Film thickness real-time monitoring crystal control probe assembly

Abstract

The utility model relates to the technical field of vacuum coating, in particular to a film thickness real-time monitoring crystal control probe assembly which comprises a sensor body, a fixing disc is fixedly installed at the upper end of the sensor body, a transmission shell is fixedly installed at the top end of the fixing disc, and a bottom cover is fixedly installed at the bottom end of the sensor body. A wafer groove is formed in one side of the bottom cover; a movable disc is movably installed at the bottom end of the bottom cover, and a switching mechanism is arranged between the transmission shell and the middle of the movable disc. After film coating is completed, the pressure in the vacuum chamber is recovered, a workpiece is taken out, then the rotating air cylinder is started, the rotating air cylinder drives the movable disc to rotate after driving, the through groove and the horn mouth are overlapped, then the micro air pump is started, the micro air pump sucks external air and compresses the external air into the air inlet pipe, and air enters the horn mouth from the air inlet pipe. And after cleaning, the through groove is cut back to the other side, so that the wafer can be repeatedly used.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology, specifically to a crystal control probe assembly for real-time film thickness monitoring. Background Technology

[0002] Crystal control devices utilize the relationship between the resonant frequency of a quartz crystal and the film thickness to control the coating thickness. In vacuum coating thickness control technology, the most commonly used real-time thickness monitoring technology is the quartz crystal thickness controller. It utilizes the piezoelectric effect of quartz crystals; when a certain film material is deposited on a quartz crystal oscillator, its natural frequency attenuates accordingly. The quartz film thickness controller monitors the thickness of the deposited thin film by measuring changes in the frequency of the quartz crystal or frequency-related parameters on a probe installed in the vacuum chamber of the coating machine.

[0003] As disclosed in patent announcement CN220083920U, the crystal control probe and system based on multi-chip conversion includes a servo motor, a probe assembly, a coupling mounted on the output end of the servo motor, and a rotating shaft connecting the coupling and the probe assembly. The probe assembly includes a probe body connected to the rotating shaft and a cover fitted onto the probe body on the side away from the servo motor. The probe body has multiple chip mounting positions on the end facing the cover, and the cover has through holes corresponding to the chip mounting positions. The servo motor drives the multiple chip mounting positions to rotate and reposition relative to the through holes via the rotating shaft. The beneficial effects of this invention using the above technical solution are: it can achieve conversion and precise positioning of chips with any number of chips, has low cost, is easy to use, and is conducive to the production of more advanced coated products.

[0004] Although the aforementioned patent can achieve the conversion and precise positioning of chips with any number of digits, after one coating, the inside of the via will be filled by the film layer. After the via changes position, the film layer inside will not be processed. Therefore, after changing to other positions, the film layer will block the chip at that position, which may affect the monitoring accuracy. Utility Model Content

[0005] The purpose of this invention is to provide a crystal-controlled probe assembly for real-time film thickness monitoring to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] A crystal-controlled probe assembly for real-time film thickness monitoring, comprising:

[0008] The sensor body has a fixed plate fixedly installed at its upper end, a transmission shell fixedly installed at the top of the fixed plate, and a bottom cover fixedly installed at the bottom end of the sensor body. A chip groove is opened on one side of the bottom cover.

[0009] A movable disc is movably mounted at the bottom end of the bottom cover, and a switching mechanism is provided between the transmission housing and the middle of the movable disc;

[0010] A through groove is provided on one side of the movable disc, and a jet cleaning mechanism is provided between the transmission housing and the left side of the movable disc.

[0011] Preferably, the switching mechanism includes a rotating rod, which is fixedly installed at the top center of the movable disc, and a rotary cylinder is fixedly installed at the top center of the transmission housing, with the output shaft of the rotary cylinder fixedly connected to the rotating rod.

[0012] Preferably, the blowing cleaning mechanism includes a micro air pump, which is fixedly installed inside the left side of the transmission housing. An air inlet pipe connected to the air inlet end of the micro air pump is fixedly installed on the left side of the transmission housing. A spray pipe is connected to the air outlet end of the micro air pump. A flared opening is provided on the side of the bottom cover away from the wafer slot. The bottom end of the spray pipe is connected to the flared opening.

[0013] Preferably, pipe joints are connected to both ends of the fixed disk, and a cooling groove is provided on the inner wall of the sensor body, with the two ends of the cooling groove connected to the two pipe joints respectively.

[0014] Preferably, an installation sleeve is movably fitted onto the outer wall of the sensor body, a knob is movably installed on the upper left side of the installation sleeve, and a pressure rod is fixedly installed on the output shaft end of the knob, with the end of the pressure rod abutting against the outer wall of the sensor body.

