Base for performance test of electrostatic chuck
By designing a base for electrostatic chuck performance testing and utilizing an insulated workbench and electrode rod structure, the automated electrode connection and position adjustment of the electrostatic chuck were realized, solving the problems of time-consuming, labor-intensive, and unstable manual voltage application, and improving the accuracy and efficiency of testing.
Patent Information
- Application Number
- CN202423315923.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-31
- Publication Date
- 2026-01-02
- Estimated Expiration
- 2034-12-31
AI Technical Summary
In existing electrostatic chuck performance testing, manually applying voltage is time-consuming, labor-intensive, and unstable, affecting the accuracy of test results.
A base for testing the performance of an electrostatic chuck was designed, including an insulated workbench and a base plate. By having the first and second electrode rods engage with the electrode holes of the electrostatic chuck, and by combining the upper and lower slot structure and connecting rods, automated electrode connection and position adjustment can be achieved.
It simplifies the installation and disassembly process of the electrostatic chuck, improves the accuracy and efficiency of testing, and reduces the impact of human factors.
Smart Images
Figure CN223756786U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to electrostatic chuck test technical field, especially electrostatic chuck performance test base. BACKGROUND
[0002] Liquid crystal panel needs to be fixed to ensure the machining precision in the processing, such as PVD (physical vapor deposition), CVD (chemical vapor deposition), dry etching and other processes, needs to be operated in vacuum environment, electrostatic chuck can be fixed through electrostatic attraction in vacuum environment, as a method of replacing vacuum chuck and mechanical clamping, is widely used in semiconductor manufacturing device.
[0003] The structure of electrostatic chuck mainly includes three parts, from bottom to top, base material (if the base material is not insulated, there is generally an insulating layer before the electrode layer), electrode layer and dielectric layer. When using, the electrode layer in the electrostatic chuck is applied with direct current voltage to generate electrostatic attraction, so that the workpiece is adsorbed on the surface of the dielectric layer of the chuck, and the adsorption is released by breaking the electricity or reversing the electrode, so most of the performance test of electrostatic chuck needs to be completed under the condition of applying voltage to the electrode layer.
[0004] At present, in the performance test process of electrostatic chuck in the laboratory, the method of applying voltage to the electrode layer is mainly to manually press the metal conductive rod against the bottom adsorption electrode of the electrostatic chuck. This way of applying voltage not only takes time and effort, but also has many unstable factors, such as the contact angle of the metal conductive rod and the size of the acting force, which will cause the fluctuation of the test result and affect the accuracy of the test result. UTILITY MODEL CONTENTS
[0005] The technical problem to be solved by the utility model is to provide an electrostatic chuck performance test base, solve the problem in the background art, and improve the accuracy of the test.
[0006] In order to solve the above technical problems, the technical scheme of the utility model is as follows:
[0007] An electrostatic chuck performance test base, the test base includes an insulating workbench, an insulating bottom plate is arranged below the workbench, the workbench and the bottom plate are connected through a plurality of connecting rods, a first electrode rod and a second electrode rod are arranged between the workbench and the bottom plate, a first upper electrode rod matched with the electrode hole of the electrostatic chuck is arranged at the top of the first electrode rod, a second upper electrode rod matched with the electrode hole of the electrostatic chuck is arranged at the top of the second electrode rod, the length of the first upper electrode rod is equal to the length of the second upper electrode rod, and the length of the first upper electrode rod and the second upper electrode rod is greater than the depth of the electrode hole of the electrostatic chuck to be detected.
[0008] Preferably, the bottom of the first electrode rod is provided with a first lower electrode rod, the bottom of the second electrode rod is provided with a second lower electrode rod, the first lower electrode rod is communicated with the first wire, and the second lower electrode rod is communicated with the second wire.
[0009] Preferably, the second electrode rod is slidably connected with the workbench and the bottom plate, the diameters of the second upper electrode rod and the second lower electrode rod are smaller than the diameter of the second electrode rod, the workbench is provided with an upper groove for adjusting the second upper electrode rod to move away from or close to the first upper electrode rod, the upper groove is matched with the second upper electrode rod, and the bottom plate is provided with a lower groove parallel to the upper groove, and the lower groove is matched with the second lower electrode rod.
