Static elimination device in evaporation process
By combining carbon nanofiber emitters and accelerating electric field screening magnetic fields, the problem of the impact of electrostatic elimination on OLED materials in a vacuum environment was solved, achieving non-destructive electrostatic removal and improving process stability and yield.
Patent Information
- Application Number
- CN202520295980.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-24
- Publication Date
- 2025-12-30
- Estimated Expiration
- 2035-02-24
AI Technical Summary
Existing static electricity elimination devices can affect the performance of organic materials in the OLED industry under vacuum conditions, and cannot achieve static electricity removal without damage.
Using a carbon nanofiber emitter as the electron emission source, combined with an accelerating electric field and a screening magnetic field, electrons are made to pass through the potential barrier and be emitted through a carbon nanofiber coating design, generating positive ions and negative charges for electrostatic neutralization.
It achieves rapid and thorough electrostatic neutralization in a vacuum environment, avoiding damage to OLED materials and improving process stability and yield.
Smart Images
Figure CN223745215U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to vacuum electrostatic elimination device technical field especially relates to a kind of electrostatic elimination device in evaporation process. BACKGROUND
[0002] The harm of electrostatic to semiconductor industry is multi-faceted, involving semiconductor devices, production processes, equipment and operators, and environment and safety, etc. Electrostatic discharge (ESD) can generate high voltage and high current, and these energies are enough to destroy the microstructure inside semiconductor devices. Even if electrostatic discharge does not directly cause physical damage, it can also cause changes in the electrical performance of devices by changing the charge distribution inside the device, introducing defects, or changing material properties, etc. Such changes can manifest as threshold voltage drift of the device, increase in leakage current, gain reduction, etc., thereby affecting the stability and reliability of the entire electronic system. In evaporation process, especially in high-precision evaporation operation carried out in vacuum environment, electrostatic problem has always been one of the key factors affecting process stability and product quality. Although vacuum environment can greatly reduce the number of gas molecules, there will still be a small amount of residual gas particles. These residual gas particles can easily accumulate static charges during evaporation due to various physical and chemical effects, which can adversely affect the uniformity, adhesion and overall performance of the evaporated film.
[0003] The principle of existing electrostatic elimination devices is mainly based on photoelectric effect, electron-ionization effect, photolysis effect, ion migration effect and strong oxidation effect of ozone. These effects work together to enable VUV light to effectively eliminate static charges on the surface of metals. However, the length of VUV irradiation has a great influence on the performance of organic materials in the OLED industry. The length of irradiation can denature the organic materials, causing product defects and making it impossible to eliminate static electricity without damage. SUMMARY
[0004] The technical problem to be solved by the utility model is to overcome the shortcomings of the prior art, and to provide an electrostatic elimination device in evaporation process. The carbon nanofiber emitter of the device has a unique carbon nanocoating structure, which can serve as an efficient emission source, allowing electrons to easily pass through the potential barrier and be emitted.
[0005] To achieve the above-mentioned purpose, the utility model adopts the following technical solutions:
[0006] An electrostatic elimination device in evaporation process is applied in a vacuum environment. The electrostatic elimination device comprises:
[0007] An electron emission assembly for emitting an electron beam;
[0008] An accelerating electric field for accelerating the electron beam to bombard residual gas particles in a vacuum to generate positive ions and negative charges, and a screening magnetic field for screening the positive ions and negative charges in a neutralizing environment and contacting electrostatic to achieve electrostatic neutralization;
[0009] The electron emission assembly is a carbon nanofiber emitter having a carbon nanocoating to serve as an emission source to make electrons pass through a potential barrier and emit electrons.
[0010] Further, the nanometer emitter further comprises a cathode electrode layer, and the carbon nanocoating is arranged below the cathode electrode layer.
[0011] Further, the nanometer emitter further comprises a gate electrode layer arranged on top of the cathode electrode layer, and a gate insulating layer is arranged between the gate electrode layer and the cathode electrode bottom layer.
[0012] Further, the cathode electrode layer and the gate electrode layer both have gate holes allowing the electron beam to pass through.
[0013] Further, the gate holes are arranged in an array form.
