Evaporator

Abstract

The utility model discloses an evaporator which comprises a vacuum chamber, a main drum mechanism and an evaporation boat group, the main drum mechanism and the evaporation boat group are arranged in the vacuum chamber, a first side plate and a second side plate are respectively arranged on two sides of the evaporation boat group, and a first partition plate is arranged between two adjacent evaporation boats. Through the arrangement of the first side plate and the second side plate, materials evaporated by the evaporation boat sets are guided, the evaporated materials are prevented from being diffused to other places, and a first partition plate is arranged between the evaporation boats of every two adjacent evaporation boat sets and used for preventing the burning influence on a product needing to be coated due to mutual crossed heat radiation between every two adjacent evaporation boats.

Description

Technical Field

[0001] This utility model relates to the field of vapor deposition machines, and in particular to a vapor deposition machine. Background Technology

[0002] Vacuum evaporation coating technology, with its unique advantages, has been widely used in optical component manufacturing, electronic device packaging, decorative coating, and functional thin film preparation. However, a significant technical challenge arises in the actual operation of vacuum evaporation coating, especially when using dual or multi-evaporation boat systems. Due to the close proximity of the evaporation boats in the evaporation machine, strong cross-thermal radiation occurs between the left and right boats when they operate simultaneously. This thermal radiation causes an abnormally high temperature in the central evaporation zone, far exceeding the safe evaporation temperature of the film material, thus increasing the risk of film burns. Film burns not only lead to a decline in coating quality, such as cracks and peeling, but also severely affect the consistency and uniformity of the coating, reducing the overall performance of the product. On the other hand, while deliberately lowering the evaporation temperature to reduce the temperature in the central evaporation zone can mitigate the film burn problem to some extent, excessively low evaporation temperatures significantly affect the evaporation rate and evaporation volume. A reduced evaporation rate means a longer coating time, which not only reduces production efficiency but may also cause aging and damage to other components within the vacuum chamber due to prolonged exposure to high temperatures. Meanwhile, the reduction in evaporation directly affects the thickness and density of the coating, which in turn affects the optical, electrical, and mechanical properties of the coating, ultimately leading to a decline in product quality. Utility Model Content

[0003] In order to solve the technical problem of excessively high temperature in the middle of the evaporation area caused by mutual heat radiation between the evaporation boats in the above-mentioned prior art vapor deposition machine, which leads to burns on the product to be coated, this utility model proposes a vapor deposition machine.

[0004] The technical solution adopted in this utility model is:

[0005] This utility model proposes a vapor deposition machine, including a vacuum chamber, a main drum mechanism is provided in the vacuum chamber, and an evaporation boat group is provided below the main drum mechanism. The evaporation boat group includes multiple evaporation boats arranged side by side, and a first side plate and a second side plate are respectively provided on both sides of the evaporation boat group. A first partition is provided between two adjacent evaporation boats of the evaporation boat group.

[0006] In a further embodiment, the first side plate, the second side plate, and the first partition are provided with cooling water channels.

[0007] In a further embodiment, heat insulation plates are respectively provided on the sides of the first side plate, the second side plate and the first partition plate, and the heat insulation plates cover the cooling water passage.

[0008] In a further embodiment, the heat insulation plate is respectively provided on the opposite sides of the first side plate and the second side plate, and the heat insulation plate is respectively provided on both sides of the first partition.

[0009] In a further embodiment, the first partition is made of an insulating material.

[0010] In a further embodiment, the vapor deposition machine further includes a first anti-overflow plate and a second anti-overflow plate respectively disposed on both sides of the main drum mechanism, wherein the first anti-overflow plate is on the same side as the first side plate and the second anti-overflow plate is on the same side as the second side plate.

[0011] In a further embodiment, the vapor deposition machine further includes a first movable baffle and a second movable baffle;

[0012] One side of the first movable baffle is hinged to the side of the first anti-overflow plate near the main drum mechanism, and the other side is abutted against the outer side of the first side plate or away from the first side plate.

[0013] One side of the second movable baffle is movably connected to the side of the second anti-overflow plate near the main drum mechanism, and the other side is abutting against the outer side of the second side plate or away from the second side plate.

[0014] In a further embodiment, the vapor deposition machine further includes a third movable baffle, which is laterally movable and can be positioned between the first side plate and the second side plate.

