Getter pump with flat plate structure

Abstract

The utility model relates to the technical field of getter pumps, and discloses a getter pump with a flat plate structure, which comprises a grid, a heating ceramic chip, an air suction sheet and a heating wire, wherein the heating ceramic chips are connected in series through the heating wire, and the air suction sheets are naturally attached to the upper and lower sides or the upper and lower sides of the heating ceramic chips; and the heating ceramic chips which are connected in series and the air suction sheets attached to the heating ceramic chips are arranged in the grids together and are riveted and fixed through screws or metal. The end face of the getter pump is rectangular, firstly, the getter pump can be installed in a vacuum pipeline or some special-shaped vacuum equipment with special shape requirements, secondly, the length of the getter pump is large in elasticity, and getter pumps with different lengths can be flexibly manufactured. And finally, a heating structure is arranged, so that heating activation is facilitated, and the heating activation efficiency is relatively high.

Description

Technical Field

[0001] This utility model relates to the field of getter pump technology, specifically a getter pump with a flat plate structure. Background Technology

[0002] Getters are commonly used materials in vacuum and gas purification fields. Their function is to eliminate impurities in devices, ensuring vacuum levels or gas purity. A getter pump is a device composed of multiple getter arrays, typically used within a vacuum chamber for functions such as maintaining vacuum and gas purification. Getter pumps generally consist of an array of getter plates combined with an electric heating element. Before a getter or getter pump can function in a vacuum, it usually requires heating activation. Most getter pumps are activated by heating the pump with an integrated heating element or similar structure.

[0003] Due to limitations in the manufacturing process, getter tablets are generally designed as circular rings, which are then stacked to form an array of getter tablets. The getter heating component passes through the center of the getter tablet array to achieve heating activation of the getter pump.

[0004] However, due to the irregular shape and long length of some vacuum system pipes, traditional circular getter arrays may not be well adapted to the internal structure of these pipes. Therefore, there is a need to develop a novel getter pump design that can more flexibly adapt to vacuum pipes of different shapes and sizes. Utility Model Content

[0005] To address the aforementioned technical shortcomings, this utility model provides a getter pump with a flat plate structure, aiming to realize the installation and application of getter pumps in irregularly shaped vacuum pipelines.

[0006] To solve the above technical problems, the present invention adopts the following technical solution: The present invention provides a getter pump with a flat plate structure, including: a grid, a heating ceramic plate, a getter plate and a heating wire;

[0007] The heating ceramic pieces are connected in series by heating wires, and the air suction plate is naturally attached to the upper and lower sides of the heating ceramic pieces.

[0008] The heating ceramic plates connected in series and the air intake plates attached to them are placed inside the grid and fixed with screws or metal rivets.

[0009] Furthermore, the grid is made of a hollow rectangular metal structure, the metal walls of which are perforated in a mesh pattern, and the material is made of one or a mixture of stainless steel, titanium alloy and copper.

[0010] Furthermore, the grid height is 4-20mm, the width is 4-40mm, and the length is 50-1000mm.

[0011] Furthermore, the heating ceramic sheet is made of ceramic, is rectangular in shape, and has 2-10 holes penetrating through it.

[0012] Furthermore, the height of the heating ceramic sheet is 1-5mm, the width is 4-38mm, and the length is 8-60mm; the diameter of the hole penetrating the heating ceramic sheet is 0.4-3mm.

[0013] Furthermore, the heating wire is made of one or any mixture of tungsten, molybdenum and rhenium metals. The heating wire passes through the holes in the heating ceramic sheet in a reciprocating manner, and several heating ceramic sheets are connected in series according to the length required by the getter pump.

[0014] Furthermore, the diameter of the heating wire ranges from 0.2 to 2 mm.

[0015] Furthermore, the air-absorbing sheet has a porous structure and is made of one or any mixture of zirconium, titanium, molybdenum, vanadium, iron, aluminum, manganese and rare earth elements.

[0016] Furthermore, the air intake sheet is rectangular in shape, with a height of 1-5mm, a width of 4-38mm, and a length of 8-60mm.

[0017] The beneficial effects of this utility model are:

[0018] 1. The getter pump of this utility model has a rectangular cross-section, which can be installed in some rectangular or other irregularly shaped vacuum pipes to adapt to different shaped equipment.

[0019] 2. The length of the getter pump of this utility model is highly flexible. Different lengths of grids can be made and different numbers of heating ceramic plates and getter plates can be installed to form different pump body lengths to meet different needs.

[0020] 3. The getter tablet and the ceramic plate of this utility model are in a planar fit, which is conducive to the uniform heating of the getter tablet and has better activation efficiency compared with the central heating mechanism of the traditional getter pump. Attached Figure Description

[0021] Figure 1 A schematic diagram of a flat-plate getter pump structure provided for an embodiment of this utility model;

[0022] Figure 2 This is a schematic diagram of the grid of this utility model;

[0023] Figure 3 This is a schematic diagram of the heating ceramic plate of this utility model;

[0024] Figure 4 This is a schematic diagram of the heating wire of this utility model;

[0025] Explanation of reference numerals in the attached diagram: 1. Grid; 2. Heating ceramic plate; 3. Heating wire; 4. Suction plate. Detailed Implementation

[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0027] Example 1

[0028] like Figures 1-4 As shown, this embodiment provides a getter pump with a flat plate structure, including: a grid 1, a heating ceramic plate 2, a getter plate 4, and a heating wire 3.

