Spectrometer

Abstract

The utility model discloses a spectrograph, which comprises a spectrograph main body, and a vacuum cavity is formed in the spectrograph main body; the optical element is mounted in the vacuum cavity; the slit assembly is provided with an incident light slit, and incident light at the incident light slit is suitable for being emitted to the detector assembly after passing through the at least one optical element. According to the spectrograph provided by the embodiment of the utility model, the vacuum cavity is formed in the spectrograph main body, so that the ultraviolet light can be spread in the vacuum cavity, the spectrograph can be further used for carrying out spectral analysis on the ultraviolet light, the application range of the spectrograph can be enlarged, and the satisfaction degree of a user can be improved; and through the arrangement of the slit assembly, the at least one optical element and the detector assembly, the incident light passing through the incident light slit can be processed by the at least one optical element and then is emitted to the detector assembly, and the incident light is converted into an electric signal in the detector assembly, so that the spectral analysis function of the spectrometer is realized.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of spectrometer, especially a spectrometer. BACKGROUND

[0002] As a kind of scientific instrument, spectrometer can be used to measure the spectrum of matter, but the existing spectrometer can usually only carry out spectral analysis on infrared light, the scope of application is smaller, there is room for improvement. CONTENT

[0003] The utility model aims at at least one of the technical problems existing in prior art is solved.For this purpose, the utility model provides a kind of spectrometer, the spectrometer can be used to carry out spectral analysis on ultraviolet light, can increase the scope of application of spectrometer, it is beneficial to improve user satisfaction degree, and the spectral analysis function of spectrometer can be realized.

[0004] According to the spectrometer of the utility model embodiment, the vacuum cavity is formed in the spectrometer main body, ultraviolet light can propagate in the vacuum cavity, so that the spectrometer can be used to carry out spectral analysis on ultraviolet light, the scope of application of spectrometer can be increased, it is beneficial to improve user satisfaction degree, and by setting slit assembly, at least one optical element and detector assembly, the incident light rays passing through incident light slit can be emitted to detector assembly after being processed by at least one optical element, and be converted into electrical signal in detector assembly, to realize the spectral analysis function of spectrometer.

[0005] According to the spectrometer of the utility model embodiment, the vacuum cavity is formed in the spectrometer main body, ultraviolet light can propagate in the vacuum cavity, so that the spectrometer can be used to carry out spectral analysis on ultraviolet light, the scope of application of spectrometer can be increased, it is beneficial to improve user satisfaction degree, and by setting slit assembly, at least one optical element and detector assembly, the incident light rays passing through incident light slit can be emitted to detector assembly after being processed by at least one optical element, and be converted into electrical signal in detector assembly, to realize the spectral analysis function of spectrometer.

[0006] According to the spectrometer of some embodiments of the utility model, the spectrometer main body includes vacuum shell and mounting base, the vacuum shell is movably installed above the mounting base, and the vacuum cavity is formed in the vacuum shell.

[0007] According to the spectrometer of some embodiments of the utility model, the vacuum shell includes upper shell and adjusting bottom plate, the upper shell is connected with the adjusting bottom plate and defines the vacuum cavity together, and the adjusting bottom plate is adjustably connected to the mounting base by six-dimensional adjusting mechanism.

[0008] According to the spectrometer of some embodiments of the utility model, the upper shell forms a chamber, the chamber is open towards the adjusting bottom plate, the adjusting bottom plate is provided with a sealing groove on the side towards the upper shell, and the sealing groove is connected to the chamber to define the vacuum cavity together.

[0009] The spectrometer according to some embodiments of the present application, the spectrometer body is further formed with a vacuum suction port, the vacuum suction port is communicated with the vacuum cavity, and the vacuum suction port is suitable for external connection of a vacuum pump.

[0010] The spectrometer according to some embodiments of the present application, the vacuum suction port is multiple, and the multiple vacuum suction ports are distributed at intervals; and / or, the vacuum suction port is arranged on the side of the vacuum cavity away from the slit assembly.

[0011] The spectrometer according to some embodiments of the present application, the spectrometer body is further provided with a light inlet and a light outlet, the slit assembly and the detector assembly are both mounted outside the vacuum cavity, the slit assembly is arranged opposite to the light inlet, and the detector assembly is arranged opposite to the light outlet.

