Water-cooled radio frequency plasma generator integrated sealing structure and plasma generator
By designing cooling channels on the outside of the ceramic tube, as well as annular water outlets, water inlets, and oblique vortex structures in the water-cooled radio frequency plasma generator, the problems of ceramic tubes being susceptible to stress extrusion and uneven cooling were solved, achieving long lifespan and efficient cooling of the ceramic tubes.
Patent Information
- Application Number
- CN202520034890.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-07
- Publication Date
- 2025-12-30
- Estimated Expiration
- 2035-01-07
AI Technical Summary
The ceramic tubes of existing water-cooled vacuum plasma generators are susceptible to stress compression, resulting in a short service life and poor cooling performance.
An integrated sealed structure for a water-cooled radio frequency plasma generator was designed. By forming a cooling channel on the outside of the ceramic tube and setting annular water outlet and water inlet holes at the upper and lower ends of the insulating shell, combined with the inclined hole design to form a vortex, the cooling effect is ensured to be uniform and without dead corners, and the ceramic tube is prevented from being squeezed.
This significantly extends the service life of the ceramic tubes and improves cooling efficiency, ensuring the stability and durability of the ceramic tubes in high-temperature environments.
Smart Images
Figure CN223744961U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the technical field of plasma generator, specifically, relates to a water -cooled radio frequency plasma generator integration sealing structure and plasma generator. BACKGROUND
[0002] Radio frequency plasma spheroidization technology is a technology for carrying out appearance modification to powder materials by utilizing the high temperature (up to 104K) and high enthalpy of radio frequency plasma, and its working principle is: high energy generated by radio frequency plasma makes powder rapidly absorb heat, melt and shrinkage into spherical shape under the action of surface tension when passing through plasma, and rapidly solidifies in extremely short time, thereby forming spherical powder. Radio frequency plasma spheroidization technology is one of the most effective means for preparing high-quality spherical powder with uniform composition, high sphericity and good fluidity, and has obvious advantages in preparing spherical powder of rare refractory metals, oxides, ceramics and the like.
[0003] There are two types of radio frequency plasma generators at present, one is a water-cooled vacuum plasma generator, and the other is a quartz tube structure plasma generator working in atmosphere; among them, the water-cooled vacuum plasma generator is easy to arc, and does not need external arc, and can reach 600mm after arcing, so that the heating time of various materials is prolonged, various powders with high quality can be prepared, and since it works in vacuum environment, it is more suitable for preparing various high-purity materials, therefore, the water-cooled vacuum plasma generator is the main research direction at present.
[0004] The current water-cooled vacuum plasma generator often uses ceramic tube as heat insulation layer to resist high temperature radiation of plasma flame; the ceramic tube is a kind of dense nitride material, which is expensive, therefore, how to prolong the service life of the ceramic tube is a key link in the design of the water-cooled vacuum plasma generator. Utility model content
[0005] The utility model aims at providing a water-cooled radio frequency plasma generator integration sealing structure and plasma generator, which forms a cooling channel of a sealed cavity outside the central arc channel through the ceramic tube and the upper and lower flanges, realizes the cooling of the ceramic tube and the sealing effect of the cooling channel at the same time, makes the ceramic tube not be extruded by the stress of the upper and lower flanges, greatly prolongs the service life of the ceramic tube, and solves the technical problem of how to prolong the service life of the ceramic tube.
[0006] This utility model is achieved through the following technical solution: an integrated sealed structure for a water-cooled radio frequency plasma generator, including a central arc channel and ceramic tubes arranged in a ring around the outside of the central arc channel. The interior of the ceramic tubes forms a water-cooling cavity, and the outside of the ceramic tubes is provided with an induction coil and an insulating shell. An upper flange is connected to the upper end of the central arc channel, and a lower flange is connected to the lower end of the central arc channel. A water outlet is provided between the upper flange and the upper end of the insulating shell, and a water inlet is provided between the lower flange and the lower end of the insulating shell. Both the water outlet and the water inlet are connected to the water-cooling cavity. The upper flange is provided with a water outlet channel connected to the water outlet, and the lower flange is provided with a water inlet channel connected to the water inlet.
