Adsorption device and detection system

Abstract

The utility model provides an adsorption device and a detection system, and relates to a detection technology. The adsorption device is applied to the detection system, and the detection system is used for carrying out preset detection on a to-be-detected material when the to-be-detected material executes preset movement; the adsorption device comprises a material disc and an adsorption unit; the material disc is used for placing a to-be-detected material; the adsorption unit is used for adsorbing and releasing the to-be-detected material, when the to-be-detected material is tightly adsorbed on the material disc, the detection device of the detection system detects the to-be-detected material, and when the to-be-detected material is detected, the material disc drives the to-be-detected material to execute preset movement. The accuracy of material detection can be improved.

Description

Technical Field

[0001] This application relates to detection technology, and more particularly to an adsorption device and detection system. Background Technology

[0002] Currently, in order to ensure that the quality of materials put into production or the final product meets the expected standards, defect detection is required. Specifically, defect detection is a quality control process used to identify and assess various problems in the materials being tested that do not meet specific standards or requirements.

[0003] It is understandable that when performing defect detection on the material under test, due to limitations of the testing environment or the influence of testing requirements, it is sometimes necessary to move or flip the material under test during the testing process to ensure that the detection of all surfaces and internal areas of the material under test can be achieved.

[0004] In actual testing, the movement or flipping of the material to be tested can easily cause a certain area of ​​the material to be undetected or repeatedly detected, thus affecting the accuracy of the test results. Utility Model Content

[0005] This application provides an adsorption device and a detection system to solve the problem of low accuracy in the detection of materials to be tested.

[0006] On one hand, this application provides an adsorption device for use in a detection system, wherein the detection system is used to perform preset detection on the material to be tested when the material to be tested performs a preset movement; the adsorption device includes a material tray and an adsorption unit, wherein the material tray is used to place the material to be tested;

[0007] The adsorption unit is used to adsorb and release the test material, and when the test material is tightly sucked into the material tray, the detection device of the detection system detects the test material. When the test material is being detected, the material tray drives the test material to perform a preset movement.

[0008] In one possible implementation, the adsorption unit is a vacuum adsorption unit, which uses a vacuuming operation to adsorb the material to be tested onto the material disk.

[0009] In one possible implementation, the side of the material tray that contacts the material to be tested is provided with an adsorption hole. The vacuum adsorption unit creates a negative pressure area near the adsorption hole by performing a vacuum operation, thereby causing the material tray to adsorb the material to be tested.

[0010] In one possible implementation, the side of the material tray that contacts the material to be tested is further provided with an adsorption groove, which is connected to the adsorption hole.

[0011] In one possible implementation, the adsorption tanks are provided in multiple ways.

[0012] In one possible implementation, multiple adsorption tanks are evenly distributed.

[0013] In one possible implementation, the adsorption groove is elongated.

[0014] In one possible implementation, the adsorption groove is annular in shape.

[0015] In one possible implementation, the adsorption groove is arc-shaped.

[0016] In one possible implementation, the vacuum adsorption unit includes a vacuum pump, the gas pipe of which is connected to the adsorption orifice.

[0017] In one possible implementation, the vacuum adsorption unit further includes a solenoid valve and a first controller; wherein,

[0018] The first controller is connected to the solenoid valve and the vacuum pump, and is used to transmit a start signal to the solenoid valve and the vacuum pump when the material to be tested is placed into the material tray;

[0019] The solenoid valve is normally closed and is used to switch from normally closed to normally open when the start signal is received.

[0020] The vacuum pump is used to start performing a vacuuming operation upon receiving the start signal.

[0021] In one possible implementation, the vacuum adsorption unit further includes a first sensor; the first sensor is connected to the first controller and is used to detect the pressure value on the surface of the material tray and output a pressure signal to the first controller;

[0022] The first controller is used to determine that the material to be tested is placed in the material tray when the pressure value indicated by the pressure signal is greater than a preset pressure value.

[0023] In one possible implementation, the first controller is further configured to transmit an opening adjustment command to the solenoid valve based on the pressure value indicated by the pressure signal; the opening adjustment command is configured to instruct the opening of the solenoid valve to be adjusted to a target opening corresponding to the pressure value.

[0024] In one possible implementation, the vacuum adsorption unit further includes a second sensor; the second sensor is connected to the first controller and is used to detect the pressure inside the trachea and transmit a pressure signal to the first controller;

[0025] When the pressure indicated by the pressure signal is greater than the preset pressure, the first controller determines that the material tray is gripping the material to be tested.

[0026] In one possible implementation, a three-way adapter is provided between the air tube and the adsorption hole, and the air tube and the adsorption hole are connected through the three-way adapter; the second sensor is connected to the three-way adapter to realize communication with the air tube and the adsorption hole.

[0027] Secondly, this application provides a detection system for performing preset detection on a material to be tested, wherein the material to be tested performs a preset movement when being tested; the detection system includes an adsorption device as described in any of the first aspects, and further includes a motion driving device;

[0028] When the adsorption device adheres to the material to be tested, the motion driving device drives the material to be tested to perform the preset motion.

[0029] In one possible implementation, the preset motion includes at least two of the following: horizontal motion, vertical motion, and rotational motion.

[0030] In one possible implementation, the motion drive device includes an execution unit, which includes a first sub-execution unit, a second sub-execution unit, and a third sub-execution unit;

[0031] The first sub-execution unit is used to drive the material to be tested to perform a rotational motion; the second sub-execution unit is used to drive the first sub-execution unit to perform a horizontal motion; and the third sub-execution unit is used to drive the second sub-execution unit to perform a vertical motion.

[0032] In one possible implementation, the first sub-execution unit is detachably connected to the material tray, and when the first sub-execution unit is connected to the material tray, the relative position between the first sub-execution unit and the material tray remains unchanged.

[0033] In one possible implementation, the motion drive device further includes a second controller; the second controller interacts with the first controller of the adsorption device;

[0034] When the first controller determines that the material tray has gripped the material to be tested, it sends a detection request to the second controller.

[0035] When the second controller receives the detection request, it sends a control command to the execution unit, causing the execution unit to drive the material to be tested to perform a preset movement.

[0036] In one possible implementation, the adsorption device has at least one adsorption unit; when the adsorption unit is a vacuum adsorption unit, the gas pipe of the vacuum pump of at least one vacuum adsorption unit is connected to the adsorption hole.