[0012] The spectrometer according to some embodiments of the present application, further comprising a laser collimation assembly, the laser collimation assembly is mounted between the slit assembly and the light source, and the laser collimation assembly is detachable relative to the spectrometer body; wherein the laser collimation assembly has a positive installation state and a reverse installation state, and in the positive installation state, the laser collimation assembly is used for calibrating the light path on one side of the slit assembly, and in the reverse installation state, the laser collimation assembly is used for calibrating the light path on one side of the light source.

[0013] The spectrometer according to some embodiments of the present application, the optical element comprises a grating assembly and a parabolic mirror assembly, the parabolic mirror assembly is two and is arranged on both sides of the grating assembly respectively, the light at the slit assembly is suitable for being reflected to the grating assembly through one parabolic mirror assembly, and after passing through the grating assembly, the light is reflected to the detector assembly through another parabolic mirror assembly.

[0014] The spectrometer according to some embodiments of the present application, the slit assembly is configured to adjust the width of the incident light slit.

[0015] The additional aspects and advantages of the present application will be partially given in the following description, partially will become obvious from the following description, or will be understood by the practice of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0016] The above and / or additional aspects and advantages of the present application will become apparent and more readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings, in which:

[0017] Figure 1 is a structural schematic view of the spectrometer according to the embodiments of the present application;

[0018] Figure 2 is a structural schematic view of the upper shell according to the embodiments of the present application;

[0019] Figure 3 is a partial schematic diagram of a spectrometer according to an embodiment of the present application Figure 1 ;

[0020] Figure 4 is a partial schematic diagram of a spectrometer according to an embodiment of the present application Figure 2 ;

[0021] Figure 5 is a structural schematic diagram of a laser collimation assembly according to an embodiment of the present application;

[0022] Figure 6 is a structural schematic diagram of a slit assembly according to an embodiment of the present application;

[0023] Figure 7 is a schematic diagram of the installation position of a laser collimation assembly and a slit assembly according to an embodiment of the present application Figure 1 ;

[0024] Figure 8 is a schematic diagram of the installation position of a laser collimation assembly and a slit assembly according to an embodiment of the present application Figure 2 ;

[0025] Figure 9 is a structural schematic diagram of a parabolic mirror assembly according to an embodiment of the present application;

[0026] Figure 10 is a structural schematic diagram of a grating assembly according to an embodiment of the present application;

[0027] Figure 11 is a structural schematic diagram of a detector assembly according to an embodiment of the present application;

[0028] Figure 12 is a schematic diagram of an optical path of a spectrometer according to an embodiment of the present application.

[0029] Reference signs:

[0030] a spectrometer 100,

[0031] a spectrometer main body 1, a vacuum shell 12, an upper shell 121, an adjusting bottom plate 122, a sealing groove 124, a mounting base 13, a vacuum suction port 14, a light ray inlet 15, a light ray outlet 16,

[0032] optical elements 2, a grating assembly 21, a grating 211, a grating clamping assembly 212, a parabolic mirror assembly 22, a parabolic mirror 221, a parabolic mirror clamping assembly 222,

[0033] a slit assembly 3, an incident light slit 31, a detector assembly 4, a detector 41, a support adjusting device 42,

[0034] laser collimation assembly 5, laser pointer 51, mounting bracket 52, pin 521, adjusting screw 6. DETAILED DESCRIPTION

[0035] The embodiments of the present application are described below in detail, examples of which are shown in the drawings, wherein the same or similar notations represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary only, and are used only for explaining the present application, and cannot be understood as a limitation of the present application.

[0036] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application. In addition, the features defined as "first" and "second" can explicitly or implicitly include one or more of the features. In the description of the present application, unless otherwise specified and limited, the term "a plurality of" means two or more.

[0037] In the description of the present application, it should be noted that, unless otherwise specified and limited, the terms "mounting", "connecting", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be connected inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0038] The following will be described with reference to Figures 1-12 The spectrometer 100 according to the embodiments of the present application is described below. By forming a vacuum cavity in the spectrometer main body 1, the ultraviolet light can propagate in the vacuum cavity, and the spectrometer 100 can be used for spectral analysis of the ultraviolet light, which can increase the application range of the spectrometer 100, and is beneficial to improving user satisfaction. In addition, by providing the slit assembly 3, the at least one optical element 2 and the detector assembly 4, the incident light rays passing through the incident light slit 31 can be processed by the at least one optical element 2 and then emitted to the detector assembly 4, and converted into electrical signals in the detector assembly 4, so as to realize the spectral analysis function of the spectrometer 100.