[0015] In a further embodiment, the vapor deposition machine further includes: an installation platform, wherein the evaporation boat assembly, the first side plate, the second side plate, and the first partition are disposed on the installation platform.

[0016] In a further embodiment, the first side plate and the second side plate each include a connecting portion and a guide portion. The connecting portion is vertically disposed on the mounting platform in the shape of a plate. The guide portion is spliced ​​with the upper side of the connecting portion and is inclined upward and outward of the main drum assembly.

[0017] Compared with the prior art, this utility model proposes a vapor deposition machine, including a vacuum chamber and a main drum mechanism and an evaporation boat assembly disposed in the vacuum chamber. A first side plate and a second side plate are respectively disposed on both sides of the evaporation boat assembly, and a first partition is disposed between two adjacent evaporation boats. The first side plate and the second side plate are disposed to guide the material evaporated by the evaporation boat assembly and prevent the evaporated material from spreading to other places. The first partition is disposed between the evaporation boats of two adjacent evaporation boat assemblies to prevent cross heat radiation between adjacent evaporation boats from causing burns to the product to be coated. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a three-dimensional structural diagram of an embodiment of the present utility model;

[0020] Figure 2 This is a side view of an embodiment of the present utility model;

[0021] Figure 3 The first and second movable baffles are in the open state according to this embodiment of the utility model;

[0022] Figure 4 This is the closed state of the first and second movable baffles in this embodiment of the utility model.

[0023] 1. Main drum mechanism;

[0024] 21. First spill guard; 22. Second spill guard;

[0025] 31. First movable baffle; 32. Second movable baffle; 311. Hinge;

[0026] 4. Third movable baffle;

[0027] 51. First side panel; 52. Second side panel; 53. Cooling water passage;

[0028] 6. First partition; 71. Insulation board; 8. Installation platform;

[0029] 101. Cathode support; 102. Anode support;

[0030] 9. Evaporation boat group. Detailed Implementation

[0031] To make the technical problems, technical solutions, and beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0032] The principle and structure of this utility model will be described in detail below with reference to the accompanying drawings and embodiments.

[0033] Vacuum evaporation coating technology, with its unique advantages, has been widely used in optical component manufacturing, electronic device packaging, decorative coating, and functional thin film preparation. Due to the close proximity of the evaporation boats in the evaporation machine, strong cross-thermal radiation occurs between the left and right evaporation boats when they operate simultaneously. This thermal radiation causes an abnormally high temperature in the central part of the evaporation zone, far exceeding the safe evaporation temperature of the film material, thus increasing the risk of film burn. Film burn not only leads to a decline in coating quality, such as cracks and peeling, but also seriously affects the consistency and uniformity of the coating, reducing the overall performance of the product. On the other hand, while deliberately lowering the evaporation temperature to reduce the temperature in the central part of the evaporation zone can mitigate the film burn problem to some extent, excessively low evaporation temperatures significantly affect the evaporation rate and evaporation volume. A reduced evaporation rate means a longer coating time, which not only reduces production efficiency but may also cause aging and damage to other components in the vacuum chamber due to prolonged exposure to high temperatures. Meanwhile, the reduction in evaporation directly affects the thickness and density of the coating, which in turn affects the optical, electrical, and mechanical properties of the coating, ultimately leading to a decline in product quality.

[0034] like Figure 1-4 As shown, this utility model proposes a vapor deposition machine, including a vacuum chamber. A main drum mechanism 1 is located within the vacuum chamber. The main drum mechanism 1 uses electrostatic adsorption to ensure the product to be coated is in close contact with the main drum. The main drum mechanism 1 also has a cooling function, cooling the coated product. Below the main drum mechanism 1 is an evaporation boat group 9, which includes multiple evaporation boats. Material is placed inside each evaporation boat, and cathodes and anodes are connected to both ends of each evaporation boat. When the cathodes and anodes are energized, they heat the evaporation boats, causing the material inside to evaporate. This process coats the product to be coated on the main drum mechanism 1 above the evaporation boat group. A first side plate 51 and a second side plate 52 are respectively provided on both sides of the evaporation boat group to guide the evaporated material and prevent it from spreading to other areas. A first partition 6 is provided between the evaporation boats of adjacent evaporation boat groups 9 to prevent cross-heat radiation between adjacent evaporation boats from causing burns to the product to be coated. The main drum mechanism 1 is existing technology and is not the focus of this patent, so the main drum mechanism 1 will not be described in detail.