[0037] This application provides an adsorption device and a detection system. The adsorption device is used in the detection system to perform preset detection on the material to be tested. During the detection process, the material to be tested must perform a preset movement. Before testing the material to be tested, the adsorption device of this application firmly adheres the material to the material tray, and only then does the detection device of the detection system begin to detect the material. During the detection process, the material tray drives the material to be tested to perform a preset movement. Because the adsorption device has already firmly adhered the material to the material tray, the material tray and the material to be tested are less likely to experience relative displacement during the preset movement, and the material to be tested is less likely to fall off. This helps to ensure both the accuracy and safety of the detection. Attached Figure Description

[0038] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application.

[0039] Figure 1 This is a schematic diagram illustrating an application scenario of an adsorption device provided in an embodiment of this application;

[0040] Figure 2 This is a schematic diagram of the structure of an adsorption device provided in an embodiment of this application;

[0041] Figure 3 This is a schematic diagram of the structure of a material tray provided in an embodiment of this application;

[0042] Figure 4 This is a schematic diagram of the structure of a vacuum adsorption unit provided in an embodiment of this application;

[0043] Figure 5 A structural block diagram of a detection system provided in an embodiment of this application;

[0044] Figure 6 A schematic diagram of a detection system provided in an embodiment of this application;

[0045] Figure 7A A structural example of a detection system provided in this application embodiment. Figure 1 ;

[0046] Figure 7B A structural example of a detection system provided in this application embodiment. Figure 2 ;

[0047] Figure 8 A structural example of a detection system provided in this application embodiment. Figure 3 ;

[0048] Figure 9A A structural example of a detection system provided in this application embodiment. Figure 4 ;

[0049] Figure 9B A structural example of a detection system provided in this application embodiment. Figure 5 .

[0050] Explanation of reference numerals in the attached figures:

[0051] 1. Adsorption unit; 11. Vacuum pump; 12. Gas pipe; 13. Solenoid valve; 14. First controller; 15. First sensor; 16. Second sensor; 17. T-connector; 18. Gas pipe adapter;

[0052] 2. Material tray; 21. Adsorption hole; 22. Adsorption tank; 23. Mounting hole;

[0053] 3. The material to be tested;

[0054] 4. First sub-execution unit;

[0055] 5. Second sub-execution unit; 51. X-axis motion platform; 52. Y-axis motion platform;

[0056] 6. Third sub-execution unit; 61. Mounting plate; 62. Lifting mechanism.

[0057] The accompanying drawings illustrate specific embodiments of this application, which will be described in more detail below. These drawings and descriptions are not intended to limit the scope of the concept in any way, but rather to illustrate the concept of this application to those skilled in the art through reference to particular embodiments. Detailed Implementation

[0058] Exemplary embodiments will now be described in detail, examples of which are illustrated in the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numerals in different drawings denote the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with this application. Rather, they are merely examples of apparatuses consistent with some aspects of this application as detailed in the appended claims.

[0059] In modern industrial production, defect detection is necessary to ensure that the quality of materials input into production or finished products meets expected standards. Specifically, defect detection is a quality control process used to identify and assess various problems in the materials being tested that do not conform to specific standards or requirements.

[0060] For example, a crystal ingot is a block of crystalline material with a specific geometric shape, such as a cylinder, prepared from raw materials through a certain crystal growth process. The crystal ingot is then processed into silicon wafers, such as slicing, which are the basic materials for manufacturing integrated circuits (chips), discrete semiconductor devices, etc. Controlling crystal defects is difficult; defects such as cracks, voids, and dislocations can affect performance and yield. Therefore, surface defect detection is necessary after the crystal ingot is produced. The device used for surface defect detection is particularly important in the crystal ingot process, directly affecting the accuracy and efficiency of the detection. Similarly, for other materials to be tested, the device for defect detection is also crucial.

[0061] Currently, a known technology discloses a defect detection device for large-kilogram sapphire ingots, comprising a tray base plate, a tray panel, a deep groove ball bearing, an inner pressure ring, an inner washer, an outer washer, an outer pressure ring, a tabletop pad, a rotating support frame, and a large-kilogram sapphire ingot. The rotating support frame includes an upper support device, a lower support device, and a rotating device. The upper and lower support devices are connected via the rotating device. The upper support device includes an outer pressure ring and an outer washer, and the lower support device includes an inner pressure ring and an inner washer. The rotating device is a deep groove ball bearing, and the outer and inner pressure rings are connected to the outer and inner rings of the deep groove ball bearing, respectively, via the outer and inner washers. The tray panel is mounted on the upper support device, and the lower support device is supported on the tray base plate. The outer pressure ring is connected to the tray panel via hexagonal socket head cap screws, and the inner pressure ring is connected to the tray base plate via hexagonal socket head cap screws.

[0062] Understandably, in practical applications, when performing defect detection on the material under test, the material may need to be moved or flipped during the testing process due to limitations of the testing environment or testing requirements, in order to ensure that the detection of all surfaces and internal areas of the material under test can be achieved.

[0063] When using detection devices provided in known technologies, the material to be tested is placed on top of the tray panel. Movement or flipping of the material can easily lead to certain areas of the material being missed or repeatedly detected, thus affecting the accuracy of the test results. Furthermore, because the material is placed directly on the tray panel, there is a risk that it may fall off the panel during movement or flipping, which compromises safety during the testing process.

[0064] Therefore, this application provides an adsorption device and a detection system to solve the above-mentioned problems. The detection system of this application is used to perform preset detection on the material to be tested, and the material to be tested performs a preset movement when being tested. The adsorption device of this application only performs detection on the material to be tested when it firmly adheres the material to be tested to the material tray.

[0065] This application enables the detection device in the detection system to maintain a relatively fixed position between the material to be tested and the material tray during the testing process. This reduces the likelihood of a certain area of ​​the material being missed or repeatedly detected, thus ensuring the accuracy of the test results. Simultaneously, it reduces the likelihood of the material falling off the material tray, thereby enhancing the safety of the testing process.

[0066] It is understood that the adsorption device of this application can be applied to any detection scenario that requires the material to be tested to perform a preset movement. For example, it can be applied to the defect detection scenario of crystal ingots. Figure 1 This is a schematic diagram illustrating an application scenario of an adsorption device provided in an embodiment of this application, such as... Figure 1 As shown, the adsorption device includes an adsorption unit 1 and a material tray 2. When performing defect detection on a crystal ingot, the crystal ingot is placed on the material tray 2. The adsorption device firmly adheres the crystal ingot to the material tray 2, allowing the detection device of the detection system to detect the crystal ingot. During the detection process, the material tray 2 drives the crystal ingot to perform a preset motion.