[0039] AsFigures 1-12 As shown, the spectrometer 100 according to one embodiment of the present application comprises: a spectrometer main body 1, at least one optical element 2, a slit assembly 3 and a detector assembly 4.

[0040] The spectrometer main body 1 is formed with a vacuum cavity; the optical element 2 is installed in the vacuum cavity; the slit assembly 3 is formed with an incident light slit 31, and the incident light at the incident light slit 31 is adapted to be emitted to the detector assembly 4 after passing through the at least one optical element 2.

[0041] Specifically, the spectrometer 100 is used for spectral analysis of light, the spectrometer main body 1 serves as a shell structure of the spectrometer 100 and can be used for mounting and protecting part of components in the spectrometer 100, the vacuum cavity is formed in the spectrometer main body 1 and is a vacuum environment, which can be used to avoid strong absorption of ultraviolet light by some molecules in the air, that is, the vacuum cavity allows the ultraviolet light to propagate inside, so that the spectrometer 100 can be used for spectral analysis of ultraviolet light, thereby increasing the application range of the spectrometer 100 and facilitating improvement of user satisfaction.

[0042] It should be noted that light with a wavelength in the range of 115nm-200nm is strongly absorbed by some molecules in the air and can only propagate in a vacuum environment, and light with a wavelength in the range of 115nm-200nm is in the ultraviolet band. Forming a vacuum cavity in the spectrometer main body 1 allows light in this wavelength range to propagate in the vacuum cavity, thereby enabling the spectrometer 100 to be used in the ultraviolet band and increasing the application range of the spectrometer 100.

[0043] Meanwhile, the optical element 2 is installed in the vacuum cavity, which can be used for decomposition, transmission and focusing of light signals, etc., so as to facilitate accurate spectral analysis by the spectrometer 100. The optical element 2 is arranged in the vacuum cavity, i.e. in the spectrometer main body 1, so that the spectrometer main body 1 can install and protect the optical element 2, avoiding damage and failure of the optical element 2 due to collision. In addition, the spectrometer 100 includes at least one optical element 2, i.e. the number of optical elements 2 can be one, two or three, etc., so that the light signal can be processed by the at least one optical element 2 in the spectrometer 100 in sequence, thereby improving the accuracy of the spectrometer 100.

[0044] Moreover, the spectrometer 100 further comprises a slit assembly 3, such as Figure 6As shown, the slit assembly 3 is used to form an incident light slit 31, the incident light slit 31 has a certain width and can be used to limit the width of the passing light beam, so that only a very narrow light beam can enter the spectrometer 100, so that the resolution of the spectrometer 100 can be improved, and the incident light at the incident light slit 31 is suitable for being emitted to the detector assembly 4 after passing through at least one optical element 2, that is, the incident light passing through the incident light slit 31 can pass through at least one optical element 2, and after being processed at the at least one optical element 2, the incident light is emitted to the detector assembly 4, the detector assembly 4 is used to detect and measure the light signal, and convert the light signal into an electrical signal for further analysis and processing, that is, the spectrum can be formed to realize the spectrum analysis function of the spectrometer 100.

[0045] According to the embodiment of the utility model, the vacuum cavity is formed in the spectrometer main body 1, so that the ultraviolet light can propagate in the vacuum cavity, and the spectrometer 100 can be used for spectrum analysis of the ultraviolet light, the application range of the spectrometer 100 can be increased, the user satisfaction can be improved, and the slit assembly 3, the at least one optical element 2 and the detector assembly 4 are arranged, so that the incident light passing through the incident light slit 31 can be emitted to the detector assembly 4 after being processed by the at least one optical element 2, and the incident light is converted into an electrical signal in the detector assembly 4, so that the spectrum analysis function of the spectrometer 100 can be realized.

[0046] In some embodiments, the spectrometer main body 1 includes a vacuum shell 12 and a mounting base 13, the vacuum shell 12 is movably mounted above the mounting base 13, and the vacuum cavity is formed in the vacuum shell 12.