[0015] Preferably, a sealing ring is detachably installed at the bottom end of the mounting sleeve.

[0016] Compared with the prior art, the beneficial effects of this utility model are:

[0017] 1. This real-time film thickness monitoring crystal control probe assembly, after film coating is completed, restores the pressure inside the vacuum chamber and removes the workpiece, then starts the rotary cylinder, which drives the movable disk to rotate, so that the through slot overlaps with the horn mouth. Then, the micro air pump is started, which draws in external air and compresses it into the air inlet pipe. The gas enters the horn mouth from the air inlet pipe and blows to clean the film layer inside the through slot. After cleaning, the through slot is cut back to the other side, so that the wafer can be reused.

[0018] 2. In this real-time film thickness monitoring crystal control probe assembly, during installation, the sensor body is fitted onto the designated position on the vacuum chamber, and then the mounting sleeve is fixed to the outer wall of the vacuum chamber. The position of the sensor body is then adjusted according to the wall thickness of the vacuum chamber so that the front end of the movable plate is on the same plane as the inner wall of the vacuum chamber. Then, the knob is turned, and the knob drives the front end pressure rod to press against the outer wall surface of the sensor body to achieve fixation. In this way, it can be adapted and adjusted according to the wall thickness of the vacuum chamber. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall main structure of this utility model;

[0020] Figure 2 For the present utility model Figure 1 Enlarged view of point A in the middle;

[0021] Figure 3 For the present utility model Figure 1 Enlarged view of point B in the middle;

[0022] Figure 4 For the present utility model Figure 1 Enlarged diagram of point C in the middle.

[0023] In the diagram: 1. Sensor body; 2. Fixed plate; 3. Transmission housing; 4. Bottom cover; 5. Chip slot; 6. Movable plate; 7. Through slot; 8. Rotating rod; 9. Rotary cylinder; 10. Miniature air pump; 11. Air inlet pipe; 12. Nozzle; 13. Horn mouth; 14. Pipe connector; 15. Cooling tank; 16. Mounting sleeve; 17. Knob; 18. Pressure rod; 19. Sealing ring. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] like Figure 1-4 As shown, this utility model provides a technical solution:

[0026] A real-time film thickness monitoring crystal control probe assembly includes a sensor body 1, a fixed plate 2 fixedly mounted on the upper end of the sensor body 1, and pipe joints 14 connected to both ends of the fixed plate 2. A cooling groove 15 is formed on the inner wall of the sensor body 1, and the two ends of the cooling groove 15 are respectively connected to the two pipe joints 14. A transmission shell 3 is fixedly mounted on the top of the fixed plate 2. A bottom cover 4 is fixedly mounted on the bottom end of the sensor body 1. A crystal groove 5 is formed on one side of the bottom cover 4. An installation sleeve 16 is movably sleeved on the outer wall of the sensor body 1. A knob 17 is movably mounted on the upper left side of the installation sleeve 16. A pressure rod 18 is fixedly mounted on the output shaft end of the knob 17. The end of the pressure rod 18 abuts against the outer wall of the sensor body 1. A sealing ring 19 is detachably mounted on the bottom end of the installation sleeve 16.

[0027] In this embodiment, during installation, the sensor body 1 is fitted onto the designated position on the vacuum chamber, and then the mounting sleeve 16 is fixed to the outer wall of the vacuum chamber. The position of the sensor body 1 is then adjusted according to the wall thickness of the vacuum chamber so that the front end of the movable disk 6 is on the same plane as the inner wall of the vacuum chamber. Then, the knob 17 is turned, and the knob 17 drives the front end pressure rod 18 to press against the outer wall surface of the sensor body 1 to achieve fixation. In this way, it can be adapted and adjusted according to the wall thickness of the vacuum chamber.

[0028] like Figure 1 and Figure 2 As shown, a movable disk 6 is movably installed at the bottom end of the bottom cover 4. A switching mechanism is provided between the transmission housing 3 and the middle of the movable disk 6. The switching mechanism includes a rotating rod 8. The rotating rod 8 is fixedly installed at the top center of the movable disk 6. A rotary cylinder 9 is fixedly installed at the top center of the transmission housing 3. The output shaft of the rotary cylinder 9 is fixedly connected to the rotating rod 8. A through groove 7 is opened on one side of the movable disk 6. A spray cleaning mechanism is provided between the left side of the transmission housing 3 and the movable disk 6. The spray cleaning mechanism includes a micro air pump 10. The micro air pump 10 is fixedly installed inside the left side of the transmission housing 3. An air inlet pipe 11 connected to the air inlet end of the micro air pump 10 is fixedly installed on the left side of the transmission housing 3. A spray pipe 12 is connected to the air outlet end of the micro air pump 10. A horn mouth 13 is opened on the side of the bottom cover 4 away from the wafer slot 5. The bottom end of the spray pipe 12 is connected to the horn mouth 13.