[0035] A cathode support 101 and an anode support 102 are also provided on the outer sides of the first and second side plates to support the cathode and anode used for heating the evaporation boat assembly.

[0036] In a further embodiment, cooling water channels 53 are respectively provided inside the first side plate 51, the second side plate 52, and the first partition plate 6 to cool the vapor deposition areas on both sides of the evaporation boat assembly and between two adjacent evaporation boats. Heat insulation plates 61 are respectively provided on the sides of the first side plate 51, the second side plate 52, and the first partition plate 6, and the heat insulation plates 61 cover the cooling water channels 53 to prevent the vapor deposition material from directly contacting the first side plate 51, the second side plate 52, and the first partition plate 6. Because the temperature of the cooling water channels 53 is low, heat insulation plates 61 are provided on the first side plate 51, the second side plate 52, and the first partition plate 6 to prevent excessive cooling of the vapor deposition material and thus ensure a good vapor deposition effect.

[0037] Specifically, the area above the evaporation boat assembly is the vapor deposition area. After the evaporation boat is heated, the material rises to the vapor deposition area due to its physical properties. The first side plate 51, the second side plate 52, and the heat insulation plate 61 are provided on the surfaces of the first side plate 51, the second side plate 52, and the heat insulation plate 61 located in the vapor deposition area. That is, heat insulation plates 61 are respectively provided on the opposite sides of the first side plate 51 and the second side plate 52. Since both sides of the first partition plate 6 are within the vapor deposition area, heat insulation plates 61 are provided on both sides of the first partition plate 6.

[0038] In a further embodiment, the first partition 6 is made of an insulating material. Since the two ends of the evaporation boat are respectively connected to a cathode and an anode, energizing the cathode and anode to heat the evaporation boat and evaporate the material inside, the first partition 6 is made of an insulating material to prevent it from becoming electrified and causing a safety hazard.

[0039] In a further embodiment, the vapor deposition machine also includes a first anti-overflow plate 21 and a second anti-overflow plate 22 respectively disposed on both sides of the main drum mechanism 1. The first anti-overflow plate 21 is on the same side as the first side plate 51, and the second anti-overflow plate 22 is on the same side as the second side plate 52. The first anti-overflow plate 21 and the second anti-overflow plate 22 are respectively disposed on both sides of the main drum mechanism 1, so that the part of the main drum mechanism 1 to be coated is located between the first anti-overflow plate 21 and the second placement plate, and faces the vapor deposition area of ​​the evaporation boat assembly, preventing the evaporated material from coating the area that does not need to be coated. The first anti-overflow plate 21 and the second anti-overflow plate 22 are photolithographic masks. The first anti-overflow plate 21 and the second anti-overflow plate 22 have the same structure, including a first anti-overflow part and a second anti-overflow part. The first anti-overflow part is horizontally disposed in a plate shape, and the second anti-overflow part is arc-shaped and close to the main drum mechanism 1, covering the part of the bottom of the main drum mechanism 1 that does not need to be coated.

[0040] In a further embodiment, the vapor deposition machine further includes a first movable baffle 31 and a second movable baffle 32. The first movable baffle 31 and the second movable baffle 32 are rectangular plates. One side of the first movable baffle 31 is movably connected to the side of the first anti-overflow plate 21 near the main drum mechanism 1, and the other side is abutted against the outer surface of the first side plate 51 or away from the first side plate 51. Specifically, the first movable baffle 31 and the first anti-overflow plate 21 are movably connected by a rotating hinge 311, enabling the opening and closing of the first movable baffle 31.

[0041] One side of the second movable baffle 32 is movably connected to the side of the second anti-overflow plate 22 near the main drum mechanism 1, and the other side is abutting against the outer side of the second side plate 52 or away from the second side plate 52. Specifically, the second movable baffle 32 and the second anti-overflow plate 22 are movably connected by a rotating hinge 311 to realize the opening and closing of the second movable baffle 32.

[0042] In a further embodiment, the vapor deposition machine further includes a third movable baffle 4, which is laterally movable and can block the vapor deposition area between the first side plate 51 and the second side plate 52, or move away from the vapor deposition area between the first side plate 51 and the second side plate 52. When the vapor deposition machine is operating, the third movable baffle 4 is away from the area between the first side plate 51 and the second side plate 52. When the vapor deposition machine does not require vapor deposition, the third movable baffle 4 blocks the vapor deposition area between the first side plate 51 and the second side plate 52.

