Metal film coating system for glass workpiece

Abstract

The utility model relates to the technical field of glass coating, and discloses a metal film coating system for a glass workpiece, which comprises a controller and a coating mechanism positioned in a vacuum chamber, the coating mechanism comprises a glass workpiece placing rack, an electronic gun and a crucible; a plurality of through holes are formed in the glass workpiece placing rack, and glass workpieces are correspondingly erected in the through holes respectively; the electron gun and the crucible are respectively positioned below the glass workpiece placing rack, and the crucible is filled with a plurality of metal particles; according to the metal film thickness control system, accurate control over the thickness of a metal film can be achieved by accurately controlling emission of the electron gun and energy of electron beams, a plurality of through holes are formed in the glass workpiece containing frame, and therefore the metal film thickness can be accurately controlled through the through holes, and the metal film thickness can be accurately controlled. A plurality of glass workpieces can be erected at the same time for coating, and the crucible is placed below the glass workpiece placing frame, so that the coating uniformity of the glass workpieces is ensured.

Description

Technical Field

[0001] This utility model relates to the field of glass coating technology, specifically to a metal thin film coating system for glass workpieces. Background Technology

[0002] Electron beam evaporation, as an important method in physical vapor deposition (PVD), is favored not only for its ability to efficiently convert evaporated materials into a gaseous phase and deposit them onto a substrate surface to form a thin film, but also for its ability to produce high-purity, high-adhesion, and precisely controlled thin film layers. It exhibits broad application potential in multiple fields such as optics, electronics, semiconductors, and materials science. Particularly in the preparation of high-reflectivity films, electron beam evaporation technology, by precisely controlling the temperature and evaporation rate of the evaporation source, can optimize the composition and structure of the film layer, thereby achieving high reflectivity for specific wavelengths of light.

[0003] High-reflectivity films, as a key optical component, are widely used in various optical systems, such as laser mirrors, solar collectors, and display backlights. Their performance directly affects the efficiency and performance of the entire system. For certain specific applications, such as mirrors within laser cavities, extremely high reflectivity is required to reduce energy loss, while the absorption and transmittance of the film are relatively less critical. These requirements can usually be met by depositing one or more layers of metal thin films. Metals such as silver and aluminum are preferred due to their excellent conductivity and high light reflectivity.

[0004] However, in actual coating processes, especially for glass workpieces with complex shapes or large areas, uniform coating becomes a major challenge. Uneven coating not only reduces the optical properties of the film, such as the consistency of reflectivity and transmittance, but may also cause uneven stress distribution within the film, leading to quality problems such as film cracking and peeling, seriously affecting the reliability and service life of the product.

[0005] Therefore, how to overcome these technical challenges in the electron beam evaporation process and achieve high-quality, uniform coating on glass workpieces has become a current research hotspot and difficulty. Utility Model Content

[0006] In order to overcome the defects of the prior art, the purpose of this utility model is to provide a metal thin film coating system for glass workpieces, so as to solve the technical problem of how to improve the uniformity of coating on glass workpieces.

[0007] This utility model is achieved through the following technical solution:

[0008] This invention provides a metal thin film coating system for glass workpieces, including a controller and a coating mechanism located in a vacuum chamber.

[0009] The coating mechanism includes a glass workpiece placement rack, an electron gun, and a crucible;

[0010] The glass workpiece placement rack has several through holes, each corresponding to a glass workpiece. The electron gun and crucible are located below the glass workpiece placement rack, and the crucible is filled with several metal particles. The emitting end of the electron gun is aligned with the side wall of the crucible to melt the metal particles inside the crucible.

[0011] The vacuum chamber is equipped with a vacuum device, and the control terminals of the vacuum device and the electron gun are respectively connected to a controller.

[0012] Preferably, the glass workpiece placement rack includes a glass workpiece placement platform and two sets of support columns;

[0013] Two sets of support columns are set vertically, with their ends located on both sides of the glass workpiece placement platform, and several through holes are distributed on the glass workpiece placement platform.

[0014] The electron gun and crucible are located below the glass workpiece placement rack.

[0015] Furthermore, the two sets of support pillars are of equal length.