[0047] Specifically, the spectrometer main body 1 includes a vacuum shell 12 and a mounting base 13, the vacuum shell 12 and the mounting base 13 can jointly form the shell structure of the spectrometer 100, the vacuum shell 12 is mounted above the mounting base 13, that is, the vacuum shell 12 and the mounting base 13 are distributed in the up-down direction, and the vacuum cavity is formed in the vacuum shell 12, that is, the at least one optical element 2 is arranged in the vacuum shell 12 to protect the at least one optical element 2 by the vacuum shell 12, so that any one of the optical elements 2 is not damaged and fails due to collision, and the mounting base 13 can be arranged at the bottom of the spectrometer 100, so that the mounting base 13 can be used as a bottom structure to mount and support other components of the spectrometer 100.

[0048] In some embodiments, the vacuum shell 12 includes an upper shell 121 and an adjusting bottom plate 122, the upper shell 121 is connected with the adjusting bottom plate 122 and jointly defines the vacuum cavity, and the adjusting bottom plate 122 is adjustably connected to the mounting base 13 by a six-dimensional adjusting mechanism.

[0049] Specifically, the vacuum shell 12 comprises an upper shell 121 and an adjusting bottom plate 122, the upper shell 121 can be connected with the adjusting bottom plate 122 to make the vacuum shell 12 as a whole, improve the structural strength of the vacuum shell 12 as a whole, improve the reliability of the protection of the at least one optical element 2 by the vacuum shell 12, and the upper shell 121 and the adjusting bottom plate 122 jointly define a vacuum cavity, that is, the at least one optical element 2 can be arranged between the upper shell 121 and the adjusting bottom plate 122 to jointly protect the at least one optical element 2 by the upper shell 121 and the adjusting bottom plate 122, and the reliability of the protection of the at least one optical element 2 can be further improved.

[0050] It should be noted that, as shown in Figures 1-4 The upper shell 121 and the adjusting bottom plate 122 can be distributed in the up-down direction, and the adjusting bottom plate 122 can support the at least one optical element 2 from the bottom to ensure the reliability of the operation, and the upper shell 121 and the adjusting bottom plate 122 can be connected by a plurality of connection members distributed at intervals, and the connection method is simple, reliable and easy to operate.

[0051] In addition, the adjusting bottom plate 122 can be adjustably connected to the mounting base 13 by a six-dimensional adjusting mechanism, that is, the adjusting bottom plate 122 can be connected above the mounting base 13 to install the adjusting bottom plate 122, and the adjusting bottom plate 122 can be movable relative to the mounting base 13 to facilitate the adjustment of the position of the adjusting bottom plate 122 by the six-dimensional adjusting mechanism, that is, the position of the adjusting bottom plate 122 and the optical element 2 and other components on the adjusting bottom plate 122 can be adjusted to adjust the overall posture of the spectrometer 100, so that the spectrometer 100 can adapt to different test working conditions.

[0052] It should be noted that the six-dimensional adjusting mechanism can be used to adjust the precise position in six degrees of freedom, and the adjusting bottom plate 122 is connected to the mounting base 13 by the six-dimensional adjusting mechanism, so that the adjusting bottom plate 122 and the optical element 2 and other components on the adjusting bottom plate 122 can be adjusted in position in six degrees of freedom relative to the mounting base 2, and the six-dimensional adjusting mechanism comprises a plurality of adjusting screws 6, which can be arranged at intervals along the circumference of the adjusting bottom plate 122, so as to adjust the position of the adjusting bottom plate 122 by the plurality of adjusting screws 6 at the same time, which can improve the reliability and stability of the adjustment of the position of the adjusting bottom plate 122.

[0053] In some embodiments, the upper shell 121 is formed with a chamber which is open towards the adjusting bottom plate 122, and the adjusting bottom plate 122 is provided with a sealing groove 124 on the side facing the upper shell 121, and the sealing groove 124 is connected to the chamber to jointly define a vacuum cavity.

[0054] Specifically, the upper shell 121 cooperates with the adjusting bottom plate 122 to define a vacuum cavity, the at least one optical element 2 is installed in the vacuum cavity, and the upper shell 121 is formed with a chamber having a certain height and space for accommodating the at least one optical element 2, and the chamber is open toward the adjusting bottom plate 122, that is, when the upper shell 121 is connected with the adjusting bottom plate 122, the at least one optical element 2 can be extended from the open side of the chamber to the inside of the chamber, so that the at least one optical element 2 can be installed between the upper shell 121 and the adjusting bottom plate 122 to achieve the installation of the at least one optical element 2, and the upper shell 121 and the adjusting bottom plate 122 can be used to protect the at least one optical element 2.

