White light interference shape selecting device

Abstract

The utility model discloses a white light interference morphology selecting device, and belongs to the field of solar cell process equipment. Comprising a marble base, a shading outer frame, a white light middle stand column, a white light signal transmission area, a white light equipment telescopic device, a multi-lens data integration area, a light source emission analysis device, an external filter area, a locking device, a lens telescopic device and an objective lens. The transportation track and the transfer device are arranged on the marble base. Through a non-contact white light interference test, physical parameters of a sample can be effectively measured, evaluated and selected on the premise that the condition of the sample is not affected, and reduction of the yield of manual operation caused by contact with the product can be avoided. By testing and selecting in a production test link, monitoring on samples of a production test is enhanced, so that the labor cost and time cost of characterization are reduced, and the production efficiency is improved.

Description

TECHNICAL FIELD

[0001] The application belongs to the field of solar cell process equipment, and particularly relates to a white light interference morphology selection device. BACKGROUND

[0002] As a new type of sustainable green energy, solar energy is a hot topic at present and in the future, and has great development potential. Photovoltaic power generation projects are also favored by capital. The production process of solar cell pieces is the core of photovoltaic power generation, and the photoelectric conversion efficiency determines the competitiveness of the product, and the production speed represents the economic benefit of the photovoltaic enterprise. From the development to now, the technology of solar cell is constantly innovated, and the product is iterated rapidly. The surface grid line plays an important role. Whether it is high-temperature paste or low-temperature paste, in order to better transmit electrons and reduce the shading area, the grid line development is towards low resistance, multi-main grid, fine auxiliary grid and other benign development. Screen printing is an integral part of the photovoltaic industry, which directly affects the development of the photovoltaic industry.

[0003] In the screen printing production process, white light interference is generally used as a characterization means of micro morphology and serves the technical characterization after the sample is finally completed. However, in the small batch production test, facing multiple batches of samples, there is a lack of automatic selection device for morphology. Whether it is through the production equipment or manual feeding and discharging, the device can select the morphology characterization under the condition of multiple samples and classify the good and defective products. Through the physical data characterization of the grid line morphology by white light interference, the device can provide more effective characterization means for production monitoring or R&D workers. CONTENT OF THE INVENTION

[0004] In order to solve the above problems, the purpose of the present application is to provide a white light interference morphology selection device, which optimizes the production and manufacturing process under the premise of obtaining high-performance cells, greatly reduces the cost and energy consumption, and reduces the production loss and human error.

[0005] The utility model is realized through the following technical schemes:

[0006] The utility model discloses a white light interference morphology selection device, which comprises a marble base, a light-shielding outer frame, a white light middle column, a white light signal transmission area, a white light equipment telescopic device, a multi-lens data integration area, a light source emission analysis device, an external filter area, a locking device, a lens telescopic device and an objective lens.

[0007] Further, the white light middle stand is fixed to the marble base, at least one white light signal transmission area is arranged above the white light middle stand, at least one white light device telescopic device is connected with the at least one white light signal transmission area, the white light device telescopic device is nestedly connected with a multi-lens data integration area, the multi-lens data integration area is mechanically connected and electrically connected with at least one light source emission analysis device, the light source emission analysis device is sequentially connected with the lens telescopic device and an objective lens, an external filter area is arranged in the lens telescopic device, and a locking device is arranged on the external filter area.

[0008] In the embodiment, the white light device telescopic device, the multi-lens data integration area, the light source emission analysis device, the lens telescopic device and the objective lens are sequentially fixed on the white light signal transmission area in a vertically downward direction, so that the final objective lens is located above the transportation track, and is used for detecting the qualified condition of the battery on the track.

[0009] In the embodiment, the lens telescopic device and the objective lens are in a detachable bite structure.

