Coating machine

Abstract

The utility model discloses a coating machine, which comprises a process chamber combination, which comprises at least two process chambers which are arranged according to a coating process sequence and are respectively sealed, and each process chamber is internally provided with a conveying mechanism used for conveying a workpiece frame; the workpiece frame sent out from the outlet side of the process chamber combination is conveyed back to the inlet side of the process chamber combination through the conveying mechanism, and the conveying mechanism is provided with a jacking and rotating device used for jacking and rotating the workpiece frame; and the feeding and discharging mechanism is matched with the jacking and rotating device to disassemble and assemble the workpieces on the workpiece frame. According to the utility model, the process chambers are arranged according to the coating process sequence, the workpiece frame is circularly conveyed between the outlet side and the inlet side of the process chamber combination through the conveying mechanism, and workpieces on the workpiece frame are disassembled and assembled through the feeding and discharging mechanism, so that multi-chamber circulating coating is realized, and the coating efficiency is remarkably improved.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating equipment technology, and in particular to a coating machine for optical coating. Background Technology

[0002] In the field of vacuum coating technology, vacuum coating equipment is a key piece of equipment for achieving material surface modification or coating treatment. Its working principle mainly relies on depositing coating materials onto the substrate surface through physical or chemical methods in a high vacuum environment to enhance material properties, improve appearance, or achieve specific functions.

[0003] In vacuum coating processes, substrates need to be moved precisely and efficiently between different coating chambers and transport chambers. To ensure coating quality and prevent cross-contamination of gas components between different coating chambers, existing technologies commonly use gate valves (also known as slide gate valves) as isolation devices between chambers. Specifically, when a coating operation is required, opening the gate valve allows the substrate located in the transport chamber to be safely transported to the target coating chamber; after coating, the substrate is then transported to the next processing chamber or removed directly through the gate valve. During the coating process, closing the gate valve ensures that a relatively independent vacuum sealed space is formed within the coating chamber, allowing the substrate to be coated within this space, effectively preventing interference and contamination from external gases.

[0004] However, although existing vacuum coating equipment meets basic coating needs to a certain extent, its functions are relatively limited, often confined to performing a single coating process, making it difficult to achieve multi-process cyclic coating. This greatly restricts the application range of the equipment in complex coating applications. In addition, existing equipment is often designed to be large and comprehensive, resulting in bulky equipment that not only increases manufacturing costs but also places greater demands on the space required for use, causing numerous inconveniences for installation, commissioning, and maintenance.

[0005] Therefore, how to design a coating machine that can achieve multi-process cyclic coating is a technical problem that the industry urgently needs to solve. Utility Model Content

[0006] To address the issue of limited functionality in existing vacuum coating equipment, this invention proposes a coating machine that enables multi-chamber circulating coating, is fully functional yet compact, and effectively improves coating efficiency.

[0007] The technical solution adopted in this utility model is to design a coating machine, including:

[0008] A process chamber assembly comprising at least two process chambers arranged in sequence according to the coating process and each sealed, wherein the process chambers are provided with a conveying mechanism for transporting a workpiece rack.

[0009] The transport mechanism is used to transport the workpiece rack delivered from the outlet side of the process chamber assembly back to the inlet side of the process chamber assembly. The transport mechanism is equipped with a jacking device for lifting and rotating the workpiece rack.

[0010] The loading and unloading mechanism works in conjunction with the top rotating device to assemble and disassemble the workpieces on the workpiece rack.

[0011] Furthermore, the process chamber combination can be any one of a three-chamber combination, a four-chamber combination, or a five-chamber combination;

[0012] The three-chamber assembly consists of, in sequence, a pretreatment chamber, an AR chamber for preparing the AR film, and an AF chamber for preparing the AF film;

[0013] The four-chamber assembly consists of, in sequence, a pretreatment chamber, an AR chamber for preparing AR films, a DLC chamber for preparing DLC ​​films, and an AF chamber for preparing AF films.

[0014] The five-chamber assembly consists of, in sequence, a first preheating chamber and a second preheating chamber for preheating the workpiece, a first AR chamber and a second AR chamber for preparing the AR film, and a DLC chamber for preparing the DLC film.

[0015] Furthermore, the process chambers within the process chamber assembly are arranged in a straight line, U-shape, or L-shape.

[0016] Furthermore, the process chamber has two openings, one as an inlet and the other as an outlet, and each opening is equipped with a valve; wherein, the valve includes: a fixed frame installed at the opening, the fixed frame having a door plate for covering the opening, and the door plate being able to move back and forth in the horizontal direction to open or close the opening.