[0055] In addition, the sealing groove 124 is used to close the chamber to ensure that the vacuum cavity can form a vacuum environment. In actual use, a sealing ring or the like can be arranged in the sealing groove 124 to improve the sealing effect of the vacuum cavity and ensure that the ultraviolet light can reliably propagate inside. The sealing groove 124 is arranged on the side of the adjusting bottom plate 122 facing the upper shell 121, that is, the sealing groove 124 is arranged above the adjusting bottom plate 122, and the sealing groove 124 is connected with the chamber, that is, the adjusting bottom plate 122 is connected with the upper shell 121, so as to close the chamber to cooperatively define the vacuum cavity.

[0056] In some embodiments, the spectrometer body 1 is further formed with a vacuum port 14, the vacuum port 14 is in communication with the vacuum cavity, and the vacuum port 14 is adapted to be externally connected to a vacuum pump.

[0057] Specifically, the spectrometer body 1 is formed with a vacuum cavity, and the spectrometer body 1 is further formed with a vacuum port 14, the vacuum port 14 is in communication with the vacuum cavity, that is, the vacuum cavity is in communication with the outside space through the vacuum port 14, so as to facilitate the air in the vacuum cavity to be extracted from the vacuum port 14 to form a vacuum environment in the vacuum cavity. At the same time, the vacuum port 14 is adapted to be externally connected to a vacuum pump, that is, the vacuum pump can be connected to the vacuum port 14, so that the vacuum pump can extract the air in the vacuum cavity from the vacuum port 14, and the ultraviolet light can propagate inside to increase the application range of the spectrometer 100.

[0058] It should be noted that the gas in the vacuum cavity is extracted by the vacuum pump to form a vacuum environment with a vacuum degree of 1E-4 Pa, which is beneficial to the propagation of ultraviolet light inside.

[0059] In some embodiments, the vacuum port 14 is a plurality of vacuum ports 14, and the plurality of vacuum ports 14 are spaced apart; and / or the vacuum port 14 is arranged on the side of the vacuum cavity away from the slit assembly 3.

[0060] Specifically, the vacuum suction port 14 is used for the vacuum pump to suck the air in the vacuum chamber, and the vacuum suction port 14 can be provided in multiple numbers, i.e., the number of the vacuum suction port 14 can be two, three or more, so as to simultaneously suck the air in the vacuum chamber from multiple vacuum suction ports 14, to improve the rate of sucking the air in the vacuum chamber, and the multiple vacuum suction ports 14 are spaced apart, i.e., there is a distance between the multiple vacuum suction ports 14, so as to avoid interference between the multiple vacuum pumps connected to the multiple vacuum suction ports 14, resulting in failure to connect with the vacuum suction port 14, thereby improving the reliability of sucking the air in the vacuum chamber.

[0061] In the embodiment shown in FIG. 1, the vacuum chamber 10 is provided with two vacuum suction ports 14, and the two vacuum suction ports 14 are spaced apart, i.e., the two vacuum suction ports 14 are arranged on the opposite sides of the vacuum chamber 10, so as to simultaneously suck the air in the vacuum chamber 10 from the two vacuum suction ports 14, to improve the rate and reliability of sucking the air in the vacuum chamber 10. Figures 1-2

[0062] In addition, the vacuum suction port 14 is arranged on the side of the vacuum chamber 10 away from the slit assembly 3, i.e., the vacuum suction port 14 and the slit assembly 3 are arranged on different sides of the vacuum chamber 10, so as to avoid interference between the vacuum suction port 14 and the slit assembly 3, resulting in failure of the spectrometer 100 to be normally used.

[0063] In some embodiments, the spectrometer body 1 is further provided with a light inlet 15 and a light outlet 16, and the slit assembly 3 and the detector assembly 4 are both mounted outside the vacuum chamber 10, the slit assembly 3 is arranged opposite to the light inlet 15, and the detector assembly 4 is arranged opposite to the light outlet 16.