[0016] Furthermore, the crucible is located at the bottom center of the glass workpiece placement stage.

[0017] Preferably, the crucible includes a first pot body and a second pot body;

[0018] The second pot is mounted on the first pot, and several metal particles are filled into the second pot; the emitting end of the electron gun is aligned with the side wall of the first pot.

[0019] Furthermore, the second pot body has an extension platform along its edge, and the second pot body is mounted on top of the first pot body via the extension platform.

[0020] Furthermore, the structure of the second pot is smaller than that of the first pot.

[0021] Furthermore, a gap is provided between the first pot body and the second pot body.

[0022] Preferably, the controller includes a control module, the output of which is connected to a signal output module. The signal output module is connected to the inputs of a first drive module and a second drive module. The output of the first drive module is connected to the input of a vacuum device, and the output of the second drive module is connected to the input of an electron gun.

[0023] Compared with the prior art, the present invention has the following beneficial technical effects:

[0024] This invention provides a metal thin film coating system for glass workpieces. An electron gun is directly aimed at the sidewall of the crucible, utilizing the high energy of the electron beam to rapidly melt the metal particles inside the crucible. Compared to traditional heating methods, this approach is faster and more energy-concentrated, significantly improving coating efficiency and shortening the production cycle. Coating is performed in a vacuum chamber, effectively avoiding the influence of external impurities on the coating process, thereby improving the purity and quality of the coating. Simultaneously, precise control of the electron gun's emission and the electron beam's energy allows for precise control of the metal thin film thickness, meeting diverse application requirements. The glass workpiece holder has several through holes, allowing multiple glass workpieces to be coated simultaneously. Placing the crucible below the glass workpiece holder ensures uniform coating of the glass workpieces.

[0025] Furthermore, the glass workpiece placement rack includes a glass workpiece placement stage and two sets of support columns. The two sets of support columns are vertically arranged, with their ends positioned on either side of the glass workpiece placement stage. Several through holes are distributed on the glass workpiece placement stage. The electron gun and crucible are located below the glass workpiece placement rack. The glass workpiece placement rack supports the glass workpiece placement stage through the two sets of vertically arranged support columns, providing excellent stability and ensuring that the glass workpiece is not affected by the shaking or deformation of the placement rack during the coating process.

[0026] Furthermore, the two sets of supports are of equal length, ensuring that the glass workpiece placement stage is horizontal. This facilitates a more uniform distribution of the coating material (such as metal vapor) on the glass workpiece. As the coating material evaporates from the crucible and deposits upwards onto the glass workpiece, the horizontal placement stage ensures that each workpiece receives the same amount of coating material, thereby improving coating uniformity.

[0027] Furthermore, the size of the through-hole corresponds to the size of the glass workpiece. When the through-hole size matches the glass workpiece size, it ensures that the coating material (such as metal vapor) can be uniformly covered across the entire surface of the glass workpiece. This helps reduce coating quality problems caused by uneven distribution of the coating material; the corresponding through-hole size also ensures that the coating material can be more effectively transferred to the glass workpiece, reducing material waste and loss. Simultaneously, it also helps reduce energy consumption during the coating process, thereby improving coating efficiency.

[0028] Furthermore, the crucible is located at the bottom center of the glass workpiece placement stage. This central positioning ensures that the coating material (such as metal vapor) evaporates from the crucible and diffuses evenly outwards, covering the glass workpiece placed on the stage. This arrangement helps reduce coating material waste and improves coating efficiency. Because the crucible is centrally located, the coating material is more evenly distributed on the glass workpiece, reducing coating thickness variations caused by uneven material distribution. This improves coating consistency and uniformity, thereby enhancing the overall product quality.

[0029] Furthermore, the crucible comprises a first pot and a second pot; the second pot is mounted on the first pot, and several metal particles are filled into the second pot; the electron gun's emitting end is aligned with the side wall of the first pot. The electron gun's emitting end is aligned with the side wall of the first pot, rather than directly with the metal particles. This avoids the splashing and uneven evaporation problems caused by the electron beam directly bombarding the metal particles. The first pot, acting as an indirect heating element, can more evenly absorb the energy of the electron beam and transfer it to the metal particles in the second pot, thus achieving more stable and uniform evaporation of the coating material. The second pot, mounted on the first pot, forms a relatively enclosed space, which helps reduce the loss of coating material during evaporation and improves the utilization rate of the coating material. Simultaneously, the presence of the first pot also prevents metal vapor from directly contacting the walls of the vacuum chamber to a certain extent, thereby reducing the waste of coating material.