[0010] In the embodiment, the marble base is provided with a transportation track and a sample calibration kit, the transportation track includes at least one feeding track, at least one substandard track and at least one finished product track, the feeding track, the substandard track and the finished product track each are composed of two transportation limiting baffle plates and two conveying belts, the two conveying belts are arranged in parallel and are used for transporting the battery, the two transportation limiting baffle plates are arranged at two opposite outer sides of the two conveying belts, and the two transportation limiting baffle plates are also arranged in parallel and have a height greater than that of the conveying belts and are used for limiting the transportation of the battery and preventing the battery from deviating from the track during the transportation.

[0011] Further, each transportation track passes through a closed space to connect the outside through the light-shielding outer frame, the battery is transported to the inside of the device through the feeding track for detection and selection, and the selected battery is transported to the outside of the device through the substandard track and the finished product track for next operation.

[0012] The sample calibration kit includes a photosensitive detection component, an entrance light-shielding shielding door, a pressure-sensitive resistor, a photosensitive component support and a component transmission area. At least three entrance light-shielding shielding doors are fixed to the feeding track, the substandard track and the finished product track and arranged on the light-shielding outer frame, the entrance light-shielding shielding door and the conveying belt are controlled to realize the entry and exit of the battery and reduce the influence of external light sources on the device.

[0013] Specifically, two light-sensitive detection assemblies are arranged at positions on both sides of the entrance light shielding door on the feeding track, and a light-sensitive assembly support is arranged to support the light-sensitive detection assemblies and provide electrical connection; a pressure-sensitive resistor and a light-sensitive detection assembly are arranged at positions on both sides of the entrance light shielding door on the substandard track, and a light-sensitive assembly support is arranged to support the light-sensitive detection assemblies and provide electrical connection, the pressure-sensitive resistor is arranged in a closed space, and the light-sensitive detection assembly is arranged outside the closed space; a pressure-sensitive resistor and a light-sensitive detection assembly are arranged at positions on both sides of the entrance light shielding door on the finished product track, and a light-sensitive assembly support is arranged to support the light-sensitive detection assemblies and provide electrical connection, the pressure-sensitive resistor is arranged in a closed space, and the light-sensitive detection assembly is arranged outside the closed space.

[0014] Further, the entrance light shielding door is controlled by the light-sensitive detection assembly and the pressure-sensitive resistor.

[0015] The transfer device comprises a mechanical arm fixed base fixed on the marble base, a rotating machine table, at least two support arms and at least one spherical rotation area alternately connected, a spherical balance holder and a mechanical suction cup fixed in sequence on the mechanical arm fixed base.

[0016] Specifically, the number of support arms is one more than that of the spherical rotation area, and the support arm-spherical rotation area-support arm alternation combination is adopted for fixation, and the rotation of the connected mechanical suction cup is controlled through the spherical rotation area.

[0017] The mechanical suction cup comprises the airflow control device, the suction cup antenna and the air suction hole, the suction cup antenna is arranged at the four corners of the mechanical suction cup, the air suction hole is arranged in the suction cup antenna, the airflow control device is arranged on the opposite side of the suction cup antenna and the air suction hole, and the air suction hole is connected with the airflow control device through the air pipe.

[0018] In actual use, after the rotating machine table is fixed on the mechanical arm fixed base through the central shaft, the rotating machine table can drive the spherical rotation area, the support arm and the spherical balance holder to rotate on the mechanical arm fixed base through automatic movement. The spherical rotation area can adapt to different samples according to the set program to meet the transfer requirements and adjust the mechanical movement.

[0019] In this embodiment, when the battery is detected and transferred to the finished product track and the substandard track through the transfer device, the battery is transferred to the finished product track through the good product transfer direction and is transferred to the substandard track through the substandard product transfer direction.

[0020] The substandard product transportation direction is automatically linked with the substandard product track and the transportation device. After the sample passes through the photosensitive detection component, moves to the sample test position through the set program, and is determined to be a substandard product through the set program and the white light interference result, the rotation machine is automatically controlled to run to the program set position, the mechanical suction cup is adjusted to the corresponding height of the sample through the spherical rotation area, the support arm and the spherical balance holder, the sample is contacted through the suction cup antenna, the airflow is controlled through the airflow control device and the air suction hole, the sample is grabbed and transferred to the substandard product track and transported to the outside of the device, and when the white light interference result is determined to be a good product, the sample is transferred to the good product track and transported to the outside of the device.