[0017] Furthermore, the door panel includes an outer layer panel and an inner layer panel, with a plurality of parallel pressing shafts hinged between the outer layer panel and the inner layer panel. The outer layer panel moves relative to the inner layer panel via the pressing shafts to press the inner layer panel against the opening for sealing.

[0018] Furthermore, the outer layer plate is driven to move by a transmission assembly, the inner layer plate is provided with a limiting block for restricting its movement position, and the pressing shaft rotates when the outer layer plate and the inner layer plate move relative to each other. When the pressing shaft rotates, it increases the distance between the inner layer plate and the outer layer plate, thereby pressing the inner layer plate.

[0019] Furthermore, the valve also includes a sealing chamber horizontally disposed on one side of the fixed frame, the sealing chamber being connected to the fixed frame, and the door panel moving back and forth between the fixed frame and the sealing chamber.

[0020] Furthermore, the valves between two adjacent process chambers share the fixed frame and the sealing chamber.

[0021] Furthermore, at least one observation window is provided on the side of the fixed frame and / or the sealed chamber that is away from it.

[0022] Furthermore, the loading and unloading mechanism is equipped with a pre-processing device and at least one workpiece buffer device, and the loading and unloading mechanism transports workpieces between the pre-processing device, the workpiece buffer device and the transport mechanism.

[0023] Furthermore, the pre-processing device includes:

[0024] Cleaning equipment used for cleaning substrates;

[0025] A patching device is used to attach a cleaned substrate onto a carrier plate to obtain a workpiece to be coated. The patching device is connected to the outlet side of the cleaning device.

[0026] In some embodiments, the transport mechanism is configured with a top-turning device, and the loading and unloading mechanism includes a loading and unloading robot, which cooperates with the top-turning device to disassemble coated workpieces on the workpiece rack and load workpieces to be coated onto the workpiece rack.

[0027] In other embodiments, the transport mechanism includes a loading section, a buffer section, and a unloading section. The loading section is connected to the inlet side of the process chamber assembly, and the unloading section is connected to the outlet side of the process chamber assembly. The loading section is equipped with a loading top-rotating device, and the unloading section is equipped with a unloading top-rotating device.

[0028] The loading and unloading mechanism includes a loading robot and a unloading robot. The unloading robot cooperates with the unloading top-turning device to disassemble the coated workpieces on the workpiece rack, and the loading robot cooperates with the loading top-turning device to load the workpieces to be coated onto the workpiece rack.

[0029] Compared with the prior art, the present invention has at least one of the following beneficial effects:

[0030] 1. The process chambers are set up according to the coating process sequence. The workpiece rack is transported in a loop between the outlet and inlet sides of the process chamber combination by a transport mechanism. The workpieces on the workpiece rack are then disassembled and assembled by the loading and unloading mechanism, so as to realize multi-chamber circulating coating and significantly improve coating efficiency.

[0031] 2. The process chambers can be combined in three, four or five chambers. When the coating machine is working, the workpieces follow the workpiece rack into each process chamber in sequence for corresponding process treatment, flexibly meeting different coating requirements.

[0032] 3. The valve is loaded from the side of the process chamber instead of being lifted and loaded as in traditional technology, which reduces the overall height of the coating machine and thus reduces the height requirements for the installation space.

[0033] 4. The door panel consists of an inner layer and an outer layer. When the door panel moves into the fixed frame and closes relative to the opening of the process chamber, the inner layer reaches the designated position first, and the outer layer can continue to move along the moving direction of the door panel. The pressing shaft rotates when the outer layer and the inner layer move relative to each other, so as to squeeze the inner layer to form a sealing structure, thereby realizing the sealing of the inner layer relative to the opening of the process chamber and improving the sealing performance of the valve. Attached Figure Description

[0034] The present invention will now be described in detail with reference to the embodiments and accompanying drawings, wherein:

[0035] Figure 1 This is a three-dimensional schematic diagram of the coating machine of this utility model with a linear layout;

[0036] Figure 2 This is a top view of the coating machine of this utility model with a linear layout;

[0037] Figure 3 This is a top view of the coating machine of this utility model with an L-shaped layout;

[0038] Figure 4 This is a top view of the coating machine of this utility model with a U-shaped layout;

[0039] Figure 5 This is a schematic diagram of the structure of the valve of this utility model;

[0040] Figure 6 This is a cross-sectional view of the door panel of this utility model;