[0030] Furthermore, the second pot has an extension platform along its edge, and it is supported on top of the first pot via this platform. This extension platform provides a stable support surface for the second pot, allowing it to be more securely mounted on top of the first pot. This structural stability helps reduce coating quality problems caused by vibration or external interference during the coating process. The extension platform not only provides support but also serves as a heat transfer medium. When the first pot is heated, heat can be transferred more evenly to the second pot via the extension platform, ensuring that the metal particles within the second pot are heated and evaporated uniformly. This optimized heat transfer helps improve the utilization rate of the coating material and the coating quality.

[0031] Furthermore, the second pot has a smaller structure than the first pot. Due to its smaller size, the metal particles inside the second pot can receive heat from the first pot more concentratedly. This helps optimize the heat distribution within the second pot, allowing the metal particles to be heated and evaporated more evenly and quickly. This improves the evaporation efficiency of the coating material and reduces the coating time.

[0032] Furthermore, a gap is provided between the first and second pots, allowing for more flexible heat transfer between them. The first pot can transfer heat to the second pot through radiation and convection, while the gap acts as a buffer and regulator for heat transfer. This design helps achieve more precise temperature control and a more uniform heat distribution, thereby optimizing the evaporation process of the coating material. During the coating process, the first pot is subjected to high-temperature radiation from the electron gun. If the first and second pots are in close contact, the second pot may be damaged due to excessive thermal stress. The gap effectively reduces the impact of thermal stress on the second pot, protecting it from high-temperature damage.

[0033] Furthermore, the control module enables centralized control of the entire coating process. The control module receives input commands or signals and transmits these signals to the first and second drive modules via the signal output module. The first drive module controls the opening and closing of the vacuum device to ensure the required vacuum environment during the coating process. The second drive module controls the emission of the electron gun, adjusting its power and emission time to precisely control the evaporation rate and deposition amount of the coating material, thus improving the quality and uniformity of the coating. Attached Figure Description

[0034] Figure 1 This is a schematic diagram of the overall structure of the metal thin film coating system in this embodiment of the present invention;

[0035] Figure 2 This is a schematic diagram of the crucible structure in an embodiment of the present invention;

[0036] Figure 3 This is a schematic diagram of the controller's principle structure in an embodiment of this utility model;

[0037] In the diagram: 1. Vacuum chamber; 2. Glass workpiece placement stage; 3. Support column; 4. Glass workpiece; 5. Vacuum device; 6. Electron gun; 7. Crucible; 8. Controller; 9. Metal particles; 71. First pot body; 72. Second pot body. Detailed Implementation

[0038] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of the present invention.

[0039] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this utility model are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the utility model described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, system, product, or device that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, products, or devices.

[0040] The purpose of this invention is to provide a metal thin film coating system for glass workpieces to solve the technical problem of how to improve the uniformity of coating on glass workpieces.

[0041] The present invention will now be described in further detail with reference to the accompanying drawings:

[0042] See Figure 1 In one embodiment of this utility model, a metal thin film coating system for glass workpieces is provided, including a controller 8 and a coating mechanism located in a vacuum chamber 1; the coating mechanism includes a glass workpiece placement rack, an electron gun 6, and a crucible 7; the glass workpiece placement rack is provided with a plurality of through holes, and glass workpieces 4 are respectively placed in the plurality of through holes; the electron gun 6 and the crucible 7 are respectively located below the glass workpiece placement rack, and the crucible 7 is filled with a plurality of metal particles 9; the emitting end of the electron gun 6 is aligned with the side wall of the crucible 7 for melting the metal particles 9 in the crucible 7; a vacuum device 5 is provided in the vacuum chamber 1, and the control ends of the vacuum device 5 and the electron gun 6 are respectively connected to the controller 8.

