Sample support and movable sample table used under vertical scanning tunneling microscope

Abstract

The utility model discloses a sample support and a mobile sample table used under a vertical scanning tunneling microscope, the sample support comprises a sample disc, a sealing plate is arranged on the sample disc, a sealing ring is arranged between the sample disc and the sealing plate, the sample disc outside the sealing ring and the sealing plate are locked through a screw, and the sample disc is fixed on the sealing ring. A sample placing area is arranged on the sample disc corresponding to the inner side of the sealing ring, an avoiding hole is formed in the sealing plate corresponding to the sample placing area, the movable sample table comprises the sample support, and the sample support is arranged on a two-axis mechanism to realize plane movement. The sample dropping device can effectively frame the dropping position of a sample, and is convenient to operate and convenient to detect.

Description

Technical Field

[0001] This utility model relates to the field of STM scanning technology, specifically to a sample holder and a movable sample stage for use under a vertical scanning tunneling microscope. Background Technology

[0002] Scanning electron microscopy (SEM) is a powerful microscopic observation tool, typically used to observe the microstructure of solid samples. However, with specific sample preparation techniques and operating methods, it can also be applied to the detection of liquid samples. The most common method is to drop the liquid sample onto a sample holder and then perform liquid chromatography scanning. This allows for SEM observation of the sample without damaging its microstructure.

[0003] In actual operation, the above method causes the liquid to flow in any direction when it is dropped onto the sample holder, which is a flat plate. This makes it difficult for the liquid sample to be properly placed on the sample holder, which has a great impact on subsequent testing. Summary of the Invention

[0004] The technical problem to be solved by this utility model is to provide a sample holder and movable sample stage for use under a vertical scanning tunneling microscope, which can effectively define the sample drop position, is easy to operate, and facilitates detection.

[0005] To solve the above-mentioned technical problems, this utility model provides a sample holder for use under a vertical scanning tunneling microscope, including a sample tray, a sealing plate on the sample tray, a sealing ring between the sample tray and the sealing plate, the sample tray outside the sealing ring and the sealing plate are fastened together by screws, the sample tray inside the sealing ring is provided with a sample placement area, and the sealing plate corresponding to the sample placement area is provided with a clearance hole.

[0006] Furthermore, a transfer connecting arm is provided on one side of the sample tray, which is used to cooperate with the robotic arm to transfer the sample tray.

[0007] Furthermore, the sealing plate is made of plastic.

[0008] A movable sample stage for use in a vertical scanning tunneling microscope, comprising the sample holder described in any one of the above.

[0009] Furthermore, the sample holder is mounted on the sample rack, and the sample rack is mounted on the two-axis moving mechanism.

[0010] Furthermore, the sample holder includes a base plate, on which two slot sides are arranged opposite each other.

[0011] Furthermore, the base plate is provided with several ball-head plungers.

[0012] Furthermore, the two-axis moving mechanism includes an upper fixed frame and a lower fixed frame, a lower movable frame is provided between the upper fixed frame and the lower fixed frame, at least three two-axis power components are provided between the lower movable frame and the upper fixed frame and between the lower movable frame and the lower fixed frame, at least three connecting columns are provided on the lower movable frame, the connecting columns pass through the upper fixed frame and are fixedly connected to the upper movable frame, and the upper movable frame is fixedly connected to the sample holder.

[0013] Furthermore, the two-axis power assembly includes two stacked piezoelectric ceramic displacement stages.

[0014] The beneficial effects of this utility model are:

[0015] 1. The combination of a sealing ring and a sealing plate with clearance holes ensures that the added liquid sample can be effectively contained within a fixed area and will not flow to the surrounding area, thus ensuring that the required liquid phase can be obtained. The structure is simple and the operation is convenient.

[0016] 2. It can effectively improve the scanning speed. By controlling the position of the lower movable frame, the planar position of the sample can be effectively adjusted, and the position of the sample to be tested can be changed without the need to remove it from the detection area, thereby reducing the time spent on scanning the area. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the sample holder structure of this utility model;

[0018] Figure 2 This is a schematic diagram of the sample holder installation structure of this utility model;

[0019] Figure 3 This is a schematic diagram of the structure of the movable sample stage of this utility model;

[0020] Figure 4 This is a schematic diagram of the structure of the sample holder and sample rack of this utility model. Detailed Implementation

[0021] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, so that those skilled in the art can better understand and implement the present invention. However, the embodiments are not intended to limit the present invention.

[0022] Reference Figure 1 As shown, one embodiment of the sample holder for use under a vertical scanning tunneling microscope of the present invention includes a sample tray 1, a sealing plate 2 on the sample tray, a sealing ring 3 between the sample tray and the sealing plate, the sample tray outside the sealing ring and the sealing plate are fastened together by screws, the sample tray corresponding to the inner side of the sealing ring is set as a sample placement area, and the sealing plate corresponding to the sample placement area is provided with a clearance hole 4.

[0023] The liquid sample to be tested and the sample tray are connected with silver paste. Specifically, the sealing plate presses the sealing ring tightly onto the sample tray, so that the sealing ring forms a framed sealing area between the sample tray and the sealing plate. When the liquid sample to be tested is put into the sample tray through the clearance hole, the liquid will not spread on the surface of the sample tray, but will gather in the sealing ring, effectively preventing and protecting the structure of the liquid phase for detection, and making the operation more convenient.

[0024] A transfer arm 5 is provided on one side of the sample tray. This arm can be used in conjunction with a robotic arm to transfer the sample tray, achieving automated operation, or it can be manually transferred. The sealing plate is made of plastic, resulting in low operating costs and no impact on testing.