[0067] It is understood that the adsorption device can be part of the detection system or set up independently. This embodiment does not limit this, as long as the adsorption device can interact with the detection device. In the above scenario, specifically, a motion driving device (not shown in the figure) can drive the material tray 2 to perform a preset movement, causing the material tray 2 to drive the crystal ingot placed on it to perform a preset movement. It is understood that the motion driving device and the material tray 2 are relatively fixed.

[0068] In the above-mentioned testing scenario, this application enables the material tray 2 and the crystal ingot to maintain a relatively stable positional relationship during the crystal ingot testing process. On the one hand, it avoids repeated testing or missed testing of a certain area on the crystal ingot due to relative displacement between the material tray 2 and the crystal ingot. On the other hand, it effectively prevents the crystal ingot from falling off the material tray 2. Thus, it is beneficial to ensure the accuracy of the test results and the safety of the testing process.

[0069] The following detailed description of some embodiments of this application is provided in conjunction with the accompanying drawings. Where the embodiments do not conflict, the following embodiments and features thereof can be combined with each other.

[0070] This application provides an embodiment of an adsorption device. It should be noted that the adsorption device of this embodiment is applied to a detection system. The detection system is used to perform preset detection on the test material 3, and the test material 3 performs preset movement when being detected. It is understood that the preset detection can be defect detection, or any other detection that requires the test material 3 to perform preset movement during the detection process; this application does not limit this.

[0071] Based on this, Figure 2 This is a schematic diagram of the structure of an adsorption device provided in an embodiment of this application, as shown below. Figure 2 As shown, in this embodiment, the adsorption device includes a material tray 2 and an adsorption unit 1. The material tray 2 is used to place the material to be tested 3, and the adsorption unit 1 is used to adsorb and release the material to be tested 3. When the material to be tested 3 is tightly adsorbed onto the material tray 2, the detection device of the detection system detects the material to be tested 3.

[0072] In this embodiment, when the material to be tested 3 is being tested, the material disk 2 drives the material to be tested 3 to perform a preset movement. Specifically, the side of the material disk 2 that contacts the material to be tested 3 is adapted to fit the material to be tested 3. If the material to be tested 3 is spherical, the side of the material disk 2 that contacts the material to be tested 3 is an arc shape adapted to the material to be tested 3. If the material to be tested 3 is a polyhedron, the side of the material disk 2 that contacts the material to be tested 3 is a plane.

[0073] In this embodiment, the adsorption unit 1 is specifically a vacuum adsorption unit 1. The vacuum adsorption unit 1 uses a vacuuming operation to allow the material tray 2 to adsorb the material to be tested 3. Correspondingly, the side of the material tray that contacts the material to be tested 3 is provided with an adsorption hole 21. The vacuum adsorption unit 1 uses a vacuuming operation to create a negative pressure area within the adsorption hole 21, thereby allowing the material tray 2 to adsorb the material to be tested 3.

[0074] It is understood that the vacuum adsorption unit 1 can be located below, to the side, or above the material tray 2. This embodiment does not limit this, as long as a negative pressure area can be formed between the material to be tested 3 and the material tray 2 through the adsorption hole 21. Similarly, the end of the adsorption hole 21 away from the material to be tested 3 can be located on any surface of the material tray 2 other than the surface in contact with the material to be tested 3, such as the side of the material tray 2. In this case, the vacuum adsorption unit 1 can be located on the same side of the material tray 2 to save the length of the air tube 12.

[0075] It is understood that the vacuum adsorption unit 1 can be fixed to the material tray 2 and follow the material tray 2 to perform a preset movement, or it can be not fixed to the material tray 2, as long as the connection between the vacuum adsorption unit 1 and the material tray 2 is stable. This embodiment does not limit this.

[0076] With the above settings, when it is necessary to fix the test material 3 on the material tray 2, the vacuum adsorption unit 1 can suction the test material 3 onto the material tray 2 by vacuuming, which can effectively avoid the damage caused by directly clamping the test material 3, thereby ensuring the integrity of the test material 3 during the detection process.

[0077] In practical applications, for the magnetic test material 3, the adsorption unit 1 can also be an electromagnetic adsorption unit 1. Specifically, the electromagnetic adsorption unit 1 is installed below the material tray 2. When the electromagnetic adsorption unit 1 is energized, the generated magnetic field will penetrate upward through the material tray 2, thereby generating an adsorption force on the magnetic test material 3 on the material tray 2, making the test material 3 adhere tightly to the material tray 2.

[0078] In practical applications, for thin and easily deformable test materials 3, such as electronic chips and thin films, the adsorption unit 1 can also be an electrostatic adsorption unit 1. Specifically, electrodes are placed on the side of the material tray 2 that contacts the test material 3. A high-voltage power supply generates an electrostatic field on the electrodes. When the test material 3 is placed in the material tray 2, as the test material 3 approaches, its surface will induce charges of opposite polarity, thereby adsorbing the test material 3 onto the material tray 2. It is understood that in order to ensure the adsorption effect, it is necessary to precisely control the electrode layout, the parameters of the high-voltage power supply, etc., which are known technologies and will not be described in detail in this embodiment.

[0079] In practical applications, adsorption unit 1 can also be an adsorption unit 1 based on other principles, as long as the material tray 2 is adapted and improved. This embodiment does not limit this.

[0080] In this embodiment, when the detection device of the detection system detects the material 3 to be tested, the detection system causes the material tray 2 to perform a preset movement, thereby causing the material tray 2 to drive the material 3 to be tested to perform the preset movement. Specifically, the preset movement is determined according to the detection requirements, and the detection system causes the material tray 2 to perform the preset movement corresponding to the detection requirements. The preset movement can be at least one of horizontal movement, vertical movement, and rotational movement, which can be executed by the corresponding execution unit.

[0081] The adsorption device provided in this embodiment can enable the detection device of the detection system to detect the material to be tested 3 when the material to be tested 3 is tightly adsorbed onto the material disk 2. As a result, when the material disk 2 drives the material to be tested 3 to perform a preset movement, the material disk 2 and the material to be tested 3 are less likely to have relative displacement. This effectively reduces the repeated detection or missed detection of a certain area of ​​the material to be tested 3 caused by the relative displacement between the material disk 2 and the material to be tested 3, thereby improving the detection accuracy.