[0041] Figure 7 This utility model Figure 6 Enlarged view of point A in the middle;

[0042] Figure 8 This is a structural schematic diagram of the door panel of this utility model;

[0043] Figure 9 This is a schematic diagram of the transmission component of this utility model; Attached image description:

[0045] 100. Process chamber assembly; 101. Pretreatment chamber; 102. AR chamber; 103. DLC chamber; 104. AF chamber; 110. Vacuum system; 200. Transport mechanism; 201. Moving trolley; 202. Working section; 300. Top-turn device; 400. Loading and unloading mechanism; 500. Cleaning equipment; 600. Patch mounting equipment; 700. Workpiece buffer equipment; 800. Workpiece rack; 900. Valve;

[0046] 10. Fixed frame; 20. Sealed chamber; 210. Sealing reinforcement rib; 30. Door panel; 301. Inner layer plate; 302. Outer layer plate; 303. Pressing shaft; 304. Limiting block; 305. Reinforcing rib; 40. Transmission assembly; 401. Rack; 402. Gear; 403. Drive device; 50. Observation window. Detailed Implementation

[0047] To make the technical problem to be solved, the technical solution, and the beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain this utility model and are not intended to limit this utility model.

[0048] like Figure 1 As shown, the coating machine proposed in this utility model includes: a process chamber assembly 100, a transport mechanism 200, and a loading / unloading mechanism 400. The process chamber assembly 100 contains at least two process chambers, which are arranged sequentially according to the coating process sequence. Each process chamber is an individually sealed vacuum chamber, and a conveying mechanism for transporting the workpiece rack 800 is provided within each process chamber. The workpiece is hung on the workpiece rack 800, and when the coating machine is working, the workpiece follows the workpiece rack 800 into each process chamber sequentially for the corresponding process treatment.

[0049] The two ends of the transport mechanism 200 are respectively connected to the outlet side and the inlet side of the process chamber assembly 100. Specifically, in some embodiments of this utility model, the transport mechanism 200 includes two mobile trolleys 201 and a working section 202. One mobile trolley 201 can move to the outlet side of the process chamber assembly 100, and the other mobile trolley 201 can move to the inlet side of the process chamber assembly 100. The working section 202 is equipped with a top rotating device 300, and the loading and unloading mechanism 400 is located near the top rotating device 300.

[0050] The workpiece rack 800 delivered from the outlet side of the process chamber assembly 100 is transferred to the working section 202 via a mobile trolley 201. The workpiece rack 800 is then transported to the top-turning device 300, which lifts and rotates the workpiece rack 800 to cooperate with the loading and unloading mechanism 400 to remove the coated workpieces from the workpiece rack 800 and load the workpieces to be coated onto the workpiece rack 800. The loaded workpiece rack 800 is then transferred to the inlet side of the process chamber assembly 100 via another mobile trolley 201 for the next round of coating.

[0051] The coating machine designed in this utility model sets up process chambers according to the coating process sequence. The workpiece rack 800 is circulated between the outlet and inlet sides of the process chamber assembly 100 by the transport mechanism 200. Then, the workpieces on the workpiece rack 800 are disassembled and assembled by the loading and unloading mechanism 400, so as to realize multi-chamber circulating coating and significantly improve coating efficiency.

[0052] It should be understood that, in order to improve the uniformity of coating, the workpiece holder 800 is cylindrical in shape, and the workpieces are arranged and loaded on the workpiece holder 800 in a circumferential manner. The process chamber is also provided with a lifting and rotating device 300 for lifting and rotating the workpiece holder 800. After the workpiece holder 800 enters each process chamber, the lifting and rotating device 300 in the process chamber lifts and rotates the workpiece holder 800.

[0053] The number and layout of the process chambers, as well as the specific processes of each chamber, can be designed according to actual needs. The following is an example of the preferred scheme. The process chamber combination 100 can be any one of a three-chamber combination, a four-chamber combination, or a five-chamber combination.

[0054] Three-chamber combination

[0055] The three chambers are arranged in sequence as follows: pretreatment chamber 101, AR chamber 102 for preparing AR film, and AF chamber 104 for preparing AF film.

[0056] The pretreatment chamber 101 includes heating, plasma cleaning, and a seed layer target. Heating, using either resistive or infrared heating, heats the substrate placed within the chamber to improve evacuation efficiency and ensure uniform substrate surface temperature. Plasma cleaning cleans the substrate surface using plasma technology, simultaneously activating it to provide better adhesion conditions for subsequent coating processes. The seed layer target, made of materials such as C, Rb, Si, or ceramics, is deposited on the substrate surface to form a seed layer. This seed layer serves as an underlayer before coating, improving coating quality and adhesion.