[0021] Compared with the prior art, the white light interference appearance selection device has the following beneficial technical effects:

[0022] The white light interference appearance selection device provided by the utility model discloses a kind of physical parameters, and direct measurement is carried out according to the feature point of grid line pattern, and is automatically classified by mechanical suction cup. Such device can be arranged in any part of silk screen printing production structure, and good product or substandard product can be directly tested for the sample that has been dried, and the next stage of wafer can be carried out according to the needs, and the good product and substandard product channel can be changed to the same good product channel and subsequently contacted with different process equipment. By non-contact white light interference test, it is beneficial to effectively measure and evaluate the physical parameters without affecting the sample, and it is beneficial to avoid the decline of good product rate caused by human operation due to product contact. The test and selection in the production test link enhance the sample monitoring of production experiment, reduce the labor cost and time cost of characterization, and improve production efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0023] In order to more clearly illustrate the technical solutions in the embodiments of the utility model, the following will briefly introduce the drawings needed to be used in the embodiment description. Obviously, the drawings in the following description are only some embodiments of the utility model, and other drawings can be obtained by those skilled in the art without creative labor.

[0024] Figure 1 It is a cross-sectional analysis schematic view of the white light interference appearance selection device provided by the utility model embodiment;

[0025] Figure 2 It is an automatic analysis schematic view of the white light interference appearance selection device provided by the utility model embodiment;

[0026] Figure 3 It is a photosensitive device analysis schematic view of the white light interference appearance selection device provided by the utility model embodiment;

[0027] Figure 4 It is a transfer device analysis schematic view of a white light interference topography selection device provided by the embodiment of the utility model.

[0028] 101, marble base; 102, light shielding frame; 103, white light middle stand; 104, white light signal transmission area; 105, white light equipment telescopic device; 106, multi-lens data integration area; 107, light source emission analysis device; 108, external filter area; 109, locking device; 110, lens telescopic device; 111, objective lens;

[0029] 20, transport track; 201, feeding track; 202, substandard product track; 203, finished product track; 204, transport limiting baffle; 205, conveying belt;

[0030] 30, sample calibration kit; 301, photosensitive detection assembly; 302, entrance light shielding shielding door; 303, pressure-sensitive resistor; 3041, photosensitive assembly support column; 3042, assembly transmission area;

[0031] 40, transfer device; 401, rotary machine; 402, mechanical arm fixed base; 403, spherical rotation area; 404, support arm; 405, spherical balance gimbal; 406, mechanical suction disc; 407, airflow control device; 408, suction disc antenna; 409, air suction hole;

[0032] 501, good product transfer direction; 502, substandard product transfer direction. DETAILED DESCRIPTION

[0033] The utility model will be further described below in conjunction with the embodiments and drawings, but not as the limitation of the scope of protection of the present application. It should be understood that the specific embodiments described herein are only used to explain the utility model and are not used to limit the utility model.

[0034] In the description of the utility model, unless otherwise specified, the meaning of "a plurality of" is two or more than two; The orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "left", "right", "inner", "outer", "front end", "rear end", "head", "tail", "vertical", "horizontal", "top", "bottom", "inner", "outer" is based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the utility model and simplifying the description, and cannot be understood as indicating or implying that the indicated device or element must have a particular orientation, a particular orientation and operation, therefore, it cannot be understood as a limitation of the utility model. In addition, the terms "first", "second", "third" and the like are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0035] Please refer toFigures 1-4 The utility model embodiment provides a kind of white light interference topography selection device, comprising: marble pedestal 101, light-shielding frame 102, white light middle column 103, white light signal transmission area 104, white light equipment telescopic device 105, multi-lens data integration area 106, light source emission analysis device 107, external filter area 108, locking device 109, lens telescopic device 110, objective 111;And transport track 20 and transfer device 40 being set on the marble pedestal 101;And sample calibration kit 30 being set on the transport track 20.

