), a first drive device (23), the turntable (21) is installed at the bottom of the vacuum chamber (11), a group of the shelves (22) are arranged on the turntable (21) along the center of the turntable (21), and the first drive device (23) is installed at the bottom outside the vacuum chamber (11), and the driving end of the first drive device (23) is connected with the turntable (21).

3. The multi-station vacuum coating device of claim 1, wherein: The vacuum exhaust assembly (3) comprises: a first vacuum pump (31) and a second vacuum pump (32), the suction inlet of the first vacuum pump (31) is communicated with the vacuum chamber (11) through a pipeline, and the exhaust port of the first vacuum pump (31) is communicated with the suction inlet of the second vacuum pump (32) through a pipeline.

4. The multi-station vacuum coating device of claim 1, wherein: A door body (111) is rotatably installed on the vacuum chamber (11), and an inspection window (110) is arranged on the door body (111).

5. The multi-station vacuum coating device of claim 1, wherein: A group of lighting devices (5) are arranged in the vacuum chamber (11), and a group of the lighting devices (5) are respectively detachably installed on the adjacent side walls in the vacuum chamber (11).

6. The multi-station vacuum coating device of claim 2, wherein: The coating material distribution assembly (4) comprises: a base plate (41), the base plate (41) is arranged above the turntable (21), and the base plate (41) is provided with: a stirring part (42), a barrel (43) and a turnover part (44), the stirring part (42) and the turnover part (44) are spaced apart and installed on the base plate (41), the barrel (43) is arranged between the stirring part (42) and the turnover part (44), the barrel (43) is suspended above the material outlet (40), the turnover part (44) is used for overturning the barrel (43), the stirring part (42) comprises: a stirring blade (421), a stand (422) and a second drive device (423), the stand (422) is arranged on the base plate (41), the second drive device (423) is installed on the stand (422), the stirring blade (421) is arranged in the barrel (43), and the second drive device (423) is in transmission connection with the stirring blade (421).

7. The multi-station vacuum coating device of claim 6, wherein: The turnover component (44) comprises a clamping part (441) matched with the barrel (43), a mounting frame (442), and a third driving device (443), the mounting frame (442) is arranged on the base plate (41), the clamping part (441) and the third driving device (443) are respectively arranged on two sides of the mounting frame (442), the barrel (43) is arranged on the clamping part (441), and the clamping part (441) is in transmission connection with the third driving device (443).

8. The multi-station vacuum coating device of claim 1, wherein: The bottom of the machine body (1) is provided with a group of universal adjusting wheels (6), and the universal adjusting wheels (6) are arranged at intervals along the circumference of the machine body (1).

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