[0057] AR chamber 102 includes heating, sputtering targets, and ICP. Heating can be achieved using resistance or infrared heating to heat the substrate, improving pumping efficiency and ensuring temperature uniformity. The sputtering targets are planar or rotating, made of materials such as C, Rb, Si, and ceramics; metals and alloys such as Al, Cu, Au, and Ag; and oxides such as ITO and IZO. Energy is provided by a sputtering power source (including DC, intermediate frequency, and pulsed RF), causing the target material to sputter and deposit onto the substrate surface, forming a single-layer thin film. ICP (Inductively Coupled Plasma) is used to ionize reactive gases (such as O2, N2, and H2), causing these gases to react with the sputtered film, ultimately generating a compound thin film with specific properties.

[0058] The AF chamber 104 includes a heating element, a seed layer target, and an AF evaporation source. Heating can be achieved using resistance or infrared heating to heat the substrate, improving pumping efficiency and temperature uniformity. This chamber also performs post-processing of the film layer to improve its quality. Similar to the pre-processing chamber, the seed layer target is equipped with materials such as C, Rb, Si, or ceramics to improve coating quality and adhesion. The main function of the AF evaporation source is to heat the raw materials in the crucible, causing them to evaporate and deposit onto the substrate surface, thus forming a thin film with waterproof, oil-proof, and fingerprint-resistant properties.

[0059] Specifically, the AF evaporation source operates by using resistance heating or other heating methods to heat the AF material (such as fluorinated coatings, whose main component is perfluoropolyether) in the crucible to its evaporation temperature. As the temperature rises, the AF material gradually changes from a solid to a gaseous state, forming an evaporation particle stream. The evaporated particle stream diffuses in a vacuum and is directly directed onto the substrate surface. These particles deposit and condense on the substrate, gradually forming a uniform AF film. After treatment with the AF evaporation source, the substrate surface forms a film with extremely low surface tension. This film significantly improves the material's hydrophobic, oil-repellent, and anti-fouling properties, effectively preventing the residue of fingerprints and other contaminants.

[0060] Four-chamber combination

[0061] The four chambers are arranged in sequence as follows: pretreatment chamber 101, AR chamber 102 for preparing AR film, DLC chamber 103 for preparing DLC ​​film, and AF chamber 104 for preparing AF film.

[0062] The four-chamber combination adds a DLC chamber 103 to the three-chamber combination. The other pretreatment chambers 101, AR chamber 102, and AF chamber 104 are the same as the corresponding chambers in the three-chamber combination. For a description of the pretreatment chambers 101, AR chamber 102, and AF chamber 104, please refer to the above.

[0063] DLC chamber 103 includes heating, a sputtering target, and process pre-set positions. Heating can be achieved using resistance or infrared heating to heat the substrate, improving pumping efficiency and temperature uniformity. The sputtering target is a C-shaped planar or rotating target, powered by a sputtering power source (DC, IF, pulsed RF, HIPIMS, etc.). The sputtered target particles react chemically with special gases (such as nitrogen and oxygen) within the chamber, generating DLC ​​films with ultra-hard properties. These films, once deposited on the substrate surface, provide scratch and wear resistance, significantly improving the substrate's surface properties. The DLC chamber includes specially designed process pre-set positions, which can be customized and adjusted according to specific needs.

[0064] Five-chamber combination

[0065] The five-chamber assembly consists of, in sequence, a first preheating chamber and a second preheating chamber for preheating the workpiece, a first AR chamber and a second AR chamber for preparing the AR film layer, and a DLC chamber 103 for preparing the DLC film layer.

[0066] The five-chamber assembly has two preheating chambers, two AR chambers 102 and one DLC chamber 103. The preheating chambers are different from the pretreatment chambers 101 of the four-chamber or three-chamber assemblies. The AR chambers 102 and DLC chambers 103 are the same as the corresponding chambers of the four-chamber or three-chamber assemblies. For a description of the AR chambers 102 and DLC chambers 103, please refer to the above.

[0067] The preheating chamber includes heating, which can be achieved using resistance or infrared heating to heat the substrate, thereby improving the pumping efficiency and temperature uniformity.

[0068] It should be noted that the arrangement of the process chamber assembly 100 can be designed according to actual needs. At least three layout schemes are provided below to adapt to different production needs and space conditions.