[0036] The marble pedestal 101 is connected with the light-shielding frame 102, and a closed space is formed on the marble pedestal 101 by connecting the light-shielding frame 102 with the marble pedestal 101, and other components are arranged in the closed space, so that the interference of external light sources on the device can be reduced, and the accuracy and stability of white light interference selection can be improved. The white light middle column 103 is fixed to the marble pedestal 101, at least one white light signal transmission area 104 is provided above the white light middle column 103, at least one white light signal transmission area 104 is connected with at least one white light equipment telescopic device 105, the white light equipment telescopic device 105 is nestedly connected with the multi-lens data integration area 106, the multi-lens data integration area 106 is mechanically connected and electrically connected with at least one light source emission analysis device 107, the light source emission analysis device 107 is sequentially connected with the lens telescopic device 110 and the objective 111, the lens telescopic device 110 is provided with the external filter area 108, and the locking device 109 is arranged on the external filter area 108.

[0037] In the embodiment, the white light equipment telescopic device 105, the multi-lens data integration area 106, the light source emission analysis device 107, the lens telescopic device 110 and the objective 111 are sequentially fixed on the white light signal transmission area 104 in the vertically downward direction, so that the final objective 111 is located above the transport track 20 for detecting the qualified condition of the battery on the track.

[0038] In the embodiment, the lens telescopic device 110 and the objective 111 are detachably engaged, and the objective can be replaced manually for samples of different thicknesses, different types, different wavelengths, different film surfaces, different resolution and analysis requirements.

[0039] During the testing process of the white light interference device, the white light equipment telescopic device 105 and the lens telescopic device 110 will be vertically telescoped upward and downward to complete the topography shooting and analysis of multiple samples, in order to cope with samples of different thicknesses, different types, different wavelengths and different film surfaces during the complete topography shooting process of the device.

[0040] In the embodiment, the operation of the locking device 109 on the external filter area 108 can replace the internal filter of the external filter area 108. Different silicon wafers, different materials, different films and different wavelengths have different interference fringes. If the corresponding filter is not replaced, the test result will be seriously affected. Therefore, the external filter area 108 is added to accurately capture a variety of samples under the condition of using the same light source emission analysis device 107, thereby effectively improving the adaptability of different batches of production tests.

[0041] The marble base 101 is provided with a transportation track 20 and a sample calibration kit 30. The transportation track 20 includes at least one feeding track 201, at least one substandard track 202 and at least one finished product track 203. The feeding track 201, the substandard track 202 and the finished product track 203 each are composed of two transportation limiting stop plates 204 and two conveying belts 205. The two conveying belts 205 are arranged in parallel and are used for transporting the batteries. The two transportation limiting stop plates 204 are arranged at the opposite two outer sides of the two conveying belts 205. The two transportation limiting stop plates 204 are also arranged in parallel and have a height greater than that of the conveying belts 205, so as to limit the transportation of the batteries and prevent the batteries from deviating from the tracks during the transportation.

[0042] Further, each transportation track 20 passes through the light-shielding outer frame 102 from the closed space to the outside. The batteries are transported to the inside of the device through the feeding track 201 for detection and selection. The selected batteries are transported to the outside of the device through the substandard track 202 and the finished product track 203 respectively, for the next operation.