[0007] According to a preferred embodiment, the insulating shell is made of polytetrafluoroethylene (PTFE) material, and the insulating shell is formed by casting PTFE material onto the induction coil.
[0008] According to a preferred embodiment, the outer side of the insulating shell is slotted to form an annular groove area, and a plurality of wire-passing holes are provided in the annular groove area. The induction coil is disposed in the wire-passing holes, and insulating material is cast on the outer side of the induction coil in the annular groove area.
[0009] According to a preferred embodiment, the cross-sections of the upper and lower ends of the insulating shell are both annular surfaces, wherein the annular surface at the upper end of the insulating shell has a plurality of water outlet holes, and the annular surface at the lower end of the insulating shell has a plurality of water inlet holes.
[0010] According to a preferred embodiment, a first sealing ring is provided at the upper end of the water outlet, and a second sealing ring is provided at the lower end of the water inlet.
[0011] According to a preferred embodiment, the plurality of water outlet holes and water inlet holes are arranged in a uniformly distributed manner.
[0012] According to a preferred embodiment, an annular water outlet groove communicating with the water outlet hole is provided between the upper flange and the upper end of the insulating shell, and an annular water inlet groove communicating with the water inlet hole is provided between the lower flange and the lower end of the insulating shell. The water outlet channel is connected to the water outlet hole through the annular water outlet groove, and the water inlet channel is connected to the water inlet hole through the annular water inlet groove.
[0013] According to a preferred embodiment, the inner diameter of the annular water outlet groove is larger than the inner diameter of the water outlet hole, and the inner diameter of the annular water inlet groove is larger than the inner diameter of the water inlet hole.
[0014] According to a preferred embodiment, the water inlet is configured as an oblique hole with a tangential angle to create a vortex within the water-cooling cavity.
[0015] This utility model also provides a water-cooled radio frequency plasma generator, including the integrated sealed structure as described above.
[0016] The integrated sealing structure of the water-cooled radio frequency plasma generator and the technical solution of the plasma generator provided by this utility model have at least the following advantages and beneficial effects: (1) The high temperature of the central arc channel is isolated by the ceramic tube, which can prevent the insulating shell from being burned; (2) The cooling channel of the sealed cavity formed by the ceramic tube and the upper and lower flanges on the outside of the central arc channel can prevent the ceramic tube from being squeezed by the upper and lower flanges, which greatly extends the service life of the ceramic tube; (3) By distributing multiple water outlet holes on the annular surface at the upper end of the insulating shell and multiple water inlet holes on the annular surface at the lower end of the insulating shell, it can be ensured that there is water flow distribution in the entire water-cooling cavity, which ensures the cooling effect; (4) By constructing the water inlet hole as a tangential angled hole, a vortex is formed in the water-cooling cavity, ensuring that there is no dead angle in the water flow in the cooling cavity, which greatly improves the cooling efficiency and further enhances the service life of the ceramic tube. Attached Figure Description
[0017] Figure 1 This is a schematic diagram of the integrated sealing structure of the water-cooled radio frequency plasma generator provided in Embodiment 1 of this utility model;
[0018] Figure 2 This is a schematic diagram of the upper and lower flanges provided in Embodiment 1 of this utility model;
[0019] Figure 3 for Figure 1 Cross-sectional view of AA;
[0020] Reference numerals: 1-O-ring seal, 2-Water outlet, 3-Annular water outlet groove, 4-Insulating shell, 5-Water cooling cavity, 6-Ceramic tube, 7-Induction coil, 8-Insulating material, 9-Water inlet, 10-Annular water inlet groove, 11-Upper flange, 12-Lower flange, 13-Plasma flame, 14-Central arc channel. Detailed Implementation
[0021] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.
[0022] Example 1
[0023] Figure 1This is a schematic diagram of the integrated sealing structure of the water-cooled radio frequency plasma generator provided in this embodiment of the utility model. (See also...) Figure 1 As shown, the integrated sealed structure of the water-cooled radio frequency plasma generator provided in this embodiment includes a central arc channel 14 and ceramic tubes 6 arranged in a ring around the outside of the central arc channel 14.