[0014] Further, the electron beam is a parallel electron beam.
[0015] Further, the electrostatic elimination device further comprises a voltage controller for adjusting the voltage applied to the carbon nanofiber emitter to control the emission speed and quantity of electrons.
[0016] Further, the electron emission voltage is 1-3V / μm.
[0017] Further, the accelerating electric field is a uniform electric field to ensure consistent acceleration effect of electrons when bombarding gas particles.
[0018] Further, the electrostatic elimination device further comprises a protective cover arranged around the carbon nanotube nanometer emitter and the accelerating electric field to prevent external interference and pollution.
[0019] Due to the above technical solutions, the utility model has the following beneficial effects:
[0020] 1. The utility model emits an electron beam through an electron emission assembly, bombards residual gas particles in a vacuum under the action of an accelerating electric field, and efficiently generates positive ions and negative charges. A screening magnetic field further screens these ions and charges, contacts electrostatic in the environment, and realizes rapid and thorough electrostatic neutralization. In addition, the utility model adopts a carbon nanofiber emitter as an electron emission source, combines a unique carbon nanocoating design, significantly reduces the difficulty of electrons passing through a potential barrier, and improves the stability and reliability of electron emission.
[0021] 2. The reasonable configuration of the hard cathode electrode layer, the gate electrode layer and the gate insulating layer enables the electron beam to be emitted in a parallel and controllable manner, further enhances the effect of electrostatic neutralization, and the voltage applied to the carbon nanofiber emitter is accurately adjusted by the voltage controller, so that the electron emission speed and quantity can be flexibly controlled. This feature enables the device to realize personalized electrostatic elimination scheme according to specific evaporation process requirements, and improves the adaptability and flexibility of the process. BRIEF DESCRIPTION OF DRAWINGS
[0022] In order to more clearly illustrate the technical scheme of the embodiments of the present application, the drawings of the embodiments will be briefly introduced below. Obviously, the drawings described below only relate to some embodiments of the present application, but not limit the present application.
[0023] Figure 1 is a structural schematic diagram of the present application.
[0024] Figure 2 is a structural diagram of the electron emission assembly of the present application.
[0025] Figure 3 is a principle schematic diagram of the present application.
[0026] Figure 4 is an enlarged view of the structure of the carbon nanometer coating of the present application.
[0027] Reference signs:
[0028] In the figure, 10. Electron emission assembly; 11. Carbon nanometer coating; 12. Cathode electrode layer; 13. Gate electrode layer; 14. Gate insulating layer; 15. Gate hole; 20. Accelerating electric field; 30. Screening magnetic field; 40. Electron beam. DETAILED DESCRIPTION
[0029] In order to make the purpose, technical scheme and advantages of the embodiments of the present application more clear, the present application will be further described in detail below with reference to the drawings. The components of the embodiments of the present application described and shown in the drawings can be arranged and designed in various different configurations. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.
[0030] It should be noted that: similar signs and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.
[0031] Unless otherwise defined, technical terms or scientific terms used in the present patent document shall have the meanings as commonly understood by one of ordinary skill in the art to which the present patent belongs. The terms "first", "second", and similar terms used in the patent specification and claims of the present patent do not denote any order, quantity, or importance, but are used to distinguish different components. Similarly, the terms "one", "an", or "the" and similar terms do not denote a quantity restriction, but indicate the presence of at least one. The terms "include", "comprise", and similar terms mean that the elements or objects appearing before the "include" or "comprise" are encompassed by the elements or objects appearing after the "include" or "comprise", and do not exclude other elements or objects. The terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like are used to indicate relative positional relationships only, and when the absolute positions of the described objects change, the relative positional relationships may also change accordingly. They are only used to facilitate the description of the present patent and simplify the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present patent.
[0032] In the description of the present patent, it should be noted that unless otherwise explicitly specified and limited, the terms "mount", "connect", and "connect" should be broadly understood. For example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication between two elements inside. For those of ordinary skill in the art, the specific meaning of the above terms in the present patent can be understood according to the specific circumstances.