[0043] The sample calibration kit 30 comprises a photosensitive detection component 301, an entrance light shielding door 302, a pressure-sensitive resistor 303, a photosensitive component support 3041, and a component transmission area 3042. At least three entrance light shielding doors 302 are respectively fixed on the feeding track 201, the substandard product track 202, and the finished product track 203 and arranged on the light shielding outer frame 102. The entrance and exit of the battery are realized by controlling the entrance light shielding door 302 and the conveying belt 205, and the influence of external light sources on the device is reduced. Two photosensitive detection components 301 are arranged at the positions on both sides of the entrance light shielding door 302 on the feeding track 201, and the photosensitive component support 3041 supporting the photosensitive detection component 301 and the component transmission area 3042 supporting the photosensitive component support 3041 and providing electrical connection are arranged. One pressure-sensitive resistor 303 and one photosensitive detection component 301 are respectively arranged at the positions on both sides of the entrance light shielding door 302 on the substandard product track 202, and the photosensitive component support 3041 supporting the photosensitive detection component 301 and the component transmission area 3042 supporting the photosensitive component support 3041 and providing electrical connection are arranged. The pressure-sensitive resistor 303 is arranged in a closed space, and the photosensitive detection component 301 is arranged outside the closed space. One pressure-sensitive resistor and one photosensitive detection component 301 are respectively arranged at the positions on both sides of the entrance light shielding door 302 on the finished product track 203, and the photosensitive component support 3041 supporting the photosensitive detection component 301 and the component transmission area 3042 supporting the photosensitive component support 3041 and providing electrical connection are arranged. The pressure-sensitive resistor 303 is arranged in a closed space, and the photosensitive detection component 301 is arranged outside the closed space.

[0044] Further, the entrance light shielding door 302 is controlled by the photosensitive detection component 301 and the pressure-sensitive resistor 303.

[0045] When the battery enters the device through the feeding track 201, the photosensitive detection component 301 outside the light shielding outer frame 102 is always in a light receiving state, so that the entrance light shielding door 302 is closed. When the sample is transported by the conveying belt 205, the light receiving of the photosensitive detection component 301 is reduced by the covering of the sample itself, so that the signal is transmitted through the component transmission area 3042 and the entrance light shielding door 302 is opened. After the sample completely enters the entrance light shielding door 302, the photosensitive detection component 301 outside the device is in a light receiving state. The photosensitive detection component 301 inside the device experiences two processes. First, due to the opening of the entrance light shielding door 302, the photosensitive detection component 301 inside the device enters a light receiving state. When the sample completely enters the device, the photosensitive detection component 301 inside the device is covered, so that it reenters a shielding state, and the entrance light shielding door 302 is closed again to complete a cycle.

[0046] When the battery is detected to be transported to the outside of the device through the defective track 202 and the finished product track 203, the battery is transported to the outside of the device according to the set program. First, the sample passes through the pressure-sensitive resistor 303, and the weight of the sample itself drives the weight of the pressure-sensitive resistor 303, so that the entrance light shielding door 302 is opened, and the sample continues to be transported and completely covers the light-sensitive detection assembly 301 outside the device to shield light. At this time, the entrance light shielding door 302 is closed, and the sample is transported to the next automatic device or the sample basket is received and manually taken. After the sample leaves the light-sensitive detection assembly 301, the light-sensitive detection assembly 301 exits the light shielding state and reenters the light receiving state. At this time, the entrance light shielding door 302 is closed to complete the transfer, and the next sample contacts the pressure-sensitive resistor 303 to start the next cycle.

[0047] The transfer device 40 comprises a mechanical arm fixed base 402 fixed to the marble base 101, a rotating machine table 401, at least two support arms 404 and at least one spherical rotating area 403 alternately connected, a spherical balance holder 405 and a mechanical suction cup 406 fixed in sequence to the mechanical arm fixed base 402.

[0048] Specifically, the number of support arms 404 is one more than the number of spherical rotating areas 403, and the support arm-spherical rotating area-support arm alternately combined mode is adopted for fixation, and the connected mechanical suction cup 406 is controlled through the spherical rotating area 403.