[0064] Specifically, the spectrometer 100 can be used for receiving light and performing a series of processes on the light, and the spectrometer body 1 is provided with a light inlet 15 and a light outlet 16, the light inlet 15 allows the light to enter, i.e., external light can enter the inside of the spectrometer 100 from the light inlet 15, and the light is processed by at least one optical element 2 in the inside of the spectrometer 100, the light outlet 16 allows the light to exit, i.e., the light processed by the at least one optical element 2 can be emitted from the light outlet 16, the slit assembly 3 and the detector assembly 4 are both mounted outside the vacuum chamber 10, the slit assembly 3 is arranged opposite to the light inlet 15, and the detector assembly 4 is arranged opposite to the light outlet 16, so as to facilitate the light emitted by the light source to pass through the slit assembly 3, enter the spectrometer 100 from the light inlet 15, be processed by the at least one optical element 2 in the inside of the spectrometer 100, and be emitted to the detector assembly 4 from the light outlet 16, and the light signal is converted into an electrical signal in the detector assembly 4 to form a spectrum.

[0065] ​It should be noted that the slit assembly 3 and the detector assembly 4 are both installed outside the vacuum cavity, and the projection area of the adjusting bottom plate 122 in the up-down direction can be configured to be larger than the projection area of the vacuum shell 12 in the up-down direction, and then the slit assembly 3 and the detector assembly 4 can be arranged above the adjusting bottom plate 122, so that the adjusting bottom plate 122 can drive the slit assembly 3, the detector assembly 4 and at least one optical element 2 to rise and fall together when the adjusting bottom plate 122 is lifted relative to the mounting base 13, so as to adjust the overall posture of the spectrometer 100, and in actual design, the slit assembly 3 can also be arranged inside the vacuum cavity, so that the light can be irradiated to the optical element 2 through the incident light slit 31, and the relative position between the slit assembly 3 and the optical element 2 can be avoided from being changed due to collision, thereby reducing the accuracy of the spectrometer 100.

[0066] In some embodiments, the spectrometer 100 further comprises a laser collimation assembly 5, which is installed between the slit assembly 3 and the light source, and the laser collimation assembly 5 is detachable relative to the spectrometer body 1; wherein the laser collimation assembly 5 has a positive state and a reverse state, and in the positive state, it is used for calibrating the light path on one side of the slit assembly 3, and in the reverse state, it is used for calibrating the light path on one side of the light source.

[0067] Specifically, as shown in Figure 3 , Figure 7 and Figure 8 , the laser collimation assembly 5 is arranged between the slit assembly 3 and the light source, that is, the laser collimation assembly 5 is installed on the adjusting bottom plate 122, and then the light source, the laser collimation assembly 5 and the slit assembly 3 are arranged in sequence, and the laser collimation assembly 5 is detachable relative to the spectrometer 100, so that the laser collimation assembly 5 can be conveniently installed or detached, and the laser collimation assembly 5 has a positive state and a reverse state, wherein the positive state is to arrange the laser collimation assembly 5 towards the slit assembly 3, and the reverse state is to arrange the laser collimation assembly 5 away from the slit assembly 3, so that when the state of the laser collimation assembly 5 is switched, the laser collimation assembly 5 can be removed and then installed again after being turned over by 180°.

[0068] Further, when the laser collimation assembly 5 is in the positive state, the laser collimation assembly 5 can be arranged towards the slit assembly 3, so that the laser collimation assembly 5 can irradiate light towards the slit assembly 3 to calibrate the light path on one side of the slit assembly 3, and ensure that the light can be emitted to the detector assembly 4 under the action of at least one optical element 2; when the laser collimation assembly 5 is in the reverse state, the laser collimation assembly 5 can be arranged away from the slit assembly 3, so that the laser collimation assembly 5 can irradiate light towards the light source to calibrate the light path on one side of the light source, and ensure that the light of the light source can be irradiated to the slit assembly 3 and enter the vacuum cavity from the incident light slit 31, thereby ensuring the accuracy and reliability of the spectrometer 100.

[0069] It should be noted that, as shown in Figure 5 The laser collimation assembly 5 includes a laser pointer 51 and a mounting bracket 52. The laser pointer 51 can emit light to calibrate the light path on one side of the slit assembly 3 or the light path on the light source side when the laser collimation assembly 5 is in the upright state or the inverted state, respectively. The laser collimation assembly 5 is mounted on the adjustment base plate 122, so that the laser collimation assembly 5 can rise and fall with the adjustment base plate 122 to adapt to the overall posture of the spectrometer 100, facilitating the calibration of the light path. Meanwhile, the mounting bracket 52 is provided with a pin 521, and the adjustment base plate 122 is provided with a pin hole. The pin 521 can be inserted into the pin hole, that is, the detachable connection between the laser collimation assembly 5 and the adjustment base plate 122 can be achieved through the cooperation of the pin 521 and the pin hole, so that the laser collimation assembly 5 can be conveniently installed in the upright state or the inverted state to calibrate the light path.