[0033] Some embodiments of the present patent will be described in detail below with reference to the accompanying drawings. The features in the following examples can be combined with each other without conflict.
[0034] Please refer to Figures 1-4 The present patent discloses an electrostatic elimination device in a vapor deposition process, which is applied in a vacuum environment. Specifically, the electrostatic elimination device of the present application is applied in high-precision vapor deposition operations performed in a vacuum environment. The electrostatic elimination device comprises an electron emission assembly 10, an acceleration electric field 20, and a screening magnetic field 30. The electron emission assembly 10 is used to emit an electron beam 40. The acceleration electric field 20 is used to accelerate the electron beam 40 to bombard residual gas particles in the vacuum to generate positive ions and negative charges. The screening magnetic field 30 is used to screen and neutralize the positive ions and negative charges in the environment, and to contact the static electricity to achieve static neutralization. In this embodiment, the electron emission assembly 10 is a carbon nanofiber emitter, which has a carbon nanocoating 11 to serve as an emission source to make electrons pass through a potential barrier and emit electrons.
[0035] It should be noted that the utility model adopts carbon nanometer fiber emitter as the core of the electron emission assembly 10, and particularly applies carbon nanometer coating 11 on the emitter. The emitter focuses on efficiently emitting electrons through the carbon nanometer fiber coating. This electron emission mode not only improves the stability and controllability of the electron beam 40, but is particularly suitable for the static electricity elimination task in the vacuum environment. By penetrating the potential barrier and accurately emitting electrons, effective bombardment of residual gas particles in the vacuum is realized, and then positive and negative ions are generated for static electricity neutralization. Moreover, the static electricity elimination device of the application is specially designed for the vacuum environment, and it can stably work under the vacuum condition required by high-precision processes such as OLED evaporation, without causing interference to the process environment, thereby ensuring the stability of the process and the quality of the product. In addition, the application also introduces a screening magnetic field 30 for accurately screening and neutralizing positive ions and negative charges in the environment. This design not only improves the efficiency of static electricity elimination, but also ensures the charge balance of the process environment, further improving the stability and yield of processes such as OLED evaporation.
[0036] In the embodiment, the electron emission assembly 10 is the core part of the static electricity elimination device, and is used for emitting the electron beam 40. The electron emission assembly 10 of the utility model adopts carbon nanometer tube emission device, has carbon nanometer coating 11, and the coating can make electrons penetrate the potential barrier and emit electrons. The work function of the carbon nanometer tube is lower than that of the metal material, so the electron emission voltage is low, usually in the range of 5-15KV / μm, which makes the carbon nanometer tube become an ideal cold cathode electron emission material.
[0037] Further, the electron emission assembly 10 also includes a cathode electrode layer 12 and a gate electrode layer 13. The cathode electrode layer 12 is located at the bottom and is used for providing the electric field required for electron emission. The carbon nanometer coating 11 is arranged above the cathode electrode layer 12 to ensure that the electrons can be smoothly emitted. The gate electrode layer 13 is arranged on the top of the cathode electrode layer 12, and a gate insulating layer 14 is arranged between the cathode electrode layer 12 and the gate electrode layer 13. The gate electrode layer 13 controls the emission speed and quantity of the electrons by adjusting the gate voltage. Further, the cathode electrode layer 12 and the gate electrode layer 13 both have gate holes 15 allowing the electron beam to pass through. The gate holes 15 are arranged in an array. And the gate holes 15 allow the parallel electron beam to pass through.
[0038] The acceleration electric field 20 is used for accelerating the emitted electron beam 40 to have sufficient energy to bombard the residual gas particles in the vacuum cavity. The acceleration electric field 20 of the utility model is a uniform electric field, so as to ensure that the electrons have consistent acceleration effect when bombarding the gas particles. The arrangement of the uniform electric field helps to improve the efficiency and stability of the static electricity elimination.
[0039] The screening magnetic field 30 is used to screen positive ions and negative charges in the neutralization environment and contact with static electricity to achieve static electricity neutralization. The screening magnetic field 30 is used to guide and focus the accelerated electrons and generated positive and negative ions to ensure that they can accurately contact the static electricity on the OLED device. Through the adjustment of the screening magnetic field 30, the efficiency and accuracy of static electricity elimination can be further improved.