[0049] The mechanical suction cup 406 comprises the airflow control device 407, the suction cup antenna 408 and the air suction hole 409. The suction cup antenna 408 is arranged at the four corners of the mechanical suction cup 406, the air suction hole 409 is arranged in the suction cup antenna 408, the airflow control device 407 is arranged on the opposite side of the suction cup antenna 408 and the air suction hole 409, and the air suction hole 409 is connected with the airflow control device 407 through an air pipe. The airflow control device 407 can extract airflow to generate negative pressure on the suction cup antenna 408, so as to adsorb the battery to be detected or the battery after detection for transfer work.

[0050] In actual use, the rotating machine table 401 is fixed to the mechanical arm fixed base 402 through the central shaft, and can be linked with the spherical rotating area 403, the support arm 404 and the spherical balance holder 405 to rotate on the mechanical arm fixed base 402 through automatic movement. The spherical rotating area 403 can adapt to different sample transfer requirements according to the set program and perform mechanical movement adjustment.

[0051] In the embodiment, when the battery is detected to pass through the transfer device 40 and is transferred to the finished product track 203 and the substandard track 202 respectively, the finished product transfer direction 501 is transferred to the finished product track 203, and the substandard track 202 is transferred to the substandard track 202 through the substandard track 202.

[0052] The substandard track 302 and the transfer device 40 are automatically linked through the substandard track 502. After the sample is moved to the sample test position through the photosensitive detection assembly 301 and the program is set, and the sample is judged to be substandard through the set program and the white light interference result, the rotating machine table 401 is automatically controlled to run to the program setting position, the mechanical suction cup 406 is adjusted to the corresponding height of the sample through the spherical rotation area 403, the supporting arm 404 and the spherical balance holder 405, the sample is contacted through the suction cup antenna 408, the airflow control device 407 and the air suction hole 409 are used for airflow control, the sample is grabbed and transferred to the substandard track 202 and transported to the outside of the device, and when the white light interference result is judged to be good, the sample is transferred to the finished product track 203 and transported to the outside of the device.

[0053] The utility model discloses a white light interference appearance selects device, it includes: marble base 101, shading outer frame 102, white light middle post 103, white light signal transmission area 104, white light equipment telescopic device 105, multi -lens data integration area 106, light source emission analysis device 107, external filter area 108, locking device 109, lens telescopic device 110, objective lens 111, and the transportation track 20 and transfer device 40 set up on marble base 101, and the sample calibration kit 30 set up on transportation track 20. According to the feature point of grid line pattern, sampling is carried out, and direct measurement of physical parameters is carried out, and automatic classification is carried out through mechanical suction cup. Such device can be arranged in any part of silk screen printing production structure, and the dried sample can be directly tested, and the good product or substandard product can be flowed to the next stage according to the need, and the good product and substandard product channels can be changed into the same good product channel and contact different process equipment subsequently. Through non -contact white light interference test, it is beneficial to effectively measure and evaluate the selection of physical parameters without affecting the sample, and it is beneficial to avoid the decline of good product rate caused by human operation. Through the test and selection in the production test link, the sample monitoring of production experiment is enhanced, the artificial cost and time cost of characterization are reduced, and the production efficiency is improved.

[0054] The above embodiments are only preferred embodiments of the present application, and it should be pointed out that: for ordinary skilled in the art, without departing from the principles of the present application, under the premise of, a variety of changes, modifications, replacement and deformation can be made to these embodiments, these on the present application claims for equivalent replacement of technical scheme, all fall within the scope of the present application, the scope of protection of the present application is defined by the appended claims and their equivalents.

Claims

1. A white light interferometric topography selection apparatus, characterized by, It comprises: a marble base, a light-shielding outer frame, a white light middle column, a white light signal transmission area, a white light device telescopic device, a multi-lens data integration area, a light source emission analysis device, an external filter area, a locking device, a lens telescopic device, an objective lens; and a transportation track and a transfer device arranged on the marble base; and a sample calibration kit arranged on the transportation track. The marble base is connected with the light-shielding outer frame, and a closed space is formed on the marble base through the connection of the light-shielding outer frame and the marble base, and other components are arranged in the closed space.