[0024] Specifically, a water-cooled cavity 5 is formed inside the ceramic tube 6. Cooling water is introduced into the water-cooled cavity 5 to cool the ceramic tube 6, thereby isolating it from the high temperature generated by the central arc channel 14, so that the ceramic tube 6 can work for a long time without being burned by the high temperature of the central arc channel 14.
[0025] The ceramic tube 6 has an induction coil 7 and an insulating shell 4 on its outer side. In one embodiment of this invention, the insulating shell 4 is made of polytetrafluoroethylene (PTFE). Alternatively, it can be made of perfluoroethylene propylene, tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer, etc. No specific limitation is made here. Preferably, in this embodiment, PTFE material is cast onto the induction coil 7 to form the insulating shell 4. The ceramic tube 6 isolates the high temperature of the central arc channel 14, preventing the insulating shell 4 from burning out. Further, an annular groove area is formed on the outer side of the insulating shell 4. Several wire-passing holes are formed within the annular groove area. The induction coil 7 is disposed within the wire-passing holes. Insulating material 8 is cast onto the outer side of the induction coil 7 within the annular groove area.
[0026] See Figure 2 As shown, the upper end of the central arc channel 14 is connected to an upper flange 11, and the lower end of the central arc channel 14 is connected to a lower flange 12. A water outlet 2 is provided between the upper flange 11 and the upper end of the insulating shell 4, and a water inlet 9 is provided between the lower flange 12 and the lower end of the insulating shell 4. Both the water outlet 2 and the water inlet 9 are connected to the water cooling cavity 5. The upper flange 11 is provided with a water outlet channel connected to the water outlet 2, and the lower flange 12 is provided with a water inlet channel connected to the water inlet 9. Furthermore, a first sealing ring is provided at the upper end of the water outlet 2, and a second sealing ring is provided at the lower end of the water inlet 9. The first and second sealing rings are O-rings 1, so that a cooling channel with a sealed cavity is formed between the ceramic tube 6 and the upper and lower flanges 12, so that the ceramic tube 6 is not subjected to the stress of the upper and lower flanges 12, which greatly extends the service life of the ceramic tube 6.
[0027] Furthermore, the cross-sections of both the upper and lower ends of the insulating shell 4 are annular surfaces. The annular surface at the upper end of the insulating shell 4 has multiple water outlet holes 2, and the annular surface at the lower end of the insulating shell 4 has multiple water inlet holes 9. All the water outlet holes 2 and water inlet holes 9 are evenly distributed and arranged. Specifically, in one embodiment of this invention, see... Figure 3As shown, eight water outlet holes 2 or water inlet holes 9 are provided on the annular surface at the upper end and the annular surface at the lower end of the insulating shell 4, respectively, which can ensure that water flows throughout the water-cooling cavity 5 and guarantee the cooling effect.
[0028] Furthermore, the water inlet 9 is constructed as an oblique hole with a tangential angle to form a vortex in the water-cooling cavity 5, thereby ensuring that there are no dead angles in the water flow in the cooling cavity, greatly improving the cooling efficiency and further extending the service life of the ceramic tube 6.
[0029] Furthermore, an annular water outlet groove 3 communicating with the water outlet hole 2 is provided between the upper flange 11 and the upper end of the insulating shell 4, and an annular water inlet groove 10 communicating with the water inlet hole 9 is provided between the lower flange 12 and the lower end of the insulating shell 4. The water outlet channel is connected to the water outlet hole 2 through the annular water outlet groove 3, and the water inlet channel is connected to the water inlet hole 9 through the annular water inlet groove 10. In one embodiment of this example, the inner diameter of the annular water outlet groove 3 is larger than the inner diameter of the water outlet hole 2, and the inner diameter of the annular water inlet groove 10 is larger than the inner diameter of the water inlet hole 9, so as to accelerate the speed at which cooling water enters the cooling chamber and flows out of the cooling chamber, thereby improving the heat dissipation efficiency of the cooling chamber.