[0082] In addition, the adsorption unit 1 firmly adheres the test material 3 to the material tray 2, which can effectively prevent the test material 3 from falling off the material tray 2, thereby effectively improving the safety of the test material 3 during the detection process.

[0083] When adsorption unit 1 is a vacuum adsorption unit 1, as a design, Figure 3 This is a schematic diagram of a material tray provided in an embodiment of this application. Figure 3As shown, in this embodiment, the side of the material tray that contacts the material to be tested 3 is still provided with an adsorption groove 22, and the adsorption groove 22 is connected to the adsorption hole 21.

[0084] Specifically, such as Figure 3 As shown, in this embodiment, multiple adsorption tanks 22 are provided, and the multiple adsorption tanks 22 are evenly distributed. More specifically, the multiple adsorption tanks 22 are all connected to the side wall of the adsorption hole 21 near the end of the material to be tested 3.

[0085] It is understood that the adsorption tank is elongated, and / or the adsorption tank 22 is annular, and / or the adsorption tank 22 is arc-shaped.

[0086] like Figure 3 As shown, in this embodiment, the multiple adsorption tanks 22 include elongated adsorption tanks 22, annular adsorption tanks 22, and arc-shaped adsorption tanks 22. Specifically, six elongated adsorption tanks 22 are provided and evenly distributed. Three annular adsorption tanks 22 are provided, with the center of the adsorption hole 21 at the end closest to the material to be tested 3 as the center. It can be understood that the radius of the annular adsorption tank 22 closer to the adsorption hole 21 is smaller, and the radius of the annular adsorption tank 22 further away from the adsorption hole 21 is larger. Multiple arc-shaped adsorption tanks 22 are provided, all located on the side of the largest-radius annular adsorption tank 22 away from the adsorption hole 21, and the centers of the multiple arc-shaped adsorption tanks 22 are also the centers of the adsorption hole 21 at the end closest to the material to be tested 3.

[0087] Preferably, in this embodiment, the radius difference between adjacent annular adsorption grooves 22, the radius difference between adjacent annular adsorption grooves 22 and arc-shaped adsorption grooves 22 are consistent, and the spacing between adjacent elongated adsorption grooves 22 is consistent, so as to achieve a uniform distribution of adsorption grooves 22.

[0088] In this embodiment, the elongated adsorption groove 22 is connected to each of the annular adsorption grooves 22 and to the corresponding portion of the arc-shaped adsorption groove 22. In this embodiment, the material tray 2 is uniformly provided with multiple mounting holes 23 for fixing the material tray 2 to the motion drive device of the detection system. The multiple arc-shaped adsorption grooves 22 are located between each pair of adjacent mounting holes 23 and are evenly distributed. Furthermore, the elongated adsorption grooves 22 are also located between each pair of adjacent mounting holes 23. Specifically, the corresponding portion of the arc-shaped adsorption groove 22 refers to the elongated adsorption groove 22 located between two adjacent mounting holes 23.

[0089] In practical applications, the multiple adsorption tanks 22 can all be elongated or annular, etc., and this embodiment does not limit them. Similarly, the specific location and distribution of the multiple adsorption tanks 22 are not limited. It is understood that in practical applications, the adsorption tanks 22 can also be other shapes, such as squares, triangles, etc., and this embodiment does not limit them.

[0090] In this embodiment, by further creating an adsorption groove 22 on the surface of the material tray 2, the suction force of the vacuum adsorption unit 1 can be effectively buffered, thereby reducing the risk of damage to the test material 3 caused by excessive suction force. On the other hand, the adsorption groove 22 increases the negative pressure area after the vacuuming operation, which helps to more effectively adhere the test material 3 to the material tray 2.

[0091] It is understandable that by setting multiple adsorption tanks 22 and distributing them evenly, the suction force of the vacuum adsorption unit 1 can be further buffered, thereby further reducing the risk of damage to the test material 3 caused by excessive suction force.

[0092] When the adsorption unit 1 is a vacuum adsorption unit 1, as another design, the adsorption holes 21 on the side of the material tray 2 that contacts the material to be tested 3 can be provided with multiple holes. This increases the area of ​​the negative pressure region formed after the vacuuming operation, thereby enhancing the stability of the material tray 2 and the material to be tested 3 after they are tightly adsorbed. Understandably, in this case, one or more vacuum adsorption units 1 are needed to simultaneously perform vacuuming operations on multiple adsorption holes 21.

[0093] This application provides a vacuum adsorption unit 1, Figure 4 This is a schematic diagram of the structure of a vacuum adsorption unit provided in an embodiment of this application. Figure 4 As shown, the vacuum adsorption unit 1 includes a vacuum pump 11, and the gas pipe 12 of the vacuum pump 11 is connected to the end of the adsorption hole 21 away from the material to be tested 3.

[0094] Specifically, when there is only one adsorption hole 21, the gas pipe 12 of the vacuum pump 11 is directly connected to the adsorption hole 21. When there are two or more adsorption holes 21, a corresponding number of vacuum pumps 11 can be set, so that the gas pipe 12 of the corresponding vacuum pump 11 is connected to the corresponding adsorption hole 21 respectively. Alternatively, one vacuum pump 11 and a multi-hole adapter can be set, and the gas pipe 12 of the vacuum pump 11 can be connected to each adsorption hole 21 respectively through the multi-hole adapter.

[0095] In this embodiment, the vacuum pump 11 is connected to the adsorption hole 21 through the air pipe 12, which can effectively extract air from the space around the adsorption hole 21, thereby forming a negative pressure in the adsorption hole 21 and the adsorption tank 22, so that the material to be tested 3 can be tightly adsorbed on the adsorption plate.

[0096] like Figure 4 As shown, in this embodiment, the vacuum adsorption unit 1 further includes a solenoid valve 13 and a first controller 14. Specifically, the solenoid valve 13 is disposed on the gas pipe 12 of the vacuum pump 11, and the solenoid valve 13 is normally closed. The first controller 14 is connected to the solenoid valve 13 and the vacuum pump 11, and is used to transmit a start signal to the solenoid valve 13 and the vacuum pump 11 when the material to be tested 3 is placed into the material tray 2. The solenoid valve 13 is used to switch from a normally closed state to a normally open state when it receives the start signal. The vacuum pump 11 is used to start performing a vacuuming operation when it receives the start signal.