[0069] See Figure 2 The linear layout is the most direct and simple, with all process chambers arranged along a straight line. Since all chambers are located on a straight line, it is easy to observe and maintain. However, as the number of process chambers increases, the transport route of the transport mechanism 200 will be correspondingly longer, resulting in a larger footprint, which may not be suitable for production environments with limited space.

[0070] See Figure 3 The L-shaped layout effectively shortens the transport route of the transport mechanism 200 by introducing a right-angle turn. This layout makes the overall structure of the coating machine more compact and reduces the floor space, making it especially suitable for space-constrained occasions.

[0071] See Figure 4 The U-shaped layout further optimizes space utilization. By forming a semi-closed loop, it further shortens the transport route of the transport mechanism 200. This layout not only improves space efficiency but may also promote the cyclicality and continuity of the process flow, thereby enhancing overall production efficiency.

[0072] For a single process chamber, the process chamber needs to maintain good sealing. The process chamber has two openings, one as the inlet and one as the outlet. Each opening is equipped with a valve 900. After the workpiece on the workpiece rack 800 is processed in one process chamber, the valve 900 between the two chambers is opened (the valve between the process chambers is always sealed relative to the atmosphere). The conveying mechanism in the chamber moves the coating drum to the next process chamber.

[0073] like Figure 5As shown, in some embodiments of this utility model, the valve 900 includes a fixed frame 10 and a door panel 30. The fixed frame 10 is installed at the opening of the process chamber, and the door panel 30 is located inside the fixed frame 10. The door panel 30 can move back and forth in the horizontal direction to open or close the opening. The valve 900 of this utility model is loaded from the side of the process chamber instead of being lifted and lowered as in conventional technology, reducing the overall height of the coating machine and thus reducing the height requirements for the installation space.

[0074] like Figure 6 , 7 As shown, to improve the sealing performance of the valve 900, a preferred embodiment is that the valve plate 30 includes an outer plate 302 and an inner plate 301. Multiple parallel clamping shafts 303 are hinged between the outer plate 302 and the inner plate 301. Here, "multiple" refers to two or more shafts. The outer plate 302 moves relative to the inner plate 301 via the clamping shafts 303 to press the inner plate 301 against the opening of the process chamber for sealing. When the valve plate 30 moves into the fixed frame 10 and closes relative to the opening of the process chamber, after the inner plate 301 reaches the designated position, the outer plate 302 can continue to move along the moving direction of the valve plate 30, thereby driving the clamping shafts 303 to rotate and compress the inner plate 301 to form a sealing structure. This achieves a sealing seal between the inner plate 301 and the opening of the process chamber, enhancing the sealing performance of the valve 900 and improving the coating quality.

[0075] like Figures 6 to 8 As shown, specifically, the outer layer plate 302 is driven to move by the transmission assembly 40, and the inner layer plate 301 is provided with a limiting block 304 to limit its movement position to ensure the positional accuracy of the inner layer plate 301. The clamping shaft 303 rotates when the outer layer plate 302 and the inner layer plate 301 move relative to each other.

[0076] When the inner layer plate 301 seals the opening, after the inner layer plate 301 moves to the designated position, the limiting block 304 will restrict the inner layer plate 301 from continuing to move, while the outer layer plate 302 can still continue to move along the closing direction, so that the distance between the inner layer plate 301 and the outer layer plate 302 gradually increases, and the outer layer plate 302 tightly squeezes the inner layer plate 301 through the pressing shaft 303.

[0077] When the inner layer plate 301 leaves the opening, the outer layer plate 302 is driven by the transmission component 40 to move first, and the distance between the inner layer plate 301 and the outer layer plate 302 gradually decreases. Then, the inner layer plate 301 moves together with the outer layer plate 302 under the drive of the clamping shaft 303 until the entire inner layer plate 301 completely leaves the opening.

[0078] It should be understood that when the inner layer plate 301 is sealed with the opening closed, the distance between the inner layer plate 301 and the outer layer plate 302 is at its maximum when the included angle θ between the clamping shaft 303 and the outer layer plate 302 is 90°, and the clamping effect of the inner layer plate 301 is the best. When the inner layer plate 301 leaves the opening, the outer layer plate 302 moves first, and then moves the inner layer plate 301 along with it. The included angle θ between the clamping shaft 303 and the outer layer plate 302 is less than 90°.