[0030] Example 2
[0031] This embodiment is based on the technical solution provided in Embodiment 1, and provides a water-cooled radio frequency plasma generator, which includes the integrated sealed structure as described in Embodiment 1.
[0032] The above are merely preferred embodiments of this utility model and are not intended to limit the scope of this utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of this utility model should be included within the protection scope of this utility model.
Claims
1. An integrated sealing structure of a water-cooled radio frequency plasma generator, characterized by comprising: The application relates to a water-cooled induction coil, which comprises a central arc channel (14) and ceramic tubes (6) distributed annularly outside the central arc channel (14), the inside of the ceramic tubes (6) forms a water-cooled cavity (5), the outside of the ceramic tubes (6) is provided with an induction coil (7) and an insulating shell (4), the upper end of the central arc channel (14) is connected with an upper flange (11), the lower end of the central arc channel (14) is connected with a lower flange (12), a water outlet hole (2) is arranged between the upper flange (11) and the upper end of the insulating shell (4), a water inlet hole (9) is arranged between the lower flange (12) and the lower end of the insulating shell (4), the water outlet hole (2) and the water inlet hole (9) are communicated with the water-cooled cavity (5), a water outlet channel communicated with the water outlet hole (2) is arranged on the upper flange (11), and a water inlet channel communicated with the water inlet hole (9) is arranged on the lower flange (12).
2. The water-cooled radio frequency plasma generator integrated seal as recited in claim 1, wherein, The insulating shell (4) is made of polytetrafluoroethylene material, and the polytetrafluoroethylene material is poured on the induction coil (7) to form the insulating shell (4).
3. The water-cooled radio frequency plasma generator integrated seal as recited in claim 2, wherein, The outer side of the insulating shell (4) is slotted to form an annular groove area, a plurality of wire passing holes are arranged in the annular groove area, the induction coil (7) is arranged in the wire passing holes, and insulating material (8) is poured outside the induction coil (7) in the annular groove area.
4. The water-cooled radio frequency plasma generator integrated seal as recited in claim 1, wherein, The cross sections of the upper and lower ends of the insulating shell (4) are annular faces, a plurality of water outlet holes (2) are distributed on the annular face at the upper end of the insulating shell (4), and a plurality of water inlet holes (9) are distributed on the annular face at the lower end of the insulating shell (4).
5. The water-cooled radio frequency plasma generator integrated seal as recited in claim 1, wherein, The upper end of the water outlet hole (2) is provided with a first sealing ring, and the lower end of the water inlet hole (9) is provided with a second sealing ring.
6. The water-cooled radio frequency plasma generator integrated seal as recited in claim 4, wherein, The plurality of water outlet holes (2) and water inlet holes (9) are arranged in a uniform distribution.
7. The water-cooled radio frequency plasma generator integrated seal as recited in claim 1, wherein, Annular water outlet grooves (3) communicated with the water outlet holes (2) are further arranged between the upper flange (11) and the upper end of the insulating shell (4), annular water inlet grooves (10) communicated with the water inlet holes (9) are further arranged between the lower flange (12) and the lower end of the insulating shell (4), the water outlet channel is communicated with the water outlet holes (2) through the annular water outlet grooves (3), and the water inlet channel is communicated with the water inlet holes (9) through the annular water inlet grooves (10).
8. The water-cooled radio frequency plasma generator integrated seal as recited in claim 7, wherein, The inner diameter of the annular water outlet groove (3) is larger than that of the water outlet hole (2), and the inner diameter of the annular water inlet groove (10) is larger than that of the water inlet hole (9).
9. The water-cooled radio frequency plasma generator integrated seal as recited in claim 8, wherein, The water inlet hole (9) is a tangential angle inclined hole, so that a vortex is formed in the water-cooled cavity (5).
10. A water-cooled radio frequency plasma generator, characterized by The application further relates to an integrated sealing structure comprising the water-cooled induction coil.