[0070] In addition, after the laser collimation assembly 5 completes the calibration of the light path, the laser collimation assembly 5 can be moved to a position away from the light source and the slit assembly 3 to avoid blocking the light of the light source, which may result in the inapplicability or reduced accuracy of the spectrometer 100.

[0071] In some embodiments, the optical element 2 includes a grating assembly 21 and a parabolic mirror assembly 22. The parabolic mirror assembly 22 is two and is arranged on both sides of the grating assembly 21. The light at the slit assembly 3 is adapted to be reflected by one parabolic mirror assembly 22 to the grating assembly 21, and then reflected by the other parabolic mirror assembly 22 to the detector assembly 4 after passing through the grating assembly 21.

[0072] Specifically, the optical element 2 is at least one, and the optical element 2 includes a grating assembly 21 and a parabolic mirror assembly 22. The parabolic mirror assembly 22 is two, that is, the optical element 2 is three, and the three optical elements 2 are arranged inside the vacuum cavity. The two parabolic mirror assemblies 22 are arranged on both sides of the grating assembly 21, so that the three optical elements 2 can be arranged at intervals in the vacuum cavity to ensure that each optical element 2 can work reliably.

[0073] In addition, as shown in Figure 12As shown, the light rays at the slit assembly 3 are adapted to be reflected by a parabolic mirror assembly 22 to the grating assembly 21, and then reflected by another parabolic mirror assembly 22 to the detector assembly 4, i.e. the light rays passing through the light slit 31 can first reach one of the parabolic mirror assemblies 22, where the divergent light beam is converted into a parallel light beam and irradiated to the grating assembly 21, and the grating assembly 21 can convert the polychromatic light into monochromatic light and irradiate to the other parabolic mirror assembly 22, where the light is focused and irradiated to the detector assembly 4, and then the light signal can be converted into an electrical signal in the detector assembly 4 to form a spectrum.

[0074] It should be noted that, as shown in Figure 10 As shown, the grating assembly 21 includes a grating 211 for converting polychromatic light into monochromatic light, and a grating clamping assembly 212 for fixing the grating 211 on the adjusting base plate 122, so as to be lifted relative to the mounting base 13 under the driving of the adjusting base plate 122, as shown in Figure 9 As shown, the parabolic mirror assembly 22 includes a parabolic mirror 221 and a parabolic mirror clamping assembly 222, both of which are configured as off-axis parabolic mirrors, one of which is used to receive light rays passing through the slit assembly 3 and convert divergent light into parallel light, and the other is used to focus the light rays, i.e. one of the parabolic mirrors 221 can be used as a collimator, and the other parabolic mirror 221 can be used as a focusing mirror, such as a focusing mirror with a focal length of 279mm, and the parabolic mirror clamping assembly 222 is used to fix the parabolic mirror 221 on the adjusting base plate 122, so as to be lifted relative to the mounting base 13 under the driving of the adjusting base plate 122, so as to change the overall posture of the spectrometer 100, and the grating clamping assembly 212 and the parabolic mirror clamping assembly 222 can be connected to the adjusting base plate 122 by connecting members or the like.

[0075] Moreover, the two parabolic mirror assemblies 22 are respectively arranged on both sides of the grating assembly 21, i.e. the collimator is arranged on the side of the grating assembly 21 facing the slit assembly 3, and the focusing mirror is arranged on the side of the grating assembly 21 facing the detector assembly 4, so that the light rays pass through the collimator, the grating 211 and the focusing mirror in turn.

[0076] It should be noted that, as shown in Figure 11As shown, the detector assembly 4 comprises a detector 41 for converting the light signal into an electrical signal, wherein the detector 41 can be a CCD detector (Charge-Coupled Device), and a support adjustment device 42 for fixing the detector 41 on the adjustment base plate 122, i.e. the support adjustment device 42 can be connected to the adjustment base plate 122 by a connecting member or the like, so as to be lifted and lowered relative to the mounting base 13 under the driving of the adjustment base plate 122, so as to realize the adjustment of the overall posture of the spectrometer 100.

[0077] In some embodiments, the slit assembly 3 is configured to adjust the width of the incident light slit 31.