[0097] In this embodiment, the vacuum adsorption unit 1 further includes a first sensor 15 connected to a first controller 14. The first sensor 15 is disposed on the side of the material tray 2 that contacts the material to be tested 3, and is used to detect the pressure value on the surface of the material tray 2 and transmit a pressure signal to the first controller 14. The first controller 14 determines that the material to be tested 3 is placed in the material tray 2 when the pressure value indicated by the pressure signal is greater than a preset pressure value. It is understood that the preset pressure value can be zero. In this embodiment, the preset pressure value can be a number greater than zero to avoid misjudgment.

[0098] Specifically, the first sensor 15 is a pressure sensor. It is understood that in practical applications, the first sensor 15 can also be a weight sensor. In this case, the first sensor 15 transmits a weight signal to the first controller 14. When the weight indicated by the weight signal is greater than zero, the first controller 14 determines that the material to be measured 3 is placed in the material tray 2. The first sensor 15 can also be a proximity switch; this embodiment does not limit its application to this.

[0099] In the above process, the state of the solenoid valve 13 and the vacuum pump 11 are controlled by the first controller 14 to execute or stop the vacuuming operation. By introducing the solenoid valve 13, the gas flow rate can be precisely controlled. On the other hand, gas backflow can be prevented, thereby effectively protecting the vacuum pump 11 from damage. In addition, the first controller confirms whether the material to be tested 3 has been placed in the material tray 2 by comparing the pressure value indicated by the pressure signal of the first sensor 15 with the preset pressure value. The judgment logic is simple and can detect whether the material to be tested 3 has been placed in the material tray 2 in a timely manner, which helps to ensure the efficiency of the entire detection process.

[0100] Based on this, in this embodiment, the first controller is further configured to transmit an opening adjustment command to the solenoid valve 13 according to the pressure value indicated by the pressure signal. The opening adjustment command is used to instruct the opening of the solenoid valve 13 to be adjusted to the target opening corresponding to the pressure value.

[0101] Specifically, in this embodiment, the first controller 14 stores the opening degree of the solenoid valve 13 corresponding to each pressure value. When the first controller 14 receives the pressure signal transmitted by the first sensor 15, it determines the target opening degree corresponding to the pressure value indicated by the pressure signal by comparing the pressure value indicated by the pressure signal with the stored pressure value.

[0102] Understandably, the opening degree of the solenoid valve 13 can adjust the suction force of the vacuum adsorption unit 1. In the above process, the first controller 14 stores the opening degree of the solenoid valve 13 corresponding to each pressure value; specifically, a smaller pressure value corresponds to a smaller opening degree of the solenoid valve 13. With this setting, the first controller 14 can, when detecting a lighter test material 3, cause the vacuum adsorption unit 1 to adsorb the test material 3 with a smaller suction force, thereby avoiding damage to the test material 3 and preventing resource waste.

[0103] like Figure 4 As shown, in this embodiment, the vacuum adsorption unit 1 further includes a second sensor 16 connected to the first controller 14. The second sensor 16 is disposed on the air tube 12 and located between the solenoid valve 13 and the end of the air tube 12 connected to the adsorption hole 21. The second sensor 16 is used to detect the pressure inside the air tube 12 and transmit the pressure signal to the first controller 14.

[0104] Accordingly, when the pressure indicated by the pressure signal is greater than the preset pressure, the first controller 14 determines that the material tray 2 has gripped the material to be tested 3. The material to be tested 3 that exerts different pressure values ​​on the material tray 2 corresponds to different preset pressures, and the different pressure values ​​of the material to be tested 3 and their corresponding preset pressures are stored in the first controller 14. The first controller 14 determines the corresponding preset pressure based on the pressure value indicated by the first sensor 15, and determines whether the material tray 2 has gripped the material to be tested 3 by comparing the pressure indicated by the pressure signal with the preset pressure.

[0105] It should be understood that the preset pressure corresponding to the different pressure values ​​applied to the material 3 in the material pan 2 can be set by the user based on experience or calculated; this embodiment does not limit this. In practical applications, the preset pressure can also be directly input by the user into the first controller 14; this embodiment also does not limit this.

[0106] With the above settings, after the first controller starts to perform the vacuuming operation by controlling the vacuum pump 11 and the solenoid valve 13, it can determine whether the material to be tested 3 has been tightly sucked up by comparing the pressure indicated by the pressure signal transmitted by the second sensor 16 with the preset pressure, thereby reducing the risk of damage to the material to be tested 3 due to excessive suction.

[0107] Optionally, in practical applications, the second sensor 16 is initially in a stopped state. When the first controller 14 transmits a start signal to the solenoid valve 13 and the vacuum pump 11, it simultaneously transmits a start signal to the second sensor 16, causing the second sensor 16 to enter the working state, thereby achieving energy saving.

[0108] like Figure 4 As shown, the vacuum adsorption unit 1 in this embodiment also includes a three-way adapter 17, which is disposed between the air tube 12 and the adsorption hole 21. The air tube 12 and the adsorption hole 21 are connected through the three-way adapter 17, and the second sensor 16 is connected to the three-way adapter 17 to achieve communication with the air tube 12 and the adsorption hole 21.

[0109] It is understandable that when there are multiple adsorption holes 21 and one vacuum pump 11, multiple three-way adapters 17 can be provided. Correspondingly, the second sensor 16 is provided with multiple signal input terminals, which are used to detect the pressure between different adsorption holes 21 and the air tube 12. This embodiment does not limit this.

[0110] In practical applications, a multi-hole adapter can also be used to connect multiple adsorption holes 21, the second sensor 16, and the air tube 12 to realize pressure detection between multiple adsorption holes 21 and the air tube 12.

[0111] In the above process, by setting up a three-way adapter 17, it is possible to avoid damaging the air pipe 12, etc., and it has the advantage of being easy to install and maintain.

[0112] This application also provides a detection system for performing preset detection on the material to be tested 3, wherein the material to be tested 3 performs preset motion when being detected. Figure 5 A structural block diagram of a detection system provided in an embodiment of this application is shown below. Figure 5 As shown, the detection system of this application includes an adsorption device and a motion driving device. Specifically, the adsorption device is the adsorption device in any of the foregoing embodiments. When the adsorption device firmly adsorbs the test material 3, the motion driving device drives the test material 3 to perform a preset motion.

[0113] In this embodiment, the adsorption device is provided with at least one adsorption unit 1. When the adsorption unit 1 is a vacuum adsorption unit 1, the gas pipe 12 of the vacuum pump 11 of at least one vacuum adsorption unit 1 is connected to the adsorption hole 21.