[0079] Furthermore, the inner layer plate 301 and the outer layer plate 302 are preferably square. In practical applications, a transmission assembly 40 can be provided at the top and / or bottom of the outer layer plate 302. Providing the transmission assembly 40 at both the top and bottom of the outer layer plate 302 offers the best stability and reliability. In addition, to further improve the stability of the movement of the outer layer plate 302, a guide assembly is also provided at the top and / or bottom of the outer layer plate 302. The guide assembly can be a guide rail slider assembly, with a guide rail designed on the outer layer plate 302 that can slide along the guide rail to ensure linear movement of the outer layer plate 302.

[0080] like Figure 5 As shown, in some embodiments of this utility model, in order to ensure that the vacuum state in the process chamber is maintained during the opening of the valve 900, the valve 900 further includes: a sealing chamber 20, which is horizontally disposed on one side of the fixed frame 10 and connected to the fixed frame 10. The door panel 30 moves back and forth within the fixed frame 10 and the sealing chamber 20. When the door panel 30 is completely moved into the fixed frame 10, the door panel 30 closes the opening of the process chamber; when the door panel 30 is completely moved into the sealing chamber 20, the door panel 30 opens the opening of the process chamber.

[0081] It should be noted that the sealing chamber 20 can be rectangular in shape, and its surface is provided with crisscrossing sealing reinforcing ribs 210, forming a regular square grid. These sealing reinforcing ribs 210 are evenly distributed at predetermined intervals to ensure that the sealing chamber 20 is subjected to balanced forces in all directions.

[0082] like Figure 9 As shown, in some embodiments of this utility model, the transmission assembly 40 mentioned above includes a rack 401, a gear 402, and a drive device 403, which can be a drive motor. Taking the transmission assembly 40 on the top of the outer layer plate 302 as an example, the top of the outer layer plate 302 is provided with a rack 401 arranged along its moving direction, and the drive device 403 is mounted on the fixed frame 10. The output end of the drive device 403 is connected to the gear 402, and the gear 402 meshes with the rack 401.

[0083] Thus, when the door panel 30 needs to move back and forth within the fixed frame 10 and the sealing chamber 20, the control unit of the coating machine will activate the drive device 403. The drive device 403 will drive the gear 402 to rotate in the forward or reverse direction, thereby causing the rack 401 to move horizontally relative to the gear 402. At the same time, the rack 401 will drive the outer plate 302 connected to it to move.

[0084] When the drive unit 403 drives the gear 402 to rotate in the reverse direction, the rack 401 will drive the door plate 30 to move into the sealing chamber 20, and open the inner layer plate 301 relative to the opening of the process chamber, so as to allow the workpiece holder 800 to enter the current process chamber, or allow the workpiece holder 800 to move from the current process chamber to the next process chamber; when the drive unit 403 drives the gear 402 to rotate in the forward direction, the rack 401 will drive the outer layer plate 302 and the inner layer plate 301 to move into the fixed frame 10, and close the inner layer plate 301 relative to the opening of the process chamber to seal, so as to form a closed space in the process chamber, and perform coating treatment on the workpiece in the closed space.

[0085] It should be understood that, in order to simplify the valve structure between process chambers and make the coating machine more compact, the valves 900 between two adjacent process chambers share a fixed frame 10 and a sealing chamber 20. That is, there are two door panels 30 in the fixed frame 10, and each door panel 30 moves back and forth within the fixed frame 10 and the sealing chamber 20.

[0086] like Figure 8 As shown, to enhance the strength of the inner layer plate 301, it is provided with multiple reinforcing ribs 305. For example, the inner layer plate 301 may have crisscrossing reinforcing ribs 305 forming a regular square grid. These reinforcing ribs 305 are evenly distributed at predetermined intervals, enhancing the strength of the inner layer plate 301 and maintaining its flatness, preventing the inner layer plate 301 from warping during sealing and reducing the sealing effect. Furthermore, the side of the inner layer plate 301 facing the opening is the sealing surface. To improve the sealing effect of the valve 900, a sealing element is provided around the sealing surface. The sealing element is preferably a high-temperature and high-pressure resistant silicone sealing ring.

[0087] like Figure 5 As shown, in some embodiments of this utility model, at least one observation window 50 is provided on the side of the fixed frame 10 and / or the sealing chamber 20 that is far away from each other. This allows the user to easily observe the movement of the door panel 30 through the observation window 50, and to carry out targeted repairs if any abnormality is found, thus ensuring the production efficiency and coating quality of the coating machine.