[0029] In this embodiment, after the coating is completed, the pressure inside the vacuum chamber is restored, and the workpiece is removed. Then, the rotary cylinder 9 is started. After the rotary cylinder 9 is driven, the movable disk 6 is rotated, so that the through groove 7 overlaps with the horn mouth 13. Then, the micro air pump 10 is started. The micro air pump 10 draws in external air and compresses it into the air inlet pipe 11. The gas enters the horn mouth 13 from the air inlet pipe 11 and blows to clean the film layer inside the through groove 7. After cleaning, the through groove 7 is cut back to the other side, so that the wafer can be reused.

[0030] Working principle: During installation, the sensor body 1 is fitted into the designated mounting slot on the vacuum chamber. Then, the mounting sleeve 16 is fixed to the outer wall of the vacuum chamber. The position of the sensor body 1 is adjusted according to the wall thickness of the vacuum chamber, ensuring that the front end of the movable disk 6 is flush with the inner wall of the vacuum chamber. Then, the knob 17 is turned, driving the pressure rod 18 at the front end to press against the outer wall surface of the sensor body 1 for fixation. During detection, the through-slot 7 overlaps with the wafer slot 5. During film deposition, the film layer fills the interior of the through-slot 7. After the wafer surface mounted on the wafer slot 5 is coated, the pressure inside the vacuum chamber is restored and the coated workpiece is removed. Then, the rotary cylinder 9 is started. The rotary cylinder 9 drives the movable disk 6 to rotate, so that the through slot 7 overlaps with the horn mouth 13. Then, the micro air pump 10 is started. The micro air pump 10 draws in external air and compresses it into the air inlet pipe 11. The compressed gas enters the horn mouth 13 from the air inlet pipe 11 and blows to clean the film layer inside the through slot 7. After cleaning, the through slot 7 is cut back to the other side.

[0031] It should be noted that the rotary cylinder 9 is a double-acting rotary cylinder. The double-acting rotary cylinder is driven by compressed air and can achieve bidirectional rotary motion. It can also achieve left and right rotation by controlling the direction of the air source.

[0032] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A film thickness real-time monitoring crystal control probe assembly characterized by: The utility model provides a sensor body (1), the upper end of sensor body (1) is fixedly installed with fixed disc (2), the top of fixed disc (2) is fixedly installed with transmission shell (3), the bottom end of sensor body (1) is fixedly installed with bottom cover (4), one side of bottom cover (4) is provided with wafer slot (5); The bottom end of bottom cover (4) movably installs movable disc (6), and switching mechanism is arranged between the middle part of transmission shell (3) and movable disc (6); The side of movable disc (6) is provided with through slot (7), and blowing cleaning mechanism is arranged between the left side of transmission shell (3) and movable disc (6). The switching mechanism includes rotating rod (8), the top middle part of movable disc (6) is fixedly installed with rotating rod (8), the top middle part of transmission shell (3) is fixedly installed with rotary air cylinder (9), and the output shaft of rotary air cylinder (9) is fixedly connected with rotating rod (8).

2. A film thickness real-time monitoring crystal control probe assembly according to claim 1, characterized in that: The blowing cleaning mechanism includes micro air pump (10), the left side inside of transmission shell (3) is fixedly installed with micro air pump (10), the left side of transmission shell (3) is fixedly installed with air inlet pipe (11) communicated with the air inlet end of micro air pump (10), the air outlet end of micro air pump (10) is communicated with spray pipe (12), the side of bottom cover (4) away from wafer slot (5) is provided with horn mouth (13), and the bottom end of spray pipe (12) is communicated with horn mouth (13).

3. A film thickness real-time monitoring crystal control probe assembly according to claim 2, characterized in that: The both ends of fixed disc (2) are communicated with pipe joint (14), and cooling groove (15) is formed in the inner wall of sensor body (1), and the both ends of cooling groove (15) are communicated with two pipe joints (14) respectively.

4. A film thickness real-time monitoring crystal control probe assembly according to claim 1, characterized in that: The outer wall of sensor body (1) movably sleeves installation sleeve (16), the left side upper end of installation sleeve (16) movably installs knob (17), the output shaft end of knob (17) is fixedly installed with pressing rod (18), and the end of pressing rod (18) abuts against the outer wall of sensor body (1).

5. A film thickness real-time monitoring crystal control probe assembly according to claim 1, characterized in that: The bottom end of installation sleeve (16) is detachably installed with sealing ring (19).

6. A film thickness real-time monitoring crystal control probe assembly according to claim 5, characterized in that: ​

Images