[0114] In this embodiment, the preset motion includes at least two of the following: horizontal motion, vertical motion, and rotational motion. Specifically, the horizontal motion is motion along the x-axis or along the y-axis; the vertical motion is motion along the z-axis; and the rotational motion is a 360° rotation, where the rotation axis can be any one of the x-axis, y-axis, or z-axis.

[0115] As a preferred embodiment, the motion driving device includes an execution unit, which includes a first sub-execution unit 4, a second sub-execution unit 5, and a third sub-execution unit 6. The first sub-execution unit 4 drives the material to be measured 3 to perform rotational motion, the second sub-execution unit 5 drives the first sub-execution unit 4 to perform horizontal motion, and the third sub-execution unit 6 drives the second sub-execution unit 5 to perform vertical motion.

[0116] Specifically, in this embodiment, the first sub-execution unit 4 is detachably connected to the material tray 2, and when the first sub-execution unit 4 is connected to the material tray 2, the relative position of the first sub-execution unit 4 and the material tray 2 remains unchanged. It is understood that the first sub-execution unit 4 and the material tray 2 can be bolted together or connected by snap-fit, etc., and this embodiment does not limit this. As can be seen from the foregoing embodiments, the material tray 2 is provided with mounting holes 23, and the material tray 2 is specifically detachably connected to the first sub-execution unit 4 through the mounting holes 23.

[0117] It is understandable that the second sub-execution unit 5 is also detachably connected to the first sub-execution unit 4, and when the second sub-execution unit 5 and the first sub-execution unit 4 are connected, their relative positions remain unchanged. Similarly, the third sub-execution unit 6 is also detachably connected to the second sub-execution unit 5, and when the third sub-execution unit 6 and the second sub-execution unit 5 are connected, their relative positions remain unchanged. Likewise, the detachable connection can be the aforementioned bolted connection, snap-fit ​​connection, etc.

[0118] In this embodiment, three sub-execution units are responsible for movement in different directions. The first sub-execution unit 4 rotates the material under test 3, the second sub-execution unit 5 moves the first sub-execution unit 4 horizontally, and the third sub-execution unit 6 moves the second sub-execution unit 5 vertically. This design enables the material under test 3 to achieve various complex movements in three-dimensional space. This is crucial for materials under test 3 that require comprehensive inspection or processing, meeting different process requirements and operational scenarios. For example, in industrial inspection, materials can be inspected from various angles and positions, ensuring the comprehensiveness and accuracy of the inspection.

[0119] Specifically, Figure 6 A schematic diagram of a detection system provided in an embodiment of this application is shown below. Figure 6As shown, when the pressure value transmitted by the first sensor 15 is greater than the preset pressure value, it indicates that the material to be tested 3 has been placed into the material tray 2. At this time, the first controller 14 controls the vacuum pump 11 to start and controls the solenoid valve 13 to switch to the normally open state. When the pressure of the second sensor 16 is greater than the preset pressure, the second controller controls the execution unit to perform preset movements, including x-axis movement, y-axis movement, z-axis movement, and rotational movement. Conversely, the first controller 14 will not start the vacuum pump 11 or keep the solenoid valve 13 in the normally closed state. At this time, the pressure of the second sensor 16 will not be greater than the preset pressure, so the preset movements will not be performed, ensuring the safety of the material detection process.

[0120] Furthermore, on the one hand, the connections between the first sub-execution unit 4 and the material tray 2, as well as between the second sub-execution unit 5 and the first sub-execution unit 4, and between the third sub-execution unit 6 and the second sub-execution unit 5, are all detachable, such as bolted or snap-fit ​​connections. This design greatly facilitates the assembly and disassembly of the device. During the installation process, workers can quickly assemble various components according to actual needs, improving installation efficiency.

[0121] On the other hand, the first sub-execution unit 4, which is used to perform the rotational motion, is directly connected to the material tray 2, which can prevent the second sub-execution unit 5 and the third sub-execution unit 6 from following the rotational motion, thereby improving the safety of the material to be tested 3 when performing the preset motion.

[0122] It is understandable that in practical applications, the material tray 2 can also be directly connected to the second sub-execution unit 5, or directly connected to the third sub-execution unit 6. This embodiment does not limit this.

[0123] As an example, Figure 7A A structural example of a detection system provided in this application embodiment. Figure 1 , Figure 7B A structural example of a detection system provided in this application embodiment. Figure 2 .like Figure 7A and Figure 7B As shown, the material tray 2 is detachably connected to the first sub-execution unit 4 of the motion drive device. The first sub-execution unit 4 is a rotating mechanism that can rotate horizontally at a uniform speed of 360°. The rotating mechanism includes a chassis, a rotating drum, and a motor for driving the rotating drum to rotate. The rotating drum is detachably connected to the material tray 2, rotatably connected to the chassis, and the interior of the rotating drum is connected to the adsorption hole 21 of the material tray 2.

[0124] like Figure 7A and Figure 7B As shown, mounting holes 23 are also provided on the chassis for connecting with other sub-execution units.

[0125] like Figure 7A and Figure 7B As shown, the three-way adapter 17 can be connected to the adsorption hole 21 through the air pipe 12 adapter, which is located inside the rotating cylinder.

[0126] Before testing the material 3, place the material 3 on the material tray 2. The material tray 2 has mounting holes 23 and adsorption grooves 22. The adsorption grooves 22 can distribute the adsorption force evenly on the bottom surface of the material 3 and generate a large adsorption force, which can firmly hold the material 3 and ensure that the material 3 will not move during horizontal 360° rotation.

[0127] Based on this, it can be understood that when the vacuum pump 11 is started and the solenoid valve 13 is in the normally closed state, or when the solenoid valve 13 is in the normally open state and the vacuum pump 11 is not started, the vacuum pump 11 is not connected to the adsorption tank 22, and the bottom of the material to be tested 3 is connected to the atmosphere, and the reading of the second sensor 16 is 0. When the material to be tested 3 is placed into the material tray 2, the first sensor 15 transmits a pressure signal to the first controller 14, and the first controller 14 controls the solenoid valve 13 to quickly switch to the normally open state. The vacuum pump 11 is instantly connected to the bottom of the material to be tested 3, and the adsorption action of the material to be tested 3 is completed. At this time, a certain value is displayed on the second sensor 16.