[0040] In addition to the above-mentioned core components, the static electricity elimination device of the utility model further comprises some auxiliary components, such as a voltage controller and a protective cover. The voltage controller is used to adjust the voltage applied to the carbon nanotube emission device to control the emission speed and quantity of electrons. The protective cover is arranged around the carbon nanotube nanometer emitter and the acceleration electric field 20 to prevent external interference and pollution and ensure the stable operation of the static electricity elimination device.
[0041] The working principle of the utility model is as follows:
[0042] Electrons are extracted from the nanometer emitter printed with the carbon nanotube coating 11 and released into the vacuum. This step is realized by applying a proper voltage between the cathode electrode layer 12 and the gate electrode layer 13.
[0043] The electrons are accelerated under the action of the acceleration electric field 20 and obtain sufficient energy to bombard the residual gas particles in the vacuum cavity. In this step, the uniform electric field ensures the consistent acceleration effect of the electrons.
[0044] The accelerated electrons bombard the gas particles to generate a large number of negative charges and positive ions. These positive and negative ions are guided and focused under the action of the screening magnetic field 30 to ensure that they can accurately contact the static electricity on the OLED device.
[0045] The positive and negative ions undergo a neutralization reaction after contacting the static electricity, thereby eliminating the static electricity on the OLED device. In this step, the adjustment of the screening magnetic field 30 ensures the efficiency and accuracy of static electricity elimination.
[0046] Through the static electricity elimination device and method of the utility model, the static electricity on the OLED device within a range of two meters can be completely eliminated within one second. Compared with the traditional VUV static electricity elimination method, the utility model has the advantage of non-damage static electricity elimination and will not cause damage to the OLED material. At the same time, the static electricity elimination device of the utility model has the advantages of simple structure, convenient operation and high efficiency, which can greatly improve the production yield and stability of semiconductor devices.
[0047] The above merely describes a specific implementation of the present application, but the protection scope of the present application is not limited thereto, any person skilled in the art can easily think of changes or replacements within the technical range disclosed by the present application, which should be covered in the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.
Claims
1. An electrostatic elimination device in a vapor deposition process, which is applied in a vacuum environment, characterized in that, The static electricity elimination device comprises: an electron emission assembly for emitting an electron beam; an acceleration electric field for accelerating the electron beam to bombard residual gas particles in a vacuum to generate positive ions and negative charges, and a screening magnetic field for screening the positive ions and negative charges in a neutralizing environment and contacting static electricity to achieve static electricity neutralization; wherein the electron emission assembly is a carbon nanofiber emitter having a carbon nanocoating to serve as an emission source to make electrons pass through a potential barrier and emit electrons.
2. The static elimination device of claim 1, wherein, The carbon nanofiber emitter further comprises a cathode electrode layer, and the carbon nanocoating is arranged below the cathode electrode layer.
3. The static elimination device of claim 2, wherein, The nanometer emitter further comprises a gate electrode layer arranged on top of the cathode electrode layer, and a gate insulating layer is arranged between the gate electrode layer and the cathode electrode bottom layer.
4. The static elimination device of claim 3, wherein The cathode electrode layer and the gate electrode layer each have a gate hole allowing the electron beam to pass through.
5. The static elimination device of claim 4, wherein, The gate holes are arranged in an array.
6. The static elimination device of claim 1, wherein, The electron beam is a parallel electron beam.
7. The static elimination device of claim 1, wherein The static electricity elimination device further comprises a voltage controller for adjusting the voltage applied to the carbon nanofiber emitter to control the emission speed and quantity of electrons.
8. The static elimination device of claim 6, wherein, The electron emission voltage is 1-3 V / μm.
9. The static elimination device of claim 1, wherein, The acceleration electric field is a uniform electric field to ensure consistent acceleration effect of electrons when bombarding gas particles.
10. The static elimination device of claim 1, wherein, The static electricity elimination device further comprises a protective cover arranged around the carbon nanotube nanometer emitter and the acceleration electric field to prevent external interference and pollution.