[0043] Specifically, the glass workpiece placement rack includes a glass workpiece placement platform 2 and two sets of support columns 3;

[0044] Two sets of support columns 3 are set vertically, with their ends set on both sides of the glass workpiece placement platform 2, and several through holes are distributed on the glass workpiece placement platform 2.

[0045] The electron gun 6 and the crucible 7 are located below the glass workpiece placement rack.

[0046] Among them, the two sets of support pillars 3 are of equal length, the size of the through hole corresponds to the size of the workpiece glass 4, and the crucible 7 is located at the bottom center of the glass workpiece placement platform 2.

[0047] In this embodiment, the glass workpiece placement rack includes a glass workpiece placement platform 2 and two sets of support columns 3. The support columns 3 are vertically arranged, and their ends are fixed to both sides of the glass workpiece placement platform 2, providing stable support for the platform. The glass workpiece placement platform 2 has several through holes, the size of which corresponds to the size of the glass workpiece 4, ensuring that the glass workpiece can be stably placed on the platform. At the same time, the through holes also facilitate the flow of heat and gas generated during the coating process.

[0048] The electron gun 6 is located below the glass workpiece holder and is used to fire an electron beam to bombard the coating material, causing it to evaporate and deposit on the glass workpiece.

[0049] The crucible 7 is located below the glass workpiece holder and at the bottom center of the glass workpiece stage 2. The crucible contains coating material, such as metal particles 9. During the coating process, the crucible is bombarded by an electron gun, causing the coating material inside to evaporate due to heat.

[0050] Specifically, according to Figure 2 As shown, the crucible 7 includes a first pot body 71 and a second pot body 72; the second pot body 72 is mounted on the first pot body 71, and a number of metal particles 9 are filled into the second pot body 72; the emitting end of the electron gun 6 is aligned with the side wall of the first pot body 71.

[0051] The second pot body 72 has an extension platform along its edge, and the second pot body 72 is mounted on top of the first pot body 71 via the extension platform.

[0052] The structure of the second pot body 72 is smaller than that of the first pot body 71; there is a gap between the first pot body 71 and the second pot body 72.

[0053] In this embodiment, the first pot body 71 is the main part of the crucible. It has a large volume and is used to accommodate and support the second pot body 72, and to serve as a medium for heat transfer.

[0054] The second pot body 72 is mounted on the first pot body 71. It is smaller in size and filled with several metal particles 9, which are the main source of the coating material. The edge of the second pot body 72 is provided with an extension platform, through which it is stably mounted on top of the first pot body 71.

[0055] A gap is provided between the first pot body 71 and the second pot body 72, which helps to optimize heat transfer and reduce thermal stress.

[0056] Specifically, according to Figure 3As shown, the controller includes a control module. The output of the control module is connected to a signal output module. The signal output module is connected to the inputs of a first drive module and a second drive module. The output of the first drive module is connected to the input of the vacuum device 5. The output of the second drive module is connected to the input of the electron gun 6.

[0057] This invention provides a metal thin film coating system for glass workpieces, and the specific process during use is as follows:

[0058] Controller 8 is activated and begins initialization checks on the entire coating system. The control module starts within the controller and prepares to receive external commands or preset programs. The control module sends commands to the first drive module via the signal output module. Upon receiving the commands, the first drive module activates the vacuum device 5 and begins the vacuuming process. The vacuum device 5 continues to operate until the vacuum level in the vacuum chamber 1 reaches the level required for coating.

[0059] The second pot 72 is filled with several metal particles 9 as the coating material. The second pot 72 is stably mounted on top of the first pot 71 via an extension platform to ensure stability during the coating process.

[0060] The control module sends commands to the second drive module via the signal output module. Upon receiving the commands, the second drive module activates the electron gun 6. The emitting end of the electron gun 6 is aimed at the side wall of the first pot 71, emitting an electron beam to bombard the first pot. Due to the gap between the first pot 71 and the second pot 72, heat can be transferred more evenly to the second pot 72. The metal particles 9 inside the second pot 72 melt under the bombardment of the electron beam, forming metal vapor.

[0061] Metal vapor diffuses upwards in a vacuum environment. The metal vapor passes through the through-hole on the glass workpiece placement stage 2, deposits on the glass workpiece 4 placed inside the through-hole, and forms a uniform metal film on the glass workpiece.