[0128] When the value displayed on the second sensor 16 does not meet the preset pressure, it indicates insufficient adsorption force, and the material to be tested 3 is at risk of falling off during movement; the device will not proceed to the next step. When the value displayed on the second sensor 16 meets the preset pressure, a 360° horizontal rotation acquisition action can be performed. At this time, the first controller 14 controls the motor to drive the rotating drum to start rotating. After the surface defects of the material to be tested 3 are collected, the first controller 14 controls the solenoid valve 13 to quickly switch to the normally closed state. At this time, the bottom of the material to be tested 3 is connected to the atmosphere, releasing the material to be tested 3 so that it can be easily removed.

[0129] Figure 8 A structural example of a detection system provided in this application embodiment. Figure 3 ,like Figure 8 As shown, the material tray 2 is detachably connected to the second sub-execution unit 5. The second sub-execution unit 5 includes an x-axis motion platform 51 and a y-axis motion platform 52. The material to be tested 3 is placed on the material tray 2, which is fixed to the y-axis motion platform 52. The surface of the material tray 2 is designed with a vacuum adsorption groove 22, which can evenly distribute the adsorption force on the bottom surface of the material to be tested 3 and generate a large adsorption force, thus firmly adsorbing the material to be tested 3 and ensuring that the material to be tested 3 will not move during the movement in the x-axis and y-axis directions. The end of the adsorption hole 21 away from the material to be tested 3 is located on the side of the material tray 2. The adsorption hole 21 is connected to an air pipe 12 adapter, which is connected to a three-way adapter 17.

[0130] Understandably, when vacuum pump 11 is started and solenoid valve 13 is normally closed, or when solenoid valve 13 is normally open and vacuum pump 11 is not started, vacuum pump 11 is not connected to adsorption tank 22, the bottom of the test material 3 is connected to the atmosphere, and the value of second sensor 16 is 0. When the test material 3 is placed in, second sensor 16 transmits a pressure signal, and first controller 14 controls solenoid valve 13 to quickly switch to normally open, vacuum pump 11 is instantly connected to the bottom of test material 3, and the adsorption action of test material 3 is completed. At this time, a certain value is displayed on second sensor 16. When the value displayed on second sensor 16 does not meet the preset pressure, it indicates that the adsorption force is insufficient, and there is a risk of test material 3 falling off during movement, and the device will not perform the next action; when the value displayed on second sensor 16 meets the preset pressure, the x-axis and y-axis movement acquisition action can be performed. After the surface defects of test material 3 are collected, solenoid valve 13 quickly switches to normally closed, at which time the bottom of test material 3 is connected to the atmosphere, releasing test material 3, so that test material 3 can be easily removed.

[0131] like Figure 8 As shown, in this example, the multiple adsorption tanks 22 on the material tray 2 include only annular adsorption tanks 22 and elongated adsorption tanks 22.

[0132] Figure 9A A structural example of a detection system provided in this application embodiment. Figure 4 , Figure 9B A structural example of a detection system provided in this application embodiment. Figure 5 .like Figure 9A and Figure 9B As shown, the material tray 2 is specifically detachably connected to the third sub-execution unit 6. In this example, the multiple adsorption grooves 22 on the material tray 2 include only annular adsorption grooves 22 and elongated adsorption grooves 22. The mounting hole 23 is located between two adjacent annular adsorption grooves 22. The material tray 2 is detachably connected to the third sub-execution unit 6 through the mounting hole 23.

[0133] In this example, the end of the adsorption hole 21 away from the material to be tested 3 is located on the side of the material tray 2. The adsorption hole 21 is connected to the air tube 12 adapter, and the air tube 12 adapter is connected to the three-way adapter 17.

[0134] In this example, the third sub-execution unit 6 is specifically a lifting mechanism 62. The material tray 2 is detachably connected to the lifting mechanism 62 through the mounting hole 23. The lifting mechanism 62 is fixed on the mounting plate 61. The lifting mechanism 62 can perform uniform lifting and reciprocating motion in the z-axis direction.

[0135] Understandably, when the vacuum pump 11 is started and the solenoid valve 13 is in the normally closed state, or when the solenoid valve 13 is in the normally open state and the vacuum pump 11 is not started, the vacuum pump 11 is not connected to the adsorption tank 22, and the bottom of the material to be tested 3 is connected to the atmosphere, and the value of the second sensor 16 is 0. When the material to be tested 3 is placed into the material tray 2, the first sensor 15 transmits a pressure signal, and the first controller 14 controls the solenoid valve 13 to quickly switch to the normally open state. The vacuum pump 11 is instantly connected to the bottom of the material to be tested 3, and the adsorption action of the material to be tested 3 is completed. At this time, a certain value is displayed on the second sensor 16. When the value displayed on the second sensor 16 does not meet the preset pressure, it indicates that the adsorption force is insufficient, and the material to be tested 3 is at risk of falling off during movement, and the device will not perform the next action; when the value displayed on the second sensor 16 meets the preset pressure, the z-axis direction movement acquisition action can be performed. After the surface defects of the test material 3 are collected, the first controller 14 controls the solenoid valve 13 to quickly switch to the normally closed state. At this time, the bottom of the test material 3 is connected to the atmosphere, releasing the test material 3 so that it can be easily removed.

[0136] like Figure 6 As shown, in this embodiment, the motion driving device further includes a second controller, which interacts with the first controller 14 of the adsorption device. Based on this, when the first controller 14 determines that the material tray 2 has firmly adhered to the material to be tested 3, it sends a detection request to the second controller. Correspondingly, upon receiving the detection request, the second controller sends a control command to the execution unit, causing the execution unit to drive the material to be tested 3 to perform a preset motion.

[0137] The specific details of how the first controller 14 determines that the material tray 2 has gripped the material to be tested 3 are described in the aforementioned embodiments and will not be repeated here.

[0138] In this embodiment, the detection request is related to specific detection requirements, and correspondingly, the control command is also related to specific detection requirements, used to instruct the preset movement of the material 3 to be tested. The detection request can be input by the user or by the host computer; this embodiment does not limit this. The second controller stores control commands corresponding to different detection requests. When the second controller receives a detection request, it compares the stored control commands to find the target control command, and controls the execution unit to drive the material 3 to perform the corresponding preset movement based on the target control command.

[0139] In this embodiment, the second controller can only control the execution unit to drive the material to be tested 3 to perform the corresponding preset movement when the material tray 2 is gripping the material to be tested 3. This can effectively ensure the stability of the material to be tested 3 during the test, thereby helping to ensure the safety of the test process.