[0010] Preferably, the diameters of the first upper electrode rod and the first lower electrode rod are smaller than the diameter of the first electrode rod.
[0011] Preferably, the number of the connecting rods is three, the two ends of the connecting rods are provided with external thread segments, and the connecting rods are threadedly connected with the workbench and the bottom plate.
[0012] Preferably, the bottom of the bottom plate is provided with at least three supporting rods, and the three supporting rods are uniformly arranged in the circumferential direction.
[0013] By adopting the above technical scheme, the following beneficial effects are achieved:
[0014] By arranging the first upper electrode rod and the second upper electrode rod, the electrode holes of the electrostatic chuck can be inserted into the first upper electrode rod and the second upper electrode rod during testing, and then the power supply device is connected for power supply, so that the testing can be performed.
[0015] By arranging the upper groove and the lower groove, the second upper electrode rod can be moved to meet the testing requirements of different electrostatic chucks. BRIEF DESCRIPTION OF DRAWINGS
[0016] Figure 1 FIG. 1 is a perspective view of a base for electrostatic chuck performance testing according to the present application;
[0017] Figure 2 FIG. 2 is a front view of the base for electrostatic chuck performance testing according to the present application. DETAILED DESCRIPTION
[0018] The specific embodiments of the present application will be further described below with reference to the accompanying drawings. It should be noted that the description of the embodiments is used to help understand the present application, but does not constitute a limitation on the present application. In addition, the technical features involved in each embodiment of the present application described below can be combined with each other as long as there is no conflict.
[0019] Reference Figure 1 、 Figure 2 A base for electrostatic chuck performance test comprises an insulating workbench 1, an insulating bottom plate 2 is arranged below the workbench 1, the bottom plate 2 is made of plastic, the workbench 1 and the bottom plate 2 are connected through a plurality of connecting rods 3, a first electrode rod 12 and a second electrode rod 8 are arranged between the workbench 1 and the bottom plate 2, a first upper electrode rod 5 is arranged at the top of the first electrode rod 12 and matches the electrode hole of the electrostatic chuck, a second upper electrode rod 6 is arranged at the top of the second electrode rod 8 and matches the electrode hole of the electrostatic chuck, the length of the first upper electrode rod 5 is equal to the length of the second upper electrode rod 6, and the length of the first upper electrode rod 5 and the second upper electrode rod 6 is greater than the depth of the electrode hole of the electrostatic chuck to be detected;
[0020] In use, the electrode hole of the electrostatic chuck to be detected is matched and installed on the first upper electrode rod 5 and the second upper electrode rod 6, because the length of the first upper electrode rod 5 and the second upper electrode rod 6 extending out of the upper surface of the workbench 1 is greater than the depth of the electrode hole of the electrostatic chuck, the electrode hole of the electrostatic chuck can be matched and connected with the first upper electrode rod 5 and the second upper electrode rod 6 under the gravity of the electrostatic chuck, and the electrostatic chuck can be tested after being powered on, and the installation and dismounting of the electrostatic chuck are simple;
[0021] A first lower electrode rod 10 is arranged at the bottom of the first electrode rod 12, a second lower electrode rod 11 is arranged at the bottom of the second electrode rod 8, the first lower electrode rod 11 is communicated with a first wire 13, the second lower electrode rod 11 is communicated with a second wire 14, and the electrostatic chuck to be tested can be tested after being powered through the first wire 13 and the second wire 14;
[0022] The second electrode rod 8 is slidingly connected with the workbench 1 and the bottom plate 2, the diameter of the second upper electrode rod 6 and the second lower electrode rod 11 is smaller than the diameter of the second electrode rod 8, so that the position of the second electrode rod 8 in the upward and downward directions is limited, the second upper electrode rod 6 can slide along the upper groove 7 to adjust the position, the upper groove 7 is arranged on the workbench 1 and is used for adjusting the second upper electrode rod 6 to move away from or close to the first upper electrode rod 5, the upper groove 7 matches the second upper electrode rod 6, a lower groove 9 parallel to the upper groove 7 is arranged on the bottom plate 2 and matches the second lower electrode rod 11, in use, the distance between the two electrode holes of the electrostatic chuck to be detected can be measured first, and then the position of the second electrode rod 8 is adjusted according to the value, so that the electrostatic chuck with different distances between the two electrode holes can be detected;
[0023] The diameter of the first upper electrode rod 5 and the first lower electrode rod 10 is smaller than the diameter of the first electrode rod 12, so that the first electrode rod 12 is clamped between the workbench 1 and the bottom plate 2, and the installation and dismounting are relatively simple;
[0024] The number of the connecting rods 3 is three, both ends of the connecting rod 3 are provided with external thread segments, the connecting rod 3 is in threaded connection with the workbench 1 and the bottom plate 2, the workbench 1 can be disc-shaped, and the center of the circumference is the center of the disc-shaped workbench 1;
[0025] The bottom of the bottom plate 2 is provided with at least three supporting rods 4, the three supporting rods 4 are arranged along the circumferential direction uniformly, and the whole structure is conveniently supported;
[0026] The first upper electrode rod 5 and the second upper electrode rod 6 are arranged, in testing, the electrode holes of the electrostatic chuck are matched and inserted into the first upper electrode rod 5 and the second upper electrode rod 6, then power supply equipment is connected in power supply, and testing can be carried out.