[0025] This application also discloses a movable sample stage for use in a vertical scanning tunneling microscope, with reference to... Figures 2 to 3 As shown, including the aforementioned sample holder, after the sample holder is mounted on the movable sample stage, the movable sample stage can drive the sample holder to move along two axes, thereby enabling the sample holder to be scanned in different areas, improving the convenience of detection and avoiding the inconvenience caused by the need for manual adjustment in the existing structure. Specifically, the sample holder is set on the sample holder 6, and the sample holder is set on the two-axis moving mechanism 7. The two-axis moving mechanism can drive the sample holder to move in the plane, that is, drive the sample holder to move, and the sample to be tested on the sample holder can also move, realizing the area switching.

[0026] Reference Figure 3 and Figure 4 As shown, the sample holder includes a base plate 8, with two slot sides 9 arranged opposite each other on both sides of the base plate. The sample holder is inserted from one side of the slot side. The sample tray of the sample holder has limiting protrusions on both sides. The two limiting protrusions abut against one end of the slot side, thereby limiting the insertion. In addition, several ball plungers 10 are arranged on the base plate. The ball plungers can push the sample holder upward against the inner wall of the slot side, achieving effective fixation. The insertion is convenient and does not require screws for fixation. When removing the sample holder, it is only necessary to pull the sample holder out in the opposite direction.

[0027] The aforementioned two-axis moving mechanism includes an upper fixed frame 11 and a lower fixed frame 12. A lower movable frame 13 is provided between the upper fixed frame and the lower fixed frame. At least three two-axis power components 14 are provided between the lower movable frame and the upper fixed frame, and between the lower movable frame and the lower fixed frame. At least three connecting columns 15 are provided on the lower movable frame. The connecting columns pass through the upper fixed frame and are fixedly connected to the upper movable frame 16. The upper movable frame is fixedly connected to the sample holder.

[0028] Both the upper and lower fixed frames are fixedly installed in the testing equipment. Two-axis power components are arranged in pairs between the lower movable frame and the upper fixed frame, and between the lower movable frame and the lower fixed frame. One end of each two-axis power component is fixedly connected to either the upper or lower fixed frame, and the other end can be fixedly connected to or abut against the lower movable frame. When abutting, friction is used to drive the lower movable frame to move. When movement in the X-axis direction is required, all two-axis power components move synchronously. By fixing or tightening with the lower fixed frame, the lower movable frame can be driven to move in the X-axis direction. When movement in the Y-axis direction is required, all two-axis power components also move synchronously, thereby driving the lower movable frame to move in the Y-axis direction.

[0029] The movement of the lower movable frame can drive the upper movable frame to move synchronously, thereby moving the sample holder synchronously, which in turn moves the sample tray, achieving the effect of changing the testing area. The upper movable frame can be positioned above the upper fixed frame with the sample holder protruding outwards, reducing interference with the testing action and facilitating the movement of the sample tray by the robotic arm.

[0030] The two-axis power assembly includes two stacked piezoelectric ceramic displacement stages, one moving in the X-axis direction and the other moving in the Y-axis direction, which cooperate with each other to achieve displacement in both axial directions.

[0031] In one embodiment, a biaxial power assembly is a ten-layer stack, consisting of three ceramic plates, four electrode plates, two piezoelectric ceramic plates, and one ceramic disc stacked on top of each other. The ceramic disc is located on the lower movable frame side, and the four electrode plates control the piezoelectric ceramic plates to move the sample stage in the X and Y axis directions respectively.

[0032] The above embodiments are merely preferred embodiments provided to fully illustrate the present utility model, and the protection scope of the present utility model is not limited thereto. Equivalent substitutions or modifications made by those skilled in the art based on the present utility model are all within the protection scope of the present utility model.

Claims

1. A sample holder for use under a vertical scanning tunneling microscope, characterized in that, The application relates to a sample tray, which comprises a sample tray provided with a sealing plate, a sealing ring arranged between the sample tray and the sealing plate, and a screw for locking the sealing ring outside the sample tray and the sealing plate.

2. The sample holder for use under a vertical scanning tunneling microscope of claim 1, wherein, The sample tray is provided with a transfer connecting arm on one side.

3. The sample holder for use under a vertical scanning tunneling microscope of claim 1, wherein, The sealing plate is made of plastic.

4. A mobile sample stage for use under a vertical scanning tunneling microscope, characterized by, The application further discloses a sample holder.

5. A mobile sample stage for use under a vertical scanning tunneling microscope as recited in claim 4, wherein, The sample holder is arranged on a two-axis moving mechanism.

6. The mobile sample stage for use under a vertical scanning tunneling microscope of claim 5, wherein, The sample holder comprises a bottom plate provided with two insertion slot sides on opposite sides.

7. A mobile sample stage for use under a vertical scanning tunneling microscope as recited in claim 6, wherein, A plurality of ball head plungers are arranged on the bottom plate.

8. The mobile sample stage for use under a vertical scanning tunneling microscope of claim 5, wherein, The two-axis moving mechanism comprises an upper fixed frame and a lower fixed frame, a lower movable frame arranged between the upper fixed frame and the lower fixed frame, at least three two-axis power assemblies arranged between the lower movable frame and the upper fixed frame and between the lower movable frame and the lower fixed frame, at least three connecting columns arranged on the lower movable frame, and the connecting columns penetrating through the upper fixed frame and being fixedly connected with the upper movable frame, the upper movable frame being fixedly connected with the sample holder.

9. The mobile sample stage for use under a vertical scanning tunneling microscope of claim 8, wherein, The two-axis power assembly comprises two piezoelectric ceramic displacement stages arranged in a stack.

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