[0078] Specifically, the slit assembly 3 is formed with the incident light slit 31 having a certain width for limiting the width of the light beam that can pass through, and the width of the incident light slit 31 is configured to be adjustable, i.e. the width of the incident light slit 31 can be changed, so as to adjust the light flux, so that the spectrometer 100 can adapt to different measurement requirements and different sample characteristics, and can facilitate to improve the resolution of the spectrometer 100, and can allow the user to adjust the width of the incident light slit 31 according to the specific experimental design or sample characteristics, so as to improve the flexibility of the use of the spectrometer 100.

[0079] It should be noted that the width of the incident light slit 31 can be adjusted within a certain range, such as 0.005-0.3 mm, i.e. the width of the incident light slit 31 can be infinitely adjusted between 0.005 mm and 0.3 mm, so as to adjust the light flux by adjusting the width of the incident light slit 31, so that the spectrometer 100 can adapt to different requirements, and can facilitate to improve the resolution of the spectrometer 100, and the spectrometer 100 of the present application can realize the spectral analysis within the range of 115 nm-400 nm.

[0080] In the description of the present specification, the description of the terms "one embodiment", "some embodiments", "exemplary embodiment", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the exemplary description of the above terms does not necessarily mean the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0081] Although the embodiments of the utility model have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, replacements and variations can be made to these embodiments without departing from the principles and purposes of the utility model, and the scope of the utility model is defined by the claims and their equivalents.

Claims

1. A spectrometer, characterized by, The application relates to a spectrometer, comprising: a spectrometer body, a vacuum cavity being formed in the spectrometer body; at least one optical element, the optical element being installed in the vacuum cavity; a slit assembly and a detector assembly, the slit assembly being formed with an incident light slit, incident light rays at the incident light slit being adapted to be emitted to the detector assembly after passing through the at least one optical element.

2. The optical spectrometer of claim 1, wherein, The spectrometer body comprises a vacuum shell and a mounting base, the vacuum shell being movably mounted above the mounting base, and the vacuum cavity being formed in the vacuum shell.

3. The optical spectrometer of claim 2, wherein, The vacuum shell comprises an upper shell and an adjusting base plate, the upper shell being connected with the adjusting base plate and jointly defining the vacuum cavity, and the adjusting base plate being adjustably connected with the mounting base through a six-dimensional adjusting mechanism.

4. The optical spectrometer of claim 3, wherein, The upper shell is formed with a cavity, the cavity being open towards the adjusting base plate, and the adjusting base plate being provided with a sealing groove on a side facing the upper shell, the sealing groove being connected with the cavity to jointly define the vacuum cavity.

5. The optical spectrometer of claim 1, wherein, The spectrometer body is further formed with vacuum outlets, the vacuum outlets being in communication with the vacuum cavity, and the vacuum outlets being adapted to be externally connected with a vacuum pump.

6. The optical spectrometer of claim 5, wherein, The vacuum outlets are multiple, and the multiple vacuum outlets are spaced apart. And / or, the vacuum outlets are arranged on a side of the vacuum cavity away from the slit assembly.

7. The optical spectrometer of any one of claims 1-6, wherein, The spectrometer body is further provided with a light inlet and a light outlet, the slit assembly and the detector assembly being both installed outside the vacuum cavity, the slit assembly being arranged opposite to the light inlet, and the detector assembly being arranged opposite to the light outlet.

8. The optical spectrometer of any one of claims 1-6, wherein, The application further comprises a laser collimation assembly, the laser collimation assembly being installed between the slit assembly and a light source, and the laser collimation assembly being detachable relative to the spectrometer body. The laser collimation assembly has a normal state and a reverse state, and is used for calibrating a light path on a side of the slit assembly in the normal state, and is used for calibrating a light path on a side of the light source in the reverse state.

9. The optical spectrometer of any one of claims 1-6, wherein, The optical element comprises a grating assembly and parabolic mirror assemblies, the parabolic mirror assemblies being two and being arranged on two sides of the grating assembly respectively, light rays at the slit assembly being adapted to be reflected to the grating assembly through one parabolic mirror assembly, and being reflected to the detector assembly through the other parabolic mirror assembly after passing through the grating assembly.

10. The optical spectrometer of any one of claims 1-6, wherein, The slit assembly is configured to have an adjustable width of the incident light slit.

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