2. The white light interferometric topography pick-off device of claim 1 wherein, The white light middle column is fixed to the marble base, at least one white light signal transmission area is arranged above the white light middle column, at least one white light signal transmission area is connected with at least one white light device telescopic device, the white light device telescopic device is nested connected with the multi-lens data integration area, the multi-lens data integration area is mechanically connected and electrically connected with at least one light source emission analysis device, the light source emission analysis device is sequentially connected with the lens telescopic device and the objective lens, the lens telescopic device is provided with an external filter area, and the external filter area is provided with a locking device.

3. The white light interferometric profilometry pick-off device of claim 2, wherein, The white light device telescopic device, the multi-lens data integration area, the light source emission analysis device, the lens telescopic device and the objective lens are sequentially fixed on the white light signal transmission area in a vertically downward direction, so that the final objective lens is located above the transportation track.

4. The white light interferometric profilometry pick-and-place apparatus of claim 2, wherein, The lens telescopic device and the objective lens are in a detachable occlusion structure.

5. The white light interferometric profilometry pick-and-place apparatus of claim 2, wherein, The marble base is provided with a transportation track and a sample calibration kit, the transportation track comprises at least one feeding track, at least one substandard track and at least one finished product track, the feeding track, the substandard track and the finished product track each comprise two transportation limiting stop plates and two conveying belts, the two conveying belts are arranged in parallel, the two transportation limiting stop plates are arranged on the opposite two outer sides of the two conveying belts, the two transportation limiting stop plates are also arranged in parallel, and the height of the transportation limiting stop plate is greater than that of the conveying belt.

6. The white light interferometric profilometry pick-and-place apparatus of claim 2, wherein, The transportation track passes through the light-shielding outer frame to connect the outside.

7. The white light interferometric topography pick-off device of claim 5 wherein, The sample calibration kit comprises a photosensitive detection component, an entrance light-shielding shielding door, a pressure-sensitive resistor, a photosensitive component support and a component transmission area, at least three entrance light-shielding shielding doors are fixed on the feeding track, the substandard track and the finished product track respectively and arranged on the light-shielding outer frame.

8. The white light interferometric profilometry pick-and-place apparatus of claim 7, wherein, Two light-sensitive detection assemblies are arranged at positions on both sides of the entrance light shielding door on the feeding track, and a light-sensitive assembly support is arranged to support the light-sensitive detection assemblies and provide electrical connection; a pressure-sensitive resistor and a light-sensitive detection assembly are arranged at positions on both sides of the entrance light shielding door on the substandard product track, and a light-sensitive assembly support is arranged to support the light-sensitive detection assemblies and provide electrical connection, the pressure-sensitive resistor is arranged in a closed space, and the light-sensitive detection assembly is arranged outside the closed space; a pressure-sensitive resistor and a light-sensitive detection assembly are arranged at positions on both sides of the entrance light shielding door on the finished product track, and a light-sensitive assembly support is arranged to support the light-sensitive detection assemblies and provide electrical connection, the pressure-sensitive resistor is arranged in a closed space, and the light-sensitive detection assembly is arranged outside the closed space.

9. The white light interferometric profilometry pick-and-place apparatus of claim 7, wherein, The entrance light shielding door is controlled by the light-sensitive detection assembly and the pressure-sensitive resistor.

10. The white light interferometric topography pick-off device of claim 2 wherein, The transfer device comprises a mechanical arm fixed base fixed on the marble base, a rotating machine table, at least two support arms and at least one spherical rotation area alternately connected, a spherical balance holder and a mechanical suction cup fixed on the mechanical arm fixed base in sequence.

11. The white light interferometric profilometry pick-and-place apparatus of claim 10, wherein, The mechanical suction cup comprises an airflow control device, a suction cup antenna and a suction hole, the suction cup antenna is arranged at four corners of the mechanical suction cup, the suction hole is arranged in the suction cup antenna, the airflow control device is arranged on the opposite side of the suction cup antenna and the suction hole, and the suction hole is connected with the airflow control device through an air pipe.

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