[0029] like Figure 1 As shown, the heating ceramic plates 2 are connected in series by heating wires 3, and the air suction plates 4 are naturally attached to the upper and lower sides of the heating ceramic plates 2. The connected heating ceramic plates 2 and the air suction plates 4 attached thereto are placed inside the grid 1 and fixed by screws or metal riveting. The air suction plates 4 have a porous structure and are made of one or any mixture of zirconium, titanium, molybdenum, vanadium, iron, aluminum, manganese and rare earth elements. The air suction plates 4 are rectangular and have a height of 1-5 mm, a width of 4-38 mm and a length of 8-60 mm.

[0030] like Figure 2 As shown, the grid 1 is made of a hollow rectangular metal structure. The metal wall of the rectangular metal structure is perforated in a mesh pattern. The material is made of one or more of stainless steel, titanium alloy and copper. Its height is 4-20mm, its width is 4-40mm, and its length is 50-1000mm.

[0031] like Figure 3 As shown, the heating ceramic plate 2 is made of ceramic and is rectangular in shape. There are 2-10 holes penetrating the heating ceramic plate 2 in the middle. The height of the heating ceramic plate 2 is 1-5mm, the width is 4-38mm, and the length is 8-60mm. The diameter of the holes penetrating the heating ceramic plate 2 is 0.4-3mm.

[0032] like Figure 4 As shown, the heating wire 3 is made of one or any mixture of tungsten, molybdenum and rhenium metals. The heating wire 3 passes through the holes of the heating ceramic plate 2 in a reciprocating manner. Several heating ceramic plates 2 are connected in series according to the length requirements of the getter pump. The diameter of the heating wire 3 ranges from 0.2 to 2 mm.

[0033] Example 2

[0034] Based on Example 1, this example provides a specific product of a flat-plate getter pump:

[0035] Preferably, the grid 1, serving as the support structure for the getter pump, is made of a hollow rectangular metal structure with a mesh-like perforated metal wall. The material is 316L stainless steel; the wall thickness is 0.2-3mm, and its inner circumference is the outer circumference minus twice the wall thickness. Taking the top and bottom wall thickness as 0.5mm and the left and right wall thickness as 2mm, the outer circumference height is 6.5mm and the outer circumference width is 18mm; then the inner circumference height is 5.5mm and the inner circumference width is 14mm; the length is 200mm.

[0036] Heating ceramic plate 2 is made of alumina ceramic, in the shape of a rectangular plate, with a height of 2mm, a width of 14mm, and a length of 20mm / plate; there are 6 holes evenly distributed in the middle of the ceramic plate, with a hole diameter of 0.7mm; a total of 10 heating plates are used, with a total length of 200mm.

[0037] The heating wire 3, made of molybdenum metal, has a diameter of 0.5 mm. The heating wire 3 passes through 6 holes in the heating ceramic plate 2 in a reciprocating manner, connecting 10 heating ceramic plates 2 in series along the direction of the ceramic plate holes; forming a combined structure with a total length of about 200 mm.

[0038] The suction plate 4, made of an alloy of titanium, molybdenum and rare earth elements, is the main effective component of the suction pump. The suction plate 4 is rectangular in shape, with a height of 1.5 mm, a width of 14 mm and a length of 20 mm. A total of 20 plates are used and are attached to the upper and lower sides of the heating assembly structure.

[0039] The specific assembly method is as follows: heating ceramic plates 2 are connected in series using heating wires 3, and suction plates 4 are attached to the upper and lower sides of the heating ceramic plates 2. The ceramic plates with heating wires 3 and the suction plates 4 attached thereto are placed together inside the grid 1 and fixed by metal riveting. This forms a flat plate structure getter pump.

[0040] When used in a vacuum device, the getter pump is installed inside the vacuum device cavity. Power is supplied to the getter pump through the two ends of the heating wire 3. The getter pump is heated with 100W power for 1 hour, and then the getter pump can start to work.

[0041] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A getter pump of the flat-plate structure, characterized by, Include: Grid, heating ceramic sheet, getter sheet and heating wire; Wherein, the heating ceramic sheet is connected together by heating wire, and the getter sheet is naturally attached to the upper and lower sides or both sides of the heating ceramic sheet; The heating ceramic sheet connected together and the getter sheet attached thereto are placed inside the grid and fixed by screws or metal rivets.

2. A getter pump of the flat-plate structure as claimed in claim 1, characterized in that, The grid is made of hollow rectangular metal structure, and the metal wall of the rectangular metal structure is reticulated.

3. A getter pump of the flat-plate construction as claimed in claim 2, characterised in that, The grid height is 4-20mm, width is 4-40mm, length is 50-1000mm.

4. A getter pump of the flat-plate structure according to claim 1, characterized in that, The heating ceramic sheet is made of ceramic and is in the shape of a rectangular sheet, and there are 2-10 holes penetrating the heating ceramic sheet in the middle of the heating ceramic sheet.

5. A getter pump of the flat-plate structure according to claim 1, characterized in that, The height of the heating ceramic sheet is 1-5mm, the width is 4-38mm, and the length is 8-60mm; the diameter of the hole penetrating the heating ceramic sheet is 0.4-3mm.

6. A getter pump of the flat-plate structure according to claim 1, characterized in that, The heating wire passes through the hole penetrating the heating ceramic sheet in a reciprocating manner, and several heating ceramic sheets are connected together according to the length required by the getter pump.

7. A getter pump of the flat-plate construction as set forth in claim 1, characterized in that The diameter of the heating wire is 0.2-2mm.

8. A getter pump of the flat-plate construction as claimed in claim 1, characterised in that, The getter sheet is in a porous structure.

9. A getter pump of the flat-plate construction as claimed in claim 1, characterised in that, The getter sheet is in the shape of a rectangular sheet, the height is 1-5mm, the width is 4-38mm, and the length is 8-60mm.

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