[0062] Once the coating reaches the required thickness or time, the control module sends a stop command to the second drive module via the signal output module. Upon receiving the command, the second drive module shuts down the electron gun 6.

[0063] At the same time, the control module can also send instructions to the first drive module to shut down the vacuum device 5.

[0064] After the coating is completed, the vacuum chamber 1, crucible 7 and glass workpiece rack need to be cleaned.

[0065] The cleaning process includes removing residual coating material, cleaning the vacuum chamber and the racks, etc.

[0066] After cleaning, the system can prepare for the next coating process.

[0067] In summary, this utility model provides a metal thin film coating system for glass workpieces. It utilizes an electron gun directly aimed at the sidewall of a crucible, rapidly melting metal particles within the crucible using the high energy of the electron beam. Compared to traditional heating methods, this approach is faster and more energy-concentrated, significantly improving coating efficiency and shortening the production cycle. Performing the coating operation within a vacuum chamber effectively avoids the influence of external impurities on the coating process, thereby improving the purity and quality of the coating. Furthermore, precise control of the electron gun's emission and the electron beam's energy allows for precise control of the metal thin film thickness, meeting diverse application requirements. The glass workpiece holder has several through holes, allowing multiple glass workpieces to be coated simultaneously. Placing the crucible below the glass workpiece holder ensures uniform coating of the glass workpieces.

[0068] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and not to limit it. Although the utility model has been described in detail with reference to the above embodiments, those skilled in the art should understand that modifications or equivalent substitutions can still be made to the specific implementation of this utility model. Any modifications or equivalent substitutions that do not depart from the spirit and scope of this utility model should be covered within the protection scope of the claims of this utility model.

Claims

1. A metal thin film coating system for glass workpieces, characterized by, The controller (8) and a coating mechanism in the vacuum chamber (1) are included. The coating mechanism includes a glass workpiece placing rack, an electron gun (6) and a crucible (7). The glass workpiece placing rack is provided with a plurality of through holes, and a glass workpiece (4) is placed in each through hole. The electron gun (6) and the crucible (7) are located below the glass workpiece placing rack.

2. The thin film deposition system for glass workpieces of claim 1, wherein, The crucible (7) is filled with a plurality of metal particles (9). The vacuum chamber (1) is provided with a vacuum device (5), and the control ends of the vacuum device (5) and the electron gun (6) are connected to the controller (8). The glass workpiece placing rack includes a glass workpiece placing table (2) and two groups of support columns (3).

3. The thin film deposition system for glass workpieces of claim 2, wherein, The two groups of support columns (3) are vertically arranged and arranged at the two sides of the glass workpiece placing table (2).

4. The thin film deposition system for glass workpieces of claim 2, wherein, The electron gun (6) and the crucible (7) are located below the glass workpiece placing rack.

5. The thin film metal coating system for glass workpieces of claim 2, wherein, The lengths of the two groups of support columns (3) are equal.

6. The thin film deposition system for glass workpieces of claim 1, wherein, The size of the through hole corresponds to the size of the glass workpiece (4). The crucible (7) is located at the bottom of the glass workpiece placing table (2).

7. The thin film metal coating system for glass workpieces of claim 6, wherein, The crucible (7) includes a first pot body (71) and a second pot body (72).

8. The thin film deposition system for glass workpieces of claim 6, wherein, The second pot body (72) is arranged on the first pot body (71), and the plurality of metal particles (9) are filled into the second pot body (72).

9. The thin film deposition system for glass workpieces of claim 6, wherein, The edge of the second pot body (72) is provided with an extension table, and the second pot body (72) is arranged on the top of the first pot body (71) through the extension table.

10. The thin film deposition system for glass workpieces of claim 1, wherein, The pot body structure of the second pot body (72) is smaller than that of the first pot body (71). The first pot body (71) and the second pot body (72) are provided with a gap. The controller is provided with a control module, the output end of the control module is connected to a signal output module, the input end of a first driving module and a second driving module are connected to the signal output module, the output end of the first driving module is connected to the input end of the vacuum device (5), and the output end of the second driving module is connected to the input end of the electron gun (6).

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