[0088] like Figure 1As shown, in some embodiments of this utility model, the loading / unloading mechanism 400 is equipped with a pre-processing device and at least one workpiece buffer device 700. The loading / unloading mechanism 400 transports workpieces between the pre-processing device, the workpiece buffer device 700, and the transport mechanism 200. The pre-processing device performs pre-treatment on the workpieces before coating, such as cleaning the substrate and attaching the substrate to a carrier plate. The workpiece buffer device 700 temporarily stores workpieces to be coated or already coated. By configuring the pre-processing device and the workpiece buffer device 700 at the loading / unloading mechanism 400, this utility model enables the coating machine to achieve full-process processing from substrate loading to unloading, resulting in high efficiency, comprehensive functions, and significantly increased production capacity.

[0089] like Figure 1 As shown, in some feasible embodiments, the pre-processing equipment includes a cleaning device 500 and a bonding device 600. Both the cleaning device 500 and the bonding device 600 are prior art. The cleaning device 500 is used to clean the substrate, and the bonding device 600 is used to bond the cleaned substrate onto a carrier plate to obtain the workpiece to be coated. The bonding device 600 is connected to the outlet side of the cleaning device 500.

[0090] It should be noted that the number of loading and unloading mechanisms 400 can be designed according to actual needs. At least two design schemes for loading and unloading mechanisms 400 and their supporting transportation mechanisms 200 are provided below.

[0091] The first type involves a transport mechanism 200 equipped with a top-turning device 300, and a loading / unloading mechanism 400 including a loading / unloading robot. The loading / unloading robot works in conjunction with the top-turning device 300 to disassemble coated workpieces from the workpiece rack 800 and load workpieces to be coated onto the workpiece rack 800. This solution utilizes a single loading / unloading robot to perform loading and unloading operations. Two workpiece buffer devices 700 can be placed at the loading / unloading robot location: one for holding workpieces to be coated and the other for holding coated workpieces.

[0092] The second type is a transport mechanism 200 that includes a loading section, a buffer section, and a unloading section, which is equivalent to dividing the above working section into three functional sections. The loading section is connected to the inlet side of the process chamber assembly 100 through a mobile trolley 201, and the unloading section is connected to the outlet side of the process chamber assembly 100 through a mobile trolley 201. The loading section is equipped with a loading top rotating device, and the unloading section is equipped with an unloading top rotating device.

[0093] The loading and unloading mechanism 400 includes an unloading robot and a loading robot. The unloading robot, in conjunction with the unloading top-turning device, unloads coated workpieces from the workpiece rack 800. A workpiece buffer device 700 for holding coated workpieces can be placed at the unloading robot. The pre-processing equipment is located at the loading robot, and a workpiece buffer device 700 for holding workpieces to be coated can also be placed at the loading robot. The loading robot, in conjunction with the loading top-turning device, loads the workpieces to be coated onto the workpiece rack 800.

[0094] It should be understood that all the process chambers mentioned above are equipped with a vacuum system 110, which enables the process chambers to reach the vacuum level required for coating. The vacuum system 110, valve 900, conveying mechanism 200, and loading / unloading mechanism 400 are all connected to the control unit of the coating machine. The control unit uses PLC programming control to achieve automated production of the entire machine.

[0095] Furthermore, the working section 202 of the conveying mechanism and transport mechanism 200 mentioned above can use conveying rollers to transport the workpiece frame 800. The top-turning device 300 can use a lifting cylinder and a rotary motor. After the workpiece frame 800 moves directly above the lifting cylinder, the lifting cylinder lifts the workpiece frame 800 upwards, connecting the workpiece frame 800 to the output shaft of the rotary motor, which then drives the workpiece frame 800 to rotate. The conveying mechanism, transport mechanism 200, and top-turning device 300 can all be selected from existing technologies, and this utility model does not impose any special restrictions on them.

[0096] It should be noted that the terminology used above is for describing specific embodiments only and is not intended to limit the exemplary embodiments according to this utility model. When the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof. The order of execution of actions, steps, etc., in the apparatus and methods shown in the specification and drawings can be implemented in any order unless a specific express order is specified, and as long as the output of the preceding process is not used in the subsequent process. Similar sequential terms used for ease of description do not imply that such an order must be followed.

[0097] Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following figures denote similar items; therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.