[0043] In a further embodiment, the vapor deposition machine also includes: a mounting platform 8, on which the evaporation boat assembly, the first side plate 51, the second side plate 52 and the first partition 6 are disposed.

[0044] In a further embodiment, the first side plate 51 and the second side plate 52 have the same structure, each including a connecting part and a guiding part. The connecting part and the guiding part are rectangular plates. The connecting part is vertically mounted on the mounting platform 8, and the guiding part is spliced ​​to the upper side of the connecting part and inclined upwards and outwards towards the main drum assembly. This guides the gaseous material heated and evaporated by the evaporation boat, preventing the material from flowing to other areas where evaporation is not required.

[0045] Compared with the prior art, this utility model proposes a vapor deposition machine, including a vacuum chamber and a main drum mechanism 1 and an evaporation boat assembly disposed in the vacuum chamber. A first side plate 51 and a second side plate 52 are respectively disposed on both sides of the evaporation boat assembly, and a first partition 6 is disposed between two adjacent evaporation boats. The first side plate 51 and the second side plate 52 are disposed to guide the material evaporated by the evaporation boat assembly and prevent the evaporated material from spreading to other places. The first partition 6 is disposed between the evaporation boats of two adjacent evaporation boat assemblies to prevent cross heat radiation between two adjacent evaporation boats from causing burns to the product to be coated.

[0046] It should be noted that the terminology used above is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this utility model. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0047] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. An evaporation machine comprising a vacuum chamber, a main drum mechanism (1) is arranged in the vacuum chamber, an evaporation boat group (9) is arranged below the main drum mechanism (1), the evaporation boat group (9) comprises a plurality of evaporation boats arranged side by side, characterized in that, The evaporation boat group (9) is provided with a first side plate (51) and a second side plate (52) on both sides respectively, and a first partition plate (6) is arranged between two adjacent evaporation boats of the evaporation boat group (9).

2. The evaporation machine according to claim 1, wherein The first side plate (51), the second side plate (52) and the first partition plate are internally provided with a cooling water path (53).

3. The evaporation machine according to claim 2, wherein The first side plate (51), the second side plate (52) and the first partition plate are respectively provided with a heat insulation plate (71) on the side surface, and the heat insulation plate (71) covers the cooling water path (53).

4. The evaporation machine according to claim 3, wherein The first side plate (51) and the second side plate (52) are respectively provided with the heat insulation plate (71) on the opposite side surface, and the first partition plate is respectively provided with the heat insulation plate (71) on both side surfaces.

5. The evaporation machine according to claim 1, wherein The first partition plate (6) is made of insulating material.

6. The evaporation machine according to claim 1, wherein The evaporation machine further comprises a first anti-overflow plate (21) and a second anti-overflow plate (22) arranged on both sides of the main drum mechanism (1) respectively, the first anti-overflow plate (21) is on the same side as the first side plate (51), and the second anti-overflow plate (22) is on the same side as the second side plate (52).

7. The evaporation machine according to claim 6, characterized in that The evaporation machine further comprises a first movable baffle (31) and a second movable baffle (32). One side edge of the first movable baffle (31) is movably connected to the side edge of the first anti-overflow plate (21) close to the main drum mechanism (1) through a hinge (311), and the other side edge abuts against the outer side surface of the first side plate (51) or is away from the first side plate (51). One side edge of the second movable baffle (32) is movably connected to the side edge of the second anti-overflow plate (22) close to the main drum mechanism (1), and the other side edge abuts against the outer side surface of the second side plate (52) or is away from the second side plate (52).

8. The evaporation machine of claim 1, wherein The evaporation machine further comprises a third movable baffle (4), which is transversely movable and can be blocked between the first side plate (51) and the second side plate (52).

9. The evaporation machine of claim 1, wherein The evaporation machine further comprises a mounting platform (8), and the evaporation boat group (9), the first side plate (51), the second side plate (52) and the first partition plate (6) are arranged on the mounting platform (8).

10. The evaporation machine of claim 9, wherein The first side plate (51) and the second side plate (52) respectively comprise a connecting portion and a guiding portion, the connecting portion is vertically arranged on the mounting platform (8) in a plate shape, the guiding portion is spliced with the upper side edge of the connecting portion and is inclined to the upper side of the outer side of the main drum mechanism (1).

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