[0027] The upper groove 7 and the lower groove 9 are arranged, so that the second upper electrode rod 6 can be moved, and testing of two electrode holes with different distances from the electrostatic chuck is satisfied.
[0028] The embodiments of the utility model are described in detail in combination with the drawings, but the utility model is not limited to the described embodiments. For those skilled in the art, various changes, modifications, replacements and modifications can be made to these embodiments without departing from the principles and spirits of the utility model, and still fall within the protection scope of the utility model.
Claims
1. A pedestal for electrostatic chuck performance testing, characterized by, The test base comprises an insulating workbench (1), an insulating bottom plate (2) is arranged below the workbench (1), the workbench (1) and the bottom plate (2) are connected through a plurality of connecting rods (3), a first electrode rod (12) and a second electrode rod (8) are arranged between the workbench (1) and the bottom plate (2), a first upper electrode rod (5) matched with an electrode hole of an electrostatic chuck is arranged at the top of the first electrode rod (12), a second upper electrode rod (6) matched with an electrode hole of an electrostatic chuck is arranged at the top of the second electrode rod (8), the length of the first upper electrode rod (5) is equal to the length of the second upper electrode rod (6), and the length of the first upper electrode rod (5) and the second upper electrode rod (6) is greater than the depth of the electrode hole of the electrostatic chuck to be detected.
2. The pedestal for electrostatic chuck performance test according to claim 1, wherein, A first lower electrode rod (10) is arranged at the bottom of the first electrode rod (12), and a second lower electrode rod (11) is arranged at the bottom of the second electrode rod (8), the first lower electrode rod (10) is in communication with a first wire (13), and the second lower electrode rod (11) is in communication with a second wire (14).
3. The pedestal for electrostatic chuck performance testing of claim 2, wherein, The second electrode rod (8) is in sliding connection with the workbench (1) and the bottom plate (2), the diameter of the second upper electrode rod (6) and the second lower electrode rod (11) is smaller than the diameter of the second electrode rod (8), an upper groove (7) for adjusting the second upper electrode rod (6) away from or close to the first upper electrode rod (5) is arranged on the workbench (1), the upper groove (7) is matched with the second upper electrode rod (6), a lower groove (9) parallel to the upper groove (7) is arranged on the bottom plate (2), and the lower groove (9) is matched with the second lower electrode rod (11).
4. The pedestal for testing performance of an electrostatic chuck of claim 2, wherein The diameter of the first upper electrode rod (5) and the first lower electrode rod (10) is smaller than the diameter of the first electrode rod (12).
5. The pedestal for testing electrostatic chuck performance according to claim 1, wherein, The number of the connecting rods (3) is three, and external thread segments are arranged at both ends of the connecting rods (3), the connecting rods (3) are in threaded connection with the workbench (1) and the bottom plate (2).
6. The pedestal for testing electrostatic chuck performance according to claim 1, wherein At least three supporting rods (4) are arranged at the bottom of the bottom plate (2), and the three supporting rods (4) are uniformly arranged in the circumferential direction.