[0098] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A coating machine characterized by, The application relates to a process chamber combination (100) comprising at least two process chambers arranged in sequence according to a coating process and each sealed, wherein a conveying mechanism is arranged in the process chamber for conveying a workpiece holder (800); a conveying mechanism (200) is arranged at the outlet side of the process chamber combination (100) for conveying the workpiece holder (800) back to the inlet side of the process chamber combination (100), wherein the conveying mechanism (200) is provided with a lifting and rotating device (300) for lifting and rotating the workpiece holder; and a loading and unloading mechanism (400) is arranged to cooperate with the lifting and rotating device (300) to load and unload the workpiece of the workpiece holder (800). The process chamber combination (100) is any one of a three-chamber combination, a four-chamber combination or a five-chamber combination. The three-chamber combination is a pretreatment chamber (101), an AR chamber (102) for preparing an AR film layer and an AF chamber (104) for preparing an AF film layer in sequence. The four-chamber combination is a pretreatment chamber (101), an AR chamber (102) for preparing an AR film layer, a DLC chamber (103) for preparing a DLC film layer and an AF chamber (104) for preparing an AF film layer in sequence.

2. The coater according to claim 1, wherein The five-chamber combination is a first and second preheating chamber for preheating a workpiece, a first and second AR chamber for preparing an AR film layer and a DLC chamber (103) for preparing a DLC film layer in sequence. The process chambers in the process chamber combination (100) are arranged in a straight line, a U shape or an L shape. The process chamber has two openings as an inlet and an outlet respectively, and a door valve (900) is arranged at each opening. The door valve (900) comprises a fixed frame (10) arranged at the opening, a door plate (30) arranged in the fixed frame (10) for covering the opening, and the door plate (30) is movable in the horizontal direction to open or close the opening.

3. The coater according to claim 1, wherein The door plate (30) comprises an outer layer plate (302) and an inner layer plate (301), a plurality of parallel compression shafts (303) are arranged between the outer layer plate (302) and the inner layer plate (301), and the outer layer plate (302) is movable relative to the inner layer plate (301) through the compression shafts (303) to compress the inner layer plate (301) against the opening for sealing.

4. The coater according to claim 1, wherein The outer layer plate (302) is driven to move through a transmission assembly (40), the inner layer plate (301) is provided with a limiting block (304) for limiting the moving position, the compression shafts (303) rotate when the outer layer plate (302) and the inner layer plate (301) move relative to each other, and the compression shafts (303) rotate to increase the distance between the inner layer plate and the outer layer plate, thereby compressing the inner layer plate (301). The door valve (900) further comprises a sealing chamber (20) horizontally arranged at one side of the fixed frame (10), the sealing chamber (20) is in communication with the fixed frame (10), and the door plate (30) moves back and forth in the fixed frame (10) and the sealing chamber (20).

5. The coater according to claim 4, wherein ​ 6. The coater according to claim 5, wherein ​ 7. The coater according to claim 4, wherein ​ 8. The coater according to claim 7, wherein The gate valve (900) between two adjacent process chambers shares the fixed frame (10) and the sealing chamber (20).

9. The coater according to claim 7, wherein At least one observation window (50) is arranged on the side of the fixed frame (10) and / or the sealing chamber (20) away from each other.

10. The coater according to any one of claims 1 to 9, characterized in that, A pre-processing device and at least one workpiece buffer device (700) are arranged at the feeding and discharging mechanism (400), and the feeding and discharging mechanism (400) carries workpieces between the pre-processing device, the workpiece buffer device (700) and the conveying mechanism (200).

11. The coater according to claim 10, wherein The pre-processing device comprises: a cleaning device (500) for cleaning substrates; a patching device (600) for patching the cleaned substrates on a carrier plate to obtain workpieces to be coated, and the patching device (600) is connected to the outlet side of the cleaning device (500).

12. The coater according to any one of claims 1 to 9, characterized in that, The conveying mechanism (200) is provided with a top transfer device (300), and the feeding and discharging mechanism (400) comprises a feeding and discharging robot which cooperates with the top transfer device (300) to unload the coated workpieces on the workpiece rack (800) and load the workpieces to be coated on the workpiece rack (800).

13. The coater according to any one of claims 1 to 9, characterized in that, The conveying mechanism (200) comprises a feeding section, a buffer section and a discharging section, the feeding section is connected to the inlet side of the process chamber combination (100), the discharging section is connected to the outlet side of the process chamber combination (100), the feeding section is provided with a feeding top transfer device, and the discharging section is provided with a discharging top transfer device. The feeding and discharging mechanism (400) comprises a discharging robot and a feeding robot, the discharging robot cooperates with the discharging top transfer device to unload the coated workpieces on the workpiece rack (800), and the feeding robot cooperates with the feeding top transfer device to load the workpieces to be coated on the workpiece rack (800).

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