[0140] In the above embodiments, the descriptions of each embodiment have their own emphasis. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions of other embodiments. The technical features of the above embodiments can be combined arbitrarily. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as these combinations of technical features do not contradict each other, they should be considered within the scope of this specification.

[0141] Other embodiments of this application will readily occur to those skilled in the art upon consideration of the specification and practice of the solutions disclosed herein. This application is intended to cover any variations, uses, or adaptations of this application that follow the general principles of this application and include common knowledge or customary techniques in the art not disclosed herein. The specification and embodiments are to be considered exemplary only, and the true scope and spirit of this application are indicated by the following claims.

[0142] It should be understood that this application is not limited to the precise structure described above and shown in the accompanying drawings, and various modifications and changes can be made without departing from its scope. The scope of this application is limited only by the appended claims.

Claims

1. An adsorption device, characterized by, The application is applied to a detection system for detecting a material (3) when the material (3) performs a preset motion; the detection system comprises a material tray (2) and an adsorption unit (1), and the material tray (2) is used for placing the material (3); The adsorption unit (1) is used for adsorbing and releasing the material (3), and when the material (3) is adsorbed on the material tray (2), the detection device of the detection system detects the material (3); when the material (3) is detected, the material tray (2) drives the material (3) to perform a preset motion.

2. The apparatus of claim 1, wherein, The adsorption unit (1) is a vacuum adsorption unit (1), which adsorbs the material (3) on the material tray (2) through a vacuum operation.

3. The apparatus of claim 2, wherein, One side of the material tray (2) in contact with the material (3) is provided with an adsorption hole (21), and the vacuum adsorption unit (1) forms a negative pressure area near the adsorption hole (21) through a vacuum operation on the adsorption hole (21), so that the material tray (2) adsorbs the material (3).

4. The apparatus of claim 3, wherein, One side of the material tray (2) in contact with the material (3) is also provided with an adsorption groove (22), and the adsorption groove (22) is communicated with the adsorption hole (21).

5. The apparatus of claim 4, wherein, The adsorption groove (22) is provided with a plurality of adsorption grooves (22).

6. The apparatus of claim 5, wherein, The plurality of adsorption grooves (22) are uniformly distributed.

7. The device of any one of claims 4-6, wherein, The shape of the adsorption groove (22) is a long strip shape.

8. The device of any one of claims 4-6, wherein, The shape of the adsorption groove (22) is a ring shape.

9. The device of any one of claims 4-6, wherein, The shape of the adsorption groove (22) is an arc shape.

10. The device of any one of claims 3-6, wherein, The vacuum adsorption unit (1) comprises a vacuum pump (11), and a gas pipe (12) of the vacuum pump (11) is communicated with the adsorption hole (21).

11. The apparatus of claim 10, wherein, The vacuum adsorption unit (1) further comprises an electromagnetic valve (13) and a first controller (14); wherein, The first controller (14) is connected to the electromagnetic valve (13) and the vacuum pump (11), and is used for transmitting a start signal to the electromagnetic valve (13) and the vacuum pump (11) when the material (3) is placed in the material tray (2); The electromagnetic valve (13) is in a normally closed state, and is used for being switched from the normally closed state to a normally open state when the start signal is received; The vacuum pump (11) is used for starting a vacuum operation when the start signal is received.

12. The apparatus of claim 11, wherein, The vacuum adsorption unit (1) further comprises a first sensor (15); the first sensor (15) is connected to the first controller (14) and is used for detecting a pressure value of a surface of the material tray (2) and outputting a pressure signal to the first controller (14); The first controller (14) is used for determining that the material (3) is placed in the material tray (2) when the pressure value indicated by the pressure signal is greater than a preset pressure value.

13. The apparatus of claim 12, wherein, The first controller (14) is further used for transmitting an opening degree adjusting instruction to the electromagnetic valve (13) according to the pressure value indicated by the pressure signal; and the opening degree adjusting instruction is used for indicating that the opening degree of the electromagnetic valve (13) is adjusted to a target opening degree corresponding to the pressure value.

14. The apparatus of claim 11, wherein, The vacuum adsorption unit (1) further comprises a second sensor (16); the second sensor (16) is connected with the first controller (14) and used for detecting the pressure in the air pipe (12) and transmitting a pressure signal to the first controller (14); The first controller (14) determines that the material disc (2) adsorbs the material to be detected (3) when the pressure indicated by the pressure signal is greater than a preset pressure.

15. The apparatus of claim 14, wherein, A three-way adapter (17) is arranged between the air pipe (12) and the adsorption hole (21), and the air pipe (12) and the adsorption hole (21) are connected through the three-way adapter (17); the second sensor (16) is connected with the three-way adapter (17) to realize communication with the air pipe (12) and the adsorption hole (21).

16. A detection system characterized by, The detection system is used for preset detection of the material to be detected (3), and the material to be detected (3) performs a preset motion when being detected; the detection system comprises the adsorption device of any one of claims 1-15 and further comprises a motion driving device. When the adsorption device adsorbs the material to be detected (3), the motion driving device drives the material to be detected (3) to perform the preset motion.

17. The system of claim 16, wherein, The preset motion comprises at least two of horizontal motion, vertical motion and rotary motion.

18. The system of claim 16 or 17, wherein, The motion driving device comprises an execution unit, and the execution unit comprises a first sub-execution unit (4), a second sub-execution unit (5) and a third sub-execution unit (6); The first sub-execution unit (4) is used for driving the material to be detected (3) to perform rotary motion; the second sub-execution unit (5) is used for driving the first sub-execution unit (4) to perform horizontal motion; and the third sub-execution unit (6) is used for driving the second sub-execution unit (5) to perform vertical motion.

19. The system of claim 18, wherein, The first sub-execution unit (4) is detachably connected with the material disc (2), and the relative position between the first sub-execution unit (4) and the material disc (2) is unchanged when the first sub-execution unit (4) is connected with the material disc (2).

20. The system of claim 18, wherein, The motion driving device further comprises a second controller; the second controller interacts with the first controller (14) of the adsorption device; The first controller (14) sends a detection request to the second controller when determining that the material disc (2) adsorbs the material to be detected (3); The second controller sends a control instruction to the execution unit to drive the material to be detected (3) to perform a preset motion when receiving the detection request.

21. The system of claim 16 or 17, wherein, The adsorption unit (1) of the adsorption device is provided with at least one; when the adsorption unit (1) is a vacuum adsorption unit (1), the air pipe (12) of the vacuum pump (11) of at least one vacuum adsorption unit (1) is communicated with the